JPH02159343A - Electrode material - Google Patents
Electrode materialInfo
- Publication number
- JPH02159343A JPH02159343A JP31476988A JP31476988A JPH02159343A JP H02159343 A JPH02159343 A JP H02159343A JP 31476988 A JP31476988 A JP 31476988A JP 31476988 A JP31476988 A JP 31476988A JP H02159343 A JPH02159343 A JP H02159343A
- Authority
- JP
- Japan
- Prior art keywords
- electrode material
- oxide
- ruthenium
- electrode
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007772 electrode material Substances 0.000 title claims abstract description 26
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims abstract description 20
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052707 ruthenium Inorganic materials 0.000 claims abstract description 13
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910000420 cerium oxide Inorganic materials 0.000 claims abstract description 9
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims abstract description 9
- 230000003647 oxidation Effects 0.000 claims abstract description 8
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 8
- 239000000843 powder Substances 0.000 abstract description 12
- 239000000463 material Substances 0.000 abstract description 4
- 239000000203 mixture Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 238000007750 plasma spraying Methods 0.000 abstract description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 6
- 229910052735 hafnium Inorganic materials 0.000 description 6
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 6
- 229910052726 zirconium Inorganic materials 0.000 description 6
- 238000012360 testing method Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011812 mixed powder Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000929 Ru alloy Inorganic materials 0.000 description 1
- WYFAYEIJSVWCBA-UHFFFAOYSA-N [O-2].[Y+2] Chemical compound [O-2].[Y+2] WYFAYEIJSVWCBA-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、大気中、酸素雰囲気中などにおいて使用され
る放電電極材料に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a discharge electrode material used in the atmosphere, oxygen atmosphere, or the like.
［従来の技術］
大気中や酸素雰囲気中など酸化雰囲気中での切断に使用
される放電電極材料は、ハフニウムやジルコニウム等ご
く一部の金属材料に限られている。これらの他に導電性
や耐熱性に優れた種々の電極材料があるが、これらは酸
化雰囲気中では消耗が大きく使用できない。[Prior Art] Discharge electrode materials used for cutting in an oxidizing atmosphere such as air or oxygen atmosphere are limited to a few metal materials such as hafnium and zirconium. In addition to these, there are various electrode materials that have excellent conductivity and heat resistance, but these cannot be used because of their wear and tear in an oxidizing atmosphere.
［発明が解、決しようとする課題］
しかしながら、上記ハフニウムやジルコニウムは極めて
高価であり、人手も困難であるので、切断コストが高く
つくという問題点があった。最近切断装置の改良仁多様
化に加えて、人件費節減や量産化の目的で自動化やロボ
ット化が急速に進んでいるが、電極材料の改良が遅れて
いるため、切断装置の発展がこれによって制限を受けて
いた。[Problems to be Solved by the Invention] However, the hafnium and zirconium described above are extremely expensive and labor intensive, resulting in a problem of high cutting costs. Recently, in addition to improvements and diversification of cutting equipment, automation and robotization are rapidly progressing for the purpose of reducing labor costs and increasing mass production. was subject to restrictions.
このため、比較的安価で耐熱耐酸化性にすぐれた電極材
料を開発することが大きな課題となっている。Therefore, it has become a major challenge to develop electrode materials that are relatively inexpensive and have excellent heat and oxidation resistance.
本発明者らは上記のような事情から諸種研究を行ない、
すでにルテニウムと一酸化イットリウムの合金からなる
耐熱耐酸化性に富んだ電極材料を開発した（特願昭６２
−０４９８５５号）が、さらにすぐれた材料の開発中に
本願発明を完成したものである。The present inventors conducted various studies based on the above circumstances,
We have already developed an electrode material with excellent heat and oxidation resistance made of an alloy of ruthenium and yttrium monoxide.
-049855), the present invention was completed during the development of even better materials.
［課題を解決するための手段］
上記課題を解決するため、本発明は次のような電極材料
を提供する。[Means for Solving the Problems] In order to solve the above problems, the present invention provides the following electrode material.
