JPH0216206Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a clean bench with a built-in clean curtain.

[Conventional technology]

Traditionally, clean rooms have been set up to maintain cleanliness by flowing clean air through HEPA filters installed in the ceiling as an appropriate environment for assembling precision instruments and electronic components or manufacturing pharmaceutical products. However, in recent years, with the rapid development of semiconductor devices, there has been a demand for environments with even higher levels of cleanliness.
A vertical clean bench as shown in FIG. 6 is used.

This clean bench has a work space 2 with an open front side of the main body 1, and above it is a work space 2.
A HEPA filter 3 is provided, and the air a in the clean room sucked into the blower 5 through the pre-filter 4 installed in the lower part of the main body 1 facing the front, rises in the back of the space 2, and
The ultra-clean air _a1 , which has been filtered by the HEPA filter 3 to further improve its cleanliness, passes through the louver 7 under the fluorescent lamp 6, flows down into the work space 2, and then flows out into the clean room from the open front. do.

However, in the case of the main body 1 having such a shape with the work space 2 open at the front, the clean air a flowing down from the ceiling is drawn into the space 2 from the front upper corner 2s of the work space 2, causing a simultaneous flow. This not only disturbs the flow of ultra-clean air _A1 that is required, but also reduces its cleanliness, and there is a risk that dust from the workers' bodies and clothes may be mixed in. Therefore, as shown in Figure 7, the work space A transparent shutter 8 that covers most of the front surface of the shutter 2 is attached so that it can be moved up and down, and a variable eyelid (non-charged acrylic plate) 9 is attached to a frame in the shape of a cross section as shown in Figure 8. A type of clean life bench that is fixed and has a conveyor has also appeared.

[Problem that the invention attempts to solve]

However, for movable shutters, the seventh
As shown in the figure, when the work space 2 is partially raised as required for work or inspection, when the shutter 8 protrudes from the top surface of the main body 1, the falling clean air a of the clean room causes the shutter 8 to be raised. Swirl currents appear in the protruding corners of the surface, making it easier for dust to accumulate (see the same figure). When the clean bench is installed at a low position on the ceiling T, there is a drawback that the shutter 8 cannot be opened sufficiently because the ceiling T becomes an obstacle (see the same figure). Also, shutter 8
Since it is heavy, it also has the disadvantage of poor operability when raising and lowering it.

On the other hand, in the case of a fixed type, the work space 2 is not only narrowed, but also its shape is deformed, and the simultaneous flow of ultra-clean air a ₁ is easily disturbed by the framework, etc.; This has the disadvantage that hands and heads may be hit and injured, and workability is also poor.

[Means for solving problems]

This idea was made in view of the circumstances mentioned above.
The aim is to solve these problems by providing a vertical clean bench equipped with a clean curtain in front of the work space.

In other words, this clean curtain has a rotating drum with a vinyl curtain wound around it installed inside an elongated housing, and the vinyl curtain can be hung from a slit drilled in the longitudinal direction at the bottom of the drum, thereby reducing the work space. The casing is attached to the top of the front end of the work space, and a pair of guide columns having guide grooves for guiding both ends of a weight attached to the tip side of the vinyl curtain are set up on both sides of the front end of the work space.

[Effect]

Therefore, by setting the vinyl curtain in an appropriate position to allow ultra-clean air to flow down, the clean room air will not be drawn into the work space, and the uniform flow will not only be maintained as far downward as possible, but also The vinyl curtain is not affected by dust from workers, and even when the work space is completely opened, the vinyl curtain is housed within the housing, so it does not disturb the air flow in the clean room. Furthermore, the height of the weight can be easily adjusted to a position that is convenient for the operator.

〔Example〕

The first embodiment of the present invention will be described below in Figures 1 to 3.
This will be explained based on the diagram. Note that the same members and the like as in the conventional example are designated by the same reference numerals, and their explanations will be omitted.

FIG. 1 is a schematic vertical side view of a vertical clean bench 10 according to this embodiment, and FIG. 2 is a front view of the same, in which the clean curtain 11 attached near the upper front corner 2s of the work space 2 is attached to the casing. It hangs down from a slit 12s bored in the longitudinal direction at the bottom of the body 12,
A rotating drum 15 driven by a motor around which a vinyl curtain 14 having a rod-shaped weight 13 attached to the tip end is wound.
is installed inside the housing 12. A pair of guide columns 16 are provided with guide grooves 16m for holding and guiding both ends of the weight 13.
They are erected on both sides of the front end of the work space 2. Note that 17 is an operation switch that is installed inside the rotating drum 15 and operates a motor (not shown) that rotates the drum 15.

Further, FIG. 3 is an explanatory diagram showing an example of another method of attaching the clean curtain 11.
The figure shows a structure in which a housing 12 is embedded in a main body 1.
The figure shows a case in which the slit 12s of the case 12 is turned inward, a case in which the inner lower end of the case 12 is rounded, and a case in which the case is attached to the outer surface of the main body 1.

