JP3258088B2 - Vacuum processing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sputtering apparatus,
The present invention relates to a vacuum processing apparatus such as a dry etching apparatus and a vacuum evaporation apparatus that performs physical or chemical processing on an object to be processed in a vacuum.

[0002]

2. Description of the Related Art In a vacuum processing apparatus of this type, an object to be processed is placed in a processing chamber such as a vacuum chamber or a chamber containing a specific gas and subjected to physical or chemical processing. Although only one type of processing may be performed, the number of different types of processing performed in recent years has increased. When a plurality of different processes are performed as described above, the same object is sequentially passed into different processing chambers. Vacuum processing apparatuses for passing an object to be processed into a plurality of different processing chambers include an in-line type and a rotary type.
In the in-line method, the objects to be processed are sequentially passed through the processing chambers arranged in a line (for example, see Japanese Patent Application Laid-Open No. 55-141570). In the rotating method, the objects to be processed are sequentially passed through the processing chambers arranged in a ring while being rotated by rotating a table or the like (for example, Japanese Patent Publication No. Sho 62-5).
No. 7377).

[0003]

In the above-mentioned in-line system, a gate valve is required between adjacent processing chambers to separate them from each other. Therefore, an in-line vacuum processing apparatus is generally large and expensive. . In addition, it takes time to transport an object to be processed from one processing chamber to the next processing chamber, and the cycle time becomes longer.

[0004] In the above-mentioned rotary system, the apparatus can be small, but since different processing chambers are connected to each other, gas is transferred between the processing chambers and the other processing chambers are liable to cause contamination.

The present invention has been made in view of the above-mentioned problems of the prior art, and has as its object to reduce the size of the apparatus and use a buffer chamber so that contamination between different processing chambers does not occur. An object of the present invention is to provide a vacuum processing apparatus that can transfer an object to be processed in a room while another object to be processed is being processed in a processing chamber, so that the cycle time can be reduced.

[0006]

According to the present invention, in order to achieve the above objects, a vacuum processing apparatus is provided with a load lock chamber for taking in an object to be cut off from outside air, and a communication between the load lock chamber and the load lock chamber. A most upstream buffer chamber connected thereto; a most upstream processing chamber connected to the uppermost buffer chamber so as to be able to communicate with the uppermost buffer chamber so as to receive an object to be processed from the load lock chamber via the most upstream buffer chamber and perform vacuum processing; A series of processing chambers provided following the chamber and connected to each other, and the adjacent processing chambers are connected so as to be able to communicate with each other so as to receive and temporarily store the object to be processed from the upstream processing chamber, and then to the next intermediate chamber. An intermediate buffer chamber for sending out to the processing chamber, and a lowermost buffer chamber connected to the lowermost processing chamber so as to be able to communicate with the lowermost processing chamber and receiving the vacuum-processed product from the lowermost processing chamber,
An unload chamber capable of shutting off communication with the most downstream buffer chamber and the outside air, the uppermost stream, the most downstream and the intermediate processing chamber, and a transfer arm for the object to be processed, and the most upstream, most downstream and intermediate processing Conveyance for moving the objects to be processed in the uppermost stream, the lowermost stream, and the intermediate buffer chamber from a position near the loading side of each buffer chamber to a position near the unloading side while the processing object is vacuum-processed in the room. A communication opening is provided in a partition partitioning the processing chamber and the buffer chamber which are connected to each other so as to be able to communicate with each other, and a transfer arm in each processing chamber and a transfer arm in the buffer chamber are provided. Each of the transfer arms has a circular hole at the distal end, and the transfer arms can be moved to a position where the circular holes face the communication opening. Facing the room A first seal member is supported so as to be displaced to a position in contact with a peripheral edge portion of the communication opening of the partition so as to close the opening, and the first seal member includes the transfer arm. A stepped hole is formed so as to be aligned with the distal end circular hole, and a catch for the object to be processed is provided in the stepped hole. In each buffer chamber, a stepped hole of the first seal member is provided. The stepped hole is closed by pressing and the first seal member is displaced to a position in contact with the peripheral edge of the communication opening of the partition wall, and the communication opening is closed by the first seal member. A first pressing member that can move forward and backward so as to be pressed as described above is provided, and a chuck for the processing object that can move forward and backward through the communication opening is attached to the first pressing member, and a transfer arm in each processing chamber is provided. On the side facing the buffer chamber on the periphery of the tip hole, a second Seal member,
The partition wall is displaced to a position where it contacts the peripheral edge of the communication opening, and is supported so as to close the opening. The second seal member is aligned with the transfer arm tip circular hole in the processing chamber. As described above, a stepped hole is formed, and a catch of an object to be processed is provided in the stepped hole. Plugs,
Further, a pressing member which can be moved forward and backward so as to displace the second seal member to a position where the second seal member comes into contact with a peripheral portion of the communication opening of the partition wall and press the second seal member so as to close the communication opening. When the respective processing chambers and the respective buffer chambers are to be shut off, the first and second seal members are attached to the peripheral edge of the communication opening of the partition by pressing by the first and second pressing members. When the workpiece is transported between the transport arm tip of each processing chamber and the transport arm tip of each buffer chamber, the chuck for the workpiece is contacted to close the opening. It is configured to move through the communication opening between the catches of the first and second seal members.

