JPH02140794A - Defect checking method for liquid crystal display device - Google Patents

Defect checking method for liquid crystal display device

Info

Publication number
JPH02140794A
JPH02140794A JP63294183A JP29418388A JPH02140794A JP H02140794 A JPH02140794 A JP H02140794A JP 63294183 A JP63294183 A JP 63294183A JP 29418388 A JP29418388 A JP 29418388A JP H02140794 A JPH02140794 A JP H02140794A
Authority
JP
Japan
Prior art keywords
electrode
liquid crystal
crystal display
picture element
electrolyte solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63294183A
Other languages
Japanese (ja)
Inventor
Katsutoshi Higuchi
勝敏 樋口
Kazuo Seki
一夫 関
Shuichi Shima
秀一 嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Shibaura Mechatronics Corp
Original Assignee
Toshiba Corp
Shibaura Engineering Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Shibaura Engineering Works Co Ltd filed Critical Toshiba Corp
Priority to JP63294183A priority Critical patent/JPH02140794A/en
Publication of JPH02140794A publication Critical patent/JPH02140794A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Liquid Crystal Display Device Control (AREA)

Abstract

PURPOSE:To detect a defective picture element before assembling by immersing substrates and an electrode in an electrolyte solution and applying a negative voltage and a positive voltage to each select line of substrates and the electrode respectively and detecting a defect of the picture element electrode by the reduction action. CONSTITUTION:Substrates 22, 23, and 24 and an electrode 25 are immersed in an electrolyte solution 21, and the negative voltage and the positive voltage are applied to each of select lines 26 and 31 of substrates 22, 23, and 24 and the electrode 25 respectively, and a defect of a picture element electrode 27 is detected by the reduction action caused between the picture element electrode 27 and respective select lines 26 and 31. That is, when a voltage is applied to the picture element electrode 27 while a thin film transistor 29 is not turned on, the reduction action is caused between the picture element electrode 27 and the electrolyte solution 21 and the quantity of oxygen O included in the picture element electrode 27 is reduced. The picture electrode 27 where short- circuit 28 occurs is blackened and is easily visually detected, and this detection is possible before final assembling.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は液晶ディスプレイの欠陥検査方法に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a method for inspecting defects in liquid crystal displays.

(従来の技術) 第4図はカラー液晶ディスプレイの構成図であって、こ
のディスプレイは偏光板1.対向基板2、赤色、緑色及
び青色から成るカラーフィルタ層3、さらには対向電極
4から構成される電極側と、TPT (薄膜トランジス
タ)アレイ基板5及び偏光板6から構成される基板側と
を対向配置し、これら電極側と基板側との間に液晶7を
封入し、さらに偏光板6の後方に拡散板8を配置すると
ともに背面照明9を配置した構成となっている。又、T
FTアレイ基板5は画素電極10を縦横に多数配列する
とともにこれら画素電極10にそれぞれスイッチング素
子としての薄膜トランジスタ11を形成し、かつこれら
薄膜トランジスタ11にそれぞれ縦方向及び横方向の各
選択線12.13を配線したものとなっている。なお、
以上のような液晶ディスプレイの等価回路は第5図に示
す如くとなっている。
(Prior Art) FIG. 4 is a block diagram of a color liquid crystal display, which consists of a polarizing plate 1. An electrode side consisting of a counter substrate 2, a color filter layer 3 consisting of red, green, and blue colors, and a counter electrode 4, and a substrate side consisting of a TPT (thin film transistor) array substrate 5 and a polarizing plate 6 are arranged to face each other. However, a liquid crystal 7 is sealed between the electrode side and the substrate side, and furthermore, a diffusion plate 8 is arranged behind the polarizing plate 6, and a backlight 9 is arranged. Also, T
The FT array substrate 5 has a large number of pixel electrodes 10 arranged vertically and horizontally, thin film transistors 11 as switching elements are formed on each of these pixel electrodes 10, and selection lines 12 and 13 are formed in each of these thin film transistors 11 in the vertical and horizontal directions. It is wired. In addition,
The equivalent circuit of the above liquid crystal display is as shown in FIG.

