JPH02148003A - Surface reflecting mirror made of multilayered film - Google Patents
Surface reflecting mirror made of multilayered filmInfo
- Publication number
- JPH02148003A JPH02148003A JP30301288A JP30301288A JPH02148003A JP H02148003 A JPH02148003 A JP H02148003A JP 30301288 A JP30301288 A JP 30301288A JP 30301288 A JP30301288 A JP 30301288A JP H02148003 A JPH02148003 A JP H02148003A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- refractive index
- reflecting mirror
- multilayer film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims abstract description 216
- 239000000463 material Substances 0.000 claims abstract description 42
- 239000012788 optical film Substances 0.000 claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 23
- 239000002184 metal Substances 0.000 claims abstract description 23
- 239000004065 semiconductor Substances 0.000 claims abstract description 23
- 230000003287 optical effect Effects 0.000 claims description 41
- 239000011521 glass Substances 0.000 abstract description 31
- 238000002310 reflectometry Methods 0.000 abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 5
- -1 MgF2 Chemical compound 0.000 abstract description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052681 coesite Inorganic materials 0.000 abstract description 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 3
- 229910052682 stishovite Inorganic materials 0.000 abstract description 3
- 229910052905 tridymite Inorganic materials 0.000 abstract description 3
- 150000002222 fluorine compounds Chemical class 0.000 abstract description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 2
- 150000003568 thioethers Chemical class 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 description 46
- 230000003595 spectral effect Effects 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910052593 corundum Inorganic materials 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 229910001845 yogo sapphire Inorganic materials 0.000 description 4
- 238000000576 coating method Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910020187 CeF3 Inorganic materials 0.000 description 1
- 241000282412 Homo Species 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910001179 chromel Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は反射鏡に係り、特に防眩性、高視認性、装飾性
、生産性、コスト性等に優れた多層膜表面反射鏡に関す
る。本発明の多層膜表面反射鏡は、自動車用バックミラ
ー、路上の危険防止用凸面鏡(カーブミラー)、装飾ミ
ラー等に主として用いられるが、その他の用途にも幅広
く利用される。DETAILED DESCRIPTION OF THE INVENTION "Industrial Application Field" The present invention relates to a reflecting mirror, and particularly to a multilayer film surface reflecting mirror that is excellent in anti-glare properties, high visibility, decorative properties, productivity, cost efficiency, etc. The multilayer film surface reflecting mirror of the present invention is mainly used for automobile rearview mirrors, convex mirrors (curved mirrors) for road hazard prevention, decorative mirrors, etc., but is also widely used for other uses.
「従来技術」
多層膜表面反射鏡の一例として、特開昭63−1658
05号公報には、ガラス基板の片面に誘電体多層膜を設
け、さらに同一基板の裏面に光吸収膜を設けてなり、前
記誘電体多層膜は交互に異なる屈折率を有する誘電体膜
を3〜6層順次積層して構成されており、かつ誘電体多
層膜を構成する3〜6層の誘電体膜の少くとも1層はλ
/2の光学膜厚を有する多層膜表面反射鏡が開示されて
いる。"Prior art" As an example of a multilayer film surface reflecting mirror, Japanese Patent Application Laid-Open No. 63-1658
No. 05 discloses that a dielectric multilayer film is provided on one side of a glass substrate, and a light absorption film is further provided on the back side of the same substrate, and the dielectric multilayer film has three dielectric films having different refractive indices alternately. It is constructed by sequentially laminating ~6 layers, and at least one layer of the 3 to 6 dielectric films constituting the dielectric multilayer film has λ
A multilayer surface reflector having an optical thickness of /2 is disclosed.
第2図に示す、人間の目の暗順応比視感度V′(λ)(
同図、曲線(1)参照)及び自動車ヘッドライト(ハロ
ゲンランプ)の分光エネルギー特性P(λ)(同図、直
線(2)参照)並びにそれらの積P(λ)xv’(λ)
(同図、曲線(3)参照)から明らかなように、夜間の
追従車のヘッドライトが目に感じる光の波長は主に48
0 nm〜550nmであり、この波長領域での反射率
が低いことが防眩効果を得るための重要な要素であるが
、前記特開昭63−165805号公報に記載の多層膜
表面反射鏡は、その分光反射率特性を第3図に示すよう
に、480nm〜550nmの波長領域において反射率
が低く防眩効果に優れている。またこの反射鏡は防眩に
必要な波長領域では、反射率が低く、その他の波長領域
では、反射率が高くなっているので視認性にも優れてい
る。The scotopic specific luminous efficiency V′(λ)(
(see curve (1) in the figure), spectral energy characteristics P(λ) of automobile headlights (halogen lamps) (see line (2) in the figure), and their product P(λ)xv'(λ)
(See curve (3) in the same figure) As is clear from the figure, the wavelength of light that is perceived by the headlights of the following vehicle at night is mainly 48
0 nm to 550 nm, and a low reflectance in this wavelength range is an important factor for obtaining an anti-glare effect. As shown in FIG. 3, its spectral reflectance characteristics show that the reflectance is low in the wavelength range of 480 nm to 550 nm, and the anti-glare effect is excellent. Further, this reflecting mirror has a low reflectance in the wavelength range necessary for anti-glare, and a high reflectance in other wavelength ranges, so it has excellent visibility.
[従来技術の問題点]
しかしながら、特開昭63−165805号公報に記載
の多層膜表面反射鏡は、ガラス基板の片面に設けられる
誘電体多層膜の層数が3〜6層と多く、誘電体多層膜の
形成のための真空蒸着工程が複雑となるばかりでなく、
同一基板の裏面に、前記真空蒸着工程と別工程で塗装、
焼成して光吸収体膜を形成する必要があるので、生産性
が悪く、コストアップにつながるという欠点があった。[Problems with the Prior Art] However, the multilayer film surface reflecting mirror described in JP-A No. 63-165805 has a large number of dielectric multilayer films, 3 to 6 layers, provided on one side of the glass substrate. Not only is the vacuum deposition process for forming multilayer films complicated;
Painting on the back side of the same substrate in a separate process from the vacuum deposition process,
Since it is necessary to form a light absorber film by baking, there is a drawback that productivity is poor and costs increase.
1[発明が解決しようとする問題点]
本発明の目的は従来の表面反射鏡の上述の如き問題点を
解消し、防眩性、視認性に優れているだけでなく、生産
性、コスト性等にも優れた表面反射鏡を提供することに
ある。1 [Problems to be Solved by the Invention] The purpose of the present invention is to solve the above-mentioned problems of conventional surface reflecting mirrors, and to provide not only excellent anti-glare properties and visibility, but also productivity and cost efficiency. It is an object of the present invention to provide an excellent surface reflecting mirror for various purposes such as the above.