[0007]

The object to be processed sent into the load lock chamber is sent from the load lock chamber through the most upstream buffer chamber to the most upstream processing chamber, where it undergoes vacuum processing. The workpiece that has undergone the first vacuum treatment is then sent into the intermediate buffer chamber. The workpiece in the buffer chamber is isolated from the processing chamber during subsequent vacuum processing of the workpiece in the processing chamber. During this time, the object to be processed in the buffer chamber is transported from a position near the carry-in side to a position near the carry-out side by the transport means in the buffer chamber. After the vacuum processing of the processing object in the processing chamber is completed, the processing object transported in the buffer chamber is sent to the next processing chamber after the buffer chamber and the next processing chamber are brought into communication with each other, and then sent to the next processing chamber. Under vacuum treatment. In this way, the object to be processed sequentially passes through the subsequent buffer chamber and processing chamber, and finally is sent to the unloading chamber via the most downstream buffer chamber, where it is taken out as a product.

[0008]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a front view of one embodiment of a vacuum processing apparatus according to the present invention. In FIG. 1, an object to be processed W is fed into a vacuum processing apparatus as indicated by an arrow A, and a plurality of processes are performed. After being received, it is taken out of the vacuum processing apparatus as a processed product W 'as shown by an arrow A'. The vacuum processing is, for example, the formation of a multilayer film on the surface of a compact disc. Incidentally, the vacuum processing apparatus has a plurality of processing chambers, the inside of which,
It may be a simple vacuum, or it may be filled with an inert gas such as argon or nitrogen.

In FIG. 1, the portion into which the workpiece W is fed is formed as a load lock chamber L, and the unloading section U for the processed product is formed as an unload chamber U. A series of processing chambers P (five processing chambers in the illustrated example) are arranged between the load lock chamber L and the unload chamber U.
The workpiece W sent in is subjected to vacuum processing in these processing chambers P sequentially. The vacuum processing is, for example, a sputtering processing. Between these processing chambers P, there is provided an intermediate buffer chamber B for temporarily storing an object to be processed while moving the processing object from the processing chamber to the processing chamber. In this embodiment, there are four buffer chambers between the processing chambers. In addition, the two most upstream and the most downstream buffer chambers B1, B1 at the most upstream end and the most downstream end, respectively.
There is B2. These buffer chambers B1 and B2 are connected to the downstream side of the load lock chamber L and the upstream side of the unload chamber, respectively, so that communication can be interrupted.

In FIG. 1, T is a turbo molecular pump,
T is a pump for exhausting the buffer chambers B, B1, and B2, and t is a pump for the processing chamber P. C is a cryopump. The load lock chamber L and the unload chamber U are exhausted by an oil rotary pump or a dry pump,
It has an independent exhaust system. FIG. 2 is a plan view of the vacuum processing apparatus of FIG. 1, showing the arrangement of a rotation motor, a pusher, and the like, which will be described later.

