JPH02165888A - Laser beam machining method - Google Patents
Laser beam machining methodInfo
- Publication number
- JPH02165888A JPH02165888A JP63319591A JP31959188A JPH02165888A JP H02165888 A JPH02165888 A JP H02165888A JP 63319591 A JP63319591 A JP 63319591A JP 31959188 A JP31959188 A JP 31959188A JP H02165888 A JPH02165888 A JP H02165888A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- liquid
- workpiece
- axis
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title description 2
- 238000003754 machining Methods 0.000 title 1
- 239000007788 liquid Substances 0.000 claims abstract description 25
- 238000005520 cutting process Methods 0.000 claims abstract description 18
- 230000001678 irradiating effect Effects 0.000 claims abstract description 3
- 238000003672 processing method Methods 0.000 claims description 7
- 238000007664 blowing Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 13
- 239000001301 oxygen Substances 0.000 abstract description 7
- 229910052760 oxygen Inorganic materials 0.000 abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 238000007254 oxidation reaction Methods 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 4
- 238000002845 discoloration Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010422 painting Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
[発明の目的1
(産業上の利用分野)
この発明は、加工すべきワークに無酸化レーザ加工を行
なうレーザ加工方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention 1 (Industrial Application Field) The present invention relates to a laser processing method for performing oxidation-free laser processing on a workpiece to be processed.
(従来の技術)
従来、レーザビームによりステンレスや鋼鉄などのワー
クを切断加工する場合、ワークに対してレーザビームを
照射すると共に、無酸化切断を行なうため、アシストガ
スとして窒素を使用して無酸化状態を作り、クリーンカ
ットが行なわれていた。(Conventional technology) Conventionally, when cutting a workpiece made of stainless steel or steel using a laser beam, the laser beam is irradiated onto the workpiece, and nitrogen is used as an assist gas to cut the workpiece without oxidation. Conditions were created and a clean cut was performed.
また、レーザビームによる熱と酸化反応の熱を利用した
切断加工を行なうため、アシストガスとして酸素を用い
、ワークの反射率を下げてレーザビームの吸収を良くし
、無酸化による切断加工が行なわれていた。In addition, since the cutting process uses the heat of the laser beam and the heat of the oxidation reaction, oxygen is used as an assist gas to lower the reflectance of the workpiece and improve absorption of the laser beam, resulting in non-oxidation cutting. was.
(発明が解決しようとする課題)
ところで、上述した従来のレーザ加工法にあっては、ア
シストガスに窒素ガスを用いた場合は、ワークの表面と
切断面は無酸化状態となるが、ワークの切断面下端部近
傍の表面は、空気のまき込みにより酸化され、裏焼けが
発生し溶接、塗装時に悪影響が生じ、美観を損うという
問題があった。(Problem to be solved by the invention) By the way, in the conventional laser processing method described above, when nitrogen gas is used as the assist gas, the surface and cut surface of the workpiece become non-oxidized; The surface near the lower end of the cut surface is oxidized by air intrusion, causing backburn, which adversely affects welding and painting, and has a problem of deteriorating the aesthetic appearance.
また、アシストガスに酸素ガスを用いた場合、切断され
た面に酸化金属の皮膜が生成され、更に、切断部近傍特
に裏面も酸化による変色、変質が生じ、溶接、塗装時に
悪影響があり美観も損うという問題があった。そこで、
酸化による悪影響を取除くために、アシストガスとして
不活性ガスを用い、そのアシストガスの圧力、焦点位置
、出力等を適正に設定することにより、ワークの切断面
、切断面上縁部近傍のワーク表面等に酸化皮膜、変質、
変色等の発生を防いでいた。In addition, when oxygen gas is used as the assist gas, a metal oxide film is formed on the cut surface, and furthermore, the vicinity of the cut portion, especially the back surface, is also discolored and deteriorated due to oxidation, which has an adverse effect on welding and painting, and reduces the aesthetic appearance. There was a problem with losses. Therefore,
In order to remove the negative effects caused by oxidation, an inert gas is used as the assist gas, and by appropriately setting the pressure, focus position, output, etc. of the assist gas, it is possible to remove the workpiece near the cut surface or the upper edge of the cut surface. Oxide film, deterioration, etc. on the surface, etc.
This prevented the occurrence of discoloration, etc.
しかしながら、ワークの切断面下縁部近傍の裏面は、空
気のまき込みにより空気と接しているため、酸化皮膜が
生成され溶接、塗装時に悪影響が生じ、美観も損うとい
う問題があった。However, since the back surface near the lower edge of the cut surface of the workpiece is in contact with air due to air being mixed in, there is a problem in that an oxide film is formed, which has an adverse effect on welding and painting, and also impairs the aesthetic appearance.
