JPH02159393A - High-speed partial plating device - Google Patents
High-speed partial plating deviceInfo
- Publication number
- JPH02159393A JPH02159393A JP31309388A JP31309388A JPH02159393A JP H02159393 A JPH02159393 A JP H02159393A JP 31309388 A JP31309388 A JP 31309388A JP 31309388 A JP31309388 A JP 31309388A JP H02159393 A JPH02159393 A JP H02159393A
- Authority
- JP
- Japan
- Prior art keywords
- plating
- plated
- electrode
- anodes
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 title claims abstract description 108
- 239000000463 material Substances 0.000 claims abstract description 21
- 239000010406 cathode material Substances 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims 2
- 239000007788 liquid Substances 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 6
- 229910052751 metal Inorganic materials 0.000 abstract description 6
- 239000000243 solution Substances 0.000 description 33
- 238000000034 method Methods 0.000 description 10
- 229910000679 solder Inorganic materials 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010828 elution Methods 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000002198 insoluble material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、被めっき材の表面に局部的な部分めっきをす
るなめのめっき装置の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an improvement in a smooth plating apparatus that performs local partial plating on the surface of a material to be plated.
[従来の技術]
被めっき材3の表面に他の金属をめっきする場合の基本
構成は、第4図に示すように、めっき楢1内にめっき液
2を充たし、該めっき液2内に被めっき材3とめっきす
べき金属と同種の材料よりなる溶解性電極4を配置し、
被めっき材3を陰極とし、溶解性型4E!4を陽極とし
て通電しめっきするものである。[Prior Art] As shown in FIG. 4, the basic configuration for plating another metal on the surface of a material to be plated 3 is to fill a plating tank 1 with a plating solution 2, and to deposit the plating solution 2 into the plating solution 2. Placing a soluble electrode 4 made of the same material as the plating material 3 and the metal to be plated,
The material to be plated 3 is used as a cathode, and the soluble type 4E! 4 is used as an anode for electroplating.
この場合、通電により被めっき材3の表面にめっきがな
されると同時に電極4がめつき液2中に少しづつ溶出し
、それによって連続的にめっきを行なってもめっき液中
の金属イオン濃度が一定に保持され、長期間にわたりめ
っき液2の紹成変動が生じないため、メンテナンスは比
較的容易である。In this case, the electrode 4 is gradually eluted into the plating solution 2 at the same time that the surface of the material to be plated 3 is plated by applying electricity, so that the metal ion concentration in the plating solution remains constant even if plating is performed continuously. Since the plating solution 2 is maintained at a constant temperature and the plating solution 2 does not fluctuate over a long period of time, maintenance is relatively easy.
しかし、上記方式は、被めっき材3の表面全体にめっき
するには非常に好都合であるが、長尺帯状の被めっき材
3の表面に局部的なスポットめっきを連続的に行なうよ
うな場合には、問題がないとはいえない。However, although the above method is very convenient for plating the entire surface of the material 3 to be plated, it is not suitable for continuous spot plating locally on the surface of the material 3 to be plated in the form of a long strip. cannot be said to be without problems.
近年、電気的接点材料やリードフレームなどにおいては
へその全面にめっきせず、必要最小限の範囲に金、銀、
ニッケルあるいは半田などをスポット状に連続めっきす
ることが行なわれるようになり、めっき材の節約と同時
に不必要な表面に不必要にめっき層か形成されるのを防
止し、目的に適合した素材特性を保有せしめようとする
考え方が一般化されるようになった。In recent years, for electrical contact materials and lead frames, gold, silver,
Continuous spot plating with nickel or solder has become a practice, which saves plating materials and prevents the formation of unnecessary plating layers on unnecessary surfaces, allowing material properties that suit the purpose. The idea of having people hold the same thing has become popular.
例えば、前記リードフレームについてみれば、IC1J
G載部にのみ半田めっきがなされていればよいのであっ
て、それ以外の表面にまで半田めっき層が存在すること
はむしろ導電性その他の特性上からは好ましくないなめ
、打ち抜きしたリードフレームの上記IC搭載部のみに
半田を部分めっきするのが通常である。For example, regarding the lead frame, IC1J
It is sufficient that the solder plating is applied only to the G mounting part, and the presence of the solder plating layer on other surfaces is rather undesirable from the viewpoint of conductivity and other properties. Normally, only the IC mounting area is partially plated with solder.
