JPH0217555U - - Google Patents

Info

Publication number
JPH0217555U
JPH0217555U JP9663688U JP9663688U JPH0217555U JP H0217555 U JPH0217555 U JP H0217555U JP 9663688 U JP9663688 U JP 9663688U JP 9663688 U JP9663688 U JP 9663688U JP H0217555 U JPH0217555 U JP H0217555U
Authority
JP
Japan
Prior art keywords
substrate
heater
plasma cvd
cvd apparatus
cathode electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9663688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9663688U priority Critical patent/JPH0217555U/ja
Publication of JPH0217555U publication Critical patent/JPH0217555U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP9663688U 1988-07-21 1988-07-21 Pending JPH0217555U (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9663688U JPH0217555U (US06534493-20030318-C00166.png) 1988-07-21 1988-07-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9663688U JPH0217555U (US06534493-20030318-C00166.png) 1988-07-21 1988-07-21

Publications (1)

Publication Number Publication Date
JPH0217555U true JPH0217555U (US06534493-20030318-C00166.png) 1990-02-05

Family

ID=31321672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9663688U Pending JPH0217555U (US06534493-20030318-C00166.png) 1988-07-21 1988-07-21

Country Status (1)

Country Link
JP (1) JPH0217555U (US06534493-20030318-C00166.png)

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