JPH02147827A - Piezoelectric element applying sensor - Google Patents

Piezoelectric element applying sensor

Info

Publication number
JPH02147827A
JPH02147827A JP30123088A JP30123088A JPH02147827A JP H02147827 A JPH02147827 A JP H02147827A JP 30123088 A JP30123088 A JP 30123088A JP 30123088 A JP30123088 A JP 30123088A JP H02147827 A JPH02147827 A JP H02147827A
Authority
JP
Japan
Prior art keywords
piezoelectric element
sensor
electrodes
electrode
positive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30123088A
Other languages
Japanese (ja)
Other versions
JPH0823536B2 (en
Inventor
Koji Yoshino
浩二 吉野
Takashi Kashimoto
隆 柏本
Masaaki Yamaguchi
公明 山口
Isao Kasai
笠井 功
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63301230A priority Critical patent/JPH0823536B2/en
Publication of JPH02147827A publication Critical patent/JPH02147827A/en
Publication of JPH0823536B2 publication Critical patent/JPH0823536B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Electric Ovens (AREA)

Abstract

PURPOSE:To simplify the constitution of a piezoelectric element applying sensor and, at the same time, to make the signal processing easier and to detect the cooked state of foods accurately by constituting the sensor in such a way that, when a positive temperature change is applied to the sensor, a positive high voltage can be outputted. CONSTITUTION:A pair of electrodes 3 having different polarities are vapor deposited on a piezoelectric element 2 and one end of the electrodes 3 is stuck onto a metallic plate 5 with a bonding agent 4. Lead wires 6 and 7 of an output section are extended from the electrodes 3. A molded resin body 8 encloses the element 2, electrodes 3, the bonding agent 4, load-out sections of the lead wires 6 and 7, and the surface of the plate 5 in the vicinity of the sticking surface of the element 2 in a united state. Since one of the electrodes 3 is connected with the reference potential of a single power source amplifier circuit which processes the signal of the element 2, with the polarity being selected so that a positive voltage can be outputted to the other electrode 3 when a positive temperature change is applied to the element 2, the cooked state of foods can be detected accurately with such simple constitution. Moreover since the metallic plate body is used for the reference potential as ground, etc., the output of this sensor can be processed easily and a high reliability can be realized.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、圧電素子の焦電効果を利用した圧電素子応用
センサに関するものであり、特に電子I/ンジなどの調
理機器関係の湿度センサに関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a sensor using a piezoelectric element that utilizes the pyroelectric effect of a piezoelectric element, and in particular to a humidity sensor for cooking appliances such as electronic I/O. be.

従来の技術 従来、湿度センサとしては、第6図に示すようにセンサ
チップ22.ヒータ23.樹脂ベース24.メツシュカ
バー25.端子26で構成されている。センサチップ2
2は湿度によりその抵抗値が変化するので、基準電圧と
その抵抗値で決まる電圧との比較によって、電子レンジ
の調理状態の検出を行なっていた。ヒータ23は、湿度
センサを電子レンジに用いた場合、食品のガス、油等に
よりセンサチップ22が汚れるのでリフレッシュをする
ためのものであり、メツシュカバー25は防風用で、ヒ
ータ23の省電力化のために用いている。(ナシゴナル
テクニカルレポートVOL、29 No、3 JAN 
19B3)発明が解決しようとする課題 しかしながら上記のように湿度センサを用いると、調理
中に食品中のガスや油などがセンサチップ22に付着し
て検出感度が落ちてくるため、−回の調理毎にリフレッ
シュ加熱処理用のヒータ23でセンサチップ22の付着
物を蒸発させなければならず、余分な電力やコストが発
生する上、抵抗両端の電圧を制御信号として用いている
ので、数多く生産する場合に、各構成要素であるセンサ
チップ22の抵抗や、その他の抵抗、電源電圧のばらつ
き等が制御電圧信号のばらつきに結び付(ことになり、
管理が困難であった。
2. Description of the Related Art Conventionally, a humidity sensor uses a sensor chip 22. as shown in FIG. Heater 23. Resin base 24. Mesh cover 25. It is composed of a terminal 26. Sensor chip 2
Since the resistance value of No. 2 changes depending on humidity, the cooking state of the microwave oven is detected by comparing a reference voltage with a voltage determined by the resistance value. The heater 23 is used to refresh the sensor chip 22 as it gets dirty due to food gas, oil, etc. when the humidity sensor is used in a microwave oven. It is used for this purpose. (Nasigonal Technical Report VOL, 29 No. 3 JAN
19B3) Problems to be Solved by the Invention However, when using a humidity sensor as described above, gas or oil in the food adheres to the sensor chip 22 during cooking, reducing detection sensitivity. It is necessary to evaporate deposits on the sensor chip 22 using the heater 23 for refresh heat treatment each time, which generates extra power and cost.In addition, since the voltage across the resistor is used as a control signal, it is difficult to produce a large number. In this case, the resistance of the sensor chip 22 which is each component, other resistances, variations in power supply voltage, etc. may lead to variations in the control voltage signal.
It was difficult to manage.