しかし、これを上記第4図の方法で行なおうとすると、
第3図に示すように、被めっき材3の両面にめっき面に
相当する開ロバターン6.6を形成したテープよりなる
マスク5を貼り付けておいてこれを溶解性電極4.4間
のめっき液2中に連続的に通過させて開ロバターン6.
6部分のみをめっきし、その後マスク5を剥離除去する
方法を用いなければならない。However, if you try to do this using the method shown in Figure 4 above,
As shown in FIG. 3, a mask 5 made of tape on which an open pattern 6.6 corresponding to the plating surface is formed is pasted on both sides of the material 3 to be plated, and this is used for plating between the soluble electrodes 4.4. Continuously pass through the liquid 2 and open the lever 6.
A method must be used in which only 6 parts are plated and then the mask 5 is peeled off.
この方法では、開ロバターン6の位置精度の問題、テー
プのランニングコストの問題などのほか、めっき速度を
大きくできないといった問題など不都合な点が山積して
くるのである。This method has many disadvantages, such as the positional accuracy of the opening lever 6, the running cost of the tape, and the inability to increase the plating speed.
このため、上記連続的スポットめっきには、めっき液を
めっき面に噴射するめっき方式を採用し、めっき面につ
ねに新しいめっき液が接するようにして高効率をもって
高速度めっきを行ない、めっき層の品質と生産性の向上
を図ることが一般化されている。For this reason, the above-mentioned continuous spot plating uses a plating method in which the plating solution is sprayed onto the plating surface, and plating is performed at high speed with high efficiency so that the plating solution is always in contact with the plating surface, and the quality of the plating layer is improved. It has become common to aim to improve productivity.
[発明が解決しようとする課題]
上記めっき液噴射方式においては、陽極には不溶性電極
が使用される。従って、前記第4図の場合のように電極
4の溶出によるめっき液の濃度維持作用はないから、め
っき作業の進捗に応じ新たなめっき液をつねに補充し続
けなければならない。[Problems to be Solved by the Invention] In the above plating solution injection method, an insoluble electrode is used as the anode. Therefore, since there is no effect of maintaining the concentration of the plating solution by elution of the electrode 4 as in the case of FIG. 4, new plating solution must be constantly replenished according to the progress of the plating work.
そのための特別なめつき液が専門メーカーより市販され
ているのが現状である。Currently, special plating liquids for this purpose are commercially available from specialized manufacturers.
しかしながら、そのような市販のめつき液を用いること
は、めっき液のランニングコストを上昇させることとな
る上、液管理を困難にするという別な問題が派生する。However, using such a commercially available plating solution not only increases the running cost of the plating solution, but also creates other problems such as making solution management difficult.
さらに、このような市販のめっき液には特殊な酸が添加
されており、それによってめっき装置の金属部分が異常
に速く腐食され、2〜3年といった短ItJJ間にめっ
き装置に大きなダメージが生ずるといった問題もある。Furthermore, these commercially available plating solutions contain special acids that corrode the metal parts of the plating equipment abnormally quickly, causing major damage to the plating equipment within a short period of 2 to 3 years. There are also issues like this.
本発明の目的は、上記したような従来技術の間趙点を解
消し、噴射方式による高速部分めっきにおいて、従来の
市販めっき液に全面依存することなく、めっき液濃度を
自ら維持可能な電極を用いることにより、めっき液のラ
ンニングコストの低減と液管理の容易性をOFせ確保可
能な高31部分めっき装置を提供しようとするものであ
る。The purpose of the present invention is to solve the above-mentioned problems in the prior art, and to provide an electrode that can maintain the plating solution concentration by itself in high-speed partial plating using the injection method without relying entirely on conventional commercially available plating solutions. It is an object of the present invention to provide a high-31 partial plating apparatus that can reduce the running cost of the plating solution and facilitate the management of the solution.
