JPH02161614A - Magnetic disk medium - Google Patents
Magnetic disk mediumInfo
- Publication number
- JPH02161614A JPH02161614A JP31424888A JP31424888A JPH02161614A JP H02161614 A JPH02161614 A JP H02161614A JP 31424888 A JP31424888 A JP 31424888A JP 31424888 A JP31424888 A JP 31424888A JP H02161614 A JPH02161614 A JP H02161614A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- protective film
- magnetic disk
- self
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims abstract description 54
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 230000000694 effects Effects 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 230000001050 lubricating effect Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 89
- 229910052799 carbon Inorganic materials 0.000 description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 14
- 239000000314 lubricant Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000002966 varnish Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 239000012188 paraffin wax Substances 0.000 description 3
- 229910020707 Co—Pt Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 229940057995 liquid paraffin Drugs 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 208000032544 Cicatrix Diseases 0.000 description 1
- UNPLRYRWJLTVAE-UHFFFAOYSA-N Cloperastine hydrochloride Chemical compound Cl.C1=CC(Cl)=CC=C1C(C=1C=CC=CC=1)OCCN1CCCCC1 UNPLRYRWJLTVAE-UHFFFAOYSA-N 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 241000282373 Panthera pardus Species 0.000 description 1
- 235000009827 Prunus armeniaca Nutrition 0.000 description 1
- 244000018633 Prunus armeniaca Species 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000013505 freshwater Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 231100000241 scar Toxicity 0.000 description 1
- 230000037387 scars Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（概要〕
情報処理システムにおける外部記憶装置として使用され
る磁気ディスク装置の磁気ディスク媒体、特にアルミニ
ウムなどの非磁性の円板にＣｏ−ＮｉやＣｏ−Ｐｔなど
の金属磁性膜や酸化鉄膜を成膜して成る薄膜型の磁気デ
ィスク媒体に関し、
磁気ヘッドが磁気ディスク媒体面に接触しても、ヘッド
クラッシュが起きにくく、磁性膜まで到達するような傷
の発生を防止できるようにすることを目的とし、
非磁性の基板上に直接もしくは下地層を介して磁性膜が
形成されており、該磁性膜より上側に、凹凸を有する硬
質の保護膜を設け、さらにその上に該硬質保護膜より軟
質で自己潤滑性を有する保護膜を形成した構成とする。[Detailed Description of the Invention] (Summary) A magnetic disk medium of a magnetic disk device used as an external storage device in an information processing system, in particular, a non-magnetic disk such as aluminum that is coated with metal magnetic material such as Co-Ni or Co-Pt. For thin-film magnetic disk media made of films or iron oxide films, even if the magnetic head comes into contact with the magnetic disk media surface, head crashes are less likely to occur, and scratches that reach the magnetic film are prevented. A magnetic film is formed on a non-magnetic substrate either directly or via an underlayer, and a hard protective film with unevenness is provided above the magnetic film. A protective film that is softer than the hard protective film and has self-lubricating properties is formed on the hard protective film.
〔産業上の利用分野］
情報処理システムにおける外部記憶装置として使用され
る磁気ディスク装置の磁気ディスク媒体は、アルミニウ
ムなどの非磁性の円板に磁性塗料を塗布してなる塗膜型
と、Ｃｏ−ＮｉやＣｏ−Ｐｔなどの金属磁性膜や酸化鉄
膜を成膜して成る薄膜型とがある。本発明は、後者の薄
膜型の磁気ディスク媒体に関する。[Industrial Application Fields] Magnetic disk media of magnetic disk devices used as external storage devices in information processing systems are of the coated type, which is made of a non-magnetic disk such as aluminum coated with magnetic paint, and of the coated type, which is made of a non-magnetic disk such as aluminum coated with magnetic paint. There is a thin film type formed by forming a metal magnetic film such as Ni or Co-Pt or an iron oxide film. The present invention relates to the latter thin film type magnetic disk medium.
第６図は従来の薄膜磁気記録媒体の全容を示す断面図で
ある。ｌは例えばアルミニウムなどのような非磁性体か
らなる基板（円板）であり、その上に直接に、あるいは
下地層２を介して、磁性層３、保護ＩＩ！ ４の順に積
層されている。FIG. 6 is a sectional view showing the entire structure of a conventional thin film magnetic recording medium. 1 is a substrate (disk) made of a non-magnetic material such as aluminum, on which a magnetic layer 3, a protection II! They are stacked in the order of 4.