また、従来の湿度センサの代わりに圧電素子を用いる方
法もあるが、圧電素子の出力である分極電流は微小であ
り、制御する場合には増巾器が必要であり、またその極
性によっては出力が正方向に大きく出たり負方向に大き
く出るものがある。
There is also a method of using a piezoelectric element instead of a conventional humidity sensor, but the polarized current that is the output of the piezoelectric element is minute and requires an amplifier to control it, and the output may vary depending on its polarity. In some cases, the value appears largely in the positive direction, while in others it appears largely in the negative direction.

さらに、圧電素子の汚れや絶縁劣化を防ぐために金属板
を用いているが、調理機器に使用する場合、湿気や水蒸
気で金属板が調理機器のケースやオーブン等とショート
状態となる課題があった。
Furthermore, a metal plate is used to prevent dirt and insulation deterioration of the piezoelectric element, but when used in cooking equipment, there is a problem that the metal plate can short-circuit with the case of the cooking equipment, oven, etc. due to moisture or water vapor. .

そこで、本発明は圧電素子の出力を大きく取出し、回路
とのマツチングをとることを第1の目的としている。
Therefore, the first object of the present invention is to increase the output of the piezoelectric element and match it with the circuit.

第2の目的は圧電素子の出力を正確に安全に処理出来る
ことにある。
The second purpose is to be able to accurately and safely process the output of the piezoelectric element.

課題を解決するための手段 上記第1の目的を達成するために、本発明の圧電素子応
用センサは、圧電素子の極性を、電極の一方を前記圧電
素子の信号を処理する単電源増巾回路の基準電位として
、前記圧電素子に正の温度変化が加わった時に、前記電
極の他方に正なる電圧が発生するように接続する構成と
している。
Means for Solving the Problems In order to achieve the above-mentioned first object, the piezoelectric element applied sensor of the present invention has the polarity of the piezoelectric element changed, and one of the electrodes connected to a single power supply amplification circuit that processes the signal of the piezoelectric element. The other electrode is connected in such a way that a positive voltage is generated at the other electrode when a positive temperature change is applied to the piezoelectric element as a reference potential.

また第2の目的を達成するために、金属板もしくは導電
性を有する板体をグランド等の基準電位とする構成とし
ている。
In order to achieve the second objective, a metal plate or a conductive plate is used as a reference potential such as a ground.

作用 本発明によれば、圧電素子を用いており、電子レンジな
どの調理機器に使用する場合、正の温度変化が加わった
時に正の電圧が出力されるように極性を選んで接続する
ので、簡単な構成で食品の調理仕上り状態を正確に検知
出来る。
According to the present invention, a piezoelectric element is used, and when used in a cooking appliance such as a microwave oven, the polarity is selected and connected so that a positive voltage is output when a positive temperature change is applied. With a simple configuration, the cooking finish state of food can be accurately detected.

また、金属または導電性を有する板体をグランド等の基
準電位とするので、センサ出力の処理が容易で、高信顛
性を実現出来る。
Further, since a metal or conductive plate is used as a reference potential such as a ground, sensor output can be easily processed and high reliability can be achieved.

