JPH02149444A - 管の内部コーティング - Google Patents
管の内部コーティングInfo
- Publication number
- JPH02149444A JPH02149444A JP1234817A JP23481789A JPH02149444A JP H02149444 A JPH02149444 A JP H02149444A JP 1234817 A JP1234817 A JP 1234817A JP 23481789 A JP23481789 A JP 23481789A JP H02149444 A JPH02149444 A JP H02149444A
- Authority
- JP
- Japan
- Prior art keywords
- glass tube
- tube
- coating region
- gas
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 46
- 238000000576 coating method Methods 0.000 title claims abstract description 46
- 239000011521 glass Substances 0.000 claims abstract description 34
- 238000009826 distribution Methods 0.000 claims abstract description 20
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 3
- 230000035939 shock Effects 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 30
- 230000007423 decrease Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01861—Means for changing or stabilising the diameter or form of tubes or rods
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
- C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01884—Means for supporting, rotating and translating tubes or rods being formed, e.g. lathes
- C03B37/01892—Deposition substrates, e.g. tubes, mandrels
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3830988.2 | 1988-09-12 | ||
| DE3830988 | 1988-09-12 | ||
| DE3929604.0 | 1989-09-06 | ||
| DE3929604A DE3929604A1 (de) | 1988-09-12 | 1989-09-06 | Innenbeschichtung eines rohres |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02149444A true JPH02149444A (ja) | 1990-06-08 |
Family
ID=25872141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1234817A Pending JPH02149444A (ja) | 1988-09-12 | 1989-09-12 | 管の内部コーティング |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5059231A (enExample) |
| JP (1) | JPH02149444A (enExample) |
| DE (1) | DE3929604A1 (enExample) |
| FR (1) | FR2641270B1 (enExample) |
| GB (1) | GB2224731B (enExample) |
| NL (1) | NL8903059A (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5356451A (en) * | 1993-12-20 | 1994-10-18 | Corning Incorporated | Method and apparatus for vaporization of liquid reactants |
| US5853894A (en) * | 1997-02-03 | 1998-12-29 | Cytonix Corporation | Laboratory vessel having hydrophobic coating and process for manufacturing same |
| DE19801861C2 (de) * | 1998-01-20 | 2001-10-18 | Schott Glas | Verfahren zum Herstellen eines hohlen, innenbeschichteten Glasformkörpers |
| US20030110808A1 (en) * | 2001-12-14 | 2003-06-19 | Applied Materials Inc., A Delaware Corporation | Method of manufacturing an optical core |
| US20030113085A1 (en) * | 2001-12-14 | 2003-06-19 | Applied Materials, Inc., A Delaware Corporation | HDP-CVD film for uppercladding application in optical waveguides |
| US20030115909A1 (en) * | 2001-12-21 | 2003-06-26 | House Keith L. | Plasma chemical vapor deposition methods and apparatus |
| US7080528B2 (en) * | 2002-10-23 | 2006-07-25 | Applied Materials, Inc. | Method of forming a phosphorus doped optical core using a PECVD process |
| US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
| NL2012866B1 (en) * | 2014-05-22 | 2016-03-15 | Draka Comteq Bv | A method and a device for manufacturing an optical preform by means of an internal vapour deposition process, as well as corresponding substrate tube assembly. |
| CN109608031B (zh) * | 2019-02-20 | 2022-04-15 | 长飞光纤光缆股份有限公司 | 一种pcvd工艺制备光纤预制棒的方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4125389A (en) * | 1977-02-10 | 1978-11-14 | Northern Telecom Limited | Method for manufacturing an optical fibre with plasma activated deposition in a tube |
| GB1554978A (en) * | 1977-08-22 | 1979-10-31 | Comp Generale Electricite | Method and device for depositing a layer of glass on the inner wall of a tube |
| JPS56120529A (en) * | 1980-02-20 | 1981-09-21 | Hitachi Cable Ltd | Manufacture of base material for optical fiber |
| DE3010314C2 (de) * | 1980-03-18 | 1982-01-07 | Beerwald, Hans, Dr.Rer.Nat., 5370 Kall | Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen |
| GB2079267B (en) * | 1980-07-11 | 1983-10-26 | Ass Elect Ind | Manufacture of optical fibre preforms |
| US4417911A (en) * | 1981-02-27 | 1983-11-29 | Associated Electrical Industries Limited | Manufacture of optical fibre preforms |
| DE3204846A1 (de) * | 1982-02-11 | 1983-08-18 | Schott Glaswerke, 6500 Mainz | Plasmaverfahren zur innenbeschichtung von glasrohren |
| JPS5918327B2 (ja) * | 1982-12-03 | 1984-04-26 | 富士通株式会社 | 光伝送線の製造方法 |
| DE3324539A1 (de) * | 1983-07-07 | 1985-01-17 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung von glas durch abscheidung aus der gasphase |
-
1989
- 1989-09-06 DE DE3929604A patent/DE3929604A1/de active Granted
- 1989-09-12 JP JP1234817A patent/JPH02149444A/ja active Pending
- 1989-09-12 US US07/406,402 patent/US5059231A/en not_active Expired - Fee Related
- 1989-09-12 FR FR8911927A patent/FR2641270B1/fr not_active Expired - Fee Related
- 1989-09-12 GB GB8920604A patent/GB2224731B/en not_active Expired - Fee Related
- 1989-12-13 NL NL8903059A patent/NL8903059A/nl not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| US5059231A (en) | 1991-10-22 |
| FR2641270B1 (fr) | 1993-06-18 |
| GB2224731A (en) | 1990-05-16 |
| NL8903059A (nl) | 1991-07-01 |
| FR2641270A1 (fr) | 1990-07-06 |
| DE3929604C2 (enExample) | 1992-09-24 |
| GB8920604D0 (en) | 1989-10-25 |
| DE3929604A1 (de) | 1990-03-15 |
| GB2224731B (en) | 1992-06-10 |
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