JPH02143918A - Production of magnetic disk - Google Patents
Production of magnetic diskInfo
- Publication number
- JPH02143918A JPH02143918A JP29888888A JP29888888A JPH02143918A JP H02143918 A JPH02143918 A JP H02143918A JP 29888888 A JP29888888 A JP 29888888A JP 29888888 A JP29888888 A JP 29888888A JP H02143918 A JPH02143918 A JP H02143918A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- magnetic disk
- ions
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 230000001681 protective effect Effects 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 17
- 150000003839 salts Chemical class 0.000 claims abstract description 11
- 239000010408 film Substances 0.000 claims description 41
- 239000010409 thin film Substances 0.000 claims description 18
- 229910001413 alkali metal ion Inorganic materials 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 abstract description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 14
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 abstract description 9
- 229910052681 coesite Inorganic materials 0.000 abstract description 7
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 7
- 238000005342 ion exchange Methods 0.000 abstract description 7
- 239000000377 silicon dioxide Substances 0.000 abstract description 7
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 7
- 229910052682 stishovite Inorganic materials 0.000 abstract description 7
- 229910052905 tridymite Inorganic materials 0.000 abstract description 7
- 235000010333 potassium nitrate Nutrition 0.000 abstract description 4
- 238000003426 chemical strengthening reaction Methods 0.000 abstract description 2
- 238000005728 strengthening Methods 0.000 abstract description 2
- 238000006467 substitution reaction Methods 0.000 abstract description 2
- 229910001415 sodium ion Inorganic materials 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 13
- 239000011521 glass Substances 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔１既 要〕
磁気ディスク装置に用いて好適な耐久性の良い磁気ディ
スクの製造方法に関し、
磁性記録層上に積層形成する保護膜を化学的に強化して
、磁気ヘッドの衝突時における衝撃に対する耐久性を向
上することを目的とし、非磁性基板上に磁性記録層及び
保護膜をこの順に積層形成した磁気ディスクにおける保
護ｎりの形成において、上記磁性記録層上にアルカリ金
属イオンを含むＳｉＯ□を主成分とする薄膜を形成する
工程と、該薄膜の表面部分を、その薄膜に含まれるアル
カリ金属イオンよりもイオン半径の大きいアルカリ金属
イオンを含む溶融塩で化学処理して、当該薄膜表面部分
のアルカリ金属イオンをイオン半径の大きいアルカリ金
属イオンと置換する工程とを含み構成する。[Detailed Description of the Invention] [1] Relating to a method for manufacturing a highly durable magnetic disk suitable for use in a magnetic disk device, a protective film laminated on a magnetic recording layer is chemically strengthened to For the purpose of improving the durability against impact when a head collides, in forming a protective layer on a magnetic disk in which a magnetic recording layer and a protective film are laminated in this order on a non-magnetic substrate, A process of forming a thin film mainly composed of SiO□ containing alkali metal ions, and chemically treating the surface portion of the thin film with a molten salt containing alkali metal ions having a larger ionic radius than the alkali metal ions contained in the thin film. and replacing the alkali metal ions on the surface of the thin film with alkali metal ions having a large ionic radius.
本発明は磁気ディスク装置に用いて好適な耐久性の良い
磁気ディスクの製造方法に関するものである。The present invention relates to a method of manufacturing a highly durable magnetic disk suitable for use in a magnetic disk device.
近年、コンピュータシステムにおける高速化、大容量化
に伴い、その外部記憶装置として用いられている磁気デ
ィスク装置に対しても高速化と共に高密度記録化、大容
量化が益々要求されている。In recent years, as computer systems have become faster and have larger capacities, magnetic disk devices used as external storage devices are increasingly required to have faster speeds, higher density recording, and larger capacities.
従って、磁気ディスクにおいても一般的に用いられてい
る塗布型の磁気ディスクに比べて記録層をスパッタリン
グ法やめっき法により１００％磁性体として形成した高
密度記録化に有利な薄膜磁気ディスクが注目され、実用
化が進められている。Therefore, thin-film magnetic disks, which have a recording layer formed of 100% magnetic material by sputtering or plating, which is advantageous for high-density recording, are attracting attention compared to coated magnetic disks that are commonly used in magnetic disks. , and its practical application is progressing.
