JPH02140842U - - Google Patents
Info
- Publication number
- JPH02140842U JPH02140842U JP4976989U JP4976989U JPH02140842U JP H02140842 U JPH02140842 U JP H02140842U JP 4976989 U JP4976989 U JP 4976989U JP 4976989 U JP4976989 U JP 4976989U JP H02140842 U JPH02140842 U JP H02140842U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- blade
- parallel
- semiconductor
- optical distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4976989U JPH02140842U (en:Method) | 1989-04-26 | 1989-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4976989U JPH02140842U (en:Method) | 1989-04-26 | 1989-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140842U true JPH02140842U (en:Method) | 1990-11-26 |
Family
ID=31567740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4976989U Pending JPH02140842U (en:Method) | 1989-04-26 | 1989-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140842U (en:Method) |
-
1989
- 1989-04-26 JP JP4976989U patent/JPH02140842U/ja active Pending
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