JPH02142558U - - Google Patents
Info
- Publication number
- JPH02142558U JPH02142558U JP5164789U JP5164789U JPH02142558U JP H02142558 U JPH02142558 U JP H02142558U JP 5164789 U JP5164789 U JP 5164789U JP 5164789 U JP5164789 U JP 5164789U JP H02142558 U JPH02142558 U JP H02142558U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas pressure
- laser device
- container
- monitored
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000012544 monitoring process Methods 0.000 claims 2
- 230000010355 oscillation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第１図は本考案の実施例を示す構成説明図、第
２図、第３図、第４図はその作用を示すフローチ
ヤートである。
１は容器、２はボンベ、３は排気ポンプ、４は
バルブ、５は圧力センサ、６は圧力センサ用コン
トローラ、７はレーザ用コントローラ、８はガス
圧記憶用外部メモリ。
FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention, and FIGS. 2, 3, and 4 are flowcharts showing its operation. 1 is a container, 2 is a cylinder, 3 is an exhaust pump, 4 is a valve, 5 is a pressure sensor, 6 is a pressure sensor controller, 7 is a laser controller, and 8 is an external memory for storing gas pressure.
Claims (1)
ーザ発振を起こさせる形式のガスレーザ装置にお
いて、容器内のガス圧力をモニタして容器内のガ
ス漏れを検知するガス圧モニタ手段を備えたこと
を特徴ガスレーザ装置。 (2) ガス圧モニタ手段にてモニタしたガス圧力
をレーザ用コントローラのガス圧記憶用外部メモ
リへ退避し、モニタ中の値と比較することによつ
てガスス漏れを検知するガス漏れ検知装置備えた
ことを特徴とするガスレーザ装置。 (3) ガスレーザ装置の電源を切る前のガス圧力
をガス圧記憶用外部メモリへ退避し、つぎに電源
を入れたときのガス圧力と比較してガス漏れを検
知できるガス漏れ検知装置を備えたことを特徴と
する請求項２記載のガスレーザ装置。 (4) ガス圧力を測定するときに、これと同時に
ガス温度を測定し、常に基準温度におけるガス圧
として換算し、記憶した値と、現在の値とを比較
するようにしたことを特徴とする請求項２及び３
記載のガスレーザ装置。[Claims for Utility Model Registration] (1) In a gas laser device that confines gas within a container and causes laser oscillation within the container, the gas pressure within the container is monitored to detect gas leakage within the container. A gas laser device characterized by being equipped with gas pressure monitoring means. (2) Equipped with a gas leak detection device that detects a gas leak by saving the gas pressure monitored by the gas pressure monitoring means to an external memory for gas pressure storage of the laser controller and comparing it with the value being monitored. A gas laser device characterized by: (3) Equipped with a gas leak detection device that can save the gas pressure before the gas laser device is powered off to an external memory for gas pressure storage and compare it with the gas pressure when the power is turned on to detect gas leaks. The gas laser device according to claim 2, characterized in that: (4) When measuring the gas pressure, the gas temperature is also measured at the same time, the gas pressure is always converted to the reference temperature, and the stored value is compared with the current value. Claims 2 and 3
The gas laser device described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5164789U JPH02142558U (en) | 1989-05-02 | 1989-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5164789U JPH02142558U (en) | 1989-05-02 | 1989-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02142558U true JPH02142558U (en) | 1990-12-04 |
Family
ID=31571268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5164789U Pending JPH02142558U (en) | 1989-05-02 | 1989-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02142558U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014170885A (en) * | 2013-03-05 | 2014-09-18 | Fanuc Ltd | Laser device capable of estimating sealing property of laser gas container |
| JP2016096319A (en) * | 2014-11-17 | 2016-05-26 | ファナック株式会社 | Gas laser device including function of inspecting airtightness of laser gas supply pipe |
| WO2017158694A1 (en) * | 2016-03-14 | 2017-09-21 | ギガフォトン株式会社 | Laser apparatus and extreme ultraviolet light generation system |
| WO2017195244A1 (en) * | 2016-05-09 | 2017-11-16 | ギガフォトン株式会社 | Laser device |
| JPWO2021065001A1 (en) * | 2019-10-04 | 2021-04-08 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55160483A (en) * | 1979-05-31 | 1980-12-13 | Nippon Sekigaisen Kogyo Kk | Laser device |
| JPS60154583A (en) * | 1984-01-25 | 1985-08-14 | Toshiba Corp | Gas laser device |
-
1989
- 1989-05-02 JP JP5164789U patent/JPH02142558U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55160483A (en) * | 1979-05-31 | 1980-12-13 | Nippon Sekigaisen Kogyo Kk | Laser device |
| JPS60154583A (en) * | 1984-01-25 | 1985-08-14 | Toshiba Corp | Gas laser device |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014170885A (en) * | 2013-03-05 | 2014-09-18 | Fanuc Ltd | Laser device capable of estimating sealing property of laser gas container |
| JP2016096319A (en) * | 2014-11-17 | 2016-05-26 | ファナック株式会社 | Gas laser device including function of inspecting airtightness of laser gas supply pipe |
| WO2017158694A1 (en) * | 2016-03-14 | 2017-09-21 | ギガフォトン株式会社 | Laser apparatus and extreme ultraviolet light generation system |
| US10461494B2 (en) | 2016-03-14 | 2019-10-29 | Gigaphoton Inc. | Laser apparatus and extreme ultraviolet light generation system |
| WO2017195244A1 (en) * | 2016-05-09 | 2017-11-16 | ギガフォトン株式会社 | Laser device |
| JPWO2017195244A1 (en) * | 2016-05-09 | 2019-03-07 | ギガフォトン株式会社 | Laser equipment |
| US11239625B2 (en) | 2016-05-09 | 2022-02-01 | Gigaphoton Inc. | Laser apparatus including gas supply device and exhausting device |
| JPWO2021065001A1 (en) * | 2019-10-04 | 2021-04-08 | ||
| WO2021065001A1 (en) * | 2019-10-04 | 2021-04-08 | ギガフォトン株式会社 | Laser device and leak check method for laser device |
| CN114287088A (en) * | 2019-10-04 | 2022-04-05 | 极光先进雷射株式会社 | Laser device and leak inspection method for laser device |