また、このような技術の発展と共に、更に記録密度を向
上させるために薄膜磁性層の記録面に垂直に磁化記録・
再生を行う垂直磁気ディスクも提案されている。In addition, with the development of such technology, magnetization recording perpendicular to the recording surface of the thin film magnetic layer has been developed to further improve recording density.
A perpendicular magnetic disk for playback has also been proposed.
このような薄膜磁気ディスクにおいては、高密度記録に
伴って記録再生時における磁気ヘッド七の間隙（ヘッド
浮上間隙）も益々微小化し、該磁気ヘッドがディスク面
に接触、または衝突して該ディスク面を損傷させるクラ
ッシュ障害が発生し易くなる。In such thin-film magnetic disks, the gap between the magnetic heads (head flying gap) during recording and reproduction has become increasingly smaller due to high-density recording, and the magnetic heads come into contact with or collide with the disk surface, causing damage to the disk surface. Crash failures that damage the vehicle are more likely to occur.
このため、前記磁気ディスクの磁性記録層の表面に保護
膜及び潤滑膜を設けてクラッシュ障害を防止した構造が
提案されているが、更に安定した耐久性の向上が必要と
されている。For this reason, a structure has been proposed in which a protective film and a lubricant film are provided on the surface of the magnetic recording layer of the magnetic disk to prevent crash failures, but there is a need for more stable durability.
従来の薄膜磁気ディスクは第３図に示すように、例えば
アルマイト表面処理等を施したアルミニウム（ＡＮ）か
らなる非磁性のディスク基板ｌ上に、０．２μｍ程度の
膜厚のγ−Ｆｅｚ０３等からなる磁性記録層２と５００
人の膜厚の５ｉｎ２等からなる保護膜３とを連続スパッ
タリング法により順に積層形成し、その表面に図示しな
い潤滑膜を施して耐久性を向上させている。As shown in Fig. 3, a conventional thin-film magnetic disk is made of a film such as γ-Fez03 with a film thickness of about 0.2 μm on a non-magnetic disk substrate l made of aluminum (AN) with an alumite surface treatment, etc. magnetic recording layers 2 and 500
A protective film 3 having a thickness of 5 in 2 , which is the same as that of a human film, is sequentially laminated by a continuous sputtering method, and a lubricating film (not shown) is applied to the surface of the protective film 3 to improve durability.
ところで高密度記録化、高速化の要求に伴って該磁気デ
ィスクに対する磁気ヘッドの浮上間隔は益々小さくなり
、高速で上位置ヘッドと磁気ディスクが衝突する確率が
増加する傾向にあり、上記したような薄膜磁気ディスク
ではそのような衝突時の衝撃に対して、磁性記録層２上
に積層形成されたＳｉＯ□等からなる保護膜３の強度が
材質的に弱いために磁性記録層２の損傷は避けられず、
十分な耐久性が得られないという問題があった。However, with the demand for higher density recording and higher speed, the flying distance of the magnetic head with respect to the magnetic disk is becoming smaller and smaller, and the probability of collision between the upper head and the magnetic disk at high speed tends to increase, and the above-mentioned problem is occurring. In a thin film magnetic disk, damage to the magnetic recording layer 2 is avoided because the strength of the protective film 3 made of SiO□ etc. laminated on the magnetic recording layer 2 is weak due to the impact caused by such a collision. Unable to do so.
There was a problem that sufficient durability could not be obtained.
本発明は上記した従来の問題点に鑑み、磁性記録層上に
積層形成する保護膜を化学的に強化して、磁気ヘッドの
衝突時における衝撃に対する耐久性を向上した新規な磁
気ディスクの製造方法を提供することを目的とするもの
である。In view of the above-mentioned conventional problems, the present invention provides a novel method for manufacturing a magnetic disk in which the protective film laminated on the magnetic recording layer is chemically strengthened to improve the durability against impact when a magnetic head collides. The purpose is to provide the following.