この発明の目的は、上記問題点を改善するため、加工す
べきワークをほぼ無酸素状態の液体中に浸してワークを
無酸化状態にして、酸化皮膜の発生、変質、変色などの
防止を図ったレーザ加工方法を提供することにある。The purpose of the present invention is to improve the above-mentioned problems by immersing the workpiece to be processed into a liquid in an almost oxygen-free state to make the workpiece non-oxidized, thereby preventing the formation of an oxide film, deterioration, discoloration, etc. The object of the present invention is to provide a laser processing method that has the following advantages.
[発明の構成]
(課題を解決するための手段)
上記目的を達成するために、この発明は、ほぼ無酸素状
態の液体中に浸された加工すべきワークにレーザビーム
で切断加工を行なう際、加工ヘッドの先端に設けられた
ノズルを前記液体中゛に浸すと共に前記ワークの表面と
ノズルの先端とをほぼ一定の距離に保持した状態でノズ
ルから照射された高圧ガスで前記液体をかき分けながら
吹き飛ばしてレーザビームをワークに照射して切断加工
を行なうレーザ加工方法である。[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the present invention provides a method for cutting a workpiece immersed in an almost oxygen-free liquid using a laser beam. The nozzle provided at the tip of the processing head is immersed in the liquid, and while the surface of the workpiece and the tip of the nozzle are kept at a substantially constant distance, the liquid is swept away with high-pressure gas irradiated from the nozzle. This is a laser processing method that performs cutting by blowing a laser beam onto the workpiece.
(作用)
この発明のレーザ加工方法を採用することにより、加工
すべきワークをほぼ無酸素状態の液体中に浸すと共に、
この液体中に加工ヘッドの先端に設けられたノズルも浸
し、前記ワークの表面とノズルの先端とを一定の距離に
保持した状態とする。この状態において、ノズルから照
射された高圧ガスで前記液体をかき分けながら吹き飛ば
してレーザビームをワークに照射することによってワー
クは空中の酸素から遮蔽されて酸化を防止し無酸化切断
が行なわれる。延いては良好な切断品質が保たれる。(Function) By employing the laser processing method of the present invention, the workpiece to be processed is immersed in a liquid in an almost oxygen-free state, and
A nozzle provided at the tip of the processing head is also immersed in this liquid, so that the surface of the workpiece and the tip of the nozzle are maintained at a constant distance. In this state, the high-pressure gas irradiated from the nozzle sweeps through the liquid and blows it away, and the workpiece is irradiated with a laser beam, thereby shielding the workpiece from oxygen in the air, preventing oxidation, and performing oxidation-free cutting. As a result, good cutting quality is maintained.
(実施例)
以下、この発明の実施例を図面に基づいて詳細に説明す
る。(Example) Hereinafter, an example of the present invention will be described in detail based on the drawings.
第1図を参照するに、レーザ加工機1には上方を開口し
たU字形状のベース3が例えば床面に配設されている。Referring to FIG. 1, a laser processing machine 1 includes a U-shaped base 3 that is open at the top and is disposed on, for example, a floor surface.
このベース3のU字形状をした溝3vの底面にはステン
レスや鋼鉄などのワークWを載置する複数の支持柱5が
立設されている。At the bottom of the U-shaped groove 3v of the base 3, a plurality of support columns 5 on which workpieces W made of stainless steel, steel, etc. are placed are erected.
前記ベース3における両側に一体化された支持フレーム
3R,3mの上面には第1図において紙面に対し直交す
る方向(以下、X軸方向という。)へ延伸したX軸周ガ
イドレール7R,7Lが敷設されている。前記ベース3
の上方にはX軸ギヤレッジ9が設けられている。このX
軸ギヤレツジ9は前記X軸用ガイドレール7R,7Lに
案内されるガイド部材11R,11Lを下部に設けたフ
レーム13R,13L’と、このフレーム13Rと13
Lを連結する左右方向く以下、Y軸方向という)へ延伸
した連結フレーム15U、15Dとで構成されている。On the upper surface of the support frames 3R, 3m integrated on both sides of the base 3, there are X-axis circumferential guide rails 7R, 7L extending in a direction perpendicular to the plane of the paper (hereinafter referred to as the X-axis direction) in FIG. It is laid down. Said base 3
An X-axis gear ledge 9 is provided above. This X
The shaft gear 9 includes frames 13R and 13L' which are provided with guide members 11R and 11L at the bottom thereof, which are guided by the X-axis guide rails 7R and 7L, and frames 13R and 13L.
