JPH02138577U - - Google Patents

Info

Publication number
JPH02138577U
JPH02138577U JP4618489U JP4618489U JPH02138577U JP H02138577 U JPH02138577 U JP H02138577U JP 4618489 U JP4618489 U JP 4618489U JP 4618489 U JP4618489 U JP 4618489U JP H02138577 U JPH02138577 U JP H02138577U
Authority
JP
Japan
Prior art keywords
heating chamber
heating
chamber
bottle
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4618489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0618467Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989046184U priority Critical patent/JPH0618467Y2/ja
Publication of JPH02138577U publication Critical patent/JPH02138577U/ja
Application granted granted Critical
Publication of JPH0618467Y2 publication Critical patent/JPH0618467Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Catching Or Destruction (AREA)
JP1989046184U 1989-04-21 1989-04-21 加熱蒸散装置 Expired - Lifetime JPH0618467Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989046184U JPH0618467Y2 (ja) 1989-04-21 1989-04-21 加熱蒸散装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989046184U JPH0618467Y2 (ja) 1989-04-21 1989-04-21 加熱蒸散装置

Publications (2)

Publication Number Publication Date
JPH02138577U true JPH02138577U (cs) 1990-11-19
JPH0618467Y2 JPH0618467Y2 (ja) 1994-05-18

Family

ID=31561041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989046184U Expired - Lifetime JPH0618467Y2 (ja) 1989-04-21 1989-04-21 加熱蒸散装置

Country Status (1)

Country Link
JP (1) JPH0618467Y2 (cs)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169983U (cs) * 1984-10-12 1986-05-13
JPS63165182U (cs) * 1987-04-17 1988-10-27
JPH0661205A (ja) * 1992-08-11 1994-03-04 Fujitsu Ltd 半導体ウェハの研磨方法および研磨装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169983U (cs) * 1984-10-12 1986-05-13
JPS63165182U (cs) * 1987-04-17 1988-10-27
JPH0661205A (ja) * 1992-08-11 1994-03-04 Fujitsu Ltd 半導体ウェハの研磨方法および研磨装置

Also Published As

Publication number Publication date
JPH0618467Y2 (ja) 1994-05-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term