第７図は従来の磁気記録媒体の断面構造を示す図であり
、磁性層３が酸化鉄（γ−ＦｅｚＯｉ）によって形成さ
れている。基板１はアルミニウムからなっており、その
表面を酸化させてアルマイ）（Ａｈ０３）層を形成する
ご々で下地層２としている６磁性層３は５．７＝Ｆｅ、
Ｏａをスパックリングすることで形成される。保護膜４
ば、カーボンやＳｉＯ□をスパッタすることで形成され
る。FIG. 7 is a diagram showing a cross-sectional structure of a conventional magnetic recording medium, in which the magnetic layer 3 is formed of iron oxide (γ-FezOi). The substrate 1 is made of aluminum, and the surface thereof is oxidized to form an aluminium (Ah03) layer, which serves as the underlayer 2.6 The magnetic layer 3 is made of 5.7=Fe,
It is formed by spackling Oa. Protective film 4
For example, it is formed by sputtering carbon or SiO□.
保護膜４ （、’） Ｊ−ＬＺ ４；！、磁気ヘッドが
摺り」する際のｒ５！！、着を防止し１′？捺係歇ペヨ
小へ・：するための凹凸層５を形成ｊ−１微小４（凹部
中１、こ潤滑剤を含浸させる、−とで、磁気・・・ラド
が接触摺動する際の媒体表面の磨耗を防ｉ卜するように
１−２でいる。なお、保護膜１１は、凹凸層Ｆ、の密層
性４、良＜するためのものである。Protective film 4 (,') J-LZ 4;! , r5 when the magnetic head "slides"! ! , 1' to prevent wear? To form a concavo-convex layer 5 for small printing: j-1 minute 4 (in the concave part 1, impregnate this with lubricant, -, magnetic... when the rad contacts and slides) 1-2 to prevent wear on the surface of the medium.The protective film 11 is provided to improve the layer density of the uneven layer F.
凹凸層５は、次のようＱこし、て形成、される。まず、
Ｓｉを含む溶剤と易熱Ｔ発性の物質を含む混合液を塗布
すると、易熱蒸発性の物質が凝隼し、玉状になる。次に
、焼伺け、硬化を行なうと、玉状の易熱蒸発性物質が蒸
発する。、：のとき、玉状の易熱蒸発性物質とＳｉ混合
液との境が盛り七かり、凹凸が形成される。The uneven layer 5 is formed by Q straining as follows. first,
When a mixed solution containing a Si-containing solvent and a heat-labile T-emitting substance is applied, the heat-labile vaporizable substance coagulates into beads. Next, when it is baked and hardened, the ball-shaped heat-evaporable substance evaporates. , :, the boundary between the bead-like heat-evaporable substance and the Si mixture liquid becomes uneven, and unevenness is formed.
Ｓ？の混合型とは、塗布液中のＳｉの割合であり、これ
を−ミ、−スとして種々の溶剤を添加し、豹の濃度を゛
１ン’ｆ−Ｄ−ルする。Ｓｉの混合量が多いと、凹凸の
高ざが大きくなり、少ないと低くなる。S? The mixed type refers to the proportion of Si in the coating liquid, and this is used as a base to add various solvents to adjust the concentration of Si. When the amount of Si mixed is large, the height of the unevenness becomes large, and when it is small, the height of the unevenness becomes low.
、てれに対し２，７第８図、第５）図は、磁性層３ 、
ｅ Ｌ、で１、Ｃｏを主成分とする金属（〃性膜を用い
ている２、第８図は、＾ｌから成る基板１の−１，ｂこ
、Ｎ ｉ −Ｐ Ｉ脅２１、Ｊ′：Ｃ＋層２：２か１ら
成るド地層２ ’ｆｉ： ’ｔ２成ｉ＝、 、、ぞの１
にＣ。, 2,7 for the deflection of the magnetic layer 3,
e L, 1, Co-based metal (2). ': C+ layer 2: Do stratum 2 consisting of 2 or 1 'fi: 't2 formation i=, ,, 1
To C.
Ｎ１かｉ；）成る鉛、外層３を形成ｊ、、ている。保護
膜４１Ｌ、（］［−層、”、ＲｘＣ層４２の２層構造に
なっ−Ｃいる。The outer layer 3 is made of lead consisting of N1 or i;). It has a two-layer structure of the protective film 41L, (][- layer, "", and RxC layer 42].