It is composed of connecting frames 15U and 15D extending in the left-right direction (hereinafter referred to as the Y-axis direction) connecting the L.
上記構成により、図示省略のX軸用駆動モータを駆動さ
せると、ベース3における支持フレーム3R,3Lの上
面に敷設されたX軸周ガイドレール7R,7Lに案内さ
れてガイド部材11R,11Lが移動されるから、X軸
ギヤレツジ9がX軸方向へ移動されることになる。With the above configuration, when the X-axis drive motor (not shown) is driven, the guide members 11R, 11L are guided by the X-axis circumferential guide rails 7R, 7L laid on the upper surface of the support frames 3R, 3L in the base 3, and the guide members 11R, 11L move. Therefore, the X-axis gearbox 9 is moved in the X-axis direction.
前記連結フレーム15U、15DにはY軸方向へ延伸し
たY軸用ガイドレール17tJ、17Dが設けられてい
る。このY軸周がイトレール17U。The connecting frames 15U, 15D are provided with Y-axis guide rails 17tJ, 17D extending in the Y-axis direction. This Y-axis circumference is the light rail 17U.
170にはY軸層ガイドレール17LJ、17Dで案内
されるY軸方向へ移動自在なY軸ギヤレツジ19が設け
られている。このY軸ギヤレツジ19の例えば左側には
上下方向(以下、Z軸方向という)へ延伸したZ軸ギヤ
レツジ21が設けられている。170 is provided with a Y-axis gearledge 19 that is guided by Y-axis layer guide rails 17LJ and 17D and is movable in the Y-axis direction. For example, on the left side of the Y-axis gear 19, a Z-axis gear 21 extending in the vertical direction (hereinafter referred to as the Z-axis direction) is provided.
前記フレーム13Rには図示省略のY軸用駆動モータに
連動連結された伝達部材23が設けられている。この伝
達部材23にはボールねじ25の一端が設けられており
、ボールねじ25の他端は前記フレーム13Lに支承さ
れている。ボールねじ25にはナツト部材27が螺合さ
れており、このナツト部材27は前記Y軸ギヤレツジ1
つに設けられている。The frame 13R is provided with a transmission member 23 that is operatively connected to a Y-axis drive motor (not shown). This transmission member 23 is provided with one end of a ball screw 25, and the other end of the ball screw 25 is supported by the frame 13L. A nut member 27 is screwed onto the ball screw 25, and this nut member 27 is connected to the Y-axis gear 1.
It is located in
上記構成により、図示省略のY軸用駆動モータを駆動さ
せると、伝達部材23を介してボールねじ25が回転さ
れるから、ナツト部材27を介してY軸ギヤレッジ19
がY軸周ガイドレール17U、17Dに案内されてY軸
方向へ移動されることになる。With the above configuration, when the Y-axis drive motor (not shown) is driven, the ball screw 25 is rotated via the transmission member 23, so the Y-axis gear ledge 19 is rotated via the nut member 27.
is guided by the Y-axis peripheral guide rails 17U and 17D and moved in the Y-axis direction.
前記Z軸ギヤレッジ21の下部には図示省略のZ軸用駆
動モータによってZ軸方向へ移動自在な加工ヘッド29
が設けられており、この加工ヘッド29の下部における
先端にはレーザビームを照射するためのノズル31が設
けられている。At the bottom of the Z-axis gear ledge 21 is a processing head 29 that is movable in the Z-axis direction by a Z-axis drive motor (not shown).
A nozzle 31 for irradiating a laser beam is provided at the lower end of the processing head 29.
上記構成により、図示省略のZ軸用駆動モータを駆動さ
せると、加工ヘッド29がZ軸方向へ移動し、加工ヘッ
ド29の先端に設けられたノズル31における先端位置
と、複数の支持柱5上に載置されたワークWの表面との
距離が調整されることになる。With the above configuration, when the Z-axis drive motor (not shown) is driven, the processing head 29 moves in the Z-axis direction, and the position of the tip of the nozzle 31 provided at the tip of the processing head 29 and the top of the plurality of support columns 5 are adjusted. The distance from the surface of the workpiece W placed on the surface is adjusted.
前記ベース3の例えば右側における後方にはレーザ発振
器33を上部に載せたベース35が配設されている。レ
ーザ発振器33には前記フレーム13R上に設けられた
ペンドミラー装置37にレーザビームLBを通すオーバ
ーへラドビーム部材39が連結されている。A base 35 on which a laser oscillator 33 is mounted is disposed behind the base 3, for example on the right side. An over Radbeam member 39 is connected to the laser oscillator 33 and passes the laser beam LB to a pend mirror device 37 provided on the frame 13R.
