JPH02168875A - Electrostatic adsorber having electrostatic adsorption plate for laminating and adsorbing plural objects to be adsorbed - Google Patents

Abstract

PURPOSE:To diminish the storing space of a plurality of adsorbed objects and need no containing space of the adsorbed objects by forming a plurality of vertical adsorption sections extending horizontally on the surface of an electro static adsorption plate, and by setting a containing section for containing the sheet-shaped adsorbed objects temporarily below the vertical adsorption sections. CONSTITUTION:On an electrostatic adsorption plate 12 extending in the horizon tal direction, a first-a tenth vertical-adsorption sections 16-1-16-10 having speci fied widths are formed. Besides, below the vertical adsorption sections 16-1-16-10, a containing section 18 for containing adsorbed objects 14 temporarily is set. The adsorbed objects 14 are taken out of the containing section 18, piece by piece, and the upper end sections 14a of the adsorbed objects 14 are moved slightly upward, and the objects 14 to be adsorbed are laminated to be adsorbed in order on a plurality of the adsorption sections 16 extending in the horizontal direction. As a result, the adsorbed objects 14 can be taken out of the containing section 18, piece by piece, and workability and using convenience are improved.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] This invention relates to an electrostatic adsorption device having an electrostatic adsorption plate that adsorbs a plurality of objects to be adsorbed in a layered manner. The present invention relates to an electrostatic chucking device having an electrostatic chucking plate that generates an electrostatic attraction force and holds a sheet-like chucking object in a stacked manner.

[Prior Art] Electrostatic holding means that uses the Coulomb force of static electricity to attract and hold an object to be attracted has a method of applying electricity to a set of electrodes to apply positive and negative charges to each electrode to induce an attraction mechanism. It uses the electrostatic attraction force to attract and hold objects.

Such electrostatic holding means is used in mechanical equipment in various industrial fields, for example, by being provided at a document holding part of a copying machine or a conveyed object holding part of a conveyor device.

[Problems to be Solved by the Invention] By the way, in the conventional electrostatic chucking device having an electrostatic chucking plate, the electrostatic chucking plate attracts and holds an object at a desired position, and is used as a bulletin board or document holder. has been done.

However, there has been no one that uses the above-mentioned electrostatic adsorption plate for temporary storage.

That is, when storing large sheets of paper such as AO or A1 size as objects to be attracted, in order to make the objects to be attracted to the indoor temperature and humidity environment, conventionally, the large sheets of paper were hung on an erected rod-shaped member, or Or place it flat on a flat plate,
This prevents wrinkles and folded lines from appearing on the paper.

However, if the paper is hung on a rod-like member, the storage space is small, but the paper tends to bend, making it difficult to use.

Furthermore, if paper is stored in a flat manner, the storage space becomes large, and the space cannot be used effectively, which is disadvantageous in practice.

Furthermore, even if the electrostatic adsorption device is used for storage, it will require a storage area for large objects to be adsorbed that do not require temporary storage, for example, as a backup, and the storage space will become large, making it impractical. This has the disadvantage of being disadvantageous.

[Purpose of the Invention] Therefore, in order to eliminate the above-mentioned disadvantages, it is an object of the present invention to stack a plurality of objects to be attracted on an electrostatic adsorption plate of an electrostatic adsorption device while moving the upper end portion of the objects to be adsorbed slightly upward. By forming a plurality of vertical adsorption parts extending horizontally on the surface of the electrostatic adsorption plate for adsorption, and by providing a storage part below the vertical adsorption parts to temporarily store the sheet-like object to be adsorbed, In addition to reducing the storage space for multiple objects to be attracted, we have realized an electrostatic attraction device that has an electrostatic attraction plate that stacks and attracts multiple objects to be attracted, which is practically advantageous and eliminates the need for storage space for objects to be attracted. There is something to do.

[Means for solving the problem] In order to achieve this object, the present invention uses a set of electrodes and an electrostatic attraction force induced by the set of electrodes to attract and hold a sheet-shaped object to be attracted. In an electrostatic chucking device that uses an electrostatic chucking plate, the set of electrodes are arranged in a comb-like shape on the electrostatic chucking plate, and the upper end portion of the chucking target is moved slightly upward while the plurality of chucking targets are moved upward. A plurality of vertical suction parts extending horizontally are formed on the surface of the electrostatic adsorption plate in order to attract objects in a stacked manner, and below the vertical suction parts there is a storage part for temporarily storing the sheet-like objects to be attracted. It is characterized by having the following.