In use, by operating the operation switch 17, the rotary drum 15 rotates to move the weight 13 into the guide groove 16.
The clean bench 10 is used after the vinyl curtain 14 is set at a desired height by moving the vinyl curtain 14 along the length m. Therefore, the ultra-clean air _a1 flows down into the work space 2 in a uniform stream without the clean room air a being sucked in, thereby maintaining ultra-cleanliness. Moreover, when performing necessary manual work, the height of the vinyl curtain can be easily adjusted using the operation switch 17, so that the work can be carried out smoothly.

Next, a second embodiment will be described based on FIGS. 4 and 5.

In the first embodiment, a colorless and transparent vinyl curtain 14 was used. However, depending on the type of inspection work, the vinyl curtain 24 may be colored in a desired color to block light to facilitate visual recognition by workers. use.

In this example, the above two types of vinyl curtains 1
4 and 24 were installed together.

FIG. 4 is an enlarged cross-sectional side view of the vicinity of the upper front corner 2s of the work space 2, in which a colorless curtain 1
A housing 22 with a rounded inner bottom corner for a colored curtain 24 is located diagonally inward in contact with the housing 12 of No. 4.
At the same time, a work space 2 is provided on the inner surface of the
A rectifying plate 28 is attached that reaches the top surface. A guide column 26 for guiding a weight 23 of a colored curtain 24 is provided alongside the guide column 16.

Note that the guide columns 16 and 26 may be formed integrally. In addition, the operation switch (not shown) can be used to change the switch box to the colored curtain 2.
4, and the box of the operation switch 17 for the colorless curtain 14 is white, and may be connected back to back or separately.

Since it has the above structure, a colorless curtain 14 is normally used, and when light shielding is required, the curtain 14 is raised all the way and a colored curtain 24 is used in its place. However, depending on the situation at that time, both curtains may
4 and 24 may be used in a double openwork with both hanging down.

Other than that, the height adjustment method, the flow of ultra-clean air _a1 , etc. are almost the same as in the first embodiment, so their explanation will be omitted.

In addition, FIG. 5 is an explanatory diagram showing another example of the configuration when two types of curtains are used.
are provided in contact with the inner surface of the casing 12, and are combined with guide columns 16 and 26, respectively.

The figure shows the case installed in the figure.
This uses a guide column 36 whose upper end is formed into a V-shaped fork 36v, and in the case of FIG.
It is also possible to apply this by processing such as cutting one side of the 6V short.

Note that several sets of clean curtains and guide columns of each color may be installed depending on the situation.

In addition, the applicant's previous application filed in 1986-
The means described in No. 167433 (Utility Model Application No. 62-79086),
That is, a channel cell is attached to the front end of the top surface of the work space 2, and several types of clean curtains, each with a desired color, are housed in a clean curtain that can be quickly attached and detached using snap-lock type mounting brackets. There is also a method of preparing a channel cell and changing the setting to the channel cell whenever necessary.

Incidentally, the present invention can also be applied to the clean life bench type equipped with a conveyor shown in FIG. 8 by providing an intermediate guide column.

In each of the examples, a motor-driven rotary drum was used, but a manually raised/lowered type with an auto-stop mechanism may also be used.Since vinyl curtains are extremely lightweight, they can be operated with one hand, and similar Effects can be obtained.

Furthermore, although a transparent vinyl curtain was used, an opaque sheet may be used depending on the need.

[Effect of idea]

As explained above, the present invention has a structure in which at least one set of clean curtains and guide columns are installed in the open front of the work space formed in the main body, which creates a vortex in the flow of clean air in the clean room. A uniform flow of ultra-clean air is always maintained in the work space without being forced into the work space or drawn into the work space, and without being affected by dust generated from workers' bodies or clothes. Furthermore, the vinyl curtain can be used for both normal work and work that requires light shielding by easily and quickly converting it into a vinyl curtain.

In addition, the height of the vinyl curtain can be easily and easily adjusted, resulting in excellent operability, which not only improves work efficiency but also has the advantage of high safety.

[Brief explanation of drawings]

FIG. 1 is a vertical sectional side view of the first embodiment of the present invention;
Fig. 2 is a front view, and Fig. 3 is an enlarged explanatory view of the main parts showing another method of installing the clean curtain. The figure shows the casing installed with the slit inward, the same figure shows the casing formed with a rounded inner lower end, the figure shows the casing attached to the outer surface of the main body, and Fig. 4 teeth,
FIG. 5 is an enlarged cross-sectional side view of the vicinity of the front upper corner of the work space in the second embodiment, and FIG. The figure shows the guide column combined with the guide column, and the figure shows the guide column with a bifurcation formed at the upper end and is combined with the clean curtain.
FIG. 7 is a schematic side view showing an overview of a conventional vertical clean bench. FIG. 7 is a schematic side view showing an overview of a conventional shutter movable clean bench. Figure 8 is a diagram showing the clean line bench type, the figure is a side view, and the figure is a front view. . 1... Main body, 2... Work space, 11... Clean curtain, 12, 22... Housing, 13... Weight, 14, 24... Vinyl curtain, 15...
Rotating drum, 16, 26, 36... guide column,
12s...slit.

Claims (1)

[Scope of utility model registration request] In the work space that opens at the front of the clean bench main body, a rotating drum with a curtain wound around the casing is mounted on the front of the top surface, and the curtain is hung from a slit drilled at the bottom of the casing. A clean room comprising at least one set of a clean curtain configured as shown in FIG. bench.