さらにペンドミラー装置37と前記2軸キヤレツジ21
とにはオーバーヘッドビーム部材41が連結されており
、2軸キヤレツジ21内にはペンドミラー43が設けら
れている。而して、レーザ発振器33で発振されたレー
ザビームLLBはオーバヘッドビーム部材39.ペンド
ミラー装置37゜オーバーへラドビーム部材41および
2軸キヤレツジ21内のペンドミラー43を経て、加工
ヘッド29内に設けられた図示省略の集光レンズで集光
され、さらにノズル31の先端からワークWへ向けて照
射されてワークWは切断されることになる。Furthermore, the pend mirror device 37 and the two-axis carriage 21
An overhead beam member 41 is connected to the two-axis carriage 21, and a pend mirror 43 is provided within the two-axis carriage 21. The laser beam LLB oscillated by the laser oscillator 33 is transmitted to the overhead beam member 39. The light passes through the pend mirror device 37° over the Radbeam member 41 and the pend mirror 43 in the two-axis carriage 21, is focused by a condensing lens (not shown) provided in the processing head 29, and is further directed from the tip of the nozzle 31 toward the workpiece W. The workpiece W is cut by the irradiation.
前記ベース3の溝3■内には第1図に示すごとく、ほぼ
無酸素状態の液体39が入れられ、ワークWはこの液体
39内に浸されると共に、加工ヘッド29の下部に設け
られたノズル31の先端も液体39内に浸される。しか
も、ワークWの表面とノズル31の先端位置との距離は
加工ヘッド29をZ軸方向に移動せしめることによって
、常に一定の距離例えば0.3〜Q、5mm程度に保持
される。As shown in FIG. 1, a substantially oxygen-free liquid 39 is placed in the groove 3 of the base 3, and the workpiece W is immersed in this liquid 39. The tip of the nozzle 31 is also immersed in the liquid 39. Furthermore, the distance between the surface of the workpiece W and the tip position of the nozzle 31 is always maintained at a constant distance, for example, about 0.3 to Q, 5 mm, by moving the processing head 29 in the Z-axis direction.
前記液体39は酸素が少ない水がよく、さらに、煮沸し
た水、蒸溜水あるいは防錆剤を添加した水などが好まし
いもので、要はほぼ無酸素状態の液体にすればよい。The liquid 39 is preferably water with low oxygen content, and more preferably boiled water, distilled water, or water to which a rust preventive has been added.In short, the liquid may be substantially oxygen-free.
上記構成により、複数の支持柱5上にワークWを載置し
、しかも、ワークWの表面とノズル31の先端位置との
距離を一定例えば0.3〜0.5mm程度に保持した状
態とする。この状態において、レーザ発振器33から発
振されたレーザビームLBは加工ヘッド29の先端に設
けられたノズル31から例えば10 ka/cm2程度
の高圧ガスと共にワークWの表面に照射し、高圧ガスに
より液体3つをかき分けながら吹き飛ばすことによって
所定の切断加工が行なわれる。さらに、加工ヘッド29
をX軸、Y軸およびZ軸方向へ移動せしめることによっ
てワークWの各部分に所望の切断加工が行なわれる。With the above configuration, the work W is placed on the plurality of support columns 5, and the distance between the surface of the work W and the tip position of the nozzle 31 is kept constant, for example, about 0.3 to 0.5 mm. . In this state, the laser beam LB emitted from the laser oscillator 33 is irradiated onto the surface of the work W from the nozzle 31 provided at the tip of the processing head 29 together with a high pressure gas of, for example, about 10 ka/cm2, and the high pressure gas causes the liquid 3 A predetermined cutting process is performed by blowing the material while separating it. Furthermore, the processing head 29
By moving in the X-axis, Y-axis, and Z-axis directions, desired cutting is performed on each part of the workpiece W.
このように、ワークWを液体39に浸してレーザビーム
L8で切断加工を行なうことにより、ワークWは空気中
の酸素から遮蔽され酸化を防止し、無酸化の状態で切断
加工ができる。したがって、ワークWに酸化皮膜の発生
、変質、変色などの防止を図って良好な切断品質を保っ
た製品を得ることができる。In this way, by immersing the workpiece W in the liquid 39 and cutting it with the laser beam L8, the workpiece W is shielded from oxygen in the air, preventing oxidation, and can be cut in an oxidized state. Therefore, it is possible to prevent the formation of an oxide film, deterioration, discoloration, etc. on the workpiece W, and to obtain a product that maintains good cutting quality.
