JPH0215864U - - Google Patents
Info
- Publication number
- JPH0215864U JPH0215864U JP9389388U JP9389388U JPH0215864U JP H0215864 U JPH0215864 U JP H0215864U JP 9389388 U JP9389388 U JP 9389388U JP 9389388 U JP9389388 U JP 9389388U JP H0215864 U JPH0215864 U JP H0215864U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- polishing
- water
- substrate
- polishing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9389388U JPH0215864U (fr) | 1988-07-14 | 1988-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9389388U JPH0215864U (fr) | 1988-07-14 | 1988-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0215864U true JPH0215864U (fr) | 1990-01-31 |
Family
ID=31318371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9389388U Pending JPH0215864U (fr) | 1988-07-14 | 1988-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0215864U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04129669A (ja) * | 1990-09-19 | 1992-04-30 | Mitsubishi Materials Corp | ウェーハの超精密研磨方法及び研磨装置 |
| JPH05132136A (ja) * | 1991-11-08 | 1993-05-28 | House Food Ind Co Ltd | 水流式固形物切り出し装置 |
-
1988
- 1988-07-14 JP JP9389388U patent/JPH0215864U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04129669A (ja) * | 1990-09-19 | 1992-04-30 | Mitsubishi Materials Corp | ウェーハの超精密研磨方法及び研磨装置 |
| JPH05132136A (ja) * | 1991-11-08 | 1993-05-28 | House Food Ind Co Ltd | 水流式固形物切り出し装置 |