JPH02155590A - Optical head for laser beam machine - Google Patents

Abstract

PURPOSE:To improve the laser beam machining accuracy by attaching a support for holding a lens and a nozzle tip to a turning axis so that its position can be adjusted, so that a mirror can be adjusted independently around two axes, and providing an assist hose, a cooling water hose and an electric wire in the cover. CONSTITUTION:In an optical head 17 of a laser beam machine, a supporting axis 22, a turning axis 30, a nozzle chip 19, a first and a second mirrors 43, 44 for reflecting a laser light, and a lens 45 for condensing the laser light which is reflected are provided on a body support 20. Subsequently, a support 37 for holding the lens 45 and the nozzle tip 19 is attached to the turning axis 30 so that its position can be adjusted in the axial direction of the nozzle tip 19. Also, the mirrors 43, 44 can be adjusted independently around two axes. Moreover, an assist hose, a cooling water hose and an electric wire are provided in a cover 63. In such a way, the laser beam machining accuracy can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to an optical head for a laser processing machine.

<Prior Art> No. 6 is a front view of an optical head of a laser processing machine according to a conventional example, and FIG. 7 is a cross-sectional view of the mirror adjustment mechanism thereof, and FIG. 7 is a side view thereof.

As shown in FIG. 6, in the conventional optical head, a support shaft 102 is rotatably supported around an axis perpendicular to a main body support 101 (in the C-axis direction), and a drive device 103 thereof consisting of a motor and a speed reducer is supported. It is provided. This support shaft 10
A rotating shaft 104 is supported rotatably around a horizontal axis (in the A-axis direction), and a driving device 105 is also provided for the rotating shaft 104, which also consists of a motor and a speed reducer.
04 has a nozzle tip 106 in a direction perpendicular to its axis.
is installed. The laser light emitted from the oscillator is reflected by the first and second mirrors 107 and 108, focused by the lens 109, and irradiated outward from the nozzle chip 106.

On the other hand, assist gas is supplied to the nozzle tip 106 via an assist gas hose 110, and the mirror 1
Cooling water is supplied to the lenses 07 and 108 and the lens 109 via a cooling water hose 111.

Further, as shown in FIG. 7, the mirror 107 (108) is fixed to a holding table 112.

This R joint 112 is attached to the support shaft 102 (or rotation shaft 104) at its flange portion 113,
The holding base 112 is swingable about a fulcrum 114, and the mirror 107 is adjusted in position by moving a plurality of adjustment screws 115 back and forth, and is fixed at a desired position with a lock screw 116 and a retaining screw 117. It has become so.

<Problems to be Solved by the Invention> In the conventional optical head described above, piping and wiring such as the assist gas hose 110, the cooling water hose 111, and electric wires are wound into a coil shape and arranged outside the device so as to be expandable and contractible. As a result, not only does the device become larger as a whole, but there is also the risk that the pipes and wires may be caught on external objects, resulting in pipe breakage or disconnection.

Furthermore, when adjusting the mirrors 107 and 108, since the mirrors 107 and 108 move in any direction around the fulcrum 114, the mirror 1
The movements of 07 and 108 influence each other and become a composite movement. Therefore, the adjustment work is troublesome, requires skill, and requires a lot of time.

On the other hand, in the conventional optical head, since the nozzle tip 106 cannot move independently, it cannot cope with changes in the distance from the workpiece, leading to a decrease in processing accuracy.

The present invention is intended to solve these problems in the optical head of a conventional laser processing machine, and aims to provide an optical head that is small and compact and can perform high-precision processing.

Means for Solving the Problems> An optical head of a laser processing machine according to the present invention for achieving the above-mentioned object has a structure including a main body support, a support shaft attached to the main body support so that its rotational position can be adjusted. , a rotating shaft attached to the support shaft so that its rotational position can be adjusted;
The nozzle tip attached to the rotation shaft, the support shaft and the rotation! fill! a first mirror disposed at the intersection of the axes of the nozzle tip to reflect the laser beam; and a first mirror disposed at the intersection of the axes of the rotation axis and the nozzle tip to reflect the laser beam. In an optical head of a laser processing machine, the optical head includes a second reflecting mirror and a lens arranged on the axis of the nozzle chip and condensing the laser beam reflected by the second mirror, wherein the lens and the nozzle The tip is held by a nozzle tip support, and the nozzle tip support is attached to the rotating shaft so that its position can be adjusted in the axial direction of the nozzle tip, while the mirror can be adjusted independently around two orthogonal axes. and an assist gas hose, a cooling water hose, and an electric wire are disposed within a cover that covers the support shaft and the rotation shaft.

