JPS6339134A - Magnetic disk - Google Patents
Magnetic diskInfo
- Publication number
- JPS6339134A JPS6339134A JP18367286A JP18367286A JPS6339134A JP S6339134 A JPS6339134 A JP S6339134A JP 18367286 A JP18367286 A JP 18367286A JP 18367286 A JP18367286 A JP 18367286A JP S6339134 A JPS6339134 A JP S6339134A
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- film
- liquid
- head
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010687 lubricating oil Substances 0.000 claims description 10
- 239000010407 anodic oxide Substances 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 239000007788 liquid Substances 0.000 abstract description 18
- 230000000694 effects Effects 0.000 abstract description 6
- 239000006061 abrasive grain Substances 0.000 abstract description 5
- 230000006866 deterioration Effects 0.000 abstract description 2
- 238000009826 distribution Methods 0.000 abstract description 2
- 230000007423 decrease Effects 0.000 abstract 2
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 239000010408 film Substances 0.000 description 30
- 238000000034 method Methods 0.000 description 12
- 238000001179 sorption measurement Methods 0.000 description 8
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000006247 magnetic powder Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、電子計算機の記憶装置として、用いられる磁
気ディスクに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic disk used as a storage device for an electronic computer.
現在広く用いられている磁気ディスクは、塗布型と称し
、アルミニウム合金を鏡面加工した後、磁性粉を樹脂と
ともに塗布(膜厚0.5〜1μm)したディスクである
。これは、磁性粉が樹脂内に不連続に分散しているため
、記録再生出力のノイズが大きく、記録密度を高めるこ
とができない。The magnetic disks that are currently widely used are called coated type disks, which are made by mirror-finishing aluminum alloy and then coating magnetic powder together with resin (film thickness: 0.5 to 1 μm). This is because the magnetic powder is discontinuously dispersed within the resin, which causes large noise in the recording and reproduction output, making it impossible to increase the recording density.
そこで磁性体をスパッタ法もしくはメツキ法によって連
続に薄く(膜厚0.2μm以下)付与した薄膜型と称す
るディスクが開発され一部用いられている。Therefore, a disk called a thin film type, in which a magnetic material is continuously applied in a thin layer (film thickness of 0.2 μm or less) by sputtering or plating, has been developed and is in some use.
磁気ディスク装置のヘッドは記録再生時は。The head of a magnetic disk drive is used during recording and playback.
回転する平滑なディスク上を空気膜を介して浮上してい
るが未使用時は、回転停止したディスク上に接地してい
る。このヘッドの回転起動および停止時の接触滑走時の
ディスクに当たって生じる衝撃を、塗布型のディスクは
、ヘッドと樹脂内に混入させた硬質物のみと接すること
でで緩和させているが、薄膜型のディスクは、磁性体を
不連続にする硬質物を付与できないので、磁性体の下に
φO,Lμm以上の凹凸の欠陥がない、硬質下地膜(例
えば、陽極酸化膜・や無電解ニッケルメッキ膜)を付与
して用いられている。It floats on a rotating, smooth disk via a film of air, but when not in use, it is grounded on a disk that has stopped rotating. Coated type disks reduce the impact caused by contact with the disk during contact sliding when the head starts and stops rotating by coming into contact only with the head and a hard substance mixed in the resin, but thin film type Since the disk cannot be coated with a hard material that discontinuously discontinuizes the magnetic material, a hard base film (e.g., anodic oxide film or electroless nickel plating film) with no unevenness defects of φO, L μm or more is used under the magnetic material. It is used with the .
しかし、それでもなお、滑走時のヘッドとディスクの接
触時の摩擦力が大きいとヘッドがピッチング振動をおこ
しディスクに傷をつけることがあるため、磁性膜や保護
膜の上に液体潤滑剤を付与することが多い。However, if the frictional force at the time of contact between the head and the disk during sliding is large, the head may cause pitching vibration and damage the disk, so it is necessary to apply a liquid lubricant on top of the magnetic film or protective film. There are many things.
