JPH0165854U - - Google Patents
Info
- Publication number
- JPH0165854U JPH0165854U JP1987161589U JP16158987U JPH0165854U JP H0165854 U JPH0165854 U JP H0165854U JP 1987161589 U JP1987161589 U JP 1987161589U JP 16158987 U JP16158987 U JP 16158987U JP H0165854 U JPH0165854 U JP H0165854U
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- lid
- coating
- exhaust
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161589U JPH0165854U (OSRAM) | 1987-10-22 | 1987-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161589U JPH0165854U (OSRAM) | 1987-10-22 | 1987-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165854U true JPH0165854U (OSRAM) | 1989-04-27 |
Family
ID=31444661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987161589U Pending JPH0165854U (OSRAM) | 1987-10-22 | 1987-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165854U (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1025564A (ja) * | 1996-07-09 | 1998-01-27 | Ion Kogaku Kenkyusho:Kk | コーティング方法およびコーティング装置 |
| JP2001003159A (ja) * | 1999-06-18 | 2001-01-09 | Shin Meiwa Ind Co Ltd | 被膜の形成方法及び被膜が形成された構造部材 |
| JP2019060025A (ja) * | 2013-12-30 | 2019-04-18 | ジーティーエイティー・コーポレーション | Ｃｖｄ反応器のための改良された放射シールディング |
-
1987
- 1987-10-22 JP JP1987161589U patent/JPH0165854U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1025564A (ja) * | 1996-07-09 | 1998-01-27 | Ion Kogaku Kenkyusho:Kk | コーティング方法およびコーティング装置 |
| JP2001003159A (ja) * | 1999-06-18 | 2001-01-09 | Shin Meiwa Ind Co Ltd | 被膜の形成方法及び被膜が形成された構造部材 |
| JP2019060025A (ja) * | 2013-12-30 | 2019-04-18 | ジーティーエイティー・コーポレーション | Ｃｖｄ反応器のための改良された放射シールディング |
| US11015244B2 (en) | 2013-12-30 | 2021-05-25 | Advanced Material Solutions, Llc | Radiation shielding for a CVD reactor |
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