実施例 以下、本発明の一実施例を添付図面に基づいて説明する
。 第1図は圧電素子応用センサ1の構成を示している
。(a)は断面回、(b)は上から見た図である。チタ
ン酸鉛系の圧圧電素子2に一対の蒸着された極性3が施
され、電極3の一端は接着剤4で金属板5上に電気的に
接触し、接着されている。電極3からは出力部のり一ド
6,7が導出され、各リードは電気的に絶縁されている
。樹脂8は、環境湿度の影響を防ぐため、圧電素子2.
電極3.接着剤4.リード6.7の導出部、金属5の圧
電素子2の接着面付近等を、透湿性の無いモールド材で
一体に封止している。リード6.7のどちらが基準電位
になるかについては第2図で説明する。
EXAMPLE Hereinafter, an example of the present invention will be described based on the accompanying drawings. FIG. 1 shows the configuration of a piezoelectric element applied sensor 1. As shown in FIG. (a) is a cross-sectional view, and (b) is a view from above. A pair of vapor-deposited polarities 3 are applied to a lead titanate-based piezoelectric element 2, and one end of the electrode 3 is electrically contacted and bonded onto a metal plate 5 with an adhesive 4. Output leads 6 and 7 are led out from the electrode 3, and each lead is electrically insulated. The resin 8 is applied to the piezoelectric element 2 to prevent the influence of environmental humidity.
Electrode 3. Adhesive 4. The lead-out portion of the lead 6.7, the vicinity of the bonding surface of the piezoelectric element 2 made of metal 5, etc. are integrally sealed with a non-moisture permeable molding material. Which of the leads 6 and 7 is at the reference potential will be explained with reference to FIG.

第2図(a)で縦軸は圧電素子応用センサに加えられる
温度変化、横軸は時間である。(a)図のオン時に、圧
電素子応用センサに正の温度変化を加えた場合、圧電素
子の極性によって(b)図、又は(C)図の様なセンサ
出力■、が得られる。この発明においては、(b)図の
出力が得られる様に基準電位を選ぶこととしている。(
b)図であれば、圧電素子応用センサに正の温度変化が
加えられた場合、センサ出力としての正の電圧を発生し
、後続の単電源増巾回路とマツチングがとれることが判
る。
In FIG. 2(a), the vertical axis represents the temperature change applied to the piezoelectric element applied sensor, and the horizontal axis represents time. If a positive temperature change is applied to the piezoelectric element-applied sensor when it is turned on as shown in (a), the sensor output (2) as shown in (b) or (C) will be obtained depending on the polarity of the piezoelectric element. In this invention, the reference potential is selected so as to obtain the output shown in FIG. 3(b). (
b) From the figure, it can be seen that when a positive temperature change is applied to the piezoelectric element applied sensor, a positive voltage is generated as the sensor output, and matching can be achieved with the subsequent single power supply amplification circuit.

第3図には圧電素子の分極のメカニズムを示している。FIG. 3 shows the mechanism of polarization of a piezoelectric element.

圧電素子2.電極3は、平常状態では分極によって正負
の電荷でつり合っている。ところが外部から温度変化△
Tが加わると、圧電素子の焦電効果によってこの分極が
崩されてリード部に分極電流を発生する。ここでリード
部を抵抗8でショートすると、その抵抗日の両端に電圧
■、が取出せるのである。図中負の電荷を発生する側を
基準電位とするというのが、本発明の第一の請求項に対
応するものである。
Piezoelectric element 2. In a normal state, the electrode 3 has a balance of positive and negative charges due to polarization. However, temperature changes from outside△
When T is applied, this polarization is broken by the pyroelectric effect of the piezoelectric element, and a polarization current is generated in the lead portion. If the lead portion is short-circuited with a resistor 8, a voltage 2 can be obtained at both ends of the resistor. In the figure, the side on which negative charges are generated is set as the reference potential, which corresponds to the first claim of the present invention.

