JPH0214872Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electron beam welding device, and more particularly to an electron beam welding device that automatically welds objects to be welded.

Conventionally, there have been devices of this type as shown in FIGS. 1 and 2. In FIG. 1, a welding chamber 3 in which objects to be welded are welded by an electron beam generator 1.
An index table 4 for transporting the objects 2 to be welded is provided with storage chambers 5a to 5d for holding the objects 2 to be welded. The index table 4 is housed in a differential pressure chamber 6 and kept in a vacuum. A first drive device 7 is fixed to the welding chamber 3 located at the lowest pressure part of the differential pressure chamber 6 to operate the workpiece 2 . A workpiece loading/unloading port 8 for loading and unloading the workpiece 2 is attached to the highest pressure part of the differential pressure chamber 6. An external vacuum seal valve 9 is provided to isolate the storage chamber 5a from the atmosphere after being carried into the carry-in/out port 8. Differential pressure chamber 6
etc. are fixed to the pedestal 10.

Next, in FIG. 2, an exhaust device 11 is connected to the differential pressure chamber 6 to keep it in a vacuum, and a second drive device 12 is connected to the differential pressure chamber 6 to rotate and index the index table 4. It is arranged.

The conventional electron beam welding apparatus is configured as described above, and the workpiece 2 is loaded into the storage chamber 5a with the external vacuum seal valve 9 opened. Then, the external vacuum seal valve 9 is closed, and the second drive device 12 rotates the index table 4 to the next index position. This operation is repeated several times, and when the workpiece 2 reaches the welding position, the workpiece 2 is loaded into the welding chamber 3 by the first drive device 7, and the workpiece 2 is loaded into the welding chamber 3 by the electron beam generator 1. Welding is performed using an electron beam. The welded workpiece 2 is moved again to the storage chamber 5c of the index table 4 by the first drive device 7.
and placed in the storage chamber 5c. Next, the index table 4 is moved by the second drive device 12.
rotates to the next index position. This operation is repeated thereafter, and the workpiece 2 welded first becomes
When the object to be welded reaches the port 8, the external vacuum seal valve 9 is opened and the welded object 2 is taken out.
After that, these series of operations are repeated.

However, because conventional electron beam welding equipment has the configuration and operation described above,
When the vacuum seal valve 9 is opened to take in and take out the workpiece 2, the differential pressure chamber 6 and the index table 4 come into contact with atmospheric pressure (760 Torr) through the workpiece loading/unloading port 8. Therefore, in order to always maintain the welding chamber 3 at the low pressure necessary for welding, the exhaust device 11
requires a large capacity, the gap between the index table 4 and the differential pressure chamber 6 needs to be very narrow, so high-precision machining is required, and the diameter of the index table 4 is increased to transport the welded material. There were drawbacks such as the need to provide a large distance between the outlet 8 and the welding chamber 3.

This idea is an attempt to solve the above-mentioned drawbacks of the conventional equipment. By arranging internal vacuum valve seals between each table,
The object of the present invention is to provide an electron beam welding device that can obtain high vacuum necessary for welding at low cost and perform welding with stable quality.

An embodiment of this invention will be described below with reference to FIGS. 3, 4, and 5. In Figure 3,
First internal vacuum seal valves 13a, 13b are located on the welding material loading/unloading port 8 side of the differential pressure chamber 6, and welding chamber 3 of the differential pressure chamber 6.
Internal vacuum seal valves 14a, 14b are installed in the passage area between the
will be established. In addition, the same reference numerals as in FIGS. 1 and 2 indicate the same parts. FIG. 4 shows the first internal vacuum seal valve 13a, and the first internal vacuum seal valve 13a is shown in an open state. FIG. 5 shows the internal vacuum seal valve 13a of FIG. 1 in a closed state. 4 and 5, an annular groove 6a having an L-shaped cross section is formed in the wall of the differential pressure chamber 6.
An annular valve body 17 having an L-shaped cross section is housed in a,
It constitutes an internal vacuum seal valve 13a. 15 is a valve opening pneumatic pipe line through which compressed air passes when opening the internal vacuum seal valve 13a, and 16 is a valve closing pneumatic pipe line through which compressed air passes when closing the internal vacuum seal valve 13a. The ends face each other and open into the annular groove 6a.