FIG. 3 is a partial horizontal vertical sectional view corresponding to a part of FIG. A rotation motor M is provided at the back of the most upstream buffer chamber B1 having a portion constituting the load lock chamber L.
The rotating shaft 2 of the motor M extends horizontally into the buffer chamber B1, and a transporting rotating arm 3 is rotatably supported on the leading end of the rotating arm 2 around the rotating shaft 2. The tip of the rotary arm 3 is enlarged, and a circular hole 4 is formed in the enlarged tip as shown in FIG.

A pressing member 5 is provided in the circular hole 4 so as to be inserted from behind, and a pusher PS for moving the pressing member 5 back and forth is provided as shown in FIG.
1 at the rear. The pressing member 5 is formed of, for example, a disk as shown in FIG.

A seal member 7 having a stepped hole 6 is provided so as to cover the front of the circular hole 4 of the rotating arm 3. A headed pin 8 protruding rearward from the seal member 7 penetrates the rotating arm 3 rearward, and due to the force of a spring 9 interposed between the rear surface of the rotating arm 3 and the head of the headed pin 8, The seal member 7 is normally pressed against the front surface of the rotating arm 3. Seal member 7
The stepped hole 6 is dimensioned so as to engage with the pressing member 5. On the other hand, an inner wall of the stepped hole 6 of the seal member 7 has a spring catch 1 for chucking the workpiece W.
2 are provided. An appropriate type of chuck 15 is provided at the tip of a shaft 5a that moves back and forth concentrically through the pressing member 5.

An opening 11 smaller than the outer diameter of the seal member 7 is provided in the front wall Ba of the most upstream buffer chamber B1. A lid 13 movable forward and backward is provided so as to be opposed to the front of the opening 11 so as to be driven forward and backward by a pusher 14 (FIG. 3). The lid 13 receives the workpiece W as shown in FIG.

FIG. 5 shows a state in which the lid 13 is displaced toward the buffer chamber front wall Ba and is in contact therewith.
In a state where the pressing member 5 is advanced by the pusher PS, as shown in FIG. 5, the pressing member 5 is tightly engaged with the stepped hole 6 of the sealing member 7 and the sealing member 7 is
To press the inner surface of the front wall Ba of the uppermost stream buffer chamber to close the opening 11. In the state of FIG. 5, a closed load lock chamber L is formed.

The rotation of the rotary motor M causes the rotary arm 3 to rotate 180 °. FIGS. 3 and 6 show positions where the circular hole 4 at the tip of the rotary arm 3 is displaced by 180 °.
As shown in the figure, a pressing member 16 similar to the pressing member 5 is provided so as to move back and forth by a pusher PS. At this position rotated by 180 °, an opening 17 (FIG. 6) is provided in the front wall Ba of the most upstream buffer chamber B1.

As shown in FIG. 3, the vacuum processing chamber P continues through the opening 17 of the buffer chamber B1. The vacuum processing chamber P is provided with a rearward rotating shaft 20 for the front rotation motor M1.
Is accommodated. As shown in FIG. 1, three rotating arms 21 can be provided at intervals of 120 ° about the rotating shaft 20. Note that the angular interval of the rotating arm 21 can be arbitrarily determined.

The tip of each rotary arm 21 is enlarged as shown in FIGS. 6 and 7, and has a circular hole 23 formed therein. The circular hole 23 is coaxial with the opening 17 at an angular position in front of the opening 17 of the most upstream buffer chamber B1.
Behind the circular hole 23, a seal member 24 is provided on the rotating arm 21. The seal member 24 has a stepped hole 25 in the center, and a spring 26 is interposed between the head of a headed pin 27 protruding forward from the seal member 24 and the front surface of the rotating arm 21. The seal member 24 is pressed against the rear surface of the rotating arm 21 by the force of the spring 26.