[課題を解決するための手段]
本発明は、めっき液を循環させ当該めっき液をノズルよ
り被めっき面に噴射してめっきする装置において、被め
っき陰極材と相対応して設置される陽極をめっき液中に
溶解可能な溶解性電極としたものであり、さらに当該溶
解性電極を位置決め片で位置決めしこれにバネ付勢する
ことにより、陽極とめっき面の間の距離を一定に維持可
能としたものである。[Means for Solving the Problems] The present invention provides an apparatus for plating by circulating a plating solution and spraying the plating solution onto a surface to be plated from a nozzle, in which an anode is installed in correspondence with a cathode material to be plated. It is a soluble electrode that can be dissolved in the plating solution, and by positioning the soluble electrode with a positioning piece and applying a spring force to it, it is possible to maintain a constant distance between the anode and the plating surface. This is what I did.
[作用]
陽極が溶解性であれば、従来の基本的めっき装置におけ
ると同様に陽極が溶出してめっき液濃度を維持する作用
を発揮する。その陽極のめつき面との対向面が位置決め
片によりつねに一定位置に保持されれば、めっき条件に
変動が生じないから、つねに安定しためつきを行なうこ
とができる。[Function] If the anode is soluble, the anode will elute and maintain the plating solution concentration in the same way as in conventional basic plating equipment. If the surface of the anode facing the plating surface is always held at a fixed position by the positioning piece, the plating conditions will not change, so that stable plating can be performed at all times.
[実施例] 以下に、本発明について実施例図面を参照し説明する。[Example] The present invention will be described below with reference to the drawings.
第1図は、本発明に係るめっき装置の具体的楕成を示す
説明斜視図である。FIG. 1 is an explanatory perspective view showing a specific configuration of a plating apparatus according to the present invention.
5は前記第3図において説明したものと同じ役目を果す
開ロバターン6を有する例えば弾性体よりなるマスクで
あり、図示されてはいないが被めっき材がとのマスク5
と重ね合せて移動せしめられ、開ロバターン6の開口面
よりめっき液の噴射かなされ、部分めっきされるもので
ある。Reference numeral 5 designates a mask made of an elastic material, for example, and has an opening pattern 6 that plays the same role as that explained in FIG.
The plating solution is sprayed from the opening surface of the open rotor 6 to perform partial plating.
7は前記マスク5を支えるマスク受けである。7 is a mask holder that supports the mask 5.
8はめっき液を噴射するノズル開口であり、めっき液供
給通路9より加圧供給されためつき液はノズル開口8よ
り前記開ロバターン6に向って噴射され、排出口13よ
り排出され、以下浄化循環せしめられる。Reference numeral 8 denotes a nozzle opening for spraying the plating solution, and the plating solution supplied under pressure from the plating solution supply passage 9 is injected from the nozzle opening 8 toward the opening rotor 6, and is discharged from the discharge port 13, and is then purified and circulated. I am forced to do it.
4.4は台座11内に保持されている溶解性電極であり
、本発明がその特徴点を構成するものである。すなわち
、従来のノズル噴射方式のめつき装置においては、陽極
は例えばグラファイトの如き不溶性であり、陰極である
被めっき材に対しめつき源側を陽極とするだけの役目を
果していた。4.4 is a dissolvable electrode held within the pedestal 11, and the present invention constitutes its characteristic point. That is, in the conventional nozzle injection type plating apparatus, the anode is made of insoluble material such as graphite, and serves only as an anode on the plating source side with respect to the material to be plated, which is the cathode.
本発明においては、溶解性電i4は、すでに説明した第
4図におけると同様にめっきすべき金属と同種の材料が
選択され、陽極を構成すると同時にめっき液中に溶出し
得るように構成される。この電極4が液中に溶出するこ
とにより、第4図において説明したと同じようにノズル
噴射方式であり乍らめっき液の濃度がそれによって維持
されるものである。In the present invention, the same material as the metal to be plated is selected for the soluble electrode i4 as in FIG. . As the electrode 4 dissolves into the solution, the concentration of the plating solution is maintained, even though it is a nozzle injection method as explained in FIG. 4.
