JPH02149880U - - Google Patents

Info

Publication number
JPH02149880U
JPH02149880U JP5948989U JP5948989U JPH02149880U JP H02149880 U JPH02149880 U JP H02149880U JP 5948989 U JP5948989 U JP 5948989U JP 5948989 U JP5948989 U JP 5948989U JP H02149880 U JPH02149880 U JP H02149880U
Authority
JP
Japan
Prior art keywords
diaphragm body
elastic member
piezoelectric element
piezoelectric
contact surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5948989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5948989U priority Critical patent/JPH02149880U/ja
Publication of JPH02149880U publication Critical patent/JPH02149880U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP5948989U 1989-05-23 1989-05-23 Pending JPH02149880U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5948989U JPH02149880U (en:Method) 1989-05-23 1989-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5948989U JPH02149880U (en:Method) 1989-05-23 1989-05-23

Publications (1)

Publication Number Publication Date
JPH02149880U true JPH02149880U (en:Method) 1990-12-21

Family

ID=31586028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5948989U Pending JPH02149880U (en:Method) 1989-05-23 1989-05-23

Country Status (1)

Country Link
JP (1) JPH02149880U (en:Method)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04137284U (ja) * 1991-06-18 1992-12-21 株式会社三鈴エリー 高吐出圧用圧電ポンプ
WO2007055136A1 (ja) * 2005-11-09 2007-05-18 Nitto Kohki Co., Ltd. ユニモルフ振動板を用いたポンプ
JP2008303774A (ja) * 2007-06-07 2008-12-18 Alps Electric Co Ltd ダイヤフラムポンプ
WO2009072261A1 (ja) * 2007-12-05 2009-06-11 Star Micronics Co., Ltd. ポンプ
JP5494801B2 (ja) * 2010-05-21 2014-05-21 株式会社村田製作所 流体ポンプ
JP2015064059A (ja) * 2013-09-25 2015-04-09 株式会社ジェイテクト 可変絞り形静圧軸受

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04137284U (ja) * 1991-06-18 1992-12-21 株式会社三鈴エリー 高吐出圧用圧電ポンプ
WO2007055136A1 (ja) * 2005-11-09 2007-05-18 Nitto Kohki Co., Ltd. ユニモルフ振動板を用いたポンプ
JP2007132252A (ja) * 2005-11-09 2007-05-31 Nitto Kohki Co Ltd ユニモルフ振動板を用いたポンプ
JP2008303774A (ja) * 2007-06-07 2008-12-18 Alps Electric Co Ltd ダイヤフラムポンプ
WO2009072261A1 (ja) * 2007-12-05 2009-06-11 Star Micronics Co., Ltd. ポンプ
JP5494801B2 (ja) * 2010-05-21 2014-05-21 株式会社村田製作所 流体ポンプ
JP2014098396A (ja) * 2010-05-21 2014-05-29 Murata Mfg Co Ltd 流体ポンプ
US8747080B2 (en) 2010-05-21 2014-06-10 Murata Manufacturing Co., Ltd. Fluid pump
JP2015064059A (ja) * 2013-09-25 2015-04-09 株式会社ジェイテクト 可変絞り形静圧軸受

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