本発明は上記した目的を達成するため、非磁性基板上に
磁性記録層及び保護膜をこの順に積層形成した磁気ディ
スクにおける保護膜の形成において、上記磁性記録層上
にアルカリ金属イオンを含むＳｉＯ□を主成分とする薄
膜を形成する工程と、該薄膜の表面部分を、その薄膜に
含まれるアルカリ金属イオンよりもイオン半径の大きい
アルカリ金属イオンを含む溶融塩で化学処理して、当該
薄膜表面部分のアルカリ金属イオンをイオン半径の大き
いアルカリ金属イオンと置換する工程とを行うことによ
り強化保護膜を形成した構成とする。In order to achieve the above-mentioned object, the present invention provides a method for forming a protective film on a magnetic disk in which a magnetic recording layer and a protective film are laminated in this order on a non-magnetic substrate. A step of forming a thin film containing as a main component, and chemically treating the surface portion of the thin film with a molten salt containing an alkali metal ion having a larger ionic radius than the alkali metal ions contained in the thin film, to form a thin film surface portion. A reinforced protective film is formed by performing the step of replacing the alkali metal ions of 2 with alkali metal ions having a large ionic radius.
本発明ではガラスの化学強化法、特にイオン交換による
化学強化法を利用して磁性記録薄膜上に設けたＳｉＯ□
を主成分とする保護膜を強化し、磁気ディスクの耐久性
をより向上させるものである。In the present invention, SiO
This strengthens the protective film, which mainly consists of , and further improves the durability of magnetic disks.
即ち、イオン交換によるガラスの化学強化法は、第２図
（ａ）に示すように５ｉ−０−５ｉからなる骨格構造を
有するＳｉＯ２を主成分とし、＾４１！ ２０３＋ Ｎ
ａ２Ｏ，ＺｎＯ等を含むガラス１１においては、Ｎａは
遊離してＮａ”−（イオンとして存在しているのでこの
ようなガラス１１を溶融した硝酸カリウム（ＫＮ（ｈ）
の溶融塩１２中に浸漬すると、該ガラス１１の表面部中
におけるＮａ”イオンと溶融塩１２中のに゛イオンとの
イオン交換が起こり、第２図（ｂ）に示すように前記ガ
ラス１１の表面部中のイオン半径が１．９人のＮａ”イ
オンとｇＨＮａ ”イオン半径よりも大きい２．６６人
のイオン半径を有する Ｋ０イオンとが置換される。こ
のため前記ガラス１１の表面部では両イオン半径の差に
よる容量増大により圧縮応力が発生した状態となり、そ
の圧縮応力に相当する分だけガラス１１の表面部が強化
される。That is, the method of chemically strengthening glass by ion exchange uses SiO2 as the main component, which has a skeleton structure of 5i-0-5i, as shown in FIG. 2(a), and uses ^41! 203+N
In the glass 11 containing a2O, ZnO, etc., Na is present as a free Na''-(ion).
When the glass 11 is immersed in the molten salt 12, ion exchange occurs between the Na'' ions in the surface of the glass 11 and the Ni'' ions in the molten salt 12, as shown in FIG. 2(b). The Na'' ion in the surface area having an ionic radius of 1.9 people is replaced with the K0 ion having an ionic radius of 2.66 people, which is larger than the gHNa'' ion radius.Therefore, in the surface area of the glass 11, both Compressive stress is generated due to the increase in capacitance due to the difference in ionic radius, and the surface portion of the glass 11 is strengthened by an amount corresponding to the compressive stress.
従って、ＳｉＯ□からなる保護膜を化学強化するには、
Ｎａを含むＳｉＯ□膜を形成し、この５ｉＯｚ膜を上述
したようにＫＮＯ３溶融塩中に浸漬して該５ｉｎ２膜表
面部分のＮａ”イオンとＫＮＯ，溶融塩中のＫ”４オン
とのイオン交換を行うことにより、該ＳｉＯ□膜の表面
部分にはＫ”−（オンの置換によって圧縮応力が存在し
た状態となってその部分が強化される。その結果、耐破
壊強度の大きい保護膜が得られる。Therefore, in order to chemically strengthen the protective film made of SiO□,
A SiO□ film containing Na is formed, and this 5iOz film is immersed in KNO3 molten salt as described above to perform ion exchange between Na'' ions on the surface of the 5in2 membrane and KNO and K''4 ions in the molten salt. By performing this, compressive stress exists in the surface portion of the SiO□ film due to the substitution of K''-(on), and that portion is strengthened. As a result, a protective film with high fracture resistance is obtained. It will be done.