電極4が溶出すれば、電極4そのものは次第に消耗され
ることになる。従って、電4N!4が固定状態にある場
合には、その消耗によって電極4の陰極との対向面が次
第に後退しその離間距離が増大する結果となり、液抵抗
がその分大きくなって、通常行なわれる定電圧めっき法
によった場合には前記電極の消耗に伴いめっき厚が薄く
なる結果となり、安定しためっきができなくなる。If the electrode 4 elutes, the electrode 4 itself will be gradually consumed. Therefore, electric 4N! If electrode 4 is in a fixed state, the surface of electrode 4 facing the cathode will gradually retreat due to its wear and the distance between them will increase, and the liquid resistance will increase accordingly, making it difficult to perform the conventional constant voltage plating method. In this case, the plating thickness becomes thinner as the electrode wears out, making it impossible to perform stable plating.
本発明においては、電極4の対向面をつねに一定に位置
決めするための位置決め片10.10が設けられており
、電極4の背面側にはバネ12゜12が配置されて、電
極4を前記位置決め片10゜10に向って押圧力を保持
するようバネ付勢が与えられる。In the present invention, a positioning piece 10.10 is provided for always positioning the opposing surface of the electrode 4 in a constant manner, and a spring 12.12 is arranged on the back side of the electrode 4 to keep the electrode 4 in the position. A spring bias is applied to maintain the pressing force towards the tabs 10°10.
このように構成すれば、電4f14が消耗してもその対
向面はつねに位置決め片io、ioの位置に存在するこ
ととなり、前記しためっき厚の変動の生ずるおそれはな
い。With this configuration, even if the electric current 4f14 is consumed, its opposing surface will always be present at the position of the positioning pieces io, io, and there is no risk of the above-mentioned variation in the plating thickness.
しかして、この位置決め片10については、電極4に全
面が連続的に当接した状態で構成することは好ましくな
い、そのように構成すると、電極はめっき面に対向した
面から選択的に溶出するために、その対向面が凹状とな
り、結果的にめっき面との距離が増大することとなり、
前記しためっき厚変動の原因となる。従って、この位置
決め片10.10については、第1図にみるように非連
続状に電極4に接触するよう間けつ的突起を形成し得る
針状、円錐状、角錐状といった形状をもってし、当該突
起がLow程度の間隔で電極4の表面に接するような構
成とすることが望ましい、このように構成することで、
電極4の対向面をほぼ均一に溶出させることができる6
一方、電極4の溶出速度の面から考えると、次式の通り
となる。Therefore, it is not preferable to configure the positioning piece 10 so that the entire surface is in continuous contact with the electrode 4. If configured in this way, the electrode will selectively elute from the surface facing the plated surface. Therefore, the opposing surface becomes concave, resulting in an increase in the distance from the plating surface.
This causes the variation in the plating thickness mentioned above. Therefore, as shown in FIG. 1, the positioning piece 10.10 has a shape such as a needle, a cone, or a pyramid that can form an intermittent protrusion so as to contact the electrode 4 discontinuously. It is desirable to have a configuration in which the protrusions touch the surface of the electrode 4 at intervals of about Low. By configuring it in this way,
The facing surface of the electrode 4 can be eluted almost uniformly.6 On the other hand, considering the elution rate of the electrode 4, the following equation is obtained.
電極溶出速度=AK/AAXめっき速度ここに AK
:めっき面積
AA:電極面積
めっき対象が半田めっきやNiめっき(リードフレーム
などにおける常用めっき)の場合には、工業的なめっき
速度は通常1〜15μm/ nin程度である。従って
、1日24時間をフル稼動するものとすれば、電極は1
.4〜21.6ms+/日の消耗となる。従って、電極
の実効面積がめつき面積と同程度であれば、1日の稼動
で電極は上記1.4〜21.6nn+厚程度溶出消耗す
ることになる。Electrode elution rate = AK/AAX plating rate here AK
: Plating area AA: Electrode area When the plating target is solder plating or Ni plating (commonly used plating in lead frames, etc.), the industrial plating speed is usually about 1 to 15 μm/nin. Therefore, assuming full operation 24 hours a day, one electrode
.. This results in consumption of 4 to 21.6 ms+/day. Therefore, if the effective area of the electrode is approximately the same as the plating area, the electrode will be eluted and consumed by the above-mentioned 1.4 to 21.6 nn + thickness in one day of operation.