In the electron beam welding apparatus configured as described above, when placing the workpiece 2 into the storage chamber 5a in the index table 4, compressed air is first fed into the valve closing pneumatic pipe line 16 and the valve body 17 is is pressed to the right to bring the right end of the valve body 17 into pressure contact with the index table 4, and close the internal vacuum seal valve 13a.
Next, the external vacuum seal valve 9 is opened. At this time, the atmosphere enters the storage chamber 5a and the pressure in the storage chamber 5a becomes atmospheric. However, since the internal vacuum seal valve 13a is closed, the pressure inside the differential pressure chamber 6 is Therefore, the pressure in the welding chamber 3 does not increase either. The object to be welded 2 is stored in the storage chamber 5
After entering a, close the external vacuum seal valve 9.
Then, compressed air is sent into the valve opening pneumatic line 15, and the valve body 17 is moved to the left to open the internal vacuum seal valve 13a. Then, as described in the description of the conventional device above, indexing is performed to the next index position. When the indexing is completed, the internal vacuum seal valve 13a is closed again, and the workpiece 2 is introduced into the storage chamber 5a through the workpiece carry-in/out port 8 in the same manner as described above. Repeat this operation sequentially. The same applies to the internal vacuum seal valve 13b. In addition, when performing such an operation, it usually takes twice to several times as long to carry in and out the workpiece 2 as compared to the indexing time, so the internal vacuum seal valve 1 is
3a is opened, the amount of air entering the atmospheric chamber of the storage chamber 5a into the differential pressure chamber 6 is greatly reduced compared to the conventional case.

On the other hand, when the workpiece 2 is indexed to the position of the welding chamber 3, the second internal vacuum seal valves 14a, 1
4b is closed in the same manner as above, and the storage chamber 5c of this part is closed.
Since the welding chamber 3 is isolated from the other parts of the differential pressure chamber 6, high pressure air does not enter, and compared to conventional equipment, the pressure in the welding chamber 3 can be stabilized more easily, making it easier to weld. It can maintain the necessary low pressure and achieve stable, high-quality welding. Further, in order to obtain the same pressure as the conventional device, it is possible to use the vacuum evacuation device 11 having a smaller capacity than the conventional device.

In the above explanation, the case where this invention is applied to an electron beam welding device was described, but the configuration of this invention excluding the electron beam generator 1 can be applied to other electron beam processing devices or other vacuum processing. Needless to say, it can be used in processing machines, processing machines, etc.

As explained above, this idea prevents air from entering the differential pressure chamber when the workpiece to be welded is placed in the storage chamber in the index table, and also keeps the welding chamber and differential pressure chamber under vacuum except when indexing. By sealing, the inflow of gas from the high pressure section into the welding chamber can be suppressed in a very short period of time, making it easy to maintain the welding chamber at the degree of vacuum required for welding. Moreover, this allows the evacuation device for constructing the differential pressure chamber to be made cheaper. Furthermore, from the opposite point of view, there are many advantages, such as the index table and the differential pressure chamber being easier to configure and being able to provide them at a lower cost.

[Brief explanation of the drawing]

Figure 1 is a front view of a conventional device, Figure 2 is a side view of the same, and Figure 3 is a side view of an embodiment of this invention.
4 and 5 are partially detailed sectional views, with FIG. 4 showing the internal vacuum seal valve in an open state and FIG. 5 showing the internal vacuum seal valve in a closed state. 1... Electron beam generator, 2... Work to be welded,
3... Welding room, 4... Index table, 5
a, 5b, 5c, 5d...accommodation chamber, 6...differential pressure chamber, 6a...annular groove, 7...first drive device, 8
...Welding material loading/unloading port, 9... External vacuum seal valve, 10... Frame, 11... Exhaust device, 12...
Second drive device, 13a, 13b...first internal vacuum seal valve, 14a, 14b...second internal vacuum seal valve, 15...pneumatic pipeline for valve opening, 16...
Pneumatic pipeline for valve closing, 17...valve body. In addition, in each figure,
The same reference numerals indicate the same or equivalent parts.

Claims (1)

[Claims for Utility Model Registration] (1) An index table having a plurality of storage chambers for holding objects to be welded, a differential pressure chamber that houses this index table and is maintained in a vacuum, and the lowest pressure of this differential pressure chamber. a welding chamber disposed in the welding chamber; an electron beam generator attached to the welding chamber; a welding material loading/unloading port disposed at the highest pressure section of the differential pressure chamber and having an external vacuum seal valve; In an electron beam welding device equipped with an exhaust device that keeps a pressure chamber in a vacuum, between the lowest pressure part of the differential pressure chamber and the index table and between the highest pressure part of the differential pressure chamber and the index table. An electron beam welding device characterized in that it is equipped with an internal vacuum seal valve, each of which is provided with an internal vacuum seal valve. (2) The electron beam welding device according to claim 1, wherein the internal vacuum seal valve is an annular valve body having an L-shaped cross section and operated by compressed air, which is disposed within the wall of the differential pressure chamber. .