第4図は本発明の圧電素子応用センサを電子レンジに使
用する場合の具体構成例である。食品9を入れる加熱室
10と、食品9を高周波加熱するマグネトロン11.加
熱室排気部12に取付けた圧電素子応用センサ1.マグ
ネl−ロン11を冷却する冷却ファン13.冷却ファン
13の風を一部加熱室10へ送風するダクト14.圧電
素子応用センサ1の出力信号により各種R器動負を制御
する制御器15等で構成されている。
FIG. 4 shows a specific configuration example when the piezoelectric element applied sensor of the present invention is used in a microwave oven. A heating chamber 10 into which the food 9 is placed, and a magnetron 11 which heats the food 9 with high frequency. Piezoelectric element applied sensor attached to the heating chamber exhaust part 12 1. Cooling fan 13 for cooling Magne-Lon 11. A duct 14 that blows part of the air from the cooling fan 13 to the heating chamber 10. It is composed of a controller 15 and the like that controls various R device movements based on the output signals of the piezoelectric element application sensor 1.

食品9の加熱終了検知は以下のように行なわれる。加熱
室10内に食品9が配され、マグネトロン11の冷却風
の一部は、冷却ファン13によりダクト14を介して加
熱室10内に導かれる。冷却風の一部を実矢綿16で、
食品9から発生ずる水分等の気体を点矢線17で示して
いる。冷却風の一部16と、食品9から発生する水分等
の気体17は、排気部12を通って加熱室10の外部へ
排出される。この時圧電素子応用センサ1と食品9から
発生する水分等の気体17との間に熱の授受へTがあり
、それに応じて圧電素子応用センサ1は出力信号を発生
する。
Detection of the completion of heating the food 9 is performed as follows. Food 9 is placed in heating chamber 10 , and a portion of the cooling air from magnetron 11 is guided into heating chamber 10 via duct 14 by cooling fan 13 . A part of the cooling air is made of real arrow cotton 16,
Gas such as moisture generated from the food 9 is indicated by a dotted arrow line 17. A portion of the cooling air 16 and gas 17 such as moisture generated from the food 9 are discharged to the outside of the heating chamber 10 through the exhaust section 12 . At this time, there is a time T in the exchange of heat between the piezoelectric element applied sensor 1 and the gas 17 such as moisture generated from the food 9, and the piezoelectric element applied sensor 1 generates an output signal accordingly.

この出力信号により制御器15はマグネトロン11や冷
却ファン13の動作を制御する。以」二が、加熱終了検
知の概要であるが、電子レンジは本来アースをとる物な
ので、加熱室10やボディカバー18.その他の部品の
電位がグランド電位となっている。
The controller 15 controls the operation of the magnetron 11 and the cooling fan 13 based on this output signal. The following is an overview of heating end detection. Since microwave ovens are originally grounded, the heating chamber 10, body cover 18. The potential of other parts is the ground potential.

圧電素子応用センサ1ば、第1図のように、金属板5が
一方の電極と電気的に接触状態にあり、水蒸気をまとも
に受ける構成となっている。ここで問題となるのは、金
属板5と電子レンジ本体のショートの問題である。通常
は金属板5と電子レユ/ジ本体は電気的にオープンであ
っても、水滴が耐着することでショート状態になる危険
がある。このため金属板5をあらかじめグランド電位に
しておくと言うのが、本発明の第二の請求項に対応する
のである。図中で金属板と同電位のり一部6をグランド
電位としている。
As shown in FIG. 1, the piezoelectric element applied sensor 1 has a metal plate 5 in electrical contact with one electrode, and is configured to receive water vapor directly. The problem here is a short circuit between the metal plate 5 and the microwave oven body. Even if the metal plate 5 and the main body of the electronic cash register are normally electrically open, there is a risk of short-circuiting due to water droplets adhering to them. Therefore, setting the metal plate 5 to ground potential in advance corresponds to the second claim of the present invention. In the figure, a part 6 of the same potential as the metal plate is set to the ground potential.

第5図は、制御器15の構成を示す具体例である。FIG. 5 shows a specific example of the configuration of the controller 15. As shown in FIG.

圧電素子応用センサ1の出力は、制御器15に入ると、
低域通過フィルタ19で60Hzの雑音を排除し、単電
源増巾器20で信号杏制御しやすいレベルまで上げ、マ
イコン21にA/D入力する。マイコン21は、信号の
大きさやパルスl】等で、食品の調理状態を知り、マグ
ネl−ロン11や冷却ファン13への制御信号を与える
わけである。
When the output of the piezoelectric element application sensor 1 enters the controller 15,
A low-pass filter 19 eliminates 60 Hz noise, a single power supply amplifier 20 raises the signal to a level that is easy to control, and the signal is A/D inputted to a microcomputer 21. The microcomputer 21 knows the cooking status of the food based on the signal size, pulse l], etc., and provides control signals to the Magnelon 11 and the cooling fan 13.