[問題点を解決するための手段]
本発明は上述の問題点を解決するためになされたもので
あり、本発明の多層膜表面反射鏡は、基材の片面に金属
ないし半導体膜を設け、さらにその上に1層以上の屈折
率物質層からなる光学膜厚が3λ0/4(λ0は設計の
中心となる光の波長である)の誘電体、膜を設けてなる
ことを特徴とする。[Means for Solving the Problems] The present invention has been made to solve the above-mentioned problems, and the multilayer film surface reflecting mirror of the present invention includes a metal or semiconductor film provided on one side of a base material, Furthermore, a dielectric film having an optical thickness of 3λ0/4 (λ0 is the wavelength of light that is the center of the design) consisting of one or more refractive index material layers is provided thereon.
以下、本発明の詳細な説明する。The present invention will be explained in detail below.
本発明の多層膜表面反射鏡において用いられる基材とし
ては、透明基材が好ましいが、基材は透明でなくても良
い。この基材は両面が平面を有する基板や、少なくとも
一面が凸面又は凹面を有する基板(例えば平凹板、平凸
板、凹凸板、両凹板、両凸板なと)であるのが好ましい
。基材の好ましい材質としてはガラスやプラスチックが
挙げられるが、その他の材質のものを用いることもでき
る。The base material used in the multilayer film surface reflecting mirror of the present invention is preferably a transparent base material, but the base material does not have to be transparent. This base material is preferably a substrate having flat surfaces on both sides, or a substrate having at least one convex or concave surface (for example, a plano-concave plate, a plano-convex plate, a concave-convex plate, a biconcave plate, a biconvex plate, etc.). Preferred materials for the base material include glass and plastic, but other materials can also be used.
本発明の多層膜表面反射鏡においては、上記基材の片面
に金属ないし半導体膜が設けられ、さらにその上に誘電
体膜が設けられている。In the multilayer film surface reflecting mirror of the present invention, a metal or semiconductor film is provided on one side of the base material, and a dielectric film is further provided on the metal or semiconductor film.
そこで先ず、本発明の多層膜表面反射鏡において、基材
の片面に設けられる金属ないし半導体膜について説明す
る。First, a description will be given of the metal or semiconductor film provided on one side of the base material in the multilayer film surface reflecting mirror of the present invention.
この金属ないし半導体膜は、反射膜として機能するもの
であり、反射率が30%以上、特に50〜80%である
ものを用いるのが好ましい。このような金属ないし半導
体膜としては、C1−5Ni、Rh、AI、Ag、Co
、Fe、Si、Geなどの金属ないし半導体の単体や、
これらの金属ないし半導体の少なくとも1種を含む合金
などが用いられる。合金の例としては、インコネル(N
i80重量%、Cr14重量%、Fe6重量%から主と
して構成され、その池の不純物を微量含む)やクロメル
(Ni80ii量%、Cr2O重景%から主として構成
され、その他の不純物を微量含む)が挙げられる。金属
ないし半導体膜は、1層の金属ないし半導体層によって
形成しても良いが、特に反射鏡の反射率を可視領域で上
げるには、1層の金属ないし半導体股上にさらに反射率
の高い異種の金属ないし半導体膜を形成することもでき
る。This metal or semiconductor film functions as a reflective film, and it is preferable to use one having a reflectance of 30% or more, particularly 50 to 80%. Such metal or semiconductor films include C1-5Ni, Rh, AI, Ag, Co
, simple metals or semiconductors such as Fe, Si, Ge,
An alloy containing at least one of these metals or semiconductors is used. An example of an alloy is Inconel (N
Mainly composed of 80% by weight of Ni, 14% by weight of Cr, and 6% by weight of Fe, including a small amount of impurities) and chromel (mainly composed of 80% by weight of Ni, 14% by weight of Cr2O, and containing a small amount of other impurities). . The metal or semiconductor film may be formed of a single metal or semiconductor layer, but in order to increase the reflectance of the mirror in the visible range, a different type of material with higher reflectivity may be added on top of the single metal or semiconductor layer. A metal or semiconductor film can also be formed.
また3種以上の金属ないし半導体層を形成してもよい。Furthermore, three or more types of metal or semiconductor layers may be formed.
この金属ないし半導体膜の形成方法としては、後記誘電
体膜の場合と同様のコーティング方法(蒸着法、スパッ
タリング法、イオンブレーティング法、CVD法など)
が採用される。The method for forming this metal or semiconductor film is the same coating method as for the dielectric film described later (evaporation method, sputtering method, ion blating method, CVD method, etc.).
will be adopted.
次に、前記金属ないし半導体股上に設けられる誘電体膜
について説明すると、この誘電体膜は、1層以上の屈折
率物質層からなる光学膜厚が3^0/4(λOは設計の
中心となる光の波長である)の誘電体膜である。ここに
前記屈折率物質層は、屈折率が1.3〜2.4の屈折率
物質によって形成するのが好ましく、このような屈折率
物質としては、Sin、TiO2、Ta205 、Zr
O2,5i02 、HfO2、AI203等の酸化物や
MgF2 、CeF3等の弗化物やZnS等の硫化物お
よびこれらの混合物が適宜用いられる。Next, to explain the dielectric film provided on the metal or semiconductor layer, this dielectric film consists of one or more refractive index material layers and has an optical thickness of 3^0/4 (λO is the center of the design). It is a dielectric film with a wavelength of light that is Here, the refractive index material layer is preferably formed of a refractive index material having a refractive index of 1.3 to 2.4, and examples of such refractive index materials include Sin, TiO2, Ta205, and Zr.
Oxides such as O2,5i02, HfO2, and AI203, fluorides such as MgF2 and CeF3, sulfides such as ZnS, and mixtures thereof are used as appropriate.
上記の如く誘電体膜の光学膜厚は3λ0/4に限定され
る。この膜厚を上記に限定した理由は、この限定により
はじめて防眩性および視認性共にずぐれた反射特性が得
られるからである。As mentioned above, the optical thickness of the dielectric film is limited to 3λ0/4. The reason why this film thickness is limited to the above range is that only by this limitation can a reflective property with excellent anti-glare properties and visibility be obtained.
光学膜厚が3λO/4の前記誘電体膜は、1層の屈折率
物質層によって形成しても良いが、光学膜厚がλO/4
の1種の屈折率物質層と、これに隣接する、光学膜厚が
2^o/4の他種の屈折率物質層とによって光学膜厚が
3λo、/4の誘電体膜を形成しても良い。The dielectric film having an optical thickness of 3λO/4 may be formed by a single refractive index material layer;
A dielectric film having an optical thickness of 3λo/4 is formed by one type of refractive index material layer and an adjacent refractive index material layer of another type having an optical thickness of 2^o/4. Also good.