以下図面を用いて本発明の実施例について詳細に説明す
る。Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図（ａ）〜（Ｃ）は本発明に係る磁気ディスクの製
造方法の一実施例を工程順に示す要部断面図である。FIGS. 1(a) to 1(C) are sectional views showing essential parts of an embodiment of the method for manufacturing a magnetic disk according to the present invention in the order of steps.
先ず第１図（ａ）に示すように、予め表面にアルマイト
処理を施したアルミニウム（Ａ ｆｆｉ ）からなる非
磁性のディスク基板１上に、スパッタリング法等により
０．２μｍ程度の膜厚の７−Ｆｅｚｏｙ、或いはＣｏ−
Ｎｉ等からなる磁性記録Ｎ２を被着形成する。First, as shown in FIG. 1(a), a film of about 0.2 μm thick is deposited on a non-magnetic disk substrate 1 made of aluminum (Affi) whose surface has been anodized in advance by sputtering or the like. Fezoy or Co-
A magnetic recording layer N2 made of Ni or the like is deposited.
次に第１図（ｂ）に示すように該磁性記録層２上に、例
えばＮａを添加した５ｉｎ２からなるターゲットを用い
たスパッタリング法によって５００人の膜厚のＮａを適
量含むＳｉＯ□膜２１を被着形成する。Next, as shown in FIG. 1(b), a SiO□ film 21 containing an appropriate amount of Na is deposited on the magnetic recording layer 2 to a thickness of 500 mm, for example, by sputtering using a 5 in 2 target doped with Na. Adhesive formation.
次に第１図（Ｃ）に示すように該ＳｉＯ□膜２１を４０
０”Ｃ程度に加熱した硝酸カリウム（ＫＮＯ，）の溶融
塩中に数分間〜数十分間浸漬し、その５ｉＯｚ膜２１の
表面部分２１ａのＮａ”イオンと該ＫＮＯ３の溶融塩中
のに１イオンとのイオン交換、即ち両イオンの置換処理
を行うことにより、前記ＳｉＯ□膜２１の表面より１０
０〜２００人の深さ方向の表面部分２１ａにはイオン半
径が１．９人のＮａ”イオンと置（典した２、６６人の
イオン半径を有する Ｋ゛イオンの差による容量増大に
より圧縮応力が存在した状態となり、その圧縮応力に相
当して表面部が強化された保護膜２２を形成することが
できる。このようにして強化された保護膜２２の表面硬
さを調べた結果、従来の保護膜の表面硬さのほぼ２倍程
度となることが判明し、強化されることが確認できた。Next, as shown in FIG. 1(C), the SiO□ film 21 is
It is immersed in a molten salt of potassium nitrate (KNO, ) heated to about 0"C for several minutes to several tens of minutes, and the Na" ion on the surface portion 21a of the 5iOz film 21 and the one ion in the molten salt of KNO3 are removed. By performing ion exchange, that is, replacing both ions with
The surface portion 21a in the depth direction of 0 to 200 people has an ionic radius of 1.9 Na'' ions and a K'' ion with an ion radius of 2,66 people. exists, and a protective film 22 whose surface portion is strengthened corresponding to the compressive stress can be formed.As a result of examining the surface hardness of the protective film 22 strengthened in this way, it was found that It was found that the surface hardness of the protective film was approximately twice that of the protective film, and it was confirmed that the surface hardness was strengthened.
その後、必要に応じて前記保護膜２２上に潤滑膜（図示
せず）を施して磁気ディスクを完成させる。Thereafter, a lubricating film (not shown) is applied on the protective film 22, if necessary, to complete the magnetic disk.
このようにして得られた磁気ディスクは、従来の磁気デ
ィスクよりも高い耐衝撃強度を有するため耐クラツシユ
性が向上する。The magnetic disk thus obtained has higher impact strength than conventional magnetic disks, and thus has improved crush resistance.