第９図は１、ＡＩから成る基板１の１−乙こ１、Ｎ ｉ
−Ｐ層２１とＣ１・層２２かＣ二）成る下地層２を形
成）−５その一１處、’：’、 Ｃ。Figure 9 shows 1, 1, 1, and 1, Ni of the substrate 1 made of AI.
- Form a base layer 2 consisting of P layer 21 and C1/layer 22 or C2) -5 Part 1, ':', C.
ＮｉＣｒから成る磁性層ｊ３、（゛から成る保護膜４の
順に積層さねでいる。、これらＣ）層構ｉ冑（、二おい
ても、接着用の保護膜４の十ト１、二、潤滑剤を含浸す
るための凹凸層５が形成される。A magnetic layer 3 made of NiCr and a protective film 4 made of (C) are laminated in this order. A concavo-convex layer 5 for impregnating the lubricant is formed.
しかしながら、このような構成では、磁気ヘッドと磁気
ディスク媒体との接触により潤滑膜の剥離もしくはそれ
に準する現象が生じた場合、微小な突起の一部が磨耗し
てその磨耗粉が磁気ヘッドの浮上性を悪くし、ヘッドク
ラッシュの原因となる。ヘッドクラッシュが起きると１
、磁気ディスク媒体の磁性膜才で到達するような傷が発
生し、情報の記録機能が失われ、エラーの原因となる。However, in such a configuration, if the lubricant film peels off or a similar phenomenon occurs due to contact between the magnetic head and the magnetic disk medium, some of the minute protrusions will wear out and the abrasion powder will cause the magnetic head to fly. This can lead to poor performance and head crashes. 1 when a head crash occurs
, scratches occur in the magnetic film of the magnetic disk medium, and the information recording function is lost, causing errors.
本発明の技術的課題は、磁気ヘッドが磁気ディスク媒体
面に接触しても、ヘッドクララシブ、が起きにくく、磁
性膜まで到達するよ・うな傷の発生を防止できるように
することにある。A technical object of the present invention is to make it possible to prevent head cracking from occurring even when a magnetic head comes into contact with the surface of a magnetic disk medium, and to prevent scratches from reaching the magnetic film.
〔課題を解決するだめの手段］
第１図は本発明による磁気ディスク媒体の基本原理を説
明する図である。非磁性の基板１上に、直接もしくは下
地層２を介して磁性膜３が形成されている。そして、該
磁性膜３よりＬ側に、凹凸を有する硬質の保護膜５を設
け、さらにその上に、該硬質保護ｆｌｕ ５より軟質で
自己潤滑性４（有する保護膜６を形成する。[Means for Solving the Problem] FIG. 1 is a diagram illustrating the basic principle of a magnetic disk medium according to the present invention. A magnetic film 3 is formed on a non-magnetic substrate 1 either directly or with an underlayer 2 interposed therebetween. A hard protective film 5 having irregularities is provided on the L side of the magnetic film 3, and a protective film 6 having a self-lubricating property 4 (softer than the hard protective flu 5) is further formed thereon.
なお、磁性膜３と硬質保護膜５との間に、接着用保護膜
４を介在させてもよく、また自己潤滑性保護膜６の上に
潤滑剤を塗布してもよい。Note that an adhesive protective film 4 may be interposed between the magnetic film 3 and the hard protective film 5, and a lubricant may be applied on the self-lubricating protective film 6.
本発明では１．従来から存在する凹凸状の硬質保護膜５
の上に、該硬質保護膜５より軟質で自己潤滑性を有する
保護膜６を有している。そのため、磁気ヘッドが磁気デ
ィスク媒体面に接触して、潤滑膜の剥離やそれに準する
現象が生じた場合でも、保護膜６の自己潤滑作用により
、磁気−・ラドと自己潤滑保護膜６との衝撃が緩和され
、へ・ラドクランシ１が起きにくくなる。その結果、内
部の磁性膜３まで達し、磁気記録機能を喪失するよ・う
な深い傷の発生が抑制され、磁気ディスク媒体の長寿命
化が可能となる。In the present invention, 1. Conventional uneven hard protective film 5
A protective film 6 that is softer than the hard protective film 5 and has self-lubricating properties is provided thereon. Therefore, even if the magnetic head comes into contact with the magnetic disk medium surface and the lubricating film peels off or a similar phenomenon occurs, the self-lubricating action of the protective film 6 ensures that the magnetic rad and the self-lubricating protective film 6 The shock is softened and He Radkranshi 1 is less likely to occur. As a result, the occurrence of deep scratches that would reach the internal magnetic film 3 and cause the magnetic recording function to be lost is suppressed, and the life of the magnetic disk medium can be extended.