また、光学膜厚がλo/4の1種の屈折率物質層と、λ
0/4の他種の屈折率物質層と、λO/4のさらに他種
の屈折率物質層とによって光学膜厚が3λO/4の誘電
体膜を形成しても良い。さらに光学膜厚が3λo/4の
前記誘電体、膜は、光学膜厚がλo/4の1種の屈折率
物質と、この両側に設けられた、光学膜厚がλo/4の
他種の屈折率物質層によって形成され、両側に設けられ
た屈折率物質層が同種のものであっても良い。Further, a refractive index material layer having an optical thickness of λo/4 and λ
A dielectric film having an optical thickness of 3λO/4 may be formed by a layer of another type of refractive index material of 0/4 and a layer of another type of refractive index material of λO/4. Further, the dielectric film having an optical thickness of 3λo/4 includes one type of refractive index material having an optical thickness of λo/4, and another type of refractive index material having an optical thickness of λo/4 provided on both sides of the dielectric substance and film. The refractive index material layers formed by the refractive index material layers and provided on both sides may be of the same type.
この誘電体膜の形成方法としては、蒸着法、スパッタ法
、イオンブレーティング法等の物理的コーティング方法
あるいはCVD法、有機溶液からの薄膜形成法等のコー
ティング方法が挙げられる。Examples of methods for forming this dielectric film include physical coating methods such as vapor deposition, sputtering, and ion-blating, and coating methods such as CVD and thin film formation from an organic solution.
[実施例]
以下実施例を挙げて本発明の好ましい具体例を説明する
が、本発明はこれらの実施例に限定されるものではない
。[Examples] Preferred specific examples of the present invention will be described below with reference to Examples, but the present invention is not limited to these Examples.
実施例1
第1図(A)は本発明の多層膜表面反射鏡の好ましい実
施例の要部拡大断面図であり、図中、1はガラス基板、
2はCr膜、3は屈折率1.46のS i02からなる
光学膜厚3λo/4(本実施例において、設計の中心と
なる光の波長λ0は540nmであり、従って3λO/
4は405nmである)の屈折率膜層(3M層)である
。すなわち、この実施例の多層膜表面反射鏡はガラス基
板の片面に基板側からC1−膜−3M層の順で多層膜が
形成されている。この多層膜表面反射鏡の分光反射特性
を第4図に示す。第4図から明らかなように、この実施
例の多層膜表面反射鏡は、後記比較例の多層膜表面反射
鏡に比べて、暗順応比視感度とへラドライトの分光エネ
ルギーの積の高い領域にほぼ相当する480nm−58
0nmの反射率が低下しているので防眩性にすぐれ、か
つ人間の目にとって明るさの感度の低い青及び赤の波長
である400nI11〜480nIl+(青)及び58
011111〜700t1m(赤)における反射率が上
昇しているので、視認性にすぐれている。Embodiment 1 FIG. 1(A) is an enlarged cross-sectional view of the main parts of a preferred embodiment of the multilayer film surface reflecting mirror of the present invention, in which 1 is a glass substrate;
2 is a Cr film, 3 is an SiO2 film with a refractive index of 1.46, and has an optical film thickness of 3λo/4 (in this example, the wavelength λ0 of light, which is the center of the design, is 540 nm, so the optical film thickness is 3λo/4).
4 is a refractive index film layer (3M layer) with a thickness of 405 nm. That is, in the multilayer film surface reflecting mirror of this embodiment, a multilayer film is formed on one side of a glass substrate in the order of C1-film-3M layer from the substrate side. The spectral reflection characteristics of this multilayer surface reflecting mirror are shown in FIG. As is clear from FIG. 4, the multilayer film surface reflector of this example is used in a region where the product of the scotopic specific luminous efficiency and the spectral energy of heradrite is higher than that of the multilayer film surface reflector of the comparative example described later. Approximately equivalent to 480nm-58
400nI11 to 480nIl+ (blue) and 58 which are blue and red wavelengths with low brightness sensitivity for the human eye and have excellent anti-glare properties because the reflectance at 0 nm is reduced.
Since the reflectance from 011111 to 700t1m (red) is increased, visibility is excellent.
実施例2
第1図(B)は本発明の多層膜表面反射鏡の他の実施例
の要部拡大断面図であり、図中、1−1−はガラス基板
、12はCr膜、13はRh膜、14は屈折率1446
のS i 02からなる光学膜厚3λO/4(本実施例
において、設計の中心となる光の波長は540nmであ
り、従って3λo/4は405 nmである)の屈折率
膜層(3M層)である。Embodiment 2 FIG. 1(B) is an enlarged sectional view of main parts of another embodiment of the multilayer film surface reflecting mirror of the present invention, in which 1-1- is a glass substrate, 12 is a Cr film, and 13 is a Rh film, 14 has a refractive index of 1446
A refractive index film layer (3M layer) consisting of S i 02 and having an optical thickness of 3λO/4 (in this example, the wavelength of light that is the center of the design is 540 nm, so 3λo/4 is 405 nm). It is.
すなわち、この実施例の多層膜表面反射鏡はガラス基板
の片面に基板側からC1−膜→RhRh膜間3M層で多
層膜が形成されている。That is, in the multilayer film surface reflecting mirror of this embodiment, a multilayer film is formed on one side of a glass substrate with 3M layers between the C1 film and the RhRh film from the substrate side.
この多層膜表面反射鏡は第5図より明らかなように、実
施例1の多層膜表面反射鏡とほぼ同様の分光反射特性を
示し、防眩性および視認性にすぐれている。また実施例
1の多層膜表面反射鏡よりも全体的に反射率が向上し5
ており、高反射性を有している。As is clear from FIG. 5, this multilayer film surface reflector exhibits substantially the same spectral reflection characteristics as the multilayer film surface reflector of Example 1, and has excellent anti-glare properties and visibility. In addition, the overall reflectance was improved compared to the multilayer film surface reflector of Example 1.
It has high reflectivity.
実施例3
第1図(C)は本発明の多層膜表面反射鏡の他の実施例
の要部拡大断面図であ1八図中、21はガラス基板、2
2はGe膜、23は屈折率1.46の8102からなる
光学膜厚3^O/4(本実施例において、設計の中心と
なる光の波長λ0は540nmであり、従って3λo/
4は405nmである)の屈折率膜層(3M層)である
。すなわち、この実施例の多層膜表面反射鏡はガラス基
板の片面に基板側からGe膜−3M層の順で多層膜が形
成されている。Embodiment 3 FIG. 1(C) is an enlarged sectional view of main parts of another embodiment of the multilayer film surface reflecting mirror of the present invention. In FIG. 18, 21 is a glass substrate;
2 is a Ge film, 23 is an 8102 film with a refractive index of 1.46, and has an optical film thickness of 3^O/4 (in this example, the wavelength λ0 of light, which is the center of the design, is 540 nm, and therefore 3λo/4).
4 is a refractive index film layer (3M layer) with a thickness of 405 nm. That is, in the multilayer film surface reflecting mirror of this embodiment, a multilayer film is formed on one side of a glass substrate in the order of Ge film and 3M layer from the substrate side.