被めっき材はリードフレームの如きものが一般となるか
ら、その大きさを考えるとめっき装置内の電極の厚さは
20au+程度か限界となる。頻繁な電極の取替えは生
産性を低下することになり、少なくとも1週間程度は連
続稼動させ得ることが望まれるから、それより計算する
と、溶解性電極4の実効面積は、被めっき面の面積の少
なくとも2値以上理想的にはIO倍程度となるように構
成してやることか望ましい。Since the material to be plated is generally something like a lead frame, considering its size, the thickness of the electrode in the plating apparatus is limited to about 20 AU+. Frequent replacement of electrodes will reduce productivity, and it is desirable to be able to operate continuously for at least one week. Based on this calculation, the effective area of the soluble electrode 4 is equal to the area of the surface to be plated. It is preferable to configure it so that it has at least two values or more, ideally about IO times.
第2図は、本発明に係る別な実施例を示す説明断面図で
ある。FIG. 2 is an explanatory sectional view showing another embodiment of the present invention.
本実線側においては、台座11および11−をめっき装
置の上下に配置し、溶解性電@!4.4をも上下に配置
し、被めっき材3の上下両面に同時にめっきするもので
ある。On the side shown by this solid line, the pedestals 11 and 11- are placed above and below the plating apparatus, and the soluble electrolyte @! 4.4 are also arranged above and below, and both the upper and lower surfaces of the material to be plated 3 are plated at the same time.
この実施例においては、ノズル開口8は下側にのみあり
、上側にはめっき液噴出のためのノズルがないが、リー
ドフレームの如き被めっき材はすでに打抜き加工した後
にめっきするものであり、めっき液は打抜かれた隙間を
抜けて反対側にまで十分に廻るために、ノズルはいずれ
か一方にあれば十分なためである。In this embodiment, the nozzle opening 8 is only on the lower side, and there is no nozzle on the upper side for spouting the plating solution. However, the material to be plated, such as the lead frame, has already been punched and then plated. This is because the liquid can pass through the punched gap and reach the opposite side, so it is sufficient to have a nozzle on either side.
噴射されためっき液は図の排出口13を通って排出され
、前記同様に循環される。しかして、この場合も、前述
同様の意味において電極の実効面積はめつき面積の2倍
以上好ましくは10倍程度となるように構成することが
望まれる。The injected plating solution is discharged through the outlet 13 shown in the figure and circulated in the same manner as described above. In this case as well, in the same sense as described above, it is desirable that the effective area of the electrode be configured to be at least twice the plating area, preferably about 10 times.
「発明の効果コ
以上の通り、本発明に係るめっき装置によれば、従来の
スポットめっき方式におけると同様のめつき位置精度が
保持され、かつその高速性能をそのまま維持しつつ、め
っき液のランニングコストの低減ならびに液管理の省力
化を達成できるものであり、部分めっきの対象分野が加
速度的に拡大しつつある折柄、その工業上の価値はきわ
めて大きなものができる。``Effects of the Invention'' As described above, the plating apparatus according to the present invention maintains the same plating position accuracy as in the conventional spot plating method, and maintains its high-speed performance while performing plating solution running. It can reduce costs and save labor in liquid management, and as the field of partial plating is expanding at an accelerating pace, its industrial value can be extremely large.
第1図は本発明に係る実施例の説明斜視図、第2図は他
の実施例の説明断面図、第3図は従来の部分めっき状況
を示す説明図、第4図は基本的めっき装置の構成を示す
説明図である。
3;被めっき材、
4:溶解性電極、
5:マスク、
6:開ロバターン、
7:マスク受、
8:ノズル開口、
10:位置決め片、
11、it−:台座、
12:バネ。
箔1図Fig. 1 is an explanatory perspective view of an embodiment according to the present invention, Fig. 2 is an explanatory sectional view of another embodiment, Fig. 3 is an explanatory diagram showing a conventional partial plating situation, and Fig. 4 is a basic plating apparatus. FIG. 2 is an explanatory diagram showing the configuration of. 3: material to be plated, 4: soluble electrode, 5: mask, 6: open lever pattern, 7: mask holder, 8: nozzle opening, 10: positioning piece, 11, it-: pedestal, 12: spring. Foil 1 diagram
Claims (3)
、それ以外の被めっき材の表面を遮へいマスクにより遮
へいして前記マスクの露出面に噴射ノズルよりめっき液
を噴射し部分めっきする装置において、前記被めっき陰
極材と相対応して設置される陽極をめっき液中に溶解可
能な溶解性電極をもって構成してなる高速部分めっき装
置。(1) A device that exposes only the plating surface of the material to be plated that will serve as the cathode, shields the other surface of the material to be plated with a shielding mask, and sprays the plating solution from a spray nozzle onto the exposed surface of the mask for partial plating. A high-speed partial plating apparatus comprising: an anode disposed in correspondence with the cathode material to be plated; and a soluble electrode capable of being dissolved in a plating solution.