このような構成であれば、各選択線12.13が選択さ
れて電圧が印加されると、これら選択された各選択線1
2.13の一致したところに設けられた薄膜トランジス
タ11がオン状態となる。
With such a configuration, when each selection line 12.13 is selected and a voltage is applied, each selected selection line 1
The thin film transistor 11 provided where 2.13 coincides is turned on.

これにより、オン状態となったところの画素電極10と
対向電極4との間に電圧が加わって、この間の液晶7の
作用により光の透過量が変化する。
As a result, a voltage is applied between the pixel electrode 10 that has been turned on and the counter electrode 4, and the amount of light transmitted changes due to the action of the liquid crystal 7 during this time.

この結果、例えば赤色に当たる画素電極10であれば、
光が赤色のカラーフィルタ3を透過して、赤色が発光す
る。なお、薄膜トランジスタ11がオフ状態となると、
光がカラーフィルタ3を透過しなくなり発光がなくなる
As a result, for example, if the pixel electrode 10 corresponds to red,
The light passes through the red color filter 3 and emits red light. Note that when the thin film transistor 11 is turned off,
Light no longer passes through the color filter 3 and no light is emitted.

ところで、かかる液晶ディスプレイでは各画素の欠陥検
査が行なわれている。この検査は、カラー液晶ディスプ
レイを組立てた後、例えば各色ごとに発光させて発光し
ない画素や例えば赤色を発光させたときに緑色が発光す
るような欠陥画素を目視によって見付は出している。そ
して、この場合、欠陥画素は、1つとして現われる点欠
陥や複数並んで現われる線欠陥となることが多い。
By the way, in such a liquid crystal display, each pixel is inspected for defects. In this inspection, after a color liquid crystal display is assembled, defective pixels such as pixels that do not emit light by emitting light for each color or defective pixels that emit green light when red light is emitted are visually identified. In this case, the defective pixel is often a point defect that appears as one or a line defect that appears in multiple lines.

ところで、かかる欠陥画素は例えば第6図に示すように
選択線12と画素電極10とが短絡14していたり、又
画素電極10と別の選択線13とが短絡したり、さらに
は薄膜トランジスタ11におけるソース電極15とゲー
ト電極16とが短絡したりする原因による。しかるに、
このような欠、陥画素の原因によりカラー液晶ディスプ
レイの欠陥画素は、カラー液晶ディスプレイ全体を組立
てる前のTFTアレイ基板5を作成する工程に発生して
いることになる。従って、上記欠陥画素の検査方法では
、カラー液晶ディスプレイを組立てた後となるので、欠
陥画素を検出しその欠陥画素数等が許容欠陥数以上にな
った場合、組立てたカラー液晶ディスプレイは不良品と
して使用不可能となる。そればかりでなく欠陥画素を存
したままカラー液晶ディスプレイを組立てることになる
ので、その組立て工程が全く無駄となる。又、上記検査
方法ではカラー液晶ディスプレイの修復が可能かどうか
の判定もできない。
By the way, such a defective pixel may be caused by, for example, a short circuit 14 between the selection line 12 and the pixel electrode 10 as shown in FIG. This is due to a short circuit between the source electrode 15 and the gate electrode 16. However,
Due to such defective or defective pixels, defective pixels in a color liquid crystal display occur during the process of producing the TFT array substrate 5 before assembling the entire color liquid crystal display. Therefore, in the above defective pixel inspection method, the color liquid crystal display is inspected after the color liquid crystal display is assembled, so if a defective pixel is detected and the number of defective pixels exceeds the allowable number of defects, the assembled color liquid crystal display will be considered defective. It becomes unusable. Not only that, but the color liquid crystal display must be assembled with the defective pixel still present, making the assembly process completely wasteful. Further, the above inspection method cannot determine whether or not the color liquid crystal display can be repaired.

(発明が解決しようとする課題) 以上のように上記検査方法ではカラー液晶ディスプレイ
を組立てた後の検査であるため、画素欠陥が検出された
場合、そのカラー液晶ディスプレイを不良品としなけれ
ばならず、無駄が多く生じるものであった。
(Problem to be Solved by the Invention) As described above, in the above inspection method, the inspection is performed after the color liquid crystal display is assembled, so if a pixel defect is detected, the color liquid crystal display must be judged as a defective product. , which resulted in a lot of waste.