In front of the opening 17 of the most upstream buffer chamber B1, a pusher 28 is attached to the front wall of the most upstream processing chamber P.
Is fixed, and the shaft 2 protruding rearward of the pusher 28
A pressing member 30 is fixed to 9. The pressing member 30 is formed of a disk as shown in FIG. The shape of the pressing member 30 is such that it can engage with the stepped hole 25 of the seal member 24.

When the pressing member 30 is moved backward by the action of the pusher 28, as shown in FIG. 7, the pressing member 30 passes through the circular hole 23 of the rotating arm 21 rearward and engages with the sealing member 24, thereby engaging the sealing member 24. Is pressed around the opening 17 to seal the opening 17.

At the angular position where the rotary arm 21 is rotated by 120 °, a processing space P 'for the processing chamber P is provided behind the seal member 24 as shown in FIGS. The processing space P 'is a space having a sputtering source 33 (FIG. 3) when the vacuum processing is sputtering. An opening 34 is provided between the processing space P ′ and the processing chamber P. A pusher 35 similar to the pusher 28 and the pressing member 30 is provided at the position of the opening 34.
The pressing member 36 is provided as shown in FIG.

On the other hand, similar pushers 37 and pressing members 38 are provided at angular positions where the rotating arm 21 is further rotated by 120 ° as shown in FIG. The opening and closing of the opening 39 (FIG. 3) is performed in the same manner as described with reference to FIG. The opening 39 is an opening for communicating the uppermost stream processing chamber P and the subsequent first intermediate buffer chamber B.

In the intermediate buffer chamber B, the transport rotary arm 3, the rotary motor M, the pusher PS, the pressing members 5, 16 and the sealing member 7 provided in the above-mentioned most upstream buffer chamber B1 are provided.
The same members are provided. In FIG. 3, the same members of the intermediate buffer chamber B are denoted by the same reference numerals. The inlet opening of the intermediate buffer chamber B is the above-mentioned opening 39, and the outlet opening thereof is indicated by reference numeral 40.

Subsequent to the intermediate buffer chamber B, a second vacuum processing chamber P is provided as shown by a phantom line in FIG.
Since the second processing chamber P has a structure completely identical to that of the first processing chamber P, the same reference numerals are given and the description is omitted.

The second intermediate buffer chamber B and the third processing chamber P can be provided in the same manner. How many buffer chambers and processing chambers are provided depends on the number of types of processing.

First, the uppermost stream buffer chamber B1 has its openings 4 and 17 sealed with a seal member 7, respectively, and the workpiece W is placed inside the lid 13 as shown by an arrow A in FIG. It is sent like. Subsequently, the lid 13 closes the opening 11 as shown in FIG. Thus, a sealed load lock chamber L is formed. At this time, the workpiece W is chucked by the chuck 15 that is moving forward. Next, after the load lock chamber L is depressurized to the same degree as the uppermost stream buffer chamber B1,
By the action of the pusher PS, the pressing member 5 and the chuck 15
Is retracted, and the load lock chamber L and the most upstream buffer chamber B1 communicate with each other. When the chuck 15 is retracted, the workpiece W held thereon is also retracted, and at this time is held by the spring catch 12. Next, the transport rotating arm 3 is rotated 180 ° by the motor M, and the spring catch 12 is rotated.
The workpiece W held in the opening 1 is moved from the position of the opening 4 to the opening 1.
7 is conveyed. The holding state of the workpiece W by the spring catch 12 is as shown in FIG.

During this time, the opening 17 is closed by the seal member 24 as shown in FIG. Then, the inside of the most upstream buffer chamber B1 is brought close to the state inside the first processing chamber P. When the state of both chambers B1 and P becomes equal, the pressing member 30 is advanced by the pusher 28, and the opening 17 is opened as shown in FIG. Next, the pressing member 16 is advanced by the pusher PS, and the workpiece W held by the spring catch 12 is pressed by the chuck 15 belonging to the pressing member 16, passes through the opening 17, and receives the spring catch of the circular hole on the seal member 24. It is moved to 31.