なお、この発明は前述した実施例に限定されることなく
、適宜の変更を行なうことにより、その他の態様で実施
し得るものである。例えば、本実施例ではワークWを固
定し、レーザビームLBが移動するタイプのレーザ加工
機1で説明したが、レーザビームLBを固定し、ワーク
Wが移動するタイプのレーザ加工機1であっても対応可
能である。Note that the present invention is not limited to the embodiments described above, and can be implemented in other embodiments by making appropriate changes. For example, in this embodiment, the laser beam processing machine 1 is of a type in which the workpiece W is fixed and the laser beam LB is moved, but the laser processing machine 1 is of a type in which the laser beam LB is fixed and the workpiece W is moved. is also possible.
[発明の効果]
以上のごとき実施例の説明より理解されるように、この
発明によれば、特許請求の範囲に記載されたとおりの構
成であるから、ワークを液体に浸すと共に、加工ヘッド
の先端に設けられたノズルも前記液体に浸し、さらにワ
ークの表面とノズル先端との位置を一定の距離に保持し
て切断加工を行なうことによって、ワークは空気中の酸
素から遮蔽され酸化を防止し、無酸化の状態で切断加工
を行なうことができる。したがって、ワークに酸化皮膜
の発生、変質、変色などの防止を図って良好な切断品質
を保った製品を得ることができる。[Effects of the Invention] As understood from the description of the embodiments above, according to the present invention, since the structure is as described in the claims, the workpiece is immersed in the liquid and the processing head is The nozzle provided at the tip is also immersed in the liquid, and cutting is performed while maintaining a constant distance between the surface of the workpiece and the tip of the nozzle, thereby shielding the workpiece from oxygen in the air and preventing oxidation. , cutting can be performed in a non-oxidized state. Therefore, it is possible to prevent the formation of an oxide film, deterioration, discoloration, etc. on the workpiece, and to obtain a product that maintains good cutting quality.
第1図はこの発明のレーザ加工方法を行なう一実施例の
レーザ加工機における正面図である。
1・・・レーデ加工機 29・・・加工ヘッド3
1・・・ノズル 39・・・液体代理人 弁
理士 三 好 保 男
1・−・レーザ加工機
31−・・ノズル
29・・・加工ヘッド
39・・・液体
第1図FIG. 1 is a front view of a laser processing machine according to an embodiment for carrying out the laser processing method of the present invention. 1... Rede processing machine 29... Processing head 3
1... Nozzle 39... Liquid agent Patent attorney Yasu Miyoshi Male 1... Laser processing machine 31... Nozzle 29... Processing head 39... Liquid Fig. 1
Claims (1)
レーザビームで切断加工を行なう際、加工ヘッドの先端
に設けられたノズルを前記液体中に浸すと共に前記ワー
クの表面とノズルの先端とをほぼ一定の距離に保持した
状態でノズルから照射された高圧ガスで前記液体をかき
分けながら吹き飛ばしてレーザビームをワークに照射し
て切断加工を行なうことを特徴とするレーザ加工方法。When cutting a workpiece immersed in an almost oxygen-free liquid using a laser beam, the nozzle provided at the tip of the processing head is immersed in the liquid, and the surface of the workpiece and the tip of the nozzle are A laser processing method characterized in that cutting is performed by irradiating a workpiece with a laser beam while blowing away the liquid with high-pressure gas irradiated from a nozzle while holding the workpiece at a substantially constant distance.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63319591A JPH02165888A (en) | 1988-12-20 | 1988-12-20 | Laser beam machining method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63319591A JPH02165888A (en) | 1988-12-20 | 1988-12-20 | Laser beam machining method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02165888A true JPH02165888A (en) | 1990-06-26 |
Family
ID=18111979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63319591A Pending JPH02165888A (en) | 1988-12-20 | 1988-12-20 | Laser beam machining method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02165888A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5601738A (en) * | 1993-07-15 | 1997-02-11 | Medizinisches Laserzentrum Lubeck Gmbh | Method and apparatus for treating material with a laser |
CN107745194A (en) * | 2017-11-17 | 2018-03-02 | 江苏微纳激光应用技术研究院有限公司 | A kind of system and method for laser liquid phase incising pipes workpiece |
-
1988
- 1988-12-20 JP JP63319591A patent/JPH02165888A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5601738A (en) * | 1993-07-15 | 1997-02-11 | Medizinisches Laserzentrum Lubeck Gmbh | Method and apparatus for treating material with a laser |
CN107745194A (en) * | 2017-11-17 | 2018-03-02 | 江苏微纳激光应用技术研究院有限公司 | A kind of system and method for laser liquid phase incising pipes workpiece |
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