JPH0215684A - Gas cooler of high speed axial flow type gas laser device - Google Patents

Abstract

PURPOSE:To decrease the pulsation of laser rays caused by that of laser gas by a method wherein two or more pressure attenuating chambers are provided to an output side inside a case of a heat exchanger. CONSTITUTION:A positive displacement blower 6 provided with vanes 6a and 6b is provided onto a right side face of a cooler 7B of a first stage, where a piping 8 of laser gas 5 sent from a laser oscillator is connected to the upper part of the cooler 7B. And, a cooler 7A of a second stage is connected to a right side of the blower 6, and a piping 8B, which is connected to a discharge section of a gas laser device, is connected to the upper part of the cooler 7A. A hole 7A1, which is connected to the blower 6, is provided to the side wall of a cuboid case 11 opposite to the center of the case 11, and heat exchangers 12, provided with coolant pipings 16 extending from it, are housed in the case 11 in such a manner that they are positioned on a right and a left side of the hole 7A1 respectively. And, a partitioning plate 12, which partitions the inside of the case 11 longitudinally and has a gap 14 at its lower end, is provided outside the heat exchangers 12, pressure attenuating chambers 13 are provided to the right and left side of the case 11, and the lower ends of pipings 15 connected to the discharge section of the laser oscillator are connected with the upper wall of the chambers 13.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a gas cooler for cooling laser gas of a high-speed axial flow gas laser device.

(Prior Art) In FIG. 3, which shows a gas circulation system diagram of a conventional high-speed axial flow type gas laser device, inside the discharge tube 1, a resonator mirror 9 is installed at the right end, and a resonator mirror 10 is installed at the left end. Between the resonator mirrors 9 and 10, a cathode 2A and anodes 3A and 3B are arranged in order from the right side.

The cathodes 2B, 2G, the anodes 3C, 3D, and the cathode 2D are attached to form four discharge parts 4 with four pairs of discharge electrodes, and excite the laser gas 5 sealed inside the discharge tube 1 to emit laser light. It is occurring.

Further, below the discharge tube 1 in the drawing, there is a pair of pipes 8 whose upper ends are connected between the anodes 3A and 3B and between the anodes 30 and 3D of the discharge tube 1.
A cooler 7B is provided, the lower end of which is connected to the inlet side of the cooler 7B, the outlet side of this cooler 7B is connected to the inlet side of the positive displacement fan 6, and the outlet side of this positive displacement fan is connected to the input side of the cooler 7A. connected to the side. Also, on the outlet side of this cooler 7A, there are pipes 8 on the left and right.
One end of this pipe 8B is connected, and the other side of this pipe 8B is branched into a single character shape to the right of the cathode 2A of the discharge tube 1 and to the left of the cathode 2B.

It is connected to the right side of the cathode 2C and to the left side of the cathode 2D.

In the high speed axial flow gas laser device thus closed, the laser gas 5 heated in the discharge section 4 passes through the heat exchanger 7B, is sent to the cooler 7A by the positive displacement fan 6, is further cooled, and passes through the pipe 8B. It is sent into the discharge tube 1.

(Problem to be Solved by the Invention) Then, the laser gas sent into the discharge section 4 is compressed by the rotation of the blades 6a of the positive displacement air blower (■), and when the two blades 6a rotate once, it is compressed once and sent out. Therefore, the laser gas 5 in the discharge section 4 also pulsates, and as a result, the laser light emitted from the oscillator also pulsates. If this laser beam is used, for example, for cutting, the cut surface will become uneven and lose the characteristics of the axial-flow type laser beam. Therefore, it is conceivable to reduce the pulsation by changing the capacity type pressure feeder 6 to a turbo type, but this cannot be used due to both the lifespan and 11.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a gas cooler for a high-speed axial flow gas laser device that can easily reduce the pulsation of laser light due to the pulsation of the laser beam amount.

[Structure of the Invention] (Means and Effects for Solving the Problems) The present invention is directed to the output side of a cooler connected to at least the output side of a positive displacement ventilator which sends laser gas to a discharge section of a high-speed axial flow gas laser device. 7. Gas cooling of a high-speed axial flow gas laser device in which a pressure damping chamber is provided through a partition plate to reduce the pulsation of the laser gas that pulsates due to the compression of the positive displacement blower, thereby reducing the pulsation of the output laser light. I'll put it in a container.