Action> By moving the nozzle tip support relative to the rotation axis so that the distance between the workpiece and the nozzle tip is constant,
Machining accuracy improves.

Further, by adjusting the mirror in two directions independently, the work can be made easier and accuracy can be improved.

On the other hand, by placing piping and wiring inside the cover, you can prevent them from interfering with external objects.

Embodiment One embodiment of the present invention will now be described in detail with reference to the drawings.

FIG. 1 is a sectional view of essential parts of an optical head according to an embodiment of the present invention, FIG. 2 is a partially cutaway side view thereof, FIG. 3 is a sectional view taken along line II in FIG. 2, and FIG. IV-1t/cross-sectional view of Figure 1,
FIG. 5 is a perspective view of the entire laser processing machine.

As shown in FIG. 5, in this laser processing machine 11, a table 13 is mounted on a bed 12 so as to be slidable in the horizontal X-axis direction, and columns 14 stand on both sides of the ped 12 to sandwich it. The upper ends of both columns 14 are connected by a cross beam 15, and this cross beam 15
A processing head 16 is mounted to be slidable in the horizontal Y-axis direction, which is perpendicular to the X-axis direction. An optical head 17 is attached to this processing head 16 so as to be slidable in the vertical z-axis direction. Then, the optical head 17 is moved in the x, y, and z axes directions with respect to the workpiece 18 placed on the table 13 to position it at a desired position, and the laser beam is directed from the optical head 17 toward the workpiece 18. The workpiece 18 is processed by irradiation.

Next, this optical radar 17 will be explained in detail with reference to FIGS. 1 to 4. The optical head 17 has a nozzle chip 1 at the tip.
9, and the nozzle tip 19 can be moved in the C-axis direction around the Z-axis, the A-axis direction around a horizontal axis perpendicular to the C-axis, and the W-axis direction parallel to the laser beam irradiation direction. It is possible.

As shown in FIG. 2, the bearing 2 is attached to the main body support 20.
1, a hollow support shaft 22 is rotatably supported in the C-axis direction. The main body sabot 20 is supported by the processing head 16 so as to be movable in the z-axis direction. A driven gear 23 is fixed to the outer periphery of this support shaft 22, and a C-axis motor 2 fixed to the main body support 20
A drive gear 27 connected to the drive shaft 25 of No. 4 via a harmonic drive reducer 26 meshes with the driven float 23. Therefore, the support shaft 22 is rotationally driven in the C-axis direction with respect to the main body support 20 by the operation of the C-axis motor 24.

As shown in FIG. 1, a boss portion 28 is formed at the lower end of the support shaft 22 and is perpendicular to the axial direction of the shaft. is rotatably supported in the A-axis direction. A slave gear 31 is fixed to the outer periphery of the rotation shaft 30, and the support shaft 22
The drive shaft 33 of the A-axis motor 32 is fixed to the boss portion 28 of
A drive gear 35 connected to this slave via a harmonic drive reducer 34 is connected to this slave! It meshes with the 81I gear 31. Therefore, by the operation of the A-axis motor 32, the rotating shaft 3
0 is rotationally driven in the A-axis direction with respect to the support shaft 22.

Further, a cylindrical portion 36 is provided on the rotating shaft 30 in a direction perpendicular to the axial direction, and a hollow nozzle tip support 37 having a nozzle tip 19 at the tip of the cylindrical portion 36 is provided in the W-axis direction. It is slidably supported. As shown in FIG. 3, a rack 38 is formed along the axial direction on the outer periphery of the nozzle tip support 37, and a rack 38 is formed along the axial direction of the nozzle tip support 37. /)
- A drive gear 42 connected via a monodrive reduction gear 8!41 meshes with this rack 38.

