JPH0214363U - - Google Patents

Info

Publication number
JPH0214363U
JPH0214363U JP9154388U JP9154388U JPH0214363U JP H0214363 U JPH0214363 U JP H0214363U JP 9154388 U JP9154388 U JP 9154388U JP 9154388 U JP9154388 U JP 9154388U JP H0214363 U JPH0214363 U JP H0214363U
Authority
JP
Japan
Prior art keywords
carrier
conveyance
lifting device
processed
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9154388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9154388U priority Critical patent/JPH0214363U/ja
Publication of JPH0214363U publication Critical patent/JPH0214363U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9154388U 1988-07-11 1988-07-11 Pending JPH0214363U (US20090182215A1-20090716-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9154388U JPH0214363U (US20090182215A1-20090716-C00004.png) 1988-07-11 1988-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9154388U JPH0214363U (US20090182215A1-20090716-C00004.png) 1988-07-11 1988-07-11

Publications (1)

Publication Number Publication Date
JPH0214363U true JPH0214363U (US20090182215A1-20090716-C00004.png) 1990-01-29

Family

ID=31316015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9154388U Pending JPH0214363U (US20090182215A1-20090716-C00004.png) 1988-07-11 1988-07-11

Country Status (1)

Country Link
JP (1) JPH0214363U (US20090182215A1-20090716-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814341A (ja) * 1981-07-17 1983-01-27 Pioneer Electronic Corp デイスク等の被処理物のメタライジング装置におけるパレツト・ガイド機構
JPS61106768A (ja) * 1984-10-31 1986-05-24 Anelva Corp 基体処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814341A (ja) * 1981-07-17 1983-01-27 Pioneer Electronic Corp デイスク等の被処理物のメタライジング装置におけるパレツト・ガイド機構
JPS61106768A (ja) * 1984-10-31 1986-05-24 Anelva Corp 基体処理装置

Similar Documents

Publication Publication Date Title
EP1126082A3 (en) Article and method for preserving an archival article
JPH0214363U (US20090182215A1-20090716-C00004.png)
CA2134598A1 (en) Vacuum Assisted Stick Placer
JPH02137324U (US20090182215A1-20090716-C00004.png)
JPS6395242U (US20090182215A1-20090716-C00004.png)
JPS63110429U (US20090182215A1-20090716-C00004.png)
JPH039325U (US20090182215A1-20090716-C00004.png)
YU41188A (en) Vacuum isolated transporting container and process therof
JPH02127629U (US20090182215A1-20090716-C00004.png)
JPH0257817U (US20090182215A1-20090716-C00004.png)
JPS63155582U (US20090182215A1-20090716-C00004.png)
JPH0187170U (US20090182215A1-20090716-C00004.png)
JPS62174759U (US20090182215A1-20090716-C00004.png)
JPS6385093U (US20090182215A1-20090716-C00004.png)
JPH03116314U (US20090182215A1-20090716-C00004.png)
JPH01126330U (US20090182215A1-20090716-C00004.png)
JPS63110427U (US20090182215A1-20090716-C00004.png)
JPS6348723U (US20090182215A1-20090716-C00004.png)
JPS63170948U (US20090182215A1-20090716-C00004.png)
JPS6165096U (US20090182215A1-20090716-C00004.png)
JPS6215422U (US20090182215A1-20090716-C00004.png)
JPH02145285U (US20090182215A1-20090716-C00004.png)
JPS6341332U (US20090182215A1-20090716-C00004.png)
JPS63142831U (US20090182215A1-20090716-C00004.png)
JPH01180462U (US20090182215A1-20090716-C00004.png)