液体潤滑剤を付与する方法としては、液体潤滑剤とその
溶媒の溶液(液と略す)を用いて。The method for applying the liquid lubricant is to use a solution (abbreviated as liquid) of the liquid lubricant and its solvent.
(a)基板を液に浸漬する方法(デイツプ法)(b)基
板を高速回転させ内周より液を供給して遠心力により塗
布する方法(スピンコード法)
(C)基板に液を均一に霧状にふきかける方法(スプレ
ー法)
(d)これらの方法で付与した液を乾燥しないうちにガ
ーゼ等を押しつけてのばす方法(すりこみ法)等が挙げ
られる。(a) A method in which the substrate is immersed in a liquid (dip method) (b) A method in which the substrate is rotated at high speed and the liquid is supplied from the inner circumference and coated using centrifugal force (spin cord method) (C) A method in which the liquid is uniformly applied to the substrate (d) A method of applying a mist (spray method); (d) A method of spreading the liquid applied by these methods by pressing it with gauze or the like before it dries (rubbing method).
上記のいずれの方法でも塗布型のディスクでは液体潤滑
剤を実用上十分に付与し得る。塗布型のは樹脂が多孔質
であるゆえ、液が含浸し、液の塗布量をある最下上にし
てやれば、表面にでている液量はほぼ一定になるよう余
分量は古漬する。よってヘッドの滑走時の摺動性はよく
動摩擦係数μは0.1以下と小さい。もつとも多すぎて
は、ヘッドの停止時の吸着力が大きくなり起動時に静摩
擦力が大きくジンバルが変形するが、ヘッドのスライダ
面は樹脂上にでている硬質物にのみ接して実際のヘッド
とディスクとの接触面積が小さいため、ある最下下にす
れば吸着事故は少ない。Any of the above methods can apply a practically sufficient amount of liquid lubricant to a coating type disk. Since the resin of the coating type is porous, it is impregnated with liquid, and if the amount of liquid applied is set to the lowest level, the excess amount is soaked in the old soak so that the amount of liquid that comes out on the surface is almost constant. Therefore, the sliding properties of the head during sliding are good and the coefficient of dynamic friction μ is as small as 0.1 or less. If there is too much, the adsorption force will be large when the head is stopped, and the static friction force will be large when starting up, deforming the gimbal. However, the slider surface of the head will only come into contact with the hard material that is exposed on the resin, and the actual head and disk will be in contact with each other. Since the contact area is small, if it is placed at a certain lowest position, there will be fewer adsorption accidents.
ところが、薄膜型のディスクは、磁性膜に凹凸がなく平
滑であるため付与する液量が少ないと、かすれた部分が
生じて摩擦力が大きくなり(例えばμ=0.5)、滑走
時、保護膜を摩耗させたり磁性膜に傷をつける。また付
与する液量が多いと接触面積の大きい平滑なスライダ面
(Rmaxo、02μm)と平滑なディスク面(Rma
xo、1μm)とがヘッド停止時に容易に吸着し、これ
をはがす力は40gfに達することもある。However, thin-film disks have a smooth magnetic film with no unevenness, so if the amount of liquid applied is small, scratched areas will occur and the frictional force will be large (for example, μ = 0.5), which makes it difficult to protect the disk when sliding. This may wear out the film or damage the magnetic film. In addition, if a large amount of liquid is applied, a smooth slider surface with a large contact area (Rmaxo, 02 μm) and a smooth disk surface (Rmaxo,
xo, 1 μm) is easily adsorbed when the head is stopped, and the force to peel it off can reach 40 gf.
なお、薄膜型のは塗布型のように樹脂の中に液が保持さ
れず、そのうえディスク面がより平滑であるため遠心力
によって液が散逸することが多い。薄膜型のを長時間の
摺動試験(例えばCSS (コンタクトスタートスト
ップ)テスト。Note that in the thin film type, the liquid is not retained in the resin as in the coating type, and in addition, the disk surface is smoother, so the liquid often dissipates due to centrifugal force. Long-term sliding tests (for example, CSS (Contact Start Stop) tests on thin film types.