発明の効果 以」―のように本発明は圧電素子応用センサに正の温度
変化が加わった時に正の大きな電圧が出力される構成と
しているので、増[i1器を一段しか必要としない等の
理由で構成が簡単で、信号処理が容易で、食品の調理仕
上り状態を正確に検知出来るものである。
As described in ``Effects of the Invention'', the present invention has a configuration in which a large positive voltage is output when a positive temperature change is applied to the piezoelectric element applied sensor. For this reason, it has a simple configuration, easy signal processing, and can accurately detect the finished cooking state of food.

また、本発明は圧電素子応用センサの金属板をグランド
電位としているので、調理機器のケースやオーブン等と
のショートにより出力が取出せないなどの異常が起らず
、安全で正確に食品の調理仕上り状態を検知出来るもの
である。
In addition, since the metal plate of the piezoelectric sensor of the present invention is at ground potential, abnormalities such as failure to output due to a short circuit with the cooking equipment case, oven, etc. do not occur, and food can be cooked safely and accurately. It is possible to detect the state.

【図面の簡単な説明】[Brief explanation of the drawing]

とそれに対するセンサ出力を示す特性図、第3図は圧電
素子の分極状態を示す模式図、第4図は圧電素子センサ
を電子レンジに用いた場合の構成図、1・・・・・・圧
電素子応用センサ、2・・・・・・圧電素子、3・・・
・・・電極、5・・・・・・金属、6.7・・・・・・
リード。 代理人の氏名 弁理士 粟野重孝 はか1名へは同圧電
素子応用センナに加えられる温度変化/−一一圧電素子
応用ゼンブ 2− 圧電素子 3−電極 S−m−金属 6.7−一一ソード
Figure 3 is a schematic diagram showing the polarization state of a piezoelectric element, Figure 4 is a configuration diagram when a piezoelectric element sensor is used in a microwave oven, 1...Piezoelectric Element application sensor, 2...Piezoelectric element, 3...
...Electrode, 5...Metal, 6.7...
Lead. Name of agent: Patent attorney Shigetaka Awano To one person: Temperature change applied to piezoelectric element applied sensor/-11 Piezoelectric element applied sensor 2- Piezoelectric element 3-Electrode S-m-Metal 6.7-11 sword

Claims (2)

【特許請求の範囲】[Claims] (1) 金属板もしくは導電性を有する板体と、一対の
電極を有する圧電素子と、センサ出力を取出すリード線
を有し、前記圧電素子の一方の電極を前記金属板もしく
は導電性を有する板体上に電気的に接続し、前記圧電素
子の極性は前記電極の一方を前記圧電素子の信号を処理
する単電源増巾回路の基準電位と接続し、前記圧電素子
に正の温度変化が加わった時に、前記電極の他方に正な
る電圧が発生するように接続する構成とした圧電素子応
用センサ。
(1) A metal plate or a conductive plate, a piezoelectric element having a pair of electrodes, and a lead wire for taking out the sensor output, and one electrode of the piezoelectric element is connected to the metal plate or the conductive plate. electrically connected to the body, and the polarity of the piezoelectric element is determined by connecting one of the electrodes to a reference potential of a single power supply amplifier circuit that processes the signal of the piezoelectric element, and applying a positive temperature change to the piezoelectric element. A piezoelectric element applied sensor configured to be connected so that a positive voltage is generated at the other electrode when the other electrode is turned.
(2) 金属板もしくは導電性を有する板体と、一対の
電極を有する圧電素子と、センサ出力を取出すリード線
を有し、前記圧電素子の一方の電極を前記金属板もしく
は導電性を有する板体上に電気的に接続し、前記電極の
一方もしくは金属板もしくは導電性を有する板体をグラ
ンド電位とする構成とした圧電素子応用センサ。
(2) A metal plate or conductive plate, a piezoelectric element having a pair of electrodes, and a lead wire for taking out the sensor output, and one electrode of the piezoelectric element is connected to the metal plate or the conductive plate. A piezoelectric element-applied sensor configured to be electrically connected on a body and to set one of the electrodes, a metal plate, or a conductive plate to a ground potential.
JP63301230A 1988-11-29 1988-11-29 Piezoelectric element applied sensor Expired - Lifetime JPH0823536B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63301230A JPH0823536B2 (en) 1988-11-29 1988-11-29 Piezoelectric element applied sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63301230A JPH0823536B2 (en) 1988-11-29 1988-11-29 Piezoelectric element applied sensor