この多層膜表面反射鏡は、第6図に示すように、実施例
1の多層膜表面反射鏡とほぼ同様の分光反射特性を示し
、防眩性および視認性にすぐれている。As shown in FIG. 6, this multilayer film surface reflector exhibits substantially the same spectral reflection characteristics as the multilayer film surface reflector of Example 1, and has excellent anti-glare properties and visibility.
実施例4
第1−図(D>は本発明の多層膜表面反射鏡の他の実施
例の要部拡大断面図であり、図r4=1,31はガラス
基板、32はCr膜、33は屈折率12.46のS]、
02からなる光学膜厚λo/4(本実施例において、設
計の中心となる光の波長λ0は540nmであり、従っ
てλo/4は1350mである)の屈折率膜層(M1層
)、34は屈折率1.63のAl2O3からなる光学膜
厚2λo/4(270nm)の屈折率膜層(2M2層)
である。ずなわち、この実施例の多層膜表面反射鏡はガ
ラス基板の片面に基板側からCr膜→M 層92M2屑
の順で多層膜が形成されている(なお、M1層と2M2
層によって光学膜厚3λ0/4の屈折率膜層(3M層)
が形成されている)。Example 4 Figure 1 (D> is an enlarged sectional view of the main part of another example of the multilayer film surface reflecting mirror of the present invention, in which figure r4=1, 31 is a glass substrate, 32 is a Cr film, and 33 is a S with a refractive index of 12.46],
02, the refractive index film layer (M1 layer) with an optical film thickness λo/4 (in this example, the wavelength λ0 of the light that is the center of the design is 540 nm, and therefore λo/4 is 1350 m), 34 is A refractive index film layer (2M2 layer) with an optical thickness of 2λo/4 (270 nm) made of Al2O3 with a refractive index of 1.63.
It is. That is, in the multilayer film surface reflecting mirror of this embodiment, a multilayer film is formed on one side of a glass substrate in the order of Cr film → M layer 92M2 scraps from the substrate side (note that M1 layer and 2M2
Depending on the layer, a refractive index film layer with an optical thickness of 3λ0/4 (3M layer)
is formed).
この多層膜表面反射鏡は、第4図に示された実施例1の
多層膜表面反射鏡と同様の分光反射特性を示し、防眩性
および視認性にすぐれている。This multilayer film surface reflector exhibits the same spectral reflection characteristics as the multilayer film surface reflector of Example 1 shown in FIG. 4, and has excellent anti-glare properties and visibility.
実施例5
第1図(E)は本発明の多層膜表面反射鏡の他の実施例
の要部拡大断面図であり、図中、4]−はガラス基板、
42はCr膜、43はRh膜、44は屈折率1.46の
S i 02からなる光学膜厚λO/4(本実施例にお
いて、設計の中心となる光の波長λOは540nmであ
り、従ってλo/4は135nmである)の屈折率膜層
(M1層)、45は屈折率1,63のA1203からな
る光学膜厚2λo /4 (270nm)の屈折率膜層
(2M2層)である。すなわち、この実施例の多層膜表
面反射鏡は、ガラス基板の片面に基板側からCr膜→R
h膜→M1層→2M2層の順で多層膜が形成されている
(なおM 層と2M2層によって光学膜厚3λo/4の
屈折率膜層(3M層)が形成されている)。Example 5 FIG. 1(E) is an enlarged cross-sectional view of main parts of another example of the multilayer film surface reflecting mirror of the present invention, in which 4]- is a glass substrate,
42 is a Cr film, 43 is a Rh film, and 44 is an optical film made of S i 02 with a refractive index of 1.46, with an optical thickness of λO/4 (in this example, the wavelength λO of light, which is the center of the design, is 540 nm, so 45 is a refractive index film layer (M1 layer) having an optical thickness of 2λo/4 (270 nm) and made of A1203 with a refractive index of 1.63 (2M2 layer). That is, the multilayer film surface reflecting mirror of this example has a Cr film→R on one side of the glass substrate from the substrate side.
A multilayer film is formed in the order of h film→M1 layer→2M2 layer (the M layer and the 2M2 layer form a refractive index film layer (3M layer) with an optical thickness of 3λo/4).
この多層膜表面反射鏡は第5図に示さ′Fした実施例2
の多層膜表面反射鏡と同様の分光反射特性を示し、防眩
性および視認性にすぐれている。また高反射性を有して
いる。This multilayer film surface reflecting mirror is shown in FIG.
It exhibits spectral reflection characteristics similar to those of the multilayer film surface reflector, and has excellent anti-glare properties and visibility. It also has high reflectivity.
実施例6
第1−図(F)は本発明の多層膜表面反射鏡の他の実施
例の要部拡大断面図であり、図中、51はガラス基板、
52はGe膜、53は屈折率]−946のS i 02
からなる光学膜厚λO/4(本実施例において、設計の
中心となる光の波長λOは540nmであり、従ってλ
o/4は135nmである)の屈折率膜層(M1層〉、
54は屈折率1.63のA l 203からなる光学膜
厚2λo/4(270n…)の屈折率膜層(2M2層)
である。すなわち、この実施例の多層膜表面反射鏡はガ
ラス基板の片面に基板側からGe膜→M1層→2M2層
の順で多層膜が形成されている(なおM1層と2M2層
によって光学膜厚3λ0/4の屈折率膜層(3M層)が
形成されている)。Example 6 FIG. 1 (F) is an enlarged sectional view of main parts of another example of the multilayer film surface reflecting mirror of the present invention, and in the figure, 51 is a glass substrate;
52 is a Ge film, 53 is a refractive index] -946 S i 02
Optical film thickness λO/4 (In this example, the wavelength λO of light that is the center of the design is 540 nm, so λ
o/4 is 135 nm) refractive index film layer (M1 layer),
54 is a refractive index film layer (2M2 layer) with an optical thickness of 2λo/4 (270n...) made of Al 203 with a refractive index of 1.63.
It is. That is, in the multilayer film surface reflecting mirror of this example, a multilayer film is formed on one side of a glass substrate in the order of Ge film → M1 layer → 2M2 layer from the substrate side (the optical film thickness is 3λ0 by the M1 layer and the 2M2 layer). /4 refractive index film layer (3M layer) is formed).
この多層膜表面反射鏡は第6図に示された、実施例3の
多層膜表面反射鏡と同様の分光反射特性を示し、防眩性
および視認性にすぐれている。This multilayer film surface reflector exhibits the same spectral reflection characteristics as the multilayer film surface reflector of Example 3 shown in FIG. 6, and has excellent anti-glare properties and visibility.