ヘッドの離着陸を間欠的にくりかえすテスト)を行なう
と、最初はμが0.1と小さく摩擦も生じないのに、2
0000回ぐらいから、μが0.4と大きくなり摩耗も
大きくなることがある。このように、最小許容潤滑膜厚
も経時変化も考慮して決定しないとヘッドがディスクを
摩滅させる衝突事故は避けられない。When conducting a test in which the head takes off and lands intermittently, μ is initially as small as 0.1 and no friction occurs, but 2
From about 0,000 times, μ becomes large to 0.4 and wear may become large. As described above, unless the minimum allowable lubricant film thickness is determined in consideration of changes over time, collisions in which the head wears out the disk cannot be avoided.
以上のように薄膜型のディスクは液体潤溶膜の膜厚によ
って摺動性、吸着性が塗布型のディスクに較べ著しく敏
感である。As described above, the sliding and adsorption properties of thin film type disks are significantly more sensitive than those of coated type disks, depending on the thickness of the liquid-wet film.
上記の問題点を検討したところ、硬質下地膜の表面に、
同心円の溝をつければ膜厚が摺動性吸着性におよぼす影
響は小さくなることがわかった・
つまり、同心円状の溝を多数つけることによって液が溝
の中に保持され、遠心力による散逸が減少し、摺動性の
低下が免れる。また溝をつけることで凹の表面が増加し
、液の密着性も向上する。そして余剰の液を溝内に保持
することで許容液量の幅が広くなり裳造しやすくなる。After considering the above problems, we found that on the surface of the hard base film,
It was found that if concentric grooves are provided, the effect of film thickness on sliding adsorption is reduced. In other words, by providing many concentric grooves, the liquid is retained in the grooves, and dissipation due to centrifugal force is prevented. This prevents deterioration in sliding properties. Also, by adding grooves, the number of concave surfaces increases, which improves the adhesion of liquid. By retaining the excess liquid in the groove, the range of allowable liquid amount is widened, making it easier to embellish.
溝をつけることでディスク面とヘッドのスライダ面との
実際の接触面積が減少するため、吸着性も減少する。By providing grooves, the actual contact area between the disk surface and the slider surface of the head is reduced, so the adhesion is also reduced.
ただし溝が0.1μm以上に深いと、底の磁性膜にヘッ
ドの磁場が届かなくなり、出力のオーバーライド特性(
重ね書き特性)が30dB(R60m、2F=2.5M
Hz、IFl、25M I(z )以下となり、好まし
くない。また溝がO001μm以下と浅いと上記の効果
は小さい。なおこの溝の深さは、断面を透過電顕で測定
したり、SEMで表面を斜めから、観察することで決定
した。However, if the groove is deeper than 0.1 μm, the magnetic field of the head will not reach the bottom magnetic film, and the output override characteristic (
Overwriting characteristics) is 30dB (R60m, 2F=2.5M
Hz, IFl, 25M I(z) or less, which is not preferable. Moreover, if the groove is shallow, such as 0001 μm or less, the above effect is small. The depth of the groove was determined by measuring the cross section with a transmission electron microscope or obliquely observing the surface with a SEM.
溝の幅は上記の深さが得るための加工砥粒の大きさから
O,1μm以上1μm以下と規定できる。実際の装置に
ディスクを組込んだ時の回転中心と同心溝をつける加工
中心とのずれ(同心度)は1■以内であれば遠心力によ
る散逸が免れる効果が大きい、同心溝の分布密度は、ス
ライダ幅が0.1■〜0.8−程度であるため少なくと
も10μm当り1本あると、ディスク−ヘッドの実際接
触面積の減少による吸着性低下の効果が得られる。The width of the groove can be defined as O, 1 μm or more and 1 μm or less, based on the size of the processing abrasive grains used to obtain the above depth. If the deviation (concentricity) between the rotation center when the disk is installed in the actual device and the processing center where the concentric grooves are made is within 1■, it will have a great effect of avoiding dissipation due to centrifugal force, and the distribution density of the concentric grooves will be Since the slider width is approximately 0.1 to 0.8 mm, if there is at least one slide per 10 μm, the effect of lowering the adsorption property due to the reduction in the actual contact area between the disk and the head can be obtained.