Publications (2)

Publication Number Publication Date
JPH02147827A true JPH02147827A (en) 1990-06-06
JPH0823536B2 JPH0823536B2 (en) 1996-03-06

Family

ID=17894342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63301230A Expired - Lifetime JPH0823536B2 (en) 1988-11-29 1988-11-29 Piezoelectric element applied sensor

Country Status (1)

Country Link
JP (1) JPH0823536B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010053158A1 (en) * 2008-11-07 2010-05-14 タイコエレクトロニクスジャパン合同会社 Ptc device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183341A (en) * 1983-04-01 1984-10-18 Matsushita Electric Ind Co Ltd Manufacture of pyroelectric infrared sensor
JPS63249026A (en) * 1987-04-03 1988-10-17 Hamamatsu Photonics Kk Pyroelectric detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183341A (en) * 1983-04-01 1984-10-18 Matsushita Electric Ind Co Ltd Manufacture of pyroelectric infrared sensor
JPS63249026A (en) * 1987-04-03 1988-10-17 Hamamatsu Photonics Kk Pyroelectric detector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010053158A1 (en) * 2008-11-07 2010-05-14 タイコエレクトロニクスジャパン合同会社 Ptc device
US8723636B2 (en) 2008-11-07 2014-05-13 Tyco Electronics Japan G.K. PTC device
RU2518219C2 (en) * 2008-11-07 2014-06-10 ТАЙКО ЭЛЕКТРОНИКС ДЖАПАН Г.К., Япония Positive temperature coefficient device
JP2014168105A (en) * 2008-11-07 2014-09-11 Tyco Electronics Japan Kk PTC device
JP5736174B2 (en) * 2008-11-07 2015-06-17 タイコエレクトロニクスジャパン合同会社 PTC device

Also Published As

Publication number Publication date
JPH0823536B2 (en) 1996-03-06

Similar Documents

Publication Publication Date Title
US4373392A (en) Sensor control circuit
US4672180A (en) Heating apparatus with piezoelectric device sensor
JP4306809B2 (en) Gas sensor operation method
JPH02147827A (en) Piezoelectric element applying sensor
JPH042851B2 (en)
US4210894A (en) Terminal unit for electrical circuit elements and sensing device employing said terminal unit
JPS6152939B2 (en)
JPH01253644A (en) Piezoelectric-element applying sensor
JP2877435B2 (en) Cooker
JPH02183725A (en) Heating device with pyroelectric sensor
US11562891B2 (en) Method of temperature measurement used in radio-frequency processing apparatus for semiconductor
JP2851630B2 (en) Cooker
JPS62112929A (en) Electronic range equipped with piezoelectric element sensor
JP2548369B2 (en) Heating cooker
JPH01250052A (en) Sensor applying piezoelectric element
JPH0210029A (en) Microwave oven with piezoelectric element sensor
JPH01267446A (en) Piezo-electric element applied sensor
KR940004978B1 (en) Heat control system for a microwave range
JP2730634B2 (en) Pyroelectric sensor applied heating device
JPS6152944B2 (en)
JPH02253128A (en) Pyroelectric type steam sensor and high-frequency heater with pyroelectric type sensor
JPH0365642A (en) Method of cleaning moisture sensitive element
JPS6152943B2 (en)
KR19990005167A (en) Humidity Sensor and Humidity Detection Circuit of Microwave
JPH05215339A (en) Heater

Legal Events

Date Code Title Description
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080306

Year of fee payment: 12

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090306

Year of fee payment: 13

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090306

Year of fee payment: 13