JPH02138434U - - Google Patents
Info
- Publication number
- JPH02138434U JPH02138434U JP4807489U JP4807489U JPH02138434U JP H02138434 U JPH02138434 U JP H02138434U JP 4807489 U JP4807489 U JP 4807489U JP 4807489 U JP4807489 U JP 4807489U JP H02138434 U JPH02138434 U JP H02138434U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- reflectance pattern
- alignment mark
- directions
- center point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4807489U JPH02138434U (ko) | 1989-04-24 | 1989-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4807489U JPH02138434U (ko) | 1989-04-24 | 1989-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02138434U true JPH02138434U (ko) | 1990-11-19 |
Family
ID=31564566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4807489U Pending JPH02138434U (ko) | 1989-04-24 | 1989-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02138434U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6081040A (en) * | 1997-03-17 | 2000-06-27 | Denso Corporation | Semiconductor device having alignment mark |
| JP2016103618A (ja) * | 2014-11-29 | 2016-06-02 | 日亜化学工業株式会社 | 発光装置 |
-
1989
- 1989-04-24 JP JP4807489U patent/JPH02138434U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6081040A (en) * | 1997-03-17 | 2000-06-27 | Denso Corporation | Semiconductor device having alignment mark |
| JP2016103618A (ja) * | 2014-11-29 | 2016-06-02 | 日亜化学工業株式会社 | 発光装置 |