アルミニウム合金(Mg4.5% その他Si、Fe、
Mn、Cu等合わせて0.02%)を外径130nm、
内径40m、板厚1.9051の形状に旋削で仕上げた
後、クロム酸溶により、陽極酸化を施し13μm厚の陽
極酸化膜を形成した。平均粒径0.3μmのアルミナの
砥粒で面を平滑にして(Ra=0.007pm)洗浄後
、ホワイトアルミナの砥粒(平均粒径約5μm)を表面
に固着させたテープを回転する基板に押しつけ同心円状
の溝をつけた。その後すみやかに洗浄しCo−Niの磁
性膜とカーボンの保護膜とをスパッタで、フッ化オイル
系の液体潤滑剤をスピンコードで、各々付与して磁気デ
ィスクを製作した。Aluminum alloy (Mg4.5% Others Si, Fe,
0.02% in total of Mn, Cu, etc.) with an outer diameter of 130 nm,
After finishing it by turning into a shape with an inner diameter of 40 m and a plate thickness of 1.9051 mm, anodization was performed using chromic acid solution to form an anodic oxide film with a thickness of 13 μm. The surface is smoothed with alumina abrasive grains with an average grain size of 0.3 μm (Ra=0.007 pm), and after cleaning, a tape with white alumina abrasive grains (average grain size of about 5 μm) fixed to the surface is rotated. Concentric grooves were created by pressing the Thereafter, it was immediately washed, and a Co--Ni magnetic film and a carbon protective film were applied by sputtering, and a fluorinated oil-based liquid lubricant was applied using a spin cord to produce a magnetic disk.
また硬質下地膜のちがいを調べるため陽極酸化膜のかわ
りに無電解ニッケルメッキ膜を15μm付与し、あとは
同種の加工を施したものを製作した。それぞれ比較のた
め溝加工をつけないものも製作した。In addition, in order to investigate the difference in the hard base film, a 15 μm thick electroless nickel plating film was applied instead of the anodic oxide film, and the same type of processing was applied. For comparison, we also produced a model without grooves.
なお溝加工のアルミナ砥粒の大きさを変えて溝深さを、
スピンコードする液体潤滑剤の濃度をかえて膜厚をそれ
ぞれ変化させた。溝深さはSEMで測定し、膜厚はFT
IR(フーリエ変換赤外分光計)の液体潤滑剤の吸光度
をエリプソメータで膜厚に較正した。In addition, the groove depth can be adjusted by changing the size of the alumina abrasive grains used for groove processing.
The film thickness was varied by changing the concentration of the liquid lubricant used in spin coding. The groove depth was measured by SEM, and the film thickness was measured by FT.
The absorbance of the liquid lubricant in an IR (Fourier transform infrared spectrometer) was calibrated to the film thickness using an ellipsometer.
評価としては、摺動性を、C5Sテスト20000回後
、保護膜のカーボンの摩耗の有無で耐吸着性は、液体潤
滑剤塗布後湿度60%の環境に5日放置して9らのヘッ
ドの摩擦力で、オーバーライド特性ば2F2.5M七1
F1.25MHzの値で各々行なった。それぞれ合格を
、摩耗皆無、、5gf以下、30dB以上とした。For evaluation, the sliding property was measured after 20,000 C5S tests, the presence or absence of abrasion of the carbon in the protective film, and the adsorption resistance of the 9 heads after being left in an environment with 60% humidity for 5 days after applying liquid lubricant. If the override characteristic is 2F2.5M71 due to frictional force
Each test was conducted at a value of F1.25 MHz. Passing was defined as no wear, 5 gf or less, and 30 dB or more.
