JPS61133558U - - Google Patents
Info
- Publication number
- JPS61133558U JPS61133558U JP1749285U JP1749285U JPS61133558U JP S61133558 U JPS61133558 U JP S61133558U JP 1749285 U JP1749285 U JP 1749285U JP 1749285 U JP1749285 U JP 1749285U JP S61133558 U JPS61133558 U JP S61133558U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- hole
- vacuum chamber
- metal vapor
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1749285U JPH0342034Y2 (https=) | 1985-02-08 | 1985-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1749285U JPH0342034Y2 (https=) | 1985-02-08 | 1985-02-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61133558U true JPS61133558U (https=) | 1986-08-20 |
| JPH0342034Y2 JPH0342034Y2 (https=) | 1991-09-03 |
Family
ID=30505245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1749285U Expired JPH0342034Y2 (https=) | 1985-02-08 | 1985-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342034Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03107452A (ja) * | 1989-09-08 | 1991-05-07 | Internatl Business Mach Corp <Ibm> | 気相付着装置 |
-
1985
- 1985-02-08 JP JP1749285U patent/JPH0342034Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03107452A (ja) * | 1989-09-08 | 1991-05-07 | Internatl Business Mach Corp <Ibm> | 気相付着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0342034Y2 (https=) | 1991-09-03 |