〔実施例］
次に本発明による磁気ディスク媒体が実際上どのように
具体化されるかを実施例で説明する。第２図は本発明に
よる磁気ディスク媒体の実施例を示す断面図である。[Example] Next, how the magnetic disk medium according to the present invention is actually implemented will be explained using an example. FIG. 2 is a sectional view showing an embodiment of a magnetic disk medium according to the present invention.
この磁気ディスク媒体は、アルミニウム基板１Ｆに、下
地層２としてＡｈａ、！を被覆し、このトに、１−Ｆｅ
、、０．、からなる磁性膜３をスパッタリング法により
形成した。そしてこの磁性膜３０トに、５ｉＯ８からな
る保護膜４をスパッタリング法で形成し、この保護膜４
−１−に、凹凸を持ちＳｉを含む保護膜５をスピンコー
ドにより形成し、この保護膜５の上に、自己潤滑性保護
膜６とし２て、カーボンをスパックリング法で形成し、
この保護膜６）、に潤滑剤７を塗布した。This magnetic disk medium is formed on an aluminum substrate 1F with a base layer 2 of Aha,! and coated with 1-Fe
,,0. A magnetic film 3 consisting of , was formed by a sputtering method. A protective film 4 made of 5iO8 is then formed on this magnetic film 30 by sputtering.
-1-, a protective film 5 having irregularities and containing Si is formed by a spin cord, and on this protective film 5, carbon is formed as a self-lubricating protective film 6 by a spackling method,
A lubricant 7 was applied to this protective film 6).
冬服の作製条件は、次の通りである。The conditions for making winter clothes are as follows.
■、磁性膜３ニスバッタリング法でα−Ｆｅ２０３を形
成した後、還元酸化処理によって、膜厚が１６００人程
度０γ−Ｆｅ２Ｏ３とした。(2) Magnetic film 3 After α-Fe203 was formed by a varnish battering method, a film thickness of about 1,600 0γ-Fe2O3 was obtained by reduction and oxidation treatment.
２６保護膜４ニスバツタリング法にて、膜厚が１２０人
程鹿の５ｉ０２膜を形成する。26 Protective Film 4 A 5i02 film with a film thickness of about 120 varnishes is formed by the varnish buttering method.
３、硬質保護膜５：Ｓｉと流動パラフィンを含む混合液
をスピンコード（７た後、焼き付けることで、膜厚１５
０人程０の膜とする。3. Hard protective film 5: A mixed solution containing Si and liquid paraffin is coated with a spin code (7) and then baked to a film thickness of 15 mm.
It is assumed that there are about 0 people.
第３図はこの硬質保、ｉ！膜の作製方法を示す断面図で
ある。まず、Ｓｉを含む溶剤（ＯＣＤ）と易熱蒸発性（
パラフィン）の物質を含む溶剤の混合液を塗布すると、
第３図（ａ）のように、Ｓｉを含む溶剤８の表面で、易
熱蒸発性（パラフィン）の物質が凝集して玉９状になる
。また該玉状部９の周囲に、Ｓｉを含む溶剤が表面張力
で引き・つけられ、盛り土がり部１０ができる。次に焼
き付けを行なうと、易熱蒸発性（パラフィン）物質の］
ミ９が蒸発し、第（１図（ｔ））のように後に窪み１１
ができると共に２、窪み１１の周囲に、盛り上がり部１
０が形成され、５ｉＯｚから成る凹凸膜が形成される。Figure 3 shows this hard material, i! FIG. 3 is a cross-sectional view showing a method for manufacturing a film. First, a solvent containing Si (OCD) and a thermally evaporable (
When a mixture of solvents containing substances (paraffin) is applied,
As shown in FIG. 3(a), on the surface of the Si-containing solvent 8, a heat-evaporable substance (paraffin) aggregates into beads 9. Further, a solvent containing Si is attracted around the beaded portion 9 by surface tension, and a mound 10 is formed. When baking is performed next, the heat-evaporating (paraffin) substance]
Mi 9 evaporates, and a depression 11 appears afterward as shown in Figure 1 (t).