Next, the workpiece W transported into the processing chamber P
Is moved directly below the processing space P ′ by the rotation of the rotary arm 21 by 120 ° by the motor M1. At this time,
By the action of the pusher 35 (FIG. 3), the pressing member 36 is raised, passes through the circular hole 23 of the rotating arm 21, and raises the sealing member 24 against the force of the spring 26. As a result, the workpiece W is exposed in the processing space P ′, and the workpiece is subjected to, for example, a sputtering process.

After the processing is completed, the pressing member 36 is returned to the original position, the seal member 24 is separated from the opening 34, and the rotating arm 21 is
The object W to be processed is moved so as to face the opening 39 connected to the next intermediate buffer chamber B by rotation. At this time, the opening 39 is closed by the sealing member 7 being pressed by the pressing member 5.

After equalizing the internal pressures of the processing chamber P and the intermediate buffer chamber B, the pressing member 5 opens the opening 39.
When the pressing member 38 is moved backward by the pusher 37, the workpiece W on the seal member 24 is moved backward and positioned in the opening 39. Next, the workpiece W is held by the spring catch of the rotating arm 3 by the operation of the chuck of the rotating arm 3 in the intermediate buffer chamber B. At this time, the opening 39 is closed by the seal member 24, and the intermediate buffer chamber B
And the processing chamber P are isolated. At the same time, in the isolated state, the next workpiece W is exposed to the processing space P 'and processed.

While the workpiece W is being processed in this way, the rotating arm 3 is rotated by the motor M in the intermediate buffer chamber B, and the workpiece held by the spring catch faces the opening 40. Transported by 180 °. When the processing in the processing chamber P is completed, after the pressures in the two chambers B and P are made equal, the opening 40 is opened by the advance of the pressing member 30 in the next processing chamber P, and the intermediate buffer chamber B
The object to be processed is released from the spring catch, and is sent into the next processing chamber P. Then, vacuum processing is performed in the next processing chamber in the same manner as described above.

In the embodiment described above, the processing chamber P
Are arranged linearly, but the arrangement of the processing chambers need not be linear.

[0034]

As described above, according to the present invention, an object to be processed, which is successively passed through a series of processing chambers and subjected to vacuum processing, is temporarily moved from one processing chamber to the next processing chamber. A transfer means is provided in the buffer chamber for temporarily storing the processing object, and the processing object in the buffer chamber is transferred to a position convenient for unloading while the processing object is being processed in the processing chamber. The time loss in which the processing is interrupted by the movement of the object is reduced, and the cycle time is shortened. Further, since the transfer of the object to be processed is performed in the buffer chamber, contamination between the processing chambers is prevented, and since there is no gate valve between the processing chambers, the size of the entire processing apparatus can be reduced.
Further, in the present invention, during the processing in the processing chamber, the opening provided in the partition partitioning the buffer chamber and the processing chamber is provided with the step of the first sealing member on the buffer chamber side and the second sealing member on the processing chamber side. Since the respective pressing members can be pressed and engaged in the holes to completely seal them, it is possible to prevent the occurrence of a situation such as the residual processing gas in the processing chamber contaminating the buffer chamber and the like. When the workpiece is transferred between the processing chamber and the processing chamber, the chuck for the workpiece is held between the first seal member and the second seal member via the opening of the partition wall separating the buffer chamber and the processing chamber. The object can be reliably moved by using.

[Brief description of the drawings]

FIG. 1 is a front view of one embodiment of a vacuum processing apparatus of the present invention.

FIG. 2 is a plan view of FIG. 1;

FIG. 3 is a cross-sectional view of a part of FIG.

FIG. 4 is an enlarged sectional view of an inlet portion of a buffer chamber.

FIG. 5 is a diagram showing an operation state different from FIG. 4;

FIG. 6 is an enlarged cross-sectional view showing the vicinity of an opening for connection between a most upstream buffer chamber and a first processing chamber.

FIG. 7 is a diagram showing an operation state different from FIG. 6;

FIG. 8 is an enlarged sectional view of a spring catch portion.

