JPH02137749U - - Google Patents
Info
- Publication number
- JPH02137749U JPH02137749U JP4633189U JP4633189U JPH02137749U JP H02137749 U JPH02137749 U JP H02137749U JP 4633189 U JP4633189 U JP 4633189U JP 4633189 U JP4633189 U JP 4633189U JP H02137749 U JPH02137749 U JP H02137749U
- Authority
- JP
- Japan
- Prior art keywords
- head
- vacuum chamber
- heating
- inlet
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003463 adsorbent Substances 0.000 claims description 3
- 239000002274 desiccant Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 3
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000010926 purge Methods 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例を説明する模式断面
図、第２図１，２はイオンソースヘツドの模式断
面図と平面図である。
図において、１は真空室、２はソースヘツド、
３はヒータ用電源、４はマツトヒータ、５は形状
記憶合金コイル、６は排気バルブ、７は真空ポン
プ、８はオイルフイルタ、９は吸着剤、１０は乾
燥剤、１１はパージバルブ、である。
FIG. 1 is a schematic sectional view for explaining an embodiment of the present invention, and FIGS. 2, 1 and 2 are a schematic sectional view and a plan view of an ion source head. In the figure, 1 is a vacuum chamber, 2 is a source head,
3 is a power source for the heater, 4 is a mat heater, 5 is a shape memory alloy coil, 6 is an exhaust valve, 7 is a vacuum pump, 8 is an oil filter, 9 is an adsorbent, 10 is a desiccant, and 11 is a purge valve.
Claims (1)
外側に出して装置し且つ該ヘツドを真空封止でき
る真空室と、 該ヘツドを加熱する加熱手段と、 該真空室の排気手段と、 該排気手段から排出するガスの導入部と、排出
部を有する吸着剤筒と、 気体の導入部と該真空室に接続する排出部を有
する乾燥剤筒とを有し、 該乾燥剤筒と該吸着剤筒が熱交換器を構成する
ことを特徴とするイオンソースヘツド保管装置。[Scope of Claim for Utility Model Registration] A vacuum chamber in which the ion source head is installed with the main body inside and the handle portion outside and can be vacuum-sealed; heating means for heating the head; and a vacuum chamber for heating the head. an adsorbent tube having an exhaust means, an inlet for gas discharged from the exhaust means, and an outlet; and a desiccant tube having an inlet for gas and an outlet connected to the vacuum chamber; An ion source head storage device characterized in that the agent cylinder and the adsorbent cylinder constitute a heat exchanger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4633189U JPH02137749U (en) | 1989-04-20 | 1989-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4633189U JPH02137749U (en) | 1989-04-20 | 1989-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137749U true JPH02137749U (en) | 1990-11-16 |
Family
ID=31561320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4633189U Pending JPH02137749U (en) | 1989-04-20 | 1989-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137749U (en) |
-
1989
- 1989-04-20 JP JP4633189U patent/JPH02137749U/ja active Pending