そこで本発明は、液晶ディスプレイを最終的に組立てる
前に欠陥画素を検出できる液晶ディスプレイの欠陥検査
方法を提供することを目的とする。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a defect inspection method for a liquid crystal display that can detect defective pixels before final assembly of the liquid crystal display.

〔発明の構成〕[Structure of the invention]

(課題を解決するための手段と作用) 本発明は、スイッチング素子をそれぞれ設けた多数の画
素電極を縦横方向に配列するとともにこれらスイッチン
グ素子に縦方向及び横方向の各選択線をそれぞれ配線し
て成る基板を有する液晶ディスプレイの欠陥検査方法に
おいて、基板並びに電極を電解質溶液中に浸漬し、遅く
ともこの浸漬状態後に基板の各選択線に負電圧を印加す
るとともに電極に正電圧を印加し、画素電極と各選択線
との間に起こる還元作用から画素電極の欠陥を検出する
液晶ディスプレイの欠陥検査方法である。
(Means and effects for solving the problem) The present invention arranges a large number of pixel electrodes each provided with a switching element in the vertical and horizontal directions, and wires selection lines in the vertical and horizontal directions to these switching elements. In a defect inspection method for a liquid crystal display having a substrate made of This is a defect inspection method for liquid crystal displays that detects defects in pixel electrodes from the reduction action that occurs between the selected line and each selection line.

(実施例) 以下、本発明の一実施例について図面を参照して説明す
る。
(Example) Hereinafter, an example of the present invention will be described with reference to the drawings.

第1図は液晶ディスプレイの欠陥検査方法を適用した欠
陥検査装置の構成図である。水槽20内には電解質溶液
21が保持されている。そして、この電解質溶液21中
にはカラー液晶ディスプレイの各TPT基板22.23
.24が浸漬されるとともに白金から成る電極25が浸
漬されている。
FIG. 1 is a block diagram of a defect inspection apparatus to which a liquid crystal display defect inspection method is applied. An electrolyte solution 21 is held within the water tank 20 . In this electrolyte solution 21, each TPT substrate 22, 23 of a color liquid crystal display is contained.
.. 24 is immersed, and an electrode 25 made of platinum is also immersed.

そして、電極25は正電圧(+)が印加されて陽極とし
て作用し、又各TPT基板22,23゜24の例えば第
2図に示す縦方向の選択線26には負電圧(−)が印加
されて陰極として作用するようになっている。
A positive voltage (+) is applied to the electrode 25 so that it acts as an anode, and a negative voltage (-) is applied to the vertical selection line 26 shown in FIG. is used to act as a cathode.

次に上記の如く構成された装置での検査方法について説
明する。
Next, an inspection method using the apparatus configured as described above will be explained.

各TPT基板22,23.24が電解質溶液21中に浸
漬されるとともに電極25が同電解質溶液21中に浸漬
される。そして、この状態にて電極25に正電圧(+)
が印加されるとともに各TFTM板22,23.24(
7)各縦方向(7)選択i26に負電圧(−)が印加さ
れる。なお、この場合、電極25と各TPT基板22,
23.24との間に印加される電圧は所定値に設定され
る。
Each TPT substrate 22, 23, 24 is immersed in the electrolyte solution 21, and the electrode 25 is immersed in the same electrolyte solution 21. In this state, a positive voltage (+) is applied to the electrode 25.
is applied and each TFTM board 22, 23, 24 (
7) A negative voltage (-) is applied to each vertical (7) selection i26. In this case, the electrode 25 and each TPT substrate 22,
The voltage applied between 23 and 24 is set to a predetermined value.

ここで、第2図に示すように画素電極27と縦方向の選
択線26との間に短絡28があると、薄膜トランジスタ
29がオン状態となっていないにも拘らず画素電極27
に電圧が印加される。そうすると、画素電極27と電解
質溶液21との間で還元作用が起きて画素電極27に含
まれる酸素Oの量が減少する。これにより、画素電極2
7はこの還元作用によって変色し、その色が黒化する。
Here, if there is a short circuit 28 between the pixel electrode 27 and the vertical selection line 26 as shown in FIG.
A voltage is applied to. Then, a reduction action occurs between the pixel electrode 27 and the electrolyte solution 21, and the amount of oxygen O contained in the pixel electrode 27 decreases. As a result, the pixel electrode 2
7 changes color due to this reduction, and its color becomes black.

