JPH0216381B2 - - Google Patents

Info

Publication number
JPH0216381B2
JPH0216381B2 JP60127486A JP12748685A JPH0216381B2 JP H0216381 B2 JPH0216381 B2 JP H0216381B2 JP 60127486 A JP60127486 A JP 60127486A JP 12748685 A JP12748685 A JP 12748685A JP H0216381 B2 JPH0216381 B2 JP H0216381B2
Authority
JP
Japan
Prior art keywords
target
discharge
groove
magnetic field
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60127486A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61284572A (ja
Inventor
Yoshinori Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP12748685A priority Critical patent/JPS61284572A/ja
Publication of JPS61284572A publication Critical patent/JPS61284572A/ja
Publication of JPH0216381B2 publication Critical patent/JPH0216381B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Physical Vapour Deposition (AREA)
JP12748685A 1985-06-12 1985-06-12 放電電極 Granted JPS61284572A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12748685A JPS61284572A (ja) 1985-06-12 1985-06-12 放電電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12748685A JPS61284572A (ja) 1985-06-12 1985-06-12 放電電極

Publications (2)

Publication Number Publication Date
JPS61284572A JPS61284572A (ja) 1986-12-15
JPH0216381B2 true JPH0216381B2 (pm) 1990-04-17

Family

ID=14961132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12748685A Granted JPS61284572A (ja) 1985-06-12 1985-06-12 放電電極

Country Status (1)

Country Link
JP (1) JPS61284572A (pm)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4601104B2 (ja) * 1999-12-20 2010-12-22 キヤノンアネルバ株式会社 プラズマ処理装置
KR100397751B1 (ko) * 2001-07-18 2003-09-13 한전건 자성체 재료 코팅용 마그네트론 원

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57158381A (en) * 1981-03-27 1982-09-30 Nippon Sheet Glass Co Ltd Magnetron sputtering device

Also Published As

Publication number Publication date
JPS61284572A (ja) 1986-12-15

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