JPH02147878U - - Google Patents

Info

Publication number

JPH02147878U

JPH02147878U JP1543989U JP1543989U JPH02147878U JP H02147878 U JPH02147878 U JP H02147878U JP 1543989 U JP1543989 U JP 1543989U JP 1543989 U JP1543989 U JP 1543989U JP H02147878 U JPH02147878 U JP H02147878U

Authority

JP

Japan

Prior art keywords

chamber

active metal

getter pump

shield plate

vacuum chamber

Prior art date

1989-02-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001816 cooling Methods 0.000 claims description 3
• 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 2
• 239000002184 metal Substances 0.000 claims 5
• 238000001704 evaporation Methods 0.000 claims 4
• 230000008020 evaporation Effects 0.000 claims 2
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
• 230000006698 induction Effects 0.000 description 2
• 239000000498 cooling water Substances 0.000 description 1
• 239000007788 liquid Substances 0.000 description 1
• 229910052757 nitrogen Inorganic materials 0.000 description 1