JPH0215735U - - Google Patents
Info
- Publication number
- JPH0215735U JPH0215735U JP9377588U JP9377588U JPH0215735U JP H0215735 U JPH0215735 U JP H0215735U JP 9377588 U JP9377588 U JP 9377588U JP 9377588 U JP9377588 U JP 9377588U JP H0215735 U JPH0215735 U JP H0215735U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic chuck
- electrode
- ground potential
- chuck device
- insulating member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Wire Bonding (AREA)
- Electron Beam Exposure (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988093775U JPH0717153Y2 (ja) | 1988-07-15 | 1988-07-15 | 静電チャック装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988093775U JPH0717153Y2 (ja) | 1988-07-15 | 1988-07-15 | 静電チャック装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0215735U true JPH0215735U (fr) | 1990-01-31 |
| JPH0717153Y2 JPH0717153Y2 (ja) | 1995-04-19 |
Family
ID=31318250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988093775U Expired - Lifetime JPH0717153Y2 (ja) | 1988-07-15 | 1988-07-15 | 静電チャック装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0717153Y2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103222043A (zh) * | 2010-09-08 | 2013-07-24 | 恩特格林斯公司 | 一种高传导静电夹盘 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63142654A (ja) * | 1986-12-04 | 1988-06-15 | Sumitomo Metal Ind Ltd | 静電吸着装置 |
-
1988
- 1988-07-15 JP JP1988093775U patent/JPH0717153Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63142654A (ja) * | 1986-12-04 | 1988-06-15 | Sumitomo Metal Ind Ltd | 静電吸着装置 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103222043A (zh) * | 2010-09-08 | 2013-07-24 | 恩特格林斯公司 | 一种高传导静电夹盘 |
| JP2013542590A (ja) * | 2010-09-08 | 2013-11-21 | インテグリス・インコーポレーテッド | 高導電性静電チャック |
| KR20140012613A (ko) * | 2010-09-08 | 2014-02-03 | 엔테그리스, 아이엔씨. | 고 전도성 정전 척 |
| CN103222043B (zh) * | 2010-09-08 | 2016-10-12 | 恩特格林斯公司 | 一种高传导静电夹盘 |
| US9692325B2 (en) | 2010-09-08 | 2017-06-27 | Entegris, Inc. | High conductivity electrostatic chuck |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0717153Y2 (ja) | 1995-04-19 |