2, a raised part 1 is formed around the depression 11.
0 is formed, and an uneven film of 5 iOz is formed.
４６ 自己潤滑性保護膜６：カーボンＩりを、スパッタ
リング法にて、膜厚３００人程０に形成する。46 Self-lubricating protective film 6: Form carbon I to a film thickness of about 300 by sputtering.
この時のカーボンスパッタは、基板を２００〜３００°
Ｃ程度に加熱し、ガス圧５〜１５ｍＴｏｒｒの行中で、
スパッタパワー３．２ｋＷを印加し°Ｃ行なった。At this time, carbon sputtering is carried out at an angle of 200 to 300°.
Heated to about C and in a gas pressure of 5 to 15 mTorr,
A sputtering power of 3.2 kW was applied and the process was carried out at °C.
このような条件で製造された磁気ディスク媒体の特性を
測定した結果、摩擦係数は０．０９、耐久パス数は７２
０００以上であった。なお、耐久パス数は、磁気ヘッド
が磁気ディスク媒体面に密着するように真空中において
、磁気ディスク媒体を高速回転させることで行なう。そ
して、ヘッドクランシュにより、磁気ディスク媒体の磁
性膜に達するような傷が発生するまでの、磁気ディスク
媒体の回転数を測定する。As a result of measuring the characteristics of magnetic disk media manufactured under these conditions, the friction coefficient was 0.09 and the number of durable passes was 72.
It was over 000. Note that the number of durable passes is determined by rotating the magnetic disk medium at high speed in a vacuum so that the magnetic head is in close contact with the surface of the magnetic disk medium. Then, the number of rotations of the magnetic disk medium is measured until a scratch that reaches the magnetic film of the magnetic disk medium is generated by the head crush.
また、第２図の本発明構成において、自己潤滑性カーボ
ン膜６の上に、液体の潤滑剤を塗布した後に、１２０°
Ｃで１時間焼いた例においては、摩擦係数は０．１３と
改善され、耐久パス数は、６４８００〜１２００００で
あった。自己潤滑性カーボン膜の上に潤滑剤を全く塗布
しない例においては、摩擦係数は０．１３、耐久パス数
は、５００００〜１０００００であり、自己潤滑性カー
ボン膜の上に、潤滑剤を塗布する方が望ましい。In addition, in the configuration of the present invention shown in FIG. 2, after applying liquid lubricant on the self-lubricating carbon film 6,
In the example baked for 1 hour at C, the friction coefficient was improved to 0.13, and the number of durability passes was 64,800 to 120,000. In an example in which no lubricant is applied on the self-lubricating carbon film, the friction coefficient is 0.13 and the number of durable passes is 50,000 to 100,000, and the lubricant is applied on the self-lubricating carbon film. It is preferable.
第４図は、自己潤滑用カーボン膜の膜厚と磁気特性との
関係を示す図で１、横軸がカーボン膜厚、縦軸が磁気特
性の減少率である。この図から明らかなように、カーボ
ン膜の増大に伴ない、磁気特性は直線的に減少する。磁
気特性の１５％以上の減少は、好ましくない。その結果
、カーボン膜Ｊ７ば４００人が限界である。FIG. 4 is a diagram showing the relationship between the film thickness and magnetic properties of a self-lubricating carbon film 1, where the horizontal axis is the carbon film thickness and the vertical axis is the reduction rate of the magnetic properties. As is clear from this figure, as the carbon film increases, the magnetic properties decrease linearly. A decrease in magnetic properties of more than 15% is undesirable. As a result, the limit for carbon film J7 is 400 people.
第５図は、本発明の各実施例と特性を比較するために、
従来の方法で製造した磁気ディスク媒体である。FIG. 5 shows, in order to compare characteristics with each embodiment of the present invention,
This is a magnetic disk medium manufactured using a conventional method.
この磁気ディスク媒体は、アノ１ベニウム基板ｊ上にＡ
ｌｚＯｓからなる下地層２を被覆し、この」−ｃこγ−
Ｆｅ、０３膜３をスパッタリングにより形成する。This magnetic disk medium has A
A base layer 2 made of lzOs is coated, and this
A Fe,03 film 3 is formed by sputtering.