なお、以上の実施例ではスパッタリング法によってＮａ
を含む５ｉＯｚ膜を被着形成した場合の例について説明
したが、この方法に限定されるものではなく、他の成膜
方法を用いても良い。また５ｉＯｚ膜を形成した後にそ
の５ｉＯｚ膜にＮａを拡散、イオン注入する方法を用い
ても良く、更にＮａ“イオンとに゛イオンとのイオン交
換の方法も電圧印加イオン交換法などの他の方法を適用
可能なことはいうまでもない。Note that in the above embodiments, Na
Although an example has been described in which a 5iOz film containing 5iOz is deposited, the method is not limited to this method, and other film forming methods may be used. Alternatively, a method may be used in which a 5iOz film is formed and then Na is diffused and ion-implanted into the 5iOz film. Furthermore, the method of ion exchange between Na" ions and Ni" ions may also be performed using other methods such as a voltage application ion exchange method. Needless to say, it is applicable.
以上の説明から明らかなように、本発明に係る磁気ディ
スクの製造方法によれば、ＳｉＯ□膜の表面部分が化学
的に強化され、磁気ヘッドの接触、衝突等に対する耐ｆ
ｊｉ 撃強度が著しく向上するので、磁気ディスクの耐
クラツシユ性が大きく改善され、実用上イ３れた効果を
奏する。As is clear from the above description, according to the method of manufacturing a magnetic disk according to the present invention, the surface portion of the SiO□ film is chemically strengthened to provide resistance to magnetic head contact, collision, etc.
ji Since the impact strength is significantly improved, the crush resistance of the magnetic disk is greatly improved, and this has an excellent practical effect.
従って、−殻内な薄膜磁気ディスクは勿論のこと垂直磁
気記録方式の薄膜磁気ディスク等の製造方法に適用して
極めて有利である。Therefore, it is extremely advantageous to apply it to the manufacturing method of not only in-shell thin film magnetic disks but also perpendicular magnetic recording type thin film magnetic disks.
第１図（ａ）〜（Ｃ）は本発明に係る磁気ディスクの製
造方法の一実施例を工程順に示す要部
断面図、
第２図（ａ）、 （ｂ）は本発明に係るＥｉ気ディスク
の製造方法における保護膜の化学強化法を
原理的に説明するための図、
第３図は従来の磁気ディスクの製造方法を説明するだめ
の要部断面図である。
〔発明の効果〕
第１図（ａ）〜（Ｃ）及び第２図（ａ）、 （ｂ）にお
いて、ｌはディスク基板、２は磁性記録層、１１はガラ
ス、１２はＫＮ（ｈ溶融塩、２１はＮａを含むＳｉＯ２
膜、２１ａは表面部分、２２は強化保護膜をそれぞれ示
す。
２ｖ；釜ぶＥｌ’１ＪＬｔデ４７７４一方５Ｅ ％ １
才１Ｆｌｅ＋＝ ’＞ｔ ＃％ｈｋＪ Ｍ第１図FIGS. 1(a) to (C) are cross-sectional views of main parts showing an embodiment of the magnetic disk manufacturing method according to the present invention in the order of steps, and FIGS. 2(a) and (b) are Ei disks according to the present invention. FIG. 3 is a diagram for explaining the principle of a chemical strengthening method for a protective film in a method for manufacturing a disk. FIG. 3 is a sectional view of a main part for explaining a conventional method for manufacturing a magnetic disk. [Effects of the Invention] In FIGS. 1(a) to (C) and FIGS. 2(a) and (b), l is a disk substrate, 2 is a magnetic recording layer, 11 is glass, and 12 is KN (h molten salt). , 21 is SiO2 containing Na
21a is a surface portion of the film, and 22 is a reinforced protective film. 2v; Kamabu El'1 JLt de 4774 while 5E% 1
1Fle+='>t #%hkJ MFigure 1
Claims (1)
２）をこの順に積層形成した磁気ディスクにおける保護
膜（２２）の形成において、 上記磁性記録層（２）上にアルカリ金属イオンを含むＳ
ｉＯ＿２を主成分とする薄膜（２１）を形成する工程と
、 該薄膜（２１）の表面部分（２１ａ）を、その薄膜（２
１）に含まれるアルカリ金属イオンよりもイオン半径の
大きいアルカリ金属イオンを含む溶融塩で化学処理して
、当該、薄膜表面部分（２１ａ）のアルカリ金属イオン
をイオン半径の大きいアルカリ金属イオンと置換する工
程とを含んでなることを特徴とする磁気ディスクの製造
方法。[Claims] A magnetic recording layer (2) and a protective film (2) on a non-magnetic substrate (1).
