JPH02143189U - - Google Patents
Info
- Publication number
- JPH02143189U JPH02143189U JP1989050798U JP5079889U JPH02143189U JP H02143189 U JPH02143189 U JP H02143189U JP 1989050798 U JP1989050798 U JP 1989050798U JP 5079889 U JP5079889 U JP 5079889U JP H02143189 U JPH02143189 U JP H02143189U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrators
- piezoelectric
- main body
- opposite
- tips
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案装置の一実施例を示す構成説明
図、第２図ａ，ｂはその一部の動作説明図である
。 １Ａ，１Ｂ……圧電振動子、２……本体、３ａ
，３ｂ……弾性体、４……薄板状物、Ｅ……直流
電源。
図、第２図ａ，ｂはその一部の動作説明図である
。 １Ａ，１Ｂ……圧電振動子、２……本体、３ａ
，３ｂ……弾性体、４……薄板状物、Ｅ……直流
電源。
Claims (1)
- ２枚の逆相の圧電振動子１Ａ，１Ｂの基部を本
体２に対向して固定し、これらの圧電振動子１Ａ
，１Ｂの先端部対向面に弾性体３ａ，３ｂを取付
けると共に各圧電振動子１Ａ，１Ｂの電極間に直
流電源Ｅを接続せしめてなる薄板状物のハンドリ
ング装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989050798U JPH02143189U (ja) | 1989-04-28 | 1989-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989050798U JPH02143189U (ja) | 1989-04-28 | 1989-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02143189U true JPH02143189U (ja) | 1990-12-05 |
Family
ID=31569661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989050798U Pending JPH02143189U (ja) | 1989-04-28 | 1989-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02143189U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005342846A (ja) * | 2004-06-03 | 2005-12-15 | Nisca Corp | マイクロマニュピュレータ |
| WO2023276041A1 (ja) * | 2021-06-30 | 2023-01-05 | 株式会社Fuji | 張り付き解消装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62235747A (ja) * | 1986-04-07 | 1987-10-15 | Nec Corp | シリコンウエハ用ハンド |
| JPH0197583A (ja) * | 1987-10-09 | 1989-04-17 | Sumio Miyamoto | 圧電セラミック把握装置 |
-
1989
- 1989-04-28 JP JP1989050798U patent/JPH02143189U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62235747A (ja) * | 1986-04-07 | 1987-10-15 | Nec Corp | シリコンウエハ用ハンド |
| JPH0197583A (ja) * | 1987-10-09 | 1989-04-17 | Sumio Miyamoto | 圧電セラミック把握装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005342846A (ja) * | 2004-06-03 | 2005-12-15 | Nisca Corp | マイクロマニュピュレータ |
| WO2023276041A1 (ja) * | 2021-06-30 | 2023-01-05 | 株式会社Fuji | 張り付き解消装置 |