そして、この磁性膜３の上に保護膜４ （Ｓｉｎ、 ）
をスパッタリング法で形成し、この保護膜４上に、凹凸
を持ちＳｔを含む保護膜５をスビンコ−１・により形成
し、その上に潤滑剤７を塗布する。Then, a protective film 4 (Sin, ) is formed on this magnetic film 3.
A protective film 5 having irregularities and containing St is formed on this protective film 4 by a sputtering method, and a lubricant 7 is applied thereon.
冬服の作製条件は、次の通りである。The conditions for making winter clothes are as follows.
１、磁性膜ニスバッタリング法でα−Ｆｅ２０．を形成
した後、還元酸化処理によって、膜）７が１６００人程
度０γ−Ｆｅ、４０ｓ とした。1. α-Fe20. by magnetic film varnish battering method. After forming the film, film 7 was made to contain about 1,600 γ-Fe for 40 s by reduction and oxidation treatment.
２゜保護膜４ニスバツタリング法にて、膜厚が１２０人
程０のＳｉＯ□膜を形成する。A SiO□ film having a thickness of approximately 120 mm is formed using a 2° protective film 4 varnish buttering method.
３、保護膜５：Ｓｉと流動パラフィンを含む混合液をス
ピンコードした後、焼き付けることで、膜厚１５０人程
０の膜とする。3. Protective film 5: A mixed solution containing Si and liquid paraffin is spin-coded and then baked to form a film with a thickness of approximately 150 mm.
このような条件で製造された従来の磁気ディスク媒体の
特性を測定した結果、摩擦係数は０．０７と、本発明の
磁気ディスク媒体と大差なかった。ｉ４久バス数は、本
発明の磁気ディスク媒体と同じ手法で測定した結果、４
２０程度であり、本発明の磁気ディスク媒体が従来のも
のよりはるかに優れていることが裏付けられた。As a result of measuring the characteristics of a conventional magnetic disk medium manufactured under such conditions, the coefficient of friction was 0.07, which was not much different from the magnetic disk medium of the present invention. The number of i4 long buses was measured using the same method as the magnetic disk medium of the present invention, and was found to be 4.
20, confirming that the magnetic disk medium of the present invention is far superior to the conventional one.
自己潤滑用カーボン膜の作製は、スパッタリング法のほ
かに、パラフィン系の液を適切な溶剤で希釈してスピン
コードし、その後２００〜３５０ ’Ｃで１〜５時間、
焼き付けることでも可能である。この際、塗布する液の
濃度、焼き付は温度を変えることにより、任意の膜厚に
制御できる。In addition to the sputtering method, the self-lubricating carbon film can be prepared by diluting a paraffinic liquid with an appropriate solvent and spin-coding it, followed by heating at 200 to 350'C for 1 to 5 hours.
It is also possible to burn it. At this time, the concentration and baking of the coating liquid can be controlled to any desired film thickness by changing the temperature.
なお、凹凸を有する硬質保護膜５より軟質で自己潤滑性
を有する保護膜６として、カーボンを例示したが、ほか
にタングステンや二硫化モリブデンなどが適している。Although carbon is shown as an example of the protective film 6 which is softer than the hard protective film 5 having unevenness and has self-lubricating properties, other materials such as tungsten and molybdenum disulfide are suitable.
〔発明の効果］
以上のように本発明によれば、磁性膜３を保護するため
の凹凸形状の硬質保護膜５の上に、該硬質保護膜５より
軟質で自己潤滑性を有する保護膜６を有している。その
ため、磁気ヘッドが磁気ディスク媒体面に接触したとき
に、保護膜６の自己潤滑作用によって、衝撃が緩和され
、ヘッドクラッシュの発生が防止され、エラーの原因と
なるような、磁性膜に達する深い傷が発生しにくくなる
。[Effects of the Invention] As described above, according to the present invention, a protective film 6 that is softer than the hard protective film 5 and has self-lubricating properties is provided on the hard protective film 5 having an uneven shape for protecting the magnetic film 3. have. Therefore, when the magnetic head comes into contact with the magnetic disk medium surface, the self-lubricating effect of the protective film 6 alleviates the impact and prevents the occurrence of head crashes. Scars are less likely to occur.