In forming the protective film (22) on a magnetic disk in which 2) are laminated in this order, S containing alkali metal ions is formed on the magnetic recording layer (2).
A step of forming a thin film (21) containing iO_2 as a main component, and a step of forming a surface portion (21a) of the thin film (21) into
Chemical treatment is performed with a molten salt containing alkali metal ions having a larger ionic radius than the alkali metal ions contained in step 1) to replace the alkali metal ions in the thin film surface portion (21a) with alkali metal ions having a larger ionic radius. A method for manufacturing a magnetic disk, comprising the steps of:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29888888A JPH02143918A (en) | 1988-11-25 | 1988-11-25 | Production of magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29888888A JPH02143918A (en) | 1988-11-25 | 1988-11-25 | Production of magnetic disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02143918A true JPH02143918A (en) | 1990-06-01 |
Family
ID=17865463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29888888A Pending JPH02143918A (en) | 1988-11-25 | 1988-11-25 | Production of magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02143918A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008245972A (en) * | 2007-03-30 | 2008-10-16 | Takara Belmont Co Ltd | Method for automatically supplying water to cup |
| JP2020504842A (en) * | 2016-12-30 | 2020-02-13 | コーニング インコーポレイテッド | Coated article with optical coating having residual compressive stress |
-
1988
- 1988-11-25 JP JP29888888A patent/JPH02143918A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008245972A (en) * | 2007-03-30 | 2008-10-16 | Takara Belmont Co Ltd | Method for automatically supplying water to cup |
| JP2020504842A (en) * | 2016-12-30 | 2020-02-13 | コーニング インコーポレイテッド | Coated article with optical coating having residual compressive stress |
| US11242280B2 (en) | 2016-12-30 | 2022-02-08 | Corning Incorporated | Coated articles with optical coatings having residual compressive stress |
| US11618711B2 (en) | 2016-12-30 | 2023-04-04 | Corning Incorporated | Coated articles with optical coatings having residual compressive stress |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61122925A (en) | Magnetic recording medium and its production | |
| US20050287397A1 (en) | Magnetic recording medium and manufacturing method thereof | |
| JPH11232627A (en) | Substrate for information record medium | |
| JPS6326827A (en) | Production of magnetic recording medium | |
| JPH02143918A (en) | Production of magnetic disk | |
| JPS63102050A (en) | Magneto-optical recording medium and its production | |
| JP3651489B2 (en) | Magnetic recording medium | |
| JP3486795B2 (en) | Magnetic recording medium and method of manufacturing the same | |
| JPH0323972B2 (en) | ||
| JPH08180402A (en) | Glass substrate for magnetic recording medium and its production and magnetic recording medium | |
| JP2998952B2 (en) | Glass substrate for recording medium and method for producing recording medium | |
| JPH02177019A (en) | Production of magnetic disk | |
| JPS61237216A (en) | Production of thin film magnetic head | |
| JP3022680B2 (en) | Magnetic disk medium and method of manufacturing the same | |
| JP2897319B2 (en) | Magnetic disk | |
| JPH01285022A (en) | Production of perpendicular magnetic recording medium | |
| JP2856258B2 (en) | Thin film magnetic disk | |
| JP2897321B2 (en) | Manufacturing method of magnetic disk | |
| JPS61120342A (en) | Magnetic recording medium | |
| JP2741380B2 (en) | Manufacturing method of magnetic recording medium | |
| JPS60138723A (en) | Magnetic recording medium | |
| JPH0198124A (en) | Production of magnetic recording medium | |
| JPS59171031A (en) | Magnetic disk | |
| JPH0198116A (en) | Magnetic disk | |
| JPH0462412B2 (en) |