JPH0214761B2 - - Google Patents

Info

Publication number
JPH0214761B2
JPH0214761B2 JP244282A JP244282A JPH0214761B2 JP H0214761 B2 JPH0214761 B2 JP H0214761B2 JP 244282 A JP244282 A JP 244282A JP 244282 A JP244282 A JP 244282A JP H0214761 B2 JPH0214761 B2 JP H0214761B2
Authority
JP
Japan
Prior art keywords
lead wires
pair
thin film
film thermistor
external lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP244282A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58119602A (ja
Inventor
Takeshi Nagai
Kazushi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP244282A priority Critical patent/JPS58119602A/ja
Publication of JPS58119602A publication Critical patent/JPS58119602A/ja
Publication of JPH0214761B2 publication Critical patent/JPH0214761B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Resistors (AREA)
  • Thermistors And Varistors (AREA)
JP244282A 1982-01-11 1982-01-11 薄膜サーミスタ Granted JPS58119602A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP244282A JPS58119602A (ja) 1982-01-11 1982-01-11 薄膜サーミスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP244282A JPS58119602A (ja) 1982-01-11 1982-01-11 薄膜サーミスタ

Publications (2)

Publication Number Publication Date
JPS58119602A JPS58119602A (ja) 1983-07-16
JPH0214761B2 true JPH0214761B2 (zh) 1990-04-10

Family

ID=11529383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP244282A Granted JPS58119602A (ja) 1982-01-11 1982-01-11 薄膜サーミスタ

Country Status (1)

Country Link
JP (1) JPS58119602A (zh)

Also Published As

Publication number Publication date
JPS58119602A (ja) 1983-07-16

Similar Documents

Publication Publication Date Title
EP0261555B1 (en) Semiconductor accelerometer
JPS6153876B2 (zh)
JPS6341080A (ja) 半導体加速度センサ
US7882744B2 (en) Flat planner pressure transducer
JPH0214761B2 (zh)
JPH01203957A (ja) 温度感応性半導体デバイスを備えるセンサ装置に対する吊り構造
JP2732413B2 (ja) 加速度センサ
JP3038692B2 (ja) バイモルフ振動子及び圧電形加速度センサ
JPH05283713A (ja) 半導体センサ
JPS63120233A (ja) 表面温センサ
JPH0232222A (ja) 温度センサ
JP3115669B2 (ja) センサ
JPH0366607B2 (zh)
JP2695274B2 (ja) 半導体加速度センサ
JPS6175535A (ja) 半導体装置
JPS58178505A (ja) 薄膜サ−ミスタチツプ用リ−ド線接続端子
JPH06242048A (ja) 熱伝導式絶対湿度センサ
JPH0245721A (ja) 絶対圧型半導体圧力センサ
JPS59208426A (ja) 温度センサ
JP2946254B2 (ja) 温度センサおよびその製造方法
JPH07131036A (ja) 半導体加速度センサ
JP3307274B2 (ja) 半導体圧力センサ
JP2822613B2 (ja) 半導体圧力センサ
JPH10221144A (ja) マイクロヒータ及びその製造方法
JPS58215507A (ja) 検知装置