すなわち、本発明に係る電極材料は、酸化イツトリウム
、酸化ランタンおよび酸化セリウムのうちの少なくとも
２種類を総量で２〜５０重量％含存し、残部がルテニウ
ムであることを特徴としている。この電極材料の成分の
うち、ルテニウムは融点が高く耐酸化性とくに高温耐酸
化性に優れている。また、酸化イツトリウム、酸化ラン
タンおよび酸化セリウム等いずれも放電特性に優れてお
り、これら酸化物とルテニウムを適当な割合で組み合わ
せることによって、酸化消耗と熱消耗が少なく、かつ安
定した放電性能を保つことが可能となるのである。上記
酸化イツトリウム（Ｙ２Ｏ３）、酸化ランタン（ＬａＯ
□、 Ｌａ、０３など）、酸化セリウム（（：ｅＯ２）
はいずれか２種を組合せて用いるのが効果的であったが
、場合によりては３種をすべて含んでもよい。ルテニウ
ムの好ましい含有量は重量比で５０％以上、より好まし
くは６０〜９５％であり、酸化イツトリウム、酸化ラン
タン、酸化セリウムからなる酸化物群の好ましい含有量
は総量で２〜５０％、より好ましくは５〜４０％である
。また、上記酸化物群中の各酸化物の配合比は、これら
酸化物の総量を１００ ｆｆｌｉ％とした場合に、いず
れか一方が２〜９８重量％であっても効果はｄられたが
、好ましく一方が５〜９５％、より好ましくは４０〜６
０％であった。この電極材料は、上記ルテニウムと酸化
物との合金であるが、その特性を損なわない範囲内で少
量の他の元素を添加してもよい。That is, the electrode material according to the present invention is characterized in that it contains at least two of yttrium oxide, lanthanum oxide, and cerium oxide in a total amount of 2 to 50% by weight, with the remainder being ruthenium. Among the components of this electrode material, ruthenium has a high melting point and excellent oxidation resistance, particularly high-temperature oxidation resistance. In addition, yttrium oxide, lanthanum oxide, cerium oxide, etc. all have excellent discharge characteristics, and by combining these oxides and ruthenium in an appropriate ratio, oxidation consumption and thermal consumption are low, and stable discharge performance can be maintained. becomes possible. The above yttrium oxide (Y2O3), lanthanum oxide (LaO
□, La, 03, etc.), cerium oxide ((:eO2)
Although it has been effective to use any two types in combination, in some cases, all three types may be included. The preferred content of ruthenium is 50% or more, more preferably 60 to 95% by weight, and the preferred content of the oxide group consisting of yttrium oxide, lanthanum oxide, and cerium oxide is 2 to 50%, more preferably in total. is 5-40%. In addition, even if the blending ratio of each oxide in the above oxide group was 2 to 98% by weight, when the total amount of these oxides was 100 ffli%, the effect was d. Preferably one is 5-95%, more preferably 40-6
It was 0%. This electrode material is an alloy of the above-mentioned ruthenium and an oxide, but small amounts of other elements may be added within a range that does not impair its properties.
この電極材料は例えば次のような方法で製造することが
できる。まず原料となるルテニウム粉末（例えば平均粒
度１５−２０μｍ）に酸化物（酸化イツトリウム、酸化
ランタン、酸化セリウムのうちの２ＨＡ以上）の粉末（
例えば平均粒度５−６μｍ）を適当な配合比で添加混合
し、得られた混合粉末を所定形状に加圧成形する。This electrode material can be manufactured, for example, by the following method. First, ruthenium powder (for example, average particle size 15-20 μm) as a raw material is mixed with powder of oxide (2HA or more of yttrium oxide, lanthanum oxide, and cerium oxide) (
For example, particles having an average particle size of 5 to 6 μm are added and mixed in an appropriate blending ratio, and the resulting mixed powder is press-molded into a predetermined shape.
このようにして得られた圧粉体を常法に従って焼結し、
所望の電極材料とする。The green compact thus obtained is sintered according to a conventional method,
Use the desired electrode material.
以下、本発明の実施例について説明する。Examples of the present invention will be described below.
［実施例］
所定の配合比で配合したルテニウム粉末と２種の酸化物
粉末をシェーカーミキサーにて３０分分間式混合した。[Example] Ruthenium powder and two types of oxide powders blended at a predetermined blending ratio were mixed for 30 minutes using a shaker mixer.