(Example) Hereinafter, one example of the gas cooler of the gas laser device of the present invention will be described with reference to the drawings.

FIG. 1 is a front view of a gas cooler of a gas laser device of the present invention, and FIG. 2 is a sectional view taken along the line AA in FIG. 1.

In FIG. 1, on the right side of the first stage cooler 7B, to which the piping 8 for the laser gas 5 sent from the laser generator (not shown) is connected, there are two internal blades 6a and 5.
Positive displacement f with b! Machine A 6 is connected. On the right side of this positive displacement blower 6, there is a second stage cooler 7A.
A pipe 8B that is connected to a discharge section of a gas laser device (not shown) is connected to the upper part of the cold IJ device 7A.

Next, in FIG. 2 showing the A-A cross section of the second-stage cooler 7A in FIG.
In other words, a hole 7A1 communicating with the positive displacement fan 6 is provided in the side wall (lower side of the paper), and the case 1 on the left and right of this hole 7A+ is provided.
1 includes a heat exchanger 1 with refrigerant pipes 16 protruding upward and downward.
2 are stored in each. And this heat exchanger 1
On the outside of 2, there is a gap 14 that vertically partitions the inside of the box 11 and at the lower end.
A pressure damping chamber 13 is provided at the left and right ends of the box body 11, and a piping 1 connected to the discharge part of the laser emitting device (not shown) is provided on the left and right soil walls.
The lower end of 5 is connected.

In the gas cooler 7A of the gas laser apparatus having such a configuration, the laser gas 5 pulsating and sent into the box body 11 from the positive displacement blower 6 is compressed by the positive displacement blower 6 and is pulsated and warmed. After being cooled and depressurized by the heat exchanger 12, it passes through the gap 14a and enters the pressure damping chamber 13 with a wide flow path.
The pulsations are attenuated and the laser beam is sent to a discharge section of a gas laser oscillator (not shown).

Therefore, the laser light emitted from the oscillator (not shown) does not pulsate, and has no irregularities on the cut surface, making it possible to perform precise processing as is inherent to axial flow laser light.

Note that a pressure damping chamber 13 is provided to effectively damp pulsation.
The cross-sectional area of the flow path is determined using the following equations (1) and (2).

FXL=50~90...(1)m=81
/32 >'I O...(2) Here, F is the pulsation frequency (Hz), 1 is the length of the pressure damping chamber 13 (m), and S+
is the cross-sectional area of the pipe 15 (17L2), and 32 is the cross-sectional area of the pressure damping chamber 13 (m2).

In the above embodiment, the pressure damping chamber 13 is provided only in the cooler 7A on the output side of the blower, but it may also be provided in the cooler 7B on the input side of the blower, in which case the gas It has the advantage of not getting colder and reducing pulsation caused by the suction of the blower.

[Effects of the Invention] As described above, according to the gas cooler of the gas laser device of the present invention,
The high-speed axial flow type is used as the discharge part of the laser device.A pressure attenuator is provided via a partition plate at least on the output side of the cooler of the positive displacement blower that sends the laser gas, and the positive displacement blower cools the pulsating laser gas. , so you can easily reduce the pulsation of the laser output without installing a separate Vi device.
A gas cooler for a gas laser device that can take advantage of the features of an axial laser beam can be installed.

[Brief explanation of the drawing]

FIG. 1 is a front view showing an embodiment of a scum cooler of a high-speed axial gas laser device of the present invention, FIG. 2 is a cross-sectional view taken along line A-A in FIG. 1 showing essential parts of the present invention, and FIG. is a diagram showing a conventional gas circulation system diagram. 1...Discharge tube 6...8 Volume feeder III 7A, 7B...Heat exchanger 13...Pressure attenuator (8733) agent

Claims (1)

[Scope of Claims] A gas laser device in which laser gas in a high-speed axial flow type gas laser discharge tube is circulated through a cooler connected to the output side of a positive displacement blower connected by piping, comprising: a box for the heat exchanger; A cooler for a high-speed axial flow gas laser device, characterized by having a plurality of pressure damping chambers provided on the output side inside the body.