第3図はTPT基板22において現われた欠陥の各画素
電極30を示している。
FIG. 3 shows each pixel electrode 30 with defects appearing in the TPT substrate 22. FIG.

次に縦方向の選択線26への負電圧の印加が停止される
とともに横方向の選択線26に正電圧が印加される。こ
れにより、画素電極27と横方向の選択線31との間が
短絡していれば、上記同様に還元作用が起こって画素電
極27は変色する。
Next, application of the negative voltage to the vertical selection line 26 is stopped, and at the same time, a positive voltage is applied to the horizontal selection line 26. As a result, if there is a short circuit between the pixel electrode 27 and the horizontal selection line 31, a reduction effect occurs in the same manner as described above, and the pixel electrode 27 changes color.

このように上記一実施例においては、TPT基板22,
23.24を電解質溶液21中に浸漬し、この状態に各
選択線26.31に負電圧を印加するとともに電解質溶
液21中に正電圧が印加された電極25を浸漬し、画素
電極27と各選択線26.31との間に起こる還元作用
から画素電極の欠陥を検出するようにしたので、短絡2
8が起きている画素電極27が黒化して目視により容易
に検出でき、しかもこの検出がカラー液晶ディスプレイ
を最終的に組立てる前にできる。従って、カラー液晶デ
ィスプレイを最終的に組立てる前に短絡箇所を修復でき
る。又、欠陥画素電極30の数が許容欠陥数よりも多か
ったり、欠陥画素が在ってはならない箇所にあった場合
、欠陥を有するTPT基板を用いてカラー液晶ディスプ
レイを最終的に組立てることがなくなる。よって、カラ
ー液晶ディスプレイ製造の無駄を非常に減少できる。
In this way, in the above embodiment, the TPT substrate 22,
23 and 24 are immersed in the electrolyte solution 21, and in this state, a negative voltage is applied to each selection line 26 and 31, and the electrode 25 to which a positive voltage has been applied is immersed in the electrolyte solution 21, and the pixel electrode 27 and each Since defects in the pixel electrode are detected from the reduction action that occurs between the selection line 26 and 31, short circuit 2
The pixel electrode 27 where 8 has occurred becomes black and can be easily detected visually, and this detection can be made before the color liquid crystal display is finally assembled. Therefore, the short circuit can be repaired before final assembly of the color liquid crystal display. Furthermore, if the number of defective pixel electrodes 30 is greater than the allowable number of defects, or if defective pixels are located at locations where they should not be present, a color liquid crystal display will no longer be assembled using a defective TPT substrate. . Therefore, waste in manufacturing color liquid crystal displays can be greatly reduced.

さらに、上記検査方法では各選択線26.31に電圧を
印加するので、使用状態に近い状態で検査ができるうえ
、電極25と各選択線26.31に印加する電圧値を高
くすることによって極僅かな短絡でも検出できる。
Furthermore, in the above inspection method, since a voltage is applied to each selection line 26.31, the inspection can be performed in a state close to the usage state, and by increasing the voltage value applied to the electrode 25 and each selection line 26.31, Even the slightest short circuit can be detected.

なお、本発明は上記一実施例に限定されるものでなくそ
の主旨を逸脱しない範囲で変形してもよい。例えば、上
記一実施例ではカラー液晶ディスプレイの欠陥検査を行
なったが、白黒の液晶ディスプレイの欠陥検査にも適用
できる。又、スイッチング素子としては薄膜トランジス
タに限らずMIM等の2端子素子でもよい。又、電極2
5並びに選択線26への電圧の印加は、これらの電圧質
溶液への浸漬前であってもよい。
Note that the present invention is not limited to the above-mentioned embodiment, and may be modified without departing from the spirit thereof. For example, in the above embodiment, a color liquid crystal display was inspected for defects, but the present invention can also be applied to defect inspections for black and white liquid crystal displays. Further, the switching element is not limited to a thin film transistor, but may be a two-terminal element such as an MIM. Also, electrode 2
5 and the selection line 26 may be applied before immersion in the voltage solution.