実施例7
第1図(G)は本発明の多層膜表面反射鏡の他の実施例
の要部拡大断面図であり、図中、61はガラス基板、6
2はCr膜、63は屈折率1.63のAl2O3からな
る光学膜厚λO/4(本実施例において、設計の中心と
なる光の波長λ0は540nmであり、従ってλo/4
は135nmである)の屈折率膜/iJ(M1層)、6
4は屈折率1゜63のCe F 3からなる光学膜厚λ
O/4(]、35nm)の屈折率膜層(M27im)
、65は屈折率146のSj、02からなる光学膜厚λ
O/4(1350…)の屈折率膜層(M3層)である。Embodiment 7 FIG. 1(G) is an enlarged sectional view of main parts of another embodiment of the multilayer film surface reflecting mirror of the present invention, in which 61 is a glass substrate;
2 is a Cr film, 63 is an Al2O3 film with a refractive index of 1.63, and has an optical film thickness of λO/4 (in this example, the wavelength λ0 of light, which is the center of the design, is 540 nm, and therefore λo/4).
is 135 nm) refractive index film/iJ (M1 layer), 6
4 is the optical film thickness λ made of Ce F 3 with a refractive index of 1°63
O/4 (], 35 nm) refractive index film layer (M27im)
, 65 is the optical film thickness λ consisting of Sj, 02 with a refractive index of 146
It is a refractive index film layer (M3 layer) of O/4 (1350...).
すなわち、この実施例の多層膜表面反射鏡はガラス基板
の片面に基板側からCr膜→M 層−M2層→M3層の
順で多層膜が形成されている(なおM1層とM2層とM
3層によって光学膜厚3λo/4の屈折率膜層(3M層
りが形成されている)。That is, in the multilayer film surface reflecting mirror of this embodiment, a multilayer film is formed on one side of a glass substrate in the order of Cr film → M layer → M2 layer → M3 layer (in addition, M1 layer, M2 layer, and M3 layer).
A refractive index film layer with an optical thickness of 3λo/4 (3M layers are formed) by three layers.
この多層膜表面反射鏡は第4図に示した実施例1の多層
膜表面反射鏡と同様の分光反射特性を示し、防眩性およ
び視認性にすぐれている。This multilayer film surface reflector exhibits the same spectral reflection characteristics as the multilayer film surface reflector of Example 1 shown in FIG. 4, and has excellent anti-glare properties and visibility.
実施例8
第1図(H)は本発明の多層膜表面反射鏡の他の実施例
の要部拡大断面図であり、図中、7]−はガラス基板、
72はCr膜、73はRh膜、74は屈折率1.63の
Al2O3からなる光学膜厚λO/4(本実施例におい
て、設計の中心となる光の波長^Oは540nmであり
、従ってλO/4は1350mである〉の屈折率膜層(
M1層)、75は屈折率1.63のCe F 3からな
る光学膜厚^0 /4 (135nm)の屈折率膜層(
M2層)、76は屈折率1.46の3102からなる光
学膜厚λO/4 (135nm)の屈折率膜層(M3層
)である。すなわち、この実施例の多層膜表面反射鏡は
ガラス基板の片面に基板側からCr膜−R,h膜→M1
層−M22分間3層の順で多層膜が形成されている(な
おM 層とM2層とへ月層にょって光学膜厚3λ0/4
の屈折率膜層(3M層)が形成されている)。Example 8 FIG. 1 (H) is an enlarged cross-sectional view of main parts of another example of the multilayer film surface reflecting mirror of the present invention, in which 7]- is a glass substrate,
72 is a Cr film, 73 is a Rh film, 74 is an Al2O3 film with a refractive index of 1.63, and has an optical thickness of λO/4 (in this example, the wavelength of light that is central to the design is 540 nm, so λO /4 is 1350 m> refractive index film layer (
M1 layer), 75 is a refractive index film layer (
76 is a refractive index film layer (M3 layer) having an optical thickness λO/4 (135 nm) and made of 3102 having a refractive index of 1.46. That is, the multilayer film surface reflecting mirror of this embodiment has a Cr film -R, an h film→M1 on one side of a glass substrate from the substrate side.
Layer-M22 minutes A multilayer film is formed in the order of 3 layers (the optical film thickness is 3λ0/4 by the M layer, M2 layer, and Hezuki layer).
refractive index film layer (3M layer) is formed).
この多層膜表面反射鏡は、第5図に示された、実施例2
の多層膜表面反射鏡と同様の分光反射特性を示し1、防
眩性および視認性にすぐれている。This multilayer film surface reflecting mirror is the embodiment 2 shown in FIG.
It exhibits spectral reflection characteristics similar to those of the multilayer film surface reflecting mirror 1, and has excellent anti-glare properties and visibility.
また高い反射性を有している。It also has high reflectivity.
実施例9
第1図(I)は、本発明の多層膜表面反射鏡の他の実施
例の要部拡大断面図であり、図中、8]−はガラス基板
、82はGe膜、83は屈折率1゜63のAl2O3か
らなる光学膜厚λo/4(本実施例において、設計の中
心となる光の波長λ0は540nmであり、従ってλo
/4は135nmである)の屈折率膜層(M1層)、8
4は屈折率1゜63のCe F 2からなる光学膜厚λ
o/4(135nm)の屈折率膜層(M2層〉、85は
屈折率1゜46のS i02からなる光学膜厚λO/4
(1350…)の屈折率膜層(IVI3層)である。す
なわち、この実施例の多層膜表面反射鏡は、ガラス基板
の片面に基板側からGe膜→M 層−M2層→M3層の
順で多層膜が形成されている(なおM1層とM2層とM
3層によって光学膜厚3λo/4の屈折率膜層(3M層
)が形成されている)。Embodiment 9 FIG. 1(I) is an enlarged sectional view of main parts of another embodiment of the multilayer film surface reflecting mirror of the present invention, in which 8]- is a glass substrate, 82 is a Ge film, and 83 is a An optical film made of Al2O3 with a refractive index of 1°63 has a thickness of λo/4 (in this example, the wavelength λ0 of the light that is the center of the design is 540 nm, so λo
/4 is 135 nm) refractive index film layer (M1 layer), 8
4 is the optical film thickness λ made of Ce F 2 with a refractive index of 1°63
o/4 (135 nm) refractive index film layer (M2 layer), 85 is an optical film thickness λO/4 made of Si02 with a refractive index of 1°46
(1350...) is a refractive index film layer (IVI 3 layer). That is, in the multilayer film surface reflecting mirror of this example, multilayer films are formed on one side of a glass substrate in the order of Ge film → M layer → M2 layer → M3 layer from the substrate side (note that M1 layer and M2 layer are separated from each other). M
The three layers form a refractive index film layer (3M layer) with an optical thickness of 3λo/4).
この多層膜表面反射鏡は第6図に示された実施例3の多
層膜表面反射鏡と同様の分光反射特性を示し、防眩性お
よび視認性にすぐれている。This multilayer film surface reflector exhibits the same spectral reflection characteristics as the multilayer film surface reflector of Example 3 shown in FIG. 6, and has excellent anti-glare properties and visibility.