原料として用いた粉末の平均粒度は、ルテニウム粉末が
１５．０ミクロン、酸化イツトリウム粉末が５．７ミク
ロン、酸化ランタン粉末が６．０ミクロン、酸化セリウ
ム粉末が５．９ ミクロンであった。なお、純度はいず
れも９９．９％以上であった。この混合粉末にバインダ
ーを添加して造粒した。得られたルテニウム（Ｒｕ）−
酸化物混合粉末の顆粒を金型内で加圧して直径２ ｍａ
ｄ、長さ４ＩＩＩ１１の圧粉体（圧粉密度は理論密度の
６５〜７５％）としたのち、常法に従って水素気流中で
予焼結（５００”ＣＸ１５分）及び本焼結（２１００℃
×３０分）を行なつて直径１．８ｍｍ長さ３．５ｍｏ＋
の焼結体からなる電極材料とした。The average particle size of the powders used as raw materials was 15.0 microns for the ruthenium powder, 5.7 microns for the yttrium oxide powder, 6.0 microns for the lanthanum oxide powder, and 5.9 microns for the cerium oxide powder. In addition, the purity was 99.9% or more in all cases. A binder was added to this mixed powder and granulated. The obtained ruthenium (Ru)-
Granules of oxide mixed powder are pressed in a mold to a diameter of 2 ma.
d. After making a green compact with a length of 4III11 (green density is 65 to 75% of the theoretical density), pre-sintering (500"CX 15 minutes) in a hydrogen stream and main sintering (2100 ° C.
x 30 minutes) to create a diameter of 1.8mm and a length of 3.5mo+
The electrode material was made of a sintered body of
得られた電極材料を銅製のチップホルダーに圧入して陰
極とし、水冷銅版を陽極として第１図および第２図に示
す試験装置を用いてアークテストを行ない、消耗量を調
べた結果は第３図および第４図に示すとおりであった。The obtained electrode material was press-fitted into a copper chip holder to serve as a cathode, and a water-cooled copper plate was used as an anode to conduct an arc test using the test equipment shown in Figures 1 and 2. It was as shown in the figure and FIG.
図中、１はトーチ、２は電極、２ａは電極材料、３は水
冷銅板、４は切断電源、５はエアレギュレータ、６はコ
ンプレッサ、７はノズル、８はプラズマアークである。In the figure, 1 is a torch, 2 is an electrode, 2a is an electrode material, 3 is a water-cooled copper plate, 4 is a cutting power source, 5 is an air regulator, 6 is a compressor, 7 is a nozzle, and 8 is a plasma arc.
第３図の試験条件は電流２５Ａ、電圧９５Ｖ、エアー圧
力３．５にｇ／ｃｍ２．層間５分間であった。消耗１は
立方ミリメートル（Ｉ！１Ｉ１１３）で表されている。The test conditions in Figure 3 are current 25A, voltage 95V, air pressure 3.5g/cm2. The interlayer time was 5 minutes. Consumption 1 is expressed in cubic millimeters (I!1I113).
また、第４図の試験条件は、５秒間通電し、１５秒間通
電を停止するサイクルを縁り返した。図中、ＡはＲｕ−
Ｃｅ０２−Ｌａ２Ｏ３（Ｃｅ０２ ： Ｌａｚ０３ ＝
５０ ： ５０）、ＢはＲｕ−Ｙ２Ｏ３−Ｃｅ０２（
ＹｚＯ３： Ｃｅ０２＝５０ ： ５０） 、 ＣはＲ
ｕ−Ｙｚｏ３−Ｌａ２０ｉ（Ｙ２Ｏ３： Ｌａ２Ｏ３＝
５０ ： ５０） 、 ＤはＲｕ−１８％Ｙ２０．−１
０％１．ａ２０３ 、ＥはＲｕ−１８％Ｙ２Ｏ３−１０
％ＣｃＯ□をそれぞれあられす。図中には、比較例とし
てジルコニウム（２「）、ハフニウム（１１ｒ）および
Ｒｕ−４０％Ｙ２０．のデータを併せて記入した。第３
図および第４図から分るとおり、本発明にかかる電極材
料は、従来のジルコニウムやハフニウム等の電極材料に
くらべてはるかにアークスタート性が良く、しかもその
消耗量が少い。また、この電極材料の製造は比較的容易
であり、原料の入手性にも問題はない。しかも、粉末焼
結体をそのまま電極として使用することができるため、
材料費、加工費の面で経済的である。この電極材料は、
安定したプラズマアークが得られ、消耗が少なく、切断
電極として用いた場合に切断面が直線的かつ滑らかで、
切断中が小さく、切断スピードが速かった。また、切断
時の熱影響による変色もごく狭い範囲にとどまっていた
。Further, the test conditions shown in FIG. 4 were a cycle in which electricity was applied for 5 seconds and electricity was stopped for 15 seconds. In the figure, A is Ru-
Ce02−La2O3(Ce02 : Laz03 =
50: 50), B is Ru-Y2O3-Ce02 (
YzO3: Ce02=50:50), C is R
u-Yzo3-La20i(Y2O3: La2O3=
50:50), D is Ru-18%Y20. -1
0%1. a203, E is Ru-18% Y2O3-10
%CcO□ respectively. In the figure, data for zirconium (2''), hafnium (11r), and Ru-40% Y20. are also written as comparative examples.
