JPH0213732U - - Google Patents
Info
- Publication number
- JPH0213732U JPH0213732U JP9070388U JP9070388U JPH0213732U JP H0213732 U JPH0213732 U JP H0213732U JP 9070388 U JP9070388 U JP 9070388U JP 9070388 U JP9070388 U JP 9070388U JP H0213732 U JPH0213732 U JP H0213732U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- vacuum
- evaluating
- fixes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は、本考案の一実施例を示すウエハープ
ローバ装置の平面図である。第２図は、従来のウ
エハープローバ装置の平面図である。
１…ステージ、２…バキユーム用コード、３…
ステージとバキユーム用コード接続部、４…ウエ
ハー、５…固定枠。
FIG. 1 is a plan view of a wafer prober device showing an embodiment of the present invention. FIG. 2 is a plan view of a conventional wafer prober device. 1...Stage, 2...Bakyum code, 3...
Stage and vacuum cord connection section, 4...wafer, 5...fixing frame.
Claims (1)
別において、ウエハーをバキユームによつて固定
するステージ上に、ウエハーの口径に応じて可変
できるウエハー固体枠を有していることを特徴と
するウエハープローバ装置。 A wafer prober device for evaluating and sorting semiconductor integrated circuits in a wafer state, characterized by having a wafer solid frame that can be changed according to the diameter of the wafer on a stage that fixes the wafer with a vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9070388U JPH0213732U (en) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9070388U JPH0213732U (en) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0213732U true JPH0213732U (en) | 1990-01-29 |
Family
ID=31315217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9070388U Pending JPH0213732U (en) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213732U (en) |
-
1988
- 1988-07-08 JP JP9070388U patent/JPH0213732U/ja active Pending