使用ヘッドはミンウインチェスタヘッドである。The head used is the Minwin Chester head.
実験結果を表1に示す。液体潤滑剤の膜厚で摺動性が良
くても耐吸着性の悪い膜厚(D、E)や摺動性が悪くて
も耐吸着性の良い薄いかまたは無い膜(A、B、I)
WI方とも悪いその中間の膜(C,J)等は、適正な溝
をつけることによって両方を満足するようになる(F、
G、K。The experimental results are shown in Table 1. Liquid lubricant film thicknesses that have good sliding properties but have poor adhesion resistance (D, E), and thin or non-existent films that have poor sliding properties but good adsorption resistance (A, B, I). )
Intermediate films (C, J), etc., which are bad on both WI sides, can be made to satisfy both (F,
G.K.
L)、もちろん、溝が深すぎたり(H,N)膜が厚すぎ
たり(M)しては、オーバーライド特性や耐吸着性を満
足しない6
〔発明の効果〕
本発明の磁気ディスクを有する磁気ディスク装置は摺動
性、耐吸着性に優れ、長寿命を保証表1.ディスクとヘ
ッドの摺動性・吸着性することができる。L), of course, if the groove is too deep (H, N) or the film is too thick (M), the override characteristics and adhesion resistance will not be satisfied. The disk device has excellent sliding properties and adhesion resistance, and a long life is guaranteed.Table 1. It can improve the sliding and adsorption properties of the disk and head.
Claims (2)
の上に膜厚0.2μm以下の連続磁性膜を、必要に応じ
てその上に保護膜を、そして、その上に膜厚0.02μ
m以下の液体潤滑膜を有する磁気ディスクにおいて、硬
質下地膜の表面に、深さ0.01μm以上0.1μm以
下で、幅0.1μm以上1μm以下の溝を、ディスクが
装置に組み込まれた時の回転中心と同周度が1mm以下
の同心円状に、ヘッド滑走領域上で少なくとも10μm
当り1本以上有することを特徴とする磁気ディスク。(1) A hard base film is applied on an aluminum alloy substrate, a continuous magnetic film with a thickness of 0.2 μm or less is applied on top of the hard base film, a protective film is placed on top of it as necessary, and a film with a thickness of 0.02 μm is placed on top of that as necessary.
In a magnetic disk having a liquid lubricant film of not more than m, grooves with a depth of 0.01 μm or more and 0.1 μm or less and a width of 0.1 μm or more and 1 μm or less are formed on the surface of the hard base film when the disk is incorporated into a device. At least 10 μm on the head sliding area in a concentric circle with a circumference of 1 mm or less around the rotation center of the
A magnetic disk characterized in that each magnetic disk has one or more disks.
化膜であることを特徴とする磁気ディスク。(2) The magnetic disk according to item 1 above, wherein the hard underlayer film is an anodic oxide film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18367286A JPS6339134A (en) | 1986-08-05 | 1986-08-05 | Magnetic disk |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18367286A JPS6339134A (en) | 1986-08-05 | 1986-08-05 | Magnetic disk |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6339134A true JPS6339134A (en) | 1988-02-19 |
Family
ID=16139906
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18367286A Pending JPS6339134A (en) | 1986-08-05 | 1986-08-05 | Magnetic disk |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6339134A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0256727A (en) * | 1988-08-20 | 1990-02-26 | Victor Co Of Japan Ltd | Magnetic recording medium |
JPH03127327A (en) * | 1989-10-13 | 1991-05-30 | Hitachi Ltd | Magnetic disk, manufacturing method and magnetic disk device |
-
1986
- 1986-08-05 JP JP18367286A patent/JPS6339134A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0256727A (en) * | 1988-08-20 | 1990-02-26 | Victor Co Of Japan Ltd | Magnetic recording medium |
JPH03127327A (en) * | 1989-10-13 | 1991-05-30 | Hitachi Ltd | Magnetic disk, manufacturing method and magnetic disk device |
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