As can be seen from the figures and FIG. 4, the electrode material according to the present invention has far better arc starting properties than conventional electrode materials such as zirconium and hafnium, and also has less wear. Furthermore, the production of this electrode material is relatively easy, and there is no problem with the availability of raw materials. Moreover, since the powder sintered body can be used as an electrode as it is,
It is economical in terms of material costs and processing costs. This electrode material is
A stable plasma arc is obtained, there is little wear and tear, and the cutting surface is straight and smooth when used as a cutting electrode.
The cutting area was small and the cutting speed was fast. In addition, discoloration due to heat effects during cutting remained within a very narrow range.
［発明の効果］
以上の説明から明らかなように、本発明にかかる電極材
料は、従来のジルコニウムやハフニウムよりも入手性に
優れ、これらにくらべて約２倍から３倍の耐消耗性を有
するとともに、安定したアーク特性を得ることのできる
優れたものである。この電極材料は、エアプラズマ切断
用、プラズマ溶射用、耐熱耐酸化電極用等として使用し
ても充分にその特性が発揮できるものである。[Effects of the Invention] As is clear from the above description, the electrode material according to the present invention is more readily available than conventional zirconium and hafnium, and has wear resistance that is about 2 to 3 times higher than that of conventional zirconium and hafnium. At the same time, it is an excellent product that can provide stable arc characteristics. This electrode material can sufficiently exhibit its characteristics even when used for air plasma cutting, plasma spraying, heat-resistant and oxidation-resistant electrodes, etc.
第１図および第２図は試験装置の説明図、第３図は組成
と耐消耗性の関係を表わすグラフ、第４図はアークスタ
ート回数と消耗量の関係をあられすグラフである。
１・・・トーチ
２・−電極
３・・・水冷銅板1 and 2 are explanatory diagrams of the test equipment, FIG. 3 is a graph showing the relationship between the composition and wear resistance, and FIG. 4 is a graph showing the relationship between the number of arc starts and the amount of wear. 1... Torch 2 - Electrode 3... Water-cooled copper plate
Claims (1)
ウムのうちの少なくとも２種類を総量で２〜５０重量％
含有し、残部がルテニウムである耐熱耐酸化性に富んだ
放電電極材料。(1) At least two types of yttrium oxide, lanthanum oxide, and cerium oxide in a total amount of 2 to 50% by weight
A discharge electrode material with high heat and oxidation resistance, with the remainder being ruthenium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31476988A JPH02159343A (en) | 1988-12-12 | 1988-12-12 | Electrode material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31476988A JPH02159343A (en) | 1988-12-12 | 1988-12-12 | Electrode material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02159343A true JPH02159343A (en) | 1990-06-19 |
Family
ID=18057366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31476988A Pending JPH02159343A (en) | 1988-12-12 | 1988-12-12 | Electrode material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02159343A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9012030B2 (en) | 2002-01-08 | 2015-04-21 | Applied Materials, Inc. | Process chamber component having yttrium—aluminum coating |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62286698A (en) * | 1986-06-03 | 1987-12-12 | Toho Kinzoku Kk | Tungsten electrode material |
| JPS63216943A (en) * | 1987-03-03 | 1988-09-09 | Toho Kinzoku Kk | Electrode material |
-
1988
- 1988-12-12 JP JP31476988A patent/JPH02159343A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62286698A (en) * | 1986-06-03 | 1987-12-12 | Toho Kinzoku Kk | Tungsten electrode material |
| JPS63216943A (en) * | 1987-03-03 | 1988-09-09 | Toho Kinzoku Kk | Electrode material |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9012030B2 (en) | 2002-01-08 | 2015-04-21 | Applied Materials, Inc. | Process chamber component having yttrium—aluminum coating |
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