実施例10
第1図(、J)は本発明の多層膜表面反射鏡の他の実施
例の要部拡大面図であり、図中、91はガラス基板、9
2はCr膜、93は屈折率1,63のA I 203か
らなる光学膜厚λO/4(本実施例において、設計の中
心となる光の波長は5400…であり、従ってλo/4
は1351mである)の屈折率膜層(MlN)、94は
屈折率1,63のCe F 3からなる光学膜厚λO/
4 (135nm)の屈折率膜層(M2層)、95は屈
折率1.63のA 1203からなる光学膜厚λO/4
(135nm)の屈折率層(M1層)である。すなわち
、この実施例の多層膜表面反射鏡はガラス基板の片面に
基板側からCr膜→M 層−M2層−M1層の順で多層
膜が形成されている(なお2つのMllと1つのM2層
によって光学膜厚3^o/4の屈折率膜層(3M層)が
形成されている)。Embodiment 10 FIG. 1 (, J) is an enlarged sectional view of main parts of another embodiment of the multilayer film surface reflecting mirror of the present invention, in which 91 is a glass substrate;
2 is a Cr film, 93 is an A I 203 film with a refractive index of 1.63, and has an optical film thickness of λO/4 (in this example, the wavelength of light that is central to the design is 5400..., so λo/4
is 1351 m), and 94 is the optical film thickness λO/
4 (135 nm) refractive index film layer (M2 layer), 95 is an optical film thickness λO/4 consisting of A 1203 with a refractive index of 1.63.
(135 nm) refractive index layer (M1 layer). That is, in the multilayer film surface reflecting mirror of this embodiment, a multilayer film is formed on one side of a glass substrate in the order of Cr film → M layer - M2 layer - M1 layer (two Mll and one M2 layer) from the substrate side. The layers form a refractive index film layer (3M layer) with an optical thickness of 3^o/4).
この多層膜表面反射鏡は第4図に示された実施例1の多
層膜表面反射鏡と同様の分光反射特性を示し、防眩性お
よび視認性にすぐれている。This multilayer film surface reflector exhibits the same spectral reflection characteristics as the multilayer film surface reflector of Example 1 shown in FIG. 4, and has excellent anti-glare properties and visibility.
実施例11
第1図(K)は本発明の多層膜表面反射鏡の他の実施例
の要部拡大断面図であり、図中、101はガラス基板、
102はCr膜、103はRh膜、104は屈折率1.
63のAl2O3からなる光学膜厚λO/4(本実施例
において、設計の中心となる光の波長λOは540nI
Ilであり、従ってλo/4は135nmである)の屈
折率膜1(M1層)、]−05は屈折率1.63のCe
F 3からなる光学膜厚λO/4 (135nm)の
屈折率膜層(M2層〉、106は屈折率1.63のAl
2O3からなる光学膜厚λo /4 (135nm)の
屈折率膜層(M1層)である。すなわち、この実施例の
多層膜表面反射鏡はガラス基板の片面に基板側からCr
膜→Rh膜→M 層→M2層→M1層の順で多層膜が形
成されている(なお2つのM1層と千つのM2層によっ
て光学膜厚3λo/4の屈折率膜層(3M層)が形成さ
れている)。Example 11 FIG. 1(K) is an enlarged cross-sectional view of main parts of another example of the multilayer film surface reflecting mirror of the present invention, and in the figure, 101 is a glass substrate,
102 is a Cr film, 103 is a Rh film, and 104 is a refractive index of 1.
Optical film thickness λO/4 (in this example, the wavelength λO of the light that is the center of the design is 540 nI)
Il, therefore λo/4 is 135 nm) refractive index film 1 (M1 layer), ]-05 is Ce with a refractive index of 1.63
A refractive index film layer (M2 layer) with an optical thickness of λO/4 (135 nm) consisting of F3, 106 is Al with a refractive index of 1.63.
This is a refractive index film layer (M1 layer) made of 2O3 and having an optical thickness of λo/4 (135 nm). That is, the multilayer film surface reflecting mirror of this example has Cr coated on one side of the glass substrate from the substrate side.
A multilayer film is formed in the order of film → Rh film → M layer → M2 layer → M1 layer (note that two M1 layers and 1,000 M2 layers form a refractive index film layer (3M layer) with an optical thickness of 3λo/4. is formed).
この多層膜表面反射鏡は第5図に示された実施例2の多
層膜表面反射鏡と同様の分光反射特性を示し、防眩性お
よび視認性にすぐれている。また高い反射性を有してい
る。This multilayer film surface reflector exhibits the same spectral reflection characteristics as the multilayer film surface reflector of Example 2 shown in FIG. 5, and has excellent anti-glare properties and visibility. It also has high reflectivity.
実施例12
第1図(L)は本発明の多層膜表面反射鏡の他の実施例
の要部拡大断面図であり、図中、111はガラス基板、
1]−2はGe膜、113は屈折率1.63のA I
203からなる光学膜厚λo/4(本実施例において、
設計の中心となる光の波長λOは540nmであり、従
ってλO/4は135nmである)の屈折率膜層(M1
層)、114は屈折率]、、6BのCeF からなる
光学膜厚λ0/4(135nm)の屈折率膜層(M2層
)、]−15は屈折率1.63のAI Oからなる光
学膜厚λ0 /4 (135nm)の屈折率膜層(IV
11層)である。すなわち、この実施例の多層膜表面反
射鏡はガラス基板の片面に基板側からGe膜−M1層→
M2層→M1層の順で多層膜が形成されている(なお2
つのM層層と1つのM層層によって光学膜厚3λo/4
の屈折率膜層(3M層)が形成されている)。Embodiment 12 FIG. 1(L) is an enlarged sectional view of main parts of another embodiment of the multilayer film surface reflecting mirror of the present invention, and in the figure, 111 is a glass substrate;
1]-2 is a Ge film, 113 is an AI with a refractive index of 1.63
Optical film thickness λo/4 consisting of 203 (in this example,
The wavelength λO of the light that is central to the design is 540 nm, so λO/4 is 135 nm).
layer), 114 is a refractive index film layer (M2 layer) made of CeF with a refractive index of 6B and has an optical thickness of λ0/4 (135 nm), ]-15 is an optical film made of AIO with a refractive index of 1.63 A refractive index film layer (IV
11 layers). That is, the multilayer film surface reflecting mirror of this example has a Ge film-M1 layer on one side of the glass substrate from the substrate side.
A multilayer film is formed in the order of M2 layer → M1 layer (note 2
Optical film thickness 3λo/4 with two M-layers and one M-layer
refractive index film layer (3M layer) is formed).
この多層膜表面反射鏡は第6図に示された実施例3の多
層膜表面反射鏡と同様の分光反射特性を示し、防眩性お
よび視認性にすぐれている。This multilayer film surface reflector exhibits the same spectral reflection characteristics as the multilayer film surface reflector of Example 3 shown in FIG. 6, and has excellent anti-glare properties and visibility.
