JPH0213753U - - Google Patents
Info
- Publication number
- JPH0213753U JPH0213753U JP9174588U JP9174588U JPH0213753U JP H0213753 U JPH0213753 U JP H0213753U JP 9174588 U JP9174588 U JP 9174588U JP 9174588 U JP9174588 U JP 9174588U JP H0213753 U JPH0213753 U JP H0213753U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- substrate
- gauge
- walled
- thick
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9174588U JPH0213753U (cs) | 1988-07-11 | 1988-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9174588U JPH0213753U (cs) | 1988-07-11 | 1988-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0213753U true JPH0213753U (cs) | 1990-01-29 |
Family
ID=31316211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9174588U Pending JPH0213753U (cs) | 1988-07-11 | 1988-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213753U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003302298A (ja) * | 2002-04-10 | 2003-10-24 | Denso Corp | 力学量検出装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5446083A (en) * | 1977-09-19 | 1979-04-11 | Toshiba Corp | Pressure transducer |
| JPS5972775A (ja) * | 1982-10-20 | 1984-04-24 | Hitachi Ltd | シリコン歪ゲ−ジ式感圧装置およびその製造方法 |
| JPS6011049B2 (ja) * | 1971-11-13 | 1985-03-22 | バイエル・アクチエンゲゼルシヤフト | 共役ジオレフインの重合方法 |
| JPS6252952B2 (cs) * | 1979-09-07 | 1987-11-07 | Ei Teii Ando Teii Tekunorojiizu Inc |
-
1988
- 1988-07-11 JP JP9174588U patent/JPH0213753U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6011049B2 (ja) * | 1971-11-13 | 1985-03-22 | バイエル・アクチエンゲゼルシヤフト | 共役ジオレフインの重合方法 |
| JPS5446083A (en) * | 1977-09-19 | 1979-04-11 | Toshiba Corp | Pressure transducer |
| JPS6252952B2 (cs) * | 1979-09-07 | 1987-11-07 | Ei Teii Ando Teii Tekunorojiizu Inc | |
| JPS5972775A (ja) * | 1982-10-20 | 1984-04-24 | Hitachi Ltd | シリコン歪ゲ−ジ式感圧装置およびその製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003302298A (ja) * | 2002-04-10 | 2003-10-24 | Denso Corp | 力学量検出装置 |