第１図は本発明による磁気ディスク媒体の基本原理を説
明する断面図、第２図は本発明の実施例を示す磁気ディ
スク媒体の断面図、第３図は硬質保護膜の作製方法を例
示する図、第４図はカーボン膜厚と磁気特性減少率との
関係を示す図、第５図は本発明と特性比較するための従
来の磁気ディスク媒体の断面図である。
第６図は従来の薄膜磁気記録媒体の全容を示す断面図、
第７図は従来の磁気記録媒体の断面構造を示す図、第８
図、第９図は磁性層として金属磁性膜を用いた磁気ディ
スク媒体の断面図である。
図において、１は非磁性基板、２は下地層、３は磁性膜
、４は接着用保護膜、５は凹凸形状の硬質保護膜、６は
自己潤滑性保護膜、７は潤滑剤をそれぞれ示す。
第７図
特許出願人 富士通株式会社
復代理人 弁理士 福 島 康 文
実茫伊り
甥２Ｚ
第３閃
力−ボ゛ン牌層こ層形ｊ々羊丹１ｊ・生滅１少間条乙の
関４１へ淡水の講暇磁え記硅娩倣
ギ６０
名て承の西（Ａヒ鈑型安仄億
第７図
ぢシンも示りつ 国方衾こ化谷天型億むη（イ２屹（ｃ
） 具イネμしＩり１ゴ第５２
従承の全１黙せ１注嗅型媒体
篇８図
淡水の杏属磁媒膜型媒体
ｘ９図FIG. 1 is a cross-sectional view explaining the basic principle of a magnetic disk medium according to the present invention, FIG. 2 is a cross-sectional view of a magnetic disk medium showing an embodiment of the present invention, and FIG. 3 is an example of a method for manufacturing a hard protective film. 4 is a diagram showing the relationship between carbon film thickness and magnetic property reduction rate, and FIG. 5 is a cross-sectional view of a conventional magnetic disk medium for comparing the characteristics with the present invention. FIG. 6 is a cross-sectional view showing the entire structure of a conventional thin film magnetic recording medium.
FIG. 7 is a diagram showing the cross-sectional structure of a conventional magnetic recording medium, and FIG.
9 are cross-sectional views of a magnetic disk medium using a metal magnetic film as a magnetic layer. In the figure, 1 is a non-magnetic substrate, 2 is a base layer, 3 is a magnetic film, 4 is an adhesive protective film, 5 is an uneven hard protective film, 6 is a self-lubricating protective film, and 7 is a lubricant. . Figure 7 Patent Applicant Fujitsu Limited Sub-Agent Patent Attorney Yasushi Fukushima Bunmi Yuiri Nephew 2Z 3rd Senki - Bon tile layered form To Seki 41, Tamsui's lesson time record was imitated by 60 people. Leopard (c
) Guine μshi Iri 1 go No. 52 all 1 silence 1 odor-type medium version 8 figure of freshwater apricot magnetic medium film-type medium x9 figure
Claims (1)
性膜（３）が形成されており、該磁性膜（３）より上側
に、凹凸を有する硬質の保護膜（５）を設け、さらにそ
の上に該硬質保護膜（５）より軟質で自己潤滑性を有す
る保護膜（６）を形成したことを特徴とする磁気ディス
ク媒体。A magnetic film (3) is formed on a non-magnetic substrate (1) directly or via an underlayer, and a hard protective film (5) having projections and depressions is provided above the magnetic film (3). A magnetic disk medium further comprising a protective film (6) that is softer than the hard protective film (5) and has self-lubricating properties.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31424888A JPH02161614A (en) | 1988-12-13 | 1988-12-13 | Magnetic disk medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31424888A JPH02161614A (en) | 1988-12-13 | 1988-12-13 | Magnetic disk medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02161614A true JPH02161614A (en) | 1990-06-21 |
Family
ID=18051067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31424888A Pending JPH02161614A (en) | 1988-12-13 | 1988-12-13 | Magnetic disk medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02161614A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62109220A (en) * | 1985-11-07 | 1987-05-20 | Fujitsu Ltd | Magnetic recording medium |
-
1988
- 1988-12-13 JP JP31424888A patent/JPH02161614A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62109220A (en) * | 1985-11-07 | 1987-05-20 | Fujitsu Ltd | Magnetic recording medium |
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