[Function] With the above-described configuration, when stacking objects to be attracted to the electrostatic adsorption plate of the electrostatic adsorption device, the objects to be adsorbed are taken out one by one from the storage section, and the objects to be adsorbed are stacked and adsorbed. While moving the upper end part slightly upward, multiple objects to be attracted are successively stacked and attracted to a plurality of suction parts extending in the horizontal direction, thereby reducing the storage space for multiple objects to be attracted, and making it possible to store the objects. Space is not required.

[Embodiments] Hereinafter, embodiments of the present invention will be described in detail based on the drawings.

1 to 3 show embodiments of this invention. 1st
In the figure, 2 is an electrostatic adsorption device.

This electrostatic adsorption device 2 includes a main body 4 in which a mounting surface 4a is vertically formed, legs 6 that support the main body 4 so as to be movable, and legs 6 formed in the vertical mounting surface 4a of the main body 4. and an electrostatic adsorption plate 12 that is induced by a pair of positive and negative electrodes 8 and 10 to generate electrostatic attractive force.

That is, as shown in FIG. 2, the electrostatic adsorption plate 12 has the set of electrodes 8 and 10 arranged in a comb-like shape in the horizontal direction, for example.
This set of positive and negative electrodes 8.10 generates an electrostatic attraction force to attract and hold a sheet-like object 14, such as a large AO or A1 sheet of paper.

More specifically, the electrostatic attraction plate 12 is provided with first to tenth vertical attraction parts 16-1 to 16-10 at a plurality of locations, for example, ten, extending in the horizontal direction and having a predetermined width.

At this time, the first to tenth vertical suction parts 16-1 to 1e-i
For example, numbers are assigned sequentially from the bottom to the left end of each o.

Experiments have shown that the horizontal adsorption force of the electrostatic adsorption device 2 is 3 to 8 kg for one sheet of A4 size paper, and the weight of 50 to 100 sheets of A4 size paper is 200 to 8 kg.
By having a weight of 1000 g, sufficient adsorption and holding power can be exhibited.

Further, the first to tenth vertical suction parts 16-1 to 16-1
0 is provided with a storage section 18 for temporarily storing the object to be attracted 14. In other words, the storage section 18 is the lattice member 18
a, and is provided so as to be tiltable with respect to the main body 4, and the storage portion 18 is fixed in a desired tilted state by an inclination adjustment screw portion 20.

Reference numeral 14a denotes the upper end of the object to be attracted 14, and 22 denotes 500 to 20 connected to the set of positive and negative electrodes 8.10, respectively.
00V DC power supply, and 24 is a power switch for turning on and off the electrostatic adsorption plate 12 of the electrostatic adsorption device 2.

Next, the effect will be explained.

When stacking and adsorbing objects 14 on the electrostatic adsorption plate 12 of the electrostatic adsorption device 2, after turning on the power switch 24, take out the objects 14 one by one from the storage section 18 and place them on the electrostatic adsorption plate 12 of the electrostatic adsorption device 2. While moving the upper end 14a of the suction object 14 slightly upward, the plurality of suction objects 14 are successively stacked and suctioned onto the plurality of suction sections 16 extending in the horizontal direction. That is, as shown in FIG. 1, the first adsorbed object 14-
1, and then the upper end 14a-2 of the second object 14-2 is attached to the first object 14.
-1 is moved a little higher than the upper end 14a-1 portion and is adsorbed to the second adsorption portion 16-2.

Further, the third and subsequent objects to be attracted 14 are adsorbed while moving the upper end 14a slightly upward, similarly to the second object to be attracted 14-2 described above.

Furthermore, when the electrostatic chuck device 2 is not in use, the storage section 18 is fixed in a vertical position by the inclination adjustment screw section 20, as shown in FIG.

As a result, when stacking the objects 14 to be attracted to the electrostatic attraction plate 12, the objects 14 to be attracted can be taken out one by one from the storage section 18, and work efficiency is improved.
Usability can be improved.

In addition, in order to adapt the plurality of suction objects 14 made of large sheets of paper such as AO and A1 to the indoor temperature and humidity environment, the suction objects 14 can be easily stored, and spare suction objects 14 can be stored. 14 can be stored in the storage section 18, the storage space for the target object 14 can be reduced, and a storage space for a spare target object 14 is not required.
Space can be used effectively, which is advantageous in practice.

Furthermore, by moving the upper end 14a of the attracting object 14 slightly upwardly and sequentially stacking and adsorbing the plurality of objects 14 onto the plurality of vertical suction sections 16 extending in the horizontal direction,
Individual adsorbed objects 14 can be easily extracted, and usability can be further improved.