〔発明の効果〕〔Effect of the invention〕

以上詳記したように本発明によれば、液晶ディスプレイ
を最終的に組立てる前に欠陥画素を検出できる液晶ディ
スプレイの欠陥検査方法を提供できる。
As described in detail above, according to the present invention, it is possible to provide a defect inspection method for a liquid crystal display that can detect defective pixels before final assembly of the liquid crystal display.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図乃至第3図は本発明に係わる液晶ディスプレイの
欠陥検査方法を説明するための図であって、第1図は同
方法を適用した欠陥検査装置の構成図、第2図は検出作
用を説明するための図、第3図は検査結果を示す図、第
4図はカラー液晶ディスプレイの構成図、第5図は同デ
ィスプレイの等価回路図、第6図は短絡状態を示す図で
ある。 20・・・水槽、21・・・電解質溶液、22.23゜
24・・・TPT基板、25・・・電極、26.31・
・・選択線、27・・・画素電極、29・・・薄膜トラ
ンジスタ。 出願人代理人 弁理士 鈴江武彦 第 図 第 図 第 図 第 図 第 図 第 図
1 to 3 are diagrams for explaining the defect inspection method for a liquid crystal display according to the present invention, in which FIG. 1 is a block diagram of a defect inspection apparatus to which the method is applied, and FIG. 2 is a diagram showing the detection operation. Figure 3 is a diagram showing the test results, Figure 4 is a configuration diagram of a color liquid crystal display, Figure 5 is an equivalent circuit diagram of the display, and Figure 6 is a diagram showing a short circuit state. . 20... Water tank, 21... Electrolyte solution, 22.23° 24... TPT substrate, 25... Electrode, 26.31.
. . . Selection line, 27 . . . Pixel electrode, 29 . . . Thin film transistor. Applicant's Representative Patent Attorney Takehiko Suzue

Claims (1)

【特許請求の範囲】[Claims] スイッチング素子をそれぞれ設けた多数の画素電極を縦
横方向に配列するとともにこれらスイッチング素子に縦
方向及び横方向の各選択線をそれぞれ配線して成る基板
を有する液晶ディスプレイの欠陥検査方法において、前
記基板並びに前記電極を電解質溶液中に浸漬し、遅くと
もこの浸漬状態後に前記基板の各選択線に負電圧を印加
するとともに前記電極に正電圧を印加し、前記画素電極
と前記各選択線との間に起こる還元作用から前記画素電
極の欠陥を検出することを特徴とする液晶ディスプレイ
の欠陥検査方法。
A defect inspection method for a liquid crystal display having a substrate having a plurality of pixel electrodes each provided with a switching element arranged in the vertical and horizontal directions, and each selection line in the vertical and horizontal directions being wired to the switching elements, the substrate and immersing said electrode in an electrolyte solution; at the latest after this immersion state, applying a negative voltage to each selection line of said substrate and applying a positive voltage to said electrode, which occurs between said pixel electrode and each said selection line; A method for inspecting defects in a liquid crystal display, characterized in that defects in the pixel electrode are detected from a reduction effect.
JP63294183A 1988-11-21 1988-11-21 Defect checking method for liquid crystal display device Pending JPH02140794A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63294183A JPH02140794A (en) 1988-11-21 1988-11-21 Defect checking method for liquid crystal display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63294183A JPH02140794A (en) 1988-11-21 1988-11-21 Defect checking method for liquid crystal display device

Publications (1)

Publication Number Publication Date
JPH02140794A true JPH02140794A (en) 1990-05-30

Family

ID=17804386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63294183A Pending JPH02140794A (en) 1988-11-21 1988-11-21 Defect checking method for liquid crystal display device

Country Status (1)

Country Link
JP (1) JPH02140794A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002072918A (en) * 2000-06-06 2002-03-12 Semiconductor Energy Lab Co Ltd Element substrate and inspection method and inspection device thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002072918A (en) * 2000-06-06 2002-03-12 Semiconductor Energy Lab Co Ltd Element substrate and inspection method and inspection device thereof

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