[Explanation of symbols]

 W Workpiece W 'Processed product L Load lock chamber U Unloading chamber P Processing chamber B Intermediate buffer chamber B1 Upstream buffer chamber B2 Downstream buffer chamber M Motor PS Pusher 3 Transport rotating arm (transporting means) 5 Pressing member 7 Sealing Member 8 Pin 9 Spring 15 Chuck 16 Pressing Member 17 Opening M1 Rotating Motor 21 Rotating Arm 24 Sealing Member 28, 37 Pusher 30, 38 Pressing Member

Claims (1)

(57) [Claims] A load lock chamber for taking in an object to be cut off from outside air; an uppermost buffer chamber connected to the load lock chamber so as to be able to shut off communication; The most upstream processing chamber that receives the object to be processed from the lock chamber via the most upstream buffer chamber and performs vacuum processing, a series of processing chambers that are provided subsequent to the most upstream processing chamber and are isolated from each other, and the adjacent processing chambers After connecting the connection so that communication can be cut off and receiving and temporarily storing the workpiece from the upstream processing chamber,
An intermediate buffer chamber for sending out to the subsequent intermediate processing chamber, a lowermost buffer chamber connected to the lowermost processing chamber so as to be able to communicate with the lowermost processing chamber, and receiving a vacuum-processed product from the lowermost processing chamber; An unload chamber capable of shutting off communication with outside air, and provided in the uppermost stream, the lowermost stream, and the intermediate processing chamber;
The transfer arm of the object to be processed, and the objects to be processed in the uppermost stream, the lowermost stream, and the intermediate buffer chamber while the object to be processed is vacuum-processed in the uppermost stream, the lowermost stream, and the intermediate chamber, A transfer arm for moving from a position near the carry-in side to a position close to the carry-out side, and a communication opening is provided in a partition separating the processing chamber and the buffer chamber, which are connected to each other so as to be able to cut off communication. The transfer arm in each processing chamber and the transfer arm in the buffer chamber
Both have circular holes at the distal end, and these transfer arms can be moved to positions where the circular holes face the communication opening, and the transfer arm distal end circular hole peripheral portion in each buffer chamber is provided. On the side facing the processing chamber, a first seal member is supported so as to be displaced to a position in contact with a peripheral portion of the communication opening of the partition wall so as to be able to close the opening, and is supported by the first seal member. Is
A stepped hole is formed so as to be aligned with the circular hole at the tip of the transfer arm, and a catch for an object to be processed is provided in the stepped hole. In each buffer chamber, the first seal member is provided. The first sealing member is displaced to a position where the first sealing member abuts on the peripheral edge of the communication opening of the partition wall by pressing and engaging the stepped hole, and the first sealing member is connected by the first sealing member. A first pressing member that can move forward and backward so as to press so as to close the communication opening is provided, and a chuck for a processing object that can move forward and backward through the communication opening is attached to the first pressing member. The second seal member is displaced to a position in contact with the periphery of the communication opening of the partition wall on the side facing the buffer chamber of the peripheral edge of the circular hole of the tip end of the transfer arm so that the opening can be closed. , The second seal member,
A stepped hole is formed so as to be aligned with the circular hole at the tip end of the transfer arm in the processing chamber, and a catch for an object to be processed is provided in the stepped hole. The second sealing member is displaced to a position where the second sealing member is brought into contact with the peripheral edge of the communication opening of the partition wall by pressing and engaging the stepped hole of the member and closing the stepped hole. A pressing member is provided that can move forward and backward so as to press to close the communication opening, and when each processing chamber and each buffer chamber are to be shut off, the first and second pressing members press the first and second pressing members. And the second seal member is brought into contact with the peripheral edge of the communication opening of the partition wall so as to close the opening, and is covered between the transfer arm tip of each processing chamber and the transfer arm tip of each buffer chamber. When transporting the workpiece, the chuck for the workpiece is held in the first and the second positions. Vacuum processing apparatus wherein the moving through the communicating Spoken opening, configured as between the catch of the second seal member.