Therefore, when the W-axis motor 39 is operated, the nozzle tip support 37 moves in the −W-axis direction with respect to the cylindrical portion 36 of the rotating shaft 30.

On the other hand, a laser beam from an oscillator built into the processing head 16 enters the optical head 17 from the center of the support shaft 22, and as shown in FIG. The light is reflected by the first and second mirrors 43 and 44, focused by the lens 45 in the nozzle chip support 37, and irradiated from the nozzle chip 19.

A first plate that reflects the laser beam that has passed through the support shaft 22.
As shown in FIG. 1, the mirror 43 is held by a holder 46 fixed to the boss portion 28 of the support shaft 22 and is located at the intersection of the axes of the support shaft 22 and the rotation shaft 30. This holding stand 46 is fixed to the boss part 28 by its base end flange part 47, while its distal end part is inserted into the rotating shaft 30 so as to be rotatable relative thereto, and the position of the first mirror 43 is adjusted at the distal end. hold possible. Therefore, even if the rotating shaft 30 rotates, the first
Regardless of this, the mirror 43 is always located on the central axis of the support shaft 22, and on the - side, a long hole 48 is formed in the outer peripheral wall of the rotation shaft 30 so that the laser beam is not blocked by the rotation. is opened.

The mirror 43 has a shape in which the tip of a cylindrical body is cut off at a plane making an angle of 45 degrees with the axial direction, and a flange 49 is provided protruding from the outer periphery of the body. In a state where the mirror 43 is attached to the holding stand 46, a ring-shaped support stand 50 is located at the front of the flange 49, and a ring-shaped mounting plate fixed to the holding stand 46 is located further ahead of the ring-shaped support stand 50. 51 is the tsuba part 4
9 and are positioned to sandwich the support stand 50. Fourth
As shown in the figure, the support stand 50 is supported rotatably around an axis in the vertical direction by conical bins 52 and 53 that are fixed to the holding stand 46 vertically.
The mirror 43 located inside the frame 0 is supported by conical bins 54 and 55 fixed to the support stand 50 side by side so as to be rotatable around an axis in the left and right direction. Versus up and down.

It can be rotated around the left and right axes.

This support stand 50 and mirror 43 are each supported by a spring 56.
and a spring 57 (see FIG. 1), and adjusting screws 58 and 59, which are screwed into the holder 46, are provided on the upper and right sides of the flange 49 of the mirror 43, respectively. are in contact. Therefore, as shown in FIG. 4, by moving this adjustment screw 58 back and forth, the angular position of the mirror 43 is adjusted in the left and right axis rotation (1 < direction a), while the other adjustment screw 59 is moved back and forth. As a result, the angular position of the mirror 43 is adjusted around the vertical axis (β direction), and adjustments in both directions can be performed independently of each other.

On the other hand, the second mirror 44, which further reflects the laser beam reflected by the first mirror 43 toward the lens 45, can be positioned on a holding base 60 fixed to the rotating shaft 30, as shown in FIG. It is held at the intersection of the axes of the rotating shaft 30 and the nozzle tip 19, and rotates together with the rotating shaft 30. The position adjustment mechanism of this second mirror 44 is similar to that of the first mirror 43 described above, so a detailed explanation will be omitted.
By operating the adjustment screws 61 and 62, the angle can be adjusted independently in the vertical and horizontal directions.

Furthermore, as shown in FIG. 1, a support shaft 22, a rotation shaft 30
A plurality of covers 63 are attached to the outer periphery of the cover. A line 64 for hoses and electric wires is formed in a space formed between the cover 63, the support shaft 22, and the rotation shaft 3o. As shown by the two-dot chain line in FIG. 1, this line 64 runs from the processing head 16 along the support shaft 22 to the 0 part, passes through the @ part and the θ part, and moves to the rotating shaft 30 side.
Furthermore, part ■.

0) part, reaching 0 parts.

