JPH02146460U - - Google Patents
Info
- Publication number
- JPH02146460U JPH02146460U JP5671589U JP5671589U JPH02146460U JP H02146460 U JPH02146460 U JP H02146460U JP 5671589 U JP5671589 U JP 5671589U JP 5671589 U JP5671589 U JP 5671589U JP H02146460 U JPH02146460 U JP H02146460U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- silicon
- electrode plate
- type
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5671589U JPH02146460U (un) | 1989-05-17 | 1989-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5671589U JPH02146460U (un) | 1989-05-17 | 1989-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146460U true JPH02146460U (un) | 1990-12-12 |
Family
ID=31580785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5671589U Pending JPH02146460U (un) | 1989-05-17 | 1989-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146460U (un) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05152599A (ja) * | 1991-11-29 | 1993-06-18 | Nec Corp | 半導体受光素子 |
-
1989
- 1989-05-17 JP JP5671589U patent/JPH02146460U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05152599A (ja) * | 1991-11-29 | 1993-06-18 | Nec Corp | 半導体受光素子 |
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