実施例1〜12における誘電体膜の各層を等価膜に置き
換えても同様の反射特性か得られる。Even if each layer of the dielectric film in Examples 1 to 12 is replaced with an equivalent film, similar reflection characteristics can be obtained.
比較例
第7図(A>、(B)は本発明の実施例1の多層膜表面
反射鏡において、屈折率1.46の5i02からなる光
学膜厚3λo/4の屈折率層(3M層)を、同一物質で
光学膜厚2^0/4の屈折率膜層(2M層)、光学膜厚
4λo/4の屈折率膜N(4M層)にそれぞれ変えた、
比較例の多層膜表面反射鏡の要部拡大断面図であり、図
中、121.131はガラス基板、122,132はC
r膜、123は2M層、13Bは4M層である。Comparative Example FIG. 7 (A>, (B) shows a refractive index layer (3M layer) with an optical thickness of 3λo/4 made of 5i02 with a refractive index of 1.46 in the multilayer film surface reflecting mirror of Example 1 of the present invention. were changed to a refractive index film layer (2M layer) with an optical thickness of 2^0/4 and a refractive index film N (4M layer) with an optical thickness of 4λo/4 using the same material, respectively.
It is an enlarged sectional view of main parts of a multilayer film surface reflecting mirror of a comparative example, in which 121 and 131 are glass substrates, and 122 and 132 are C
The r film 123 is a 2M layer, and 13B is a 4M layer.
すなわちこの比較例の多層膜表面反射鏡はガラス基板の
片面に基板側からCr膜→2M!(または4M層)の順
で多層膜が形成されている。In other words, the multilayer film surface reflecting mirror of this comparative example has a Cr film on one side of the glass substrate from the substrate side → 2M! A multilayer film is formed in this order (or 4M layers).
この比較例の多層膜表面反射鏡の分光反射特性を第8図
に示す(なお図中、(1)の曲線はCr膜上に2M層を
有する場合、(2)の曲線はCr膜上に4M層を有する
場合に該当する)。The spectral reflection characteristics of the multilayer surface reflector of this comparative example are shown in Figure 8 (in the figure, the curve (1) is for the case where the 2M layer is on the Cr film, and the curve (2) is for the case where the 2M layer is on the Cr film). 4M layer).
第8図から明らかなように、比較例の多層膜表面反射鏡
は、実施例1〜12の多層膜表面反射鏡と異なり、暗順
応比視感度とヘッドライトの分光エネルギーの積の高い
領域480−550nmの反射率が高くなっているので
、防眩性が悪く、かつ人間にとって明るさの感度の低い
青及び赤の波長である430n…〜480nm(青)及
び580nm〜700nm(赤)における反射率が低く
なっているため視認性も悪くなっている。As is clear from FIG. 8, unlike the multilayer surface reflectors of Examples 1 to 12, the multilayer surface reflector of the comparative example has a region 480 where the product of the scotopic specific luminous efficiency and the spectral energy of the headlight is high. -Since the reflectance at 550 nm is high, the anti-glare property is poor, and the reflection at 430 nm to 480 nm (blue) and 580 nm to 700 nm (red), which are blue and red wavelengths to which humans have low brightness sensitivity. Visibility is also poor due to the low rate.
よって防眩性および視認性をもつ多層膜表面反射鏡を得
るためには実施例1〜12及び比較例かられかるように
ガラス基板の片面に基板側から金属ないし半導体膜及び
光学膜厚3λo/4の3M層をこの順で形成させること
が必須であることが明らかとなった。Therefore, in order to obtain a multilayer film surface reflecting mirror with anti-glare properties and visibility, as can be seen from Examples 1 to 12 and Comparative Examples, a metal or semiconductor film and an optical film thickness of 3λo/1 are coated on one side of a glass substrate from the substrate side. It has become clear that it is essential to form the 4 3M layers in this order.
[発明の効果]
本発明の多層膜表面反射鏡は次のような技術的効果を有
する。[Effects of the Invention] The multilayer film surface reflecting mirror of the present invention has the following technical effects.
(1)防眩性にすぐれている。(1) Excellent anti-glare properties.
本発明の反射鏡は第4〜6図から明らかなように、第2
図、曲線(3)によって示されるP(λ)xV’(λ)
の値の大きな領域にほぼ相当する480nmから600
nmで反射率が低いので防眩効果にすぐれている。As is clear from FIGS. 4 to 6, the reflecting mirror of the present invention has a second
Figure, P(λ) x V'(λ) shown by curve (3)
from 480 nm to 600 nm, which corresponds to the region with large values of
It has a low reflectance at nm, so it has excellent anti-glare effects.
(11)視認性にすぐれている。(11) Excellent visibility.
本発明の反射鏡は第4〜6図に示すように防眩に必要な
波長領域では反射率が低く、その他の波長領域で反射率
が高くなっているので、すぐれた視認性が確保される。As shown in Figures 4 to 6, the reflector of the present invention has a low reflectance in the wavelength range necessary for anti-glare, and a high reflectance in other wavelength ranges, ensuring excellent visibility. .
また本発明の反射鏡は明るさの感度の良い緑の領域(4
90〜580nm)の反射率を青の領域(400〜48
0nm)や赤の領域(590〜750nm)よりも下げ
てあり、結果として青、赤の目の感度の低い色を増感す
ることから色の分別性(コントラスト)が向上するとい
う利点もある。In addition, the reflector of the present invention has good brightness sensitivity in the green region (4
90-580nm) in the blue region (400-48nm)
0 nm) and the red region (590 to 750 nm), and as a result, it sensitizes blue and red colors to which the eye has low sensitivity, which also has the advantage of improving color discrimination (contrast).
(iii)装飾性、ファツション性にすぐれている。(iii) Excellent decorative and fashionable properties.
本発明の反射鏡は防眩性及び視認性を追及した結果、そ
の反射色がマゼンタ色を帯びている。As a result of pursuing anti-glare properties and visibility, the reflecting mirror of the present invention has a magenta-tinged reflected color.
このマゼンタ色は高級感を与え、他の反射鏡との差別化
が可能となる。This magenta color gives the mirror a sense of luxury and allows it to be differentiated from other reflective mirrors.
(iv)生産性、コスト性にすぐれている。(iv) Excellent productivity and cost efficiency.
本発明の反射鏡の製造においては、形成される誘電体膜
の層数が少ないことおよびこの誘電体膜と金属ないし半
導体膜とを同一の成膜手段によって形成することができ
ること等の利点を有するので、形成される誘電体多層膜
の層数が多く、かつ光吸収膜の塗装、焼成の必要な、前
記特開昭63 165805号公報の反射鏡の場合と異
なり、生産性及びコスト性にすぐれている。In manufacturing the reflecting mirror of the present invention, there are advantages such as a small number of layers of the dielectric film formed and the ability to form the dielectric film and the metal or semiconductor film by the same film forming method. Therefore, unlike the case of the reflecting mirror disclosed in JP-A-63-165805, which has a large number of dielectric multilayer films and requires painting and baking a light-absorbing film, this method has excellent productivity and cost efficiency. ing.
