JPH0215862U - - Google Patents
Info
- Publication number
- JPH0215862U JPH0215862U JP9389288U JP9389288U JPH0215862U JP H0215862 U JPH0215862 U JP H0215862U JP 9389288 U JP9389288 U JP 9389288U JP 9389288 U JP9389288 U JP 9389288U JP H0215862 U JPH0215862 U JP H0215862U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- holder
- semiconductor substrates
- water
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9389288U JPH0215862U (en, 2012) | 1988-07-14 | 1988-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9389288U JPH0215862U (en, 2012) | 1988-07-14 | 1988-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0215862U true JPH0215862U (en, 2012) | 1990-01-31 |
Family
ID=31318370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9389288U Pending JPH0215862U (en, 2012) | 1988-07-14 | 1988-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0215862U (en, 2012) |
-
1988
- 1988-07-14 JP JP9389288U patent/JPH0215862U/ja active Pending
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