Furthermore, when the electrostatic chuck device 2 is not in use, the storage section 18 can be fixed in a vertical position by the tilt adjustment screw portion 20, so that the thickness of the electrostatic chuck device 2 can be reduced, and the electrostatic chuck device 2, the storage space can be reduced.

Further, the first to tenth vertical adsorption parts 1 of the electrostatic adsorption device 2
By providing the storage section 18 below 6-1 to 1B-10, the center of gravity of the electrostatic chuck device 2 is lowered, stability is improved, and the electrostatic chuck device 2 is reliably prevented from falling down. Can be done.

Furthermore, by removing the storage section 18 from the electrostatic adsorption device 2, the electrostatic adsorption device 2 can be used as a bulletin board with an adsorption function, which improves versatility and is advantageous in practice.

Note that the present invention is not limited to the above-described embodiments, and various modifications can be made.

For example, in the embodiment of the present invention, a single storage section is provided below the vertical adsorption section of the electrostatic adsorption device, but if this storage section is provided in two or three or more stages, two or three types of storage sections may be provided. It is possible to accommodate more than one type of objects to be attracted in the electrostatic attraction device, which is advantageous in practice.

[Effects of the Invention] As explained in detail above, according to the present invention, a plurality of objects to be attracted can be stacked and attracted by moving the upper end portion of the objects to be attracted to the electrostatic attraction plate of the electrostatic attraction device slightly upward. A plurality of vertical adsorption parts are formed on the surface of the electrostatic adsorption plate, and a storage part is provided below the vertical adsorption part to temporarily store the sheet-like object to be adsorbed. When stacking and adsorbing the objects to be adsorbed, the objects to be adsorbed can be taken out one by one from the storage section, which improves workability and improves usability. In addition, it is possible to easily store multiple objects such as large sheets of paper so that they can adapt to the indoor temperature and humidity environment, and spare objects can be stored in the storage unit. The storage space for the objects to be attracted can be reduced, and there is no need for a spare storage space for the objects to be attracted, and the space can be used effectively, which is advantageous in practice. Further, by moving the upper end portion of the adsorbed object slightly upward and sequentially stacking and adsorbing the plurality of adsorbed objects onto a plurality of vertical suction parts extending in the horizontal direction, individual objects to be adsorbed can be easily extracted. Usability can be further improved. Furthermore, since the storage section can be fixed in a vertical position when the electrostatic chucking device is not in use, the thickness of the electrostatic chucking device can be reduced, and the storage space for the electrostatic chucking device can be reduced.

[Brief explanation of the drawing]

1 to 3 show embodiments of the present invention, FIG. 1 is a schematic perspective view showing how the electrostatic adsorption device is used, FIG. 2 is a schematic diagram showing how a set of electrodes are arranged, and FIG. The figure is a schematic perspective view showing the electrostatic adsorption device in a state in which it is not in use. In the figure, 2 is an electrostatic adsorption device, 4 is a main body, 4a is a mounting surface, 6 is a leg part, 8.10 is a set of positive and negative electrodes, 12 is an electrostatic adsorption plate, 14 is an object to be adsorbed, and 16 18 is a vertical suction part, 18 is a storage part, 18a is a lattice member, 20 is an inclination adjustment screw part, 2
2 is a DC power supply, and 24 is a power switch. Patent applicant: Abisa Co., Ltd. Patent attorney: Yoshimi Saigo 1, case description: Patent Application No. 1983-323009 2, title of the invention: Electrostatic adsorption plate for stacking and adsorbing multiple objects to be adsorbed Relationship between the electrostatic adsorption device 3 and the case of the person making the amendment Patent applicant address 1 name of 864 Ryoke, Kakeyo City, Shizuoka Prefecture Abisare Co., Ltd. Representative Keiji Kasahara 4, Agent 101 THE 03-292
-4411 (Representative) Address: 2-8-6 Kanda Ogawamachi, Chiyoda-ku, Tokyo, subject to correction

Claims (1)

[Claims] 1. In an electrostatic chucking device having a set of electrodes and an electrostatic chucking plate that attracts and holds a sheet-shaped object by electrostatic attraction force induced by the set of electrodes, a comb is attached to the electrostatic chucking plate. The set of electrodes are arranged in a tooth shape, and a plurality of electrodes extending horizontally on the surface of the electrostatic attraction plate are arranged to move the upper end portion of the object to be attracted slightly upward and to attract a plurality of objects to be attracted in a layered manner. An electrostatic attraction for stacking and attracting a plurality of objects to be attracted, characterized in that a vertical attraction section is formed, and a storage section is provided below the vertical attraction section to temporarily store the sheet-like objects to be attracted. Electrostatic adsorption device with a plate.