JPH02142531U - - Google Patents

Info

Publication number
JPH02142531U
JPH02142531U JP5066689U JP5066689U JPH02142531U JP H02142531 U JPH02142531 U JP H02142531U JP 5066689 U JP5066689 U JP 5066689U JP 5066689 U JP5066689 U JP 5066689U JP H02142531 U JPH02142531 U JP H02142531U
Authority
JP
Japan
Prior art keywords
carrier
liquid
semiconductor wafer
processing equipment
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5066689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5066689U priority Critical patent/JPH02142531U/ja
Publication of JPH02142531U publication Critical patent/JPH02142531U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP5066689U 1989-04-28 1989-04-28 Pending JPH02142531U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5066689U JPH02142531U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-28 1989-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5066689U JPH02142531U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-28 1989-04-28

Publications (1)

Publication Number Publication Date
JPH02142531U true JPH02142531U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-04

Family

ID=31569410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5066689U Pending JPH02142531U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-28 1989-04-28

Country Status (1)

Country Link
JP (1) JPH02142531U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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