を位置決めする非連続状の位置決め片があり、その反対
側には前記位置決め片に向って電極に付勢力を与えるバ
ネ片が設けられてなる請求項1記載のめつき装置。(2) On the side of the soluble electrode facing the surface to be plated, there is a discontinuous positioning piece for positioning the electrode, and on the opposite side there is a spring piece that biases the electrode toward the positioning piece. The plating apparatus according to claim 1, further comprising: a plating apparatus having a plating apparatus;
くとも2倍以上となるように構成してなる請求項1又は
2記載のめつき装置。(3) The plating apparatus according to claim 1 or 2, wherein the effective area of the soluble electrode is at least twice the area of the surface to be plated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31309388A JPH02159393A (en) | 1988-12-12 | 1988-12-12 | High-speed partial plating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31309388A JPH02159393A (en) | 1988-12-12 | 1988-12-12 | High-speed partial plating device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02159393A true JPH02159393A (en) | 1990-06-19 |
Family
ID=18037084
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP31309388A Pending JPH02159393A (en) | 1988-12-12 | 1988-12-12 | High-speed partial plating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02159393A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015151567A (en) * | 2014-02-13 | 2015-08-24 | 株式会社デンソー | Plating device and plating method |
CN109267141A (en) * | 2018-11-09 | 2019-01-25 | 江苏浩博塑业有限公司 | A kind of parcel plating anode water corridor device |
-
1988
- 1988-12-12 JP JP31309388A patent/JPH02159393A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015151567A (en) * | 2014-02-13 | 2015-08-24 | 株式会社デンソー | Plating device and plating method |
CN109267141A (en) * | 2018-11-09 | 2019-01-25 | 江苏浩博塑业有限公司 | A kind of parcel plating anode water corridor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6033540A (en) | Plating apparatus for plating a wafer | |
KR20050056263A (en) | Plating uniformity control by contact ring shaping | |
JP2014129592A (en) | Electrolytic plating shield board and electrolytic plating device possessing the same | |
JPH04263090A (en) | Device for electrocoating metal and anode assembly and anode for use in said device | |
KR101420779B1 (en) | By way of drum rotation portion of the connector pin electroplating unit | |
JPH02159393A (en) | High-speed partial plating device | |
JPS5827993A (en) | Method and device for plating of micropart | |
EP0330316B1 (en) | Selective plating apparatus for zone plating | |
JP5822212B2 (en) | Electrolytic plating equipment | |
KR101420780B1 (en) | By way of drum rotation pin connector accepts times stripper spray device of the plating and stripper spray methods | |
WO1995020064A1 (en) | Uniform electroplating of printed circuit boards | |
CN221052015U (en) | Electroplating jet flow box | |
JP2611431B2 (en) | Uniform partial electroplating method | |
JPH02101189A (en) | Method and device for precise electroplating | |
JPS61295395A (en) | Brush plating method for connector terminal | |
CN216074069U (en) | Electrode shielding plate structure for fan-out type panel level packaging electroplating | |
CN210104101U (en) | Point plating electrode module | |
JPH02153100A (en) | Barrel plating device | |
JPS5931882A (en) | Method and device for surface treatment in bath | |
CN116949524A (en) | Electroplating jet flow box | |
JPH0140115B2 (en) | ||
JPH04165094A (en) | Soluble-anode jet plating device | |
JPS62133100A (en) | Metal plating apparatus | |
JPH0536698A (en) | Jig for plating wafer | |
JPH0447036B2 (en) |