JPH02146426U - - Google Patents
Info
- Publication number
- JPH02146426U JPH02146426U JP5655989U JP5655989U JPH02146426U JP H02146426 U JPH02146426 U JP H02146426U JP 5655989 U JP5655989 U JP 5655989U JP 5655989 U JP5655989 U JP 5655989U JP H02146426 U JPH02146426 U JP H02146426U
- Authority
- JP
- Japan
- Prior art keywords
- reactor
- cap
- plasma processing
- closes
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005855 radiation Effects 0.000 claims description 3
- 230000017525 heat dissipation Effects 0.000 claims 2
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989056559U JPH0754999Y2 (ja) | 1989-05-17 | 1989-05-17 | 縦型プラズマ処理機のリアクター |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989056559U JPH0754999Y2 (ja) | 1989-05-17 | 1989-05-17 | 縦型プラズマ処理機のリアクター |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02146426U true JPH02146426U (OSRAM) | 1990-12-12 |
| JPH0754999Y2 JPH0754999Y2 (ja) | 1995-12-18 |
Family
ID=31580495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989056559U Expired - Lifetime JPH0754999Y2 (ja) | 1989-05-17 | 1989-05-17 | 縦型プラズマ処理機のリアクター |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754999Y2 (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5860552A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
| JPS6226028U (OSRAM) * | 1985-07-29 | 1987-02-17 |
-
1989
- 1989-05-17 JP JP1989056559U patent/JPH0754999Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5860552A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
| JPS6226028U (OSRAM) * | 1985-07-29 | 1987-02-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0754999Y2 (ja) | 1995-12-18 |