JPH02145990U - - Google Patents
Info
- Publication number
- JPH02145990U JPH02145990U JP5636289U JP5636289U JPH02145990U JP H02145990 U JPH02145990 U JP H02145990U JP 5636289 U JP5636289 U JP 5636289U JP 5636289 U JP5636289 U JP 5636289U JP H02145990 U JPH02145990 U JP H02145990U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- outer shaft
- motor
- holding cylinder
- bearing holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011553 magnetic fluid Substances 0.000 claims description 2
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5636289U JPH02145990U (en18) | 1989-05-16 | 1989-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5636289U JPH02145990U (en18) | 1989-05-16 | 1989-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02145990U true JPH02145990U (en18) | 1990-12-11 |
Family
ID=31580120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5636289U Pending JPH02145990U (en18) | 1989-05-16 | 1989-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02145990U (en18) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009153253A (ja) * | 2007-12-19 | 2009-07-09 | Daihen Corp | 真空搬送装置 |
| JP2015121265A (ja) * | 2013-12-24 | 2015-07-02 | キヤノントッキ株式会社 | 磁性流体軸受装置並びに真空チャンバ |
-
1989
- 1989-05-16 JP JP5636289U patent/JPH02145990U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009153253A (ja) * | 2007-12-19 | 2009-07-09 | Daihen Corp | 真空搬送装置 |
| JP2015121265A (ja) * | 2013-12-24 | 2015-07-02 | キヤノントッキ株式会社 | 磁性流体軸受装置並びに真空チャンバ |