JPH02142558U - - Google Patents

Info

Publication number
JPH02142558U
JPH02142558U JP5164789U JP5164789U JPH02142558U JP H02142558 U JPH02142558 U JP H02142558U JP 5164789 U JP5164789 U JP 5164789U JP 5164789 U JP5164789 U JP 5164789U JP H02142558 U JPH02142558 U JP H02142558U
Authority
JP
Japan
Prior art keywords
gas
gas pressure
laser device
container
monitored
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5164789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5164789U priority Critical patent/JPH02142558U/ja
Publication of JPH02142558U publication Critical patent/JPH02142558U/ja
Pending legal-status Critical Current

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  • Lasers (AREA)
JP5164789U 1989-05-02 1989-05-02 Pending JPH02142558U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5164789U JPH02142558U (enrdf_load_stackoverflow) 1989-05-02 1989-05-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5164789U JPH02142558U (enrdf_load_stackoverflow) 1989-05-02 1989-05-02

Publications (1)

Publication Number Publication Date
JPH02142558U true JPH02142558U (enrdf_load_stackoverflow) 1990-12-04

Family

ID=31571268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5164789U Pending JPH02142558U (enrdf_load_stackoverflow) 1989-05-02 1989-05-02

Country Status (1)

Country Link
JP (1) JPH02142558U (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014170885A (ja) * 2013-03-05 2014-09-18 Fanuc Ltd レーザガス容器の密閉性を推定可能なレーザ装置
JP2016096319A (ja) * 2014-11-17 2016-05-26 ファナック株式会社 レーザガスの供給配管の気密性を検査する機能を備えたガスレーザ装置
WO2017158694A1 (ja) * 2016-03-14 2017-09-21 ギガフォトン株式会社 レーザ装置及び極端紫外光生成システム
WO2017195244A1 (ja) * 2016-05-09 2017-11-16 ギガフォトン株式会社 レーザ装置
WO2021065001A1 (ja) * 2019-10-04 2021-04-08 ギガフォトン株式会社 レーザ装置、及びレーザ装置のリークチェック方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55160483A (en) * 1979-05-31 1980-12-13 Nippon Sekigaisen Kogyo Kk Laser device
JPS60154583A (ja) * 1984-01-25 1985-08-14 Toshiba Corp ガスレ−ザ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55160483A (en) * 1979-05-31 1980-12-13 Nippon Sekigaisen Kogyo Kk Laser device
JPS60154583A (ja) * 1984-01-25 1985-08-14 Toshiba Corp ガスレ−ザ装置

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014170885A (ja) * 2013-03-05 2014-09-18 Fanuc Ltd レーザガス容器の密閉性を推定可能なレーザ装置
JP2016096319A (ja) * 2014-11-17 2016-05-26 ファナック株式会社 レーザガスの供給配管の気密性を検査する機能を備えたガスレーザ装置
WO2017158694A1 (ja) * 2016-03-14 2017-09-21 ギガフォトン株式会社 レーザ装置及び極端紫外光生成システム
US10461494B2 (en) 2016-03-14 2019-10-29 Gigaphoton Inc. Laser apparatus and extreme ultraviolet light generation system
WO2017195244A1 (ja) * 2016-05-09 2017-11-16 ギガフォトン株式会社 レーザ装置
JPWO2017195244A1 (ja) * 2016-05-09 2019-03-07 ギガフォトン株式会社 レーザ装置
US11239625B2 (en) 2016-05-09 2022-02-01 Gigaphoton Inc. Laser apparatus including gas supply device and exhausting device
WO2021065001A1 (ja) * 2019-10-04 2021-04-08 ギガフォトン株式会社 レーザ装置、及びレーザ装置のリークチェック方法
JPWO2021065001A1 (enrdf_load_stackoverflow) * 2019-10-04 2021-04-08
CN114287088A (zh) * 2019-10-04 2022-04-05 极光先进雷射株式会社 激光装置和激光装置的泄漏检查方法
CN114287088B (zh) * 2019-10-04 2025-03-21 极光先进雷射株式会社 激光装置和激光装置的泄漏检查方法
US12388228B2 (en) 2019-10-04 2025-08-12 Gigaphoton Inc. Laser device and leak check method for laser device

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