JPS6343428U - - Google Patents
Info
- Publication number
- JPS6343428U JPS6343428U JP13691186U JP13691186U JPS6343428U JP S6343428 U JPS6343428 U JP S6343428U JP 13691186 U JP13691186 U JP 13691186U JP 13691186 U JP13691186 U JP 13691186U JP S6343428 U JPS6343428 U JP S6343428U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- verneuil
- supply means
- manufacturing apparatus
- processing liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims 2
- 238000001035 drying Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13691186U JPS6343428U (fr) | 1986-09-05 | 1986-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13691186U JPS6343428U (fr) | 1986-09-05 | 1986-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6343428U true JPS6343428U (fr) | 1988-03-23 |
Family
ID=31040469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13691186U Pending JPS6343428U (fr) | 1986-09-05 | 1986-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343428U (fr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0475328A (ja) * | 1990-07-18 | 1992-03-10 | Toshiba Corp | 半導体の処理方法およびその装置 |
| WO1995015006A1 (fr) * | 1993-11-22 | 1995-06-01 | Tadahiro Ohmi | Appareil de lavage, appareil de production de semi-conducteurs et chaine de production de semi-conducteurs |
| JP2017092397A (ja) * | 2015-11-16 | 2017-05-25 | 株式会社東京精密 | ウェハ搬送装置 |
-
1986
- 1986-09-05 JP JP13691186U patent/JPS6343428U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0475328A (ja) * | 1990-07-18 | 1992-03-10 | Toshiba Corp | 半導体の処理方法およびその装置 |
| WO1995015006A1 (fr) * | 1993-11-22 | 1995-06-01 | Tadahiro Ohmi | Appareil de lavage, appareil de production de semi-conducteurs et chaine de production de semi-conducteurs |
| JP2017092397A (ja) * | 2015-11-16 | 2017-05-25 | 株式会社東京精密 | ウェハ搬送装置 |