(assistance required for laser processing) - gas to the nozzle tip 19
The assist gas hose that supplies the gas to the machining head 16 is piped to the connector 65 through the parts ◯ to ◯ of the line 64 . Similarly, a cooling water hose that supplies cooling water to the lens periphery 66 in order to cool the lens 45 is connected to a line 64.
The cooling water hoses that supply cooling water to the mirrors 43 and 44 are piped to the connector 67 through parts ■ to ■ of the R path 64 and are connected to the respective connectors 68 through parts
Piped to ゜69.

On the other hand, electric wires for the A-axis motor 32 are also routed through portions ■ to O of the line 64, and electric wires for the W-axis motor 39 are also routed through portions ■ to G of the line 64.

In the optical head 17 having such a configuration, C
The nozzle tip 19 is controlled to a required posture by the operation of the axis motor 24 and the A-axis motor 32, and the W-axis motor 3
9 adjusts the distance between the nozzle tip 19 and the workpiece 18. In this case, the hoses and electric wires also move as each part moves, but since these are arranged around the support shaft 22 and rotation shaft 30 and are located inside the cover 63, external objects There is no interference between the two and the overall structure can be made compact.

In addition, by making the position of the nozzle tip 19 adjustable in the W-axis direction, the distance between the nozzle tip 19 and the workpiece 18 is detected by a position detector (not shown) built into the nozzle tip support 37, and the distance between the nozzle tip 19 and the workpiece 18 is detected by a preprogrammed Laser processing accuracy can be improved by operating the W-axis motor 39 so that the calculated value matches the actual distance.

On the other hand, the mirrors 43 and 44 have adjustment screws 58 and 59, respectively.
Since the angle can be adjusted independently in two directions at 61 and 62, the adjustment can be performed easily and accurately.

Although the above-described embodiments have been described with respect to a laser processing machine as a machine tool, the present invention can also be applied to other industrial robots and the like.

<Effects of the Invention> As described above in detail with reference to one embodiment, according to the present invention, the hose, electric wires, etc. of the optical head of the laser processing machine are disposed within the cover, so that the entire device can be downsized. The pipe was disconnected as soon as it was completed.

It is possible to prevent one cursive line from being disconnected. In addition, since the mirror can be adjusted independently around two orthogonal axes, it is easy to adjust the rA, making maintenance easier, and the nozzle tip sabot 1 can be moved and adjusted in the laser irradiation direction. , it is possible to improve machining accuracy by always keeping the distance to the workpiece constant.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of essential parts of an optical head according to an embodiment of the present invention, FIG. 2 is a partially cutaway side view thereof, FIG. 3 is a sectional view taken along the 1 is an IV-IV sectional view, FIG. 5 is a perspective view of the entire laser processing machine, FIG. 6 is a front view of the optical head of the conventional laser processing machine, and FIG.
That mirror v! A sectional view of the J alignment 81 structure, and FIG. 7 fbl is a side view thereof. In the drawing, 17 is the optical head, 19 is the nozzle chip) 20 is the main body support, 22 is the support shaft, 30 is the rotation axis, 37 is the nozzle chip support, 43.44 is the mirror 45 is the lens, 46.60 is the holding 50 is a support base, 58, 59, 61, 62 are adjustment screws, 63 is a cover 64 is a track. Patent applicant Mitsubishi Heavy Industries, Ltd. Agent

Claims (1)

[Claims] a main body support, a support shaft attached to the main body support so that the rotational position can be adjusted, a rotating shaft attached to the support shaft so that the rotational position can be adjusted, a nozzle tip attached to the rotating shaft, a first mirror disposed at the intersection of the axes of the support shaft and the rotation axis to reflect the laser beam; and a first mirror disposed at the intersection of the axes of the rotation axis and the nozzle chip. In an optical head of a laser processing machine, the optical head includes a second mirror that reflects reflected laser light, and a lens that is arranged on the axis of the nozzle chip and that focuses the laser light reflected by the second mirror. , the lens and the nozzle chip are held by a nozzle chip support, and the nozzle chip support is attached to the rotation shaft so that the position can be adjusted in the axial direction of the nozzle chip, while the mirror is held about two orthogonal axes. 1. An optical head for a laser processing machine, which is independently adjustable, and wherein an assist gas hose, a cooling water hose, and an electric wire are disposed within a cover that covers the support shaft and the rotation shaft.