以上、要するに本発明によれば、層数が少ないにも拘ら
ず、防眩性、視認性、装飾性、有害光線カット性等の利
点を有する多層膜表面反射鏡が提供された。In summary, according to the present invention, a multilayer film surface reflecting mirror is provided which has advantages such as anti-glare properties, visibility, decorative properties, and harmful ray blocking properties despite having a small number of layers.
第1図は本発明の多層膜表面反射鏡の要部拡大断面図、
第2図は人間の目の暗順応比視感度および自動車前照灯
の分光エネルギー特性並びにそれらの積である人間の目
に感じる自動車前照灯の分光エネルギー特性図、第3図
は従来の反射鏡の分光反射特性図、第4図、第5図及び
第6図は本発明の反射鏡の分光反射特性図、第7図は比
較例の多層膜表面反射鏡の要部拡大断面図、第8図は比
較例の反射鏡の分光反射特性図である。FIG. 1 is an enlarged sectional view of the main parts of the multilayer film surface reflecting mirror of the present invention.
Figure 2 shows the scotopic specific luminous efficiency of the human eye, the spectral energy characteristics of a car headlamp, and the spectral energy characteristics of a car headlamp perceived by the human eye, which is the product of these. 4, 5, and 6 are spectral reflection characteristic diagrams of the mirror of the present invention. FIG. FIG. 8 is a spectral reflection characteristic diagram of a reflecting mirror of a comparative example.
Claims (1)
の上に1層以上の屈折率物質層からなる光学膜厚が3λ
_0/4(λ_0は設計の中心となる光の波長である)
の誘電体膜を設けてなることを特徴とする多層膜表面反
射鏡。 2、光学膜厚が3λ_0/4の前記誘電体膜が、1層の
屈折率物質層によって形成されている、請求項1に記載
の多層膜表面反射鏡。 3、光学膜厚が3λ_0/4の前記誘電体膜が、光学膜
厚がλ_0/4の1種の屈折率物質層と、光学膜厚が2
λ_0/4の他種の屈折率物質層とによって形成されて
いる、請求項1に記載の多層膜表面反射鏡。 4、光学膜厚が3λ_0/4の前記誘電体膜が、光学膜
厚がλ_0/4の1種の屈折率物質層と、光学膜厚がλ
_0/4の他種の屈折率物質層と、光学膜厚がλ_0/
4のさらに他種の屈折率物質層とによって形成されてい
る、請求項1に記載の多層膜表面反射鏡。 5、光学膜厚が3λ_0/4の前記誘電体膜が、光学膜
厚がλ_0/4の1種の屈折率物質層と、この両側に設
けられた、光学膜厚がλ_0/4の他種の屈折率物質層
とによって形成され、両側に設けられた屈折率物質層が
同種のものである、請求項1に記載の多層膜表面反射鏡
。 6、金属ないし半導体膜が1層又は2層以上の金属ない
し半導体層によって形成されている、請求項1〜5に記
載の多層膜表面反射鏡。[Claims] 1. A metal or semiconductor film is provided on one side of the base material, and one or more refractive index material layers are further formed on the metal or semiconductor film, and the optical film thickness is 3λ.
_0/4 (λ_0 is the wavelength of light that is the center of the design)
A multilayer film surface reflecting mirror characterized by being provided with a dielectric film of. 2. The multilayer surface reflecting mirror according to claim 1, wherein the dielectric film having an optical thickness of 3λ_0/4 is formed of one refractive index material layer. 3. The dielectric film with an optical thickness of 3λ_0/4 is composed of one type of refractive index material layer with an optical thickness of λ_0/4 and an optical thickness of 2
The multilayer film surface reflecting mirror according to claim 1, wherein the multilayer film surface reflecting mirror is formed of a layer of another type of refractive index material having a refractive index of λ_0/4. 4. The dielectric film with an optical thickness of 3λ_0/4 is composed of one type of refractive index material layer with an optical thickness of λ_0/4 and an optical thickness of λ_0/4.
Optical film thickness is λ_0/ with another type of refractive index material layer of _0/4
4. The multilayer film surface reflecting mirror according to claim 1, wherein the multilayer film surface reflecting mirror is formed of a layer of a refractive index material of another type. 5. The dielectric film having an optical thickness of 3λ_0/4 has one type of refractive index material layer having an optical thickness of λ_0/4, and another type of refractive index material layer having an optical thickness of λ_0/4 provided on both sides thereof. 2. The multilayer film surface reflecting mirror according to claim 1, wherein the refractive index material layers provided on both sides are of the same type. 6. The multilayer film surface reflecting mirror according to claims 1 to 5, wherein the metal or semiconductor film is formed of one or more metal or semiconductor layers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63303012A JP2719375B2 (en) | 1988-11-30 | 1988-11-30 | Multi-layer surface reflector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63303012A JP2719375B2 (en) | 1988-11-30 | 1988-11-30 | Multi-layer surface reflector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02148003A true JPH02148003A (en) | 1990-06-06 |
JP2719375B2 JP2719375B2 (en) | 1998-02-25 |
Family
ID=17915878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63303012A Expired - Lifetime JP2719375B2 (en) | 1988-11-30 | 1988-11-30 | Multi-layer surface reflector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2719375B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0933959A (en) * | 1995-07-14 | 1997-02-07 | Olympus Optical Co Ltd | Phase control film structure |
WO2018216122A1 (en) * | 2017-05-23 | 2018-11-29 | 株式会社島津製作所 | Heat-resistant reflecting mirror, gas concentration monitor and method for producing heat-resistant reflecting mirror |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59188602A (en) * | 1983-04-11 | 1984-10-26 | Nippon Soken Inc | Reflection mirror for car |
JPS63165805A (en) * | 1986-12-27 | 1988-07-09 | Hoya Corp | Multilayer film surface reflector |
-
1988
- 1988-11-30 JP JP63303012A patent/JP2719375B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59188602A (en) * | 1983-04-11 | 1984-10-26 | Nippon Soken Inc | Reflection mirror for car |
JPS63165805A (en) * | 1986-12-27 | 1988-07-09 | Hoya Corp | Multilayer film surface reflector |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0933959A (en) * | 1995-07-14 | 1997-02-07 | Olympus Optical Co Ltd | Phase control film structure |
WO2018216122A1 (en) * | 2017-05-23 | 2018-11-29 | 株式会社島津製作所 | Heat-resistant reflecting mirror, gas concentration monitor and method for producing heat-resistant reflecting mirror |
JPWO2018216122A1 (en) * | 2017-05-23 | 2020-01-16 | 株式会社島津製作所 | Heat-resistant reflector, gas concentration monitor, and method of manufacturing heat-resistant reflector |
Also Published As
Publication number | Publication date |
---|---|
JP2719375B2 (en) | 1998-02-25 |
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