JPH02137032U - - Google Patents
Info
- Publication number
- JPH02137032U JPH02137032U JP3013389U JP3013389U JPH02137032U JP H02137032 U JPH02137032 U JP H02137032U JP 3013389 U JP3013389 U JP 3013389U JP 3013389 U JP3013389 U JP 3013389U JP H02137032 U JPH02137032 U JP H02137032U
- Authority
- JP
- Japan
- Prior art keywords
- microresist
- heating
- section
- sample
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000011156 evaluation Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 3
- 230000001427 coherent effect Effects 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3013389U JPH02137032U (cs) | 1989-03-16 | 1989-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3013389U JPH02137032U (cs) | 1989-03-16 | 1989-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137032U true JPH02137032U (cs) | 1990-11-15 |
Family
ID=31532864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3013389U Pending JPH02137032U (cs) | 1989-03-16 | 1989-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137032U (cs) |
-
1989
- 1989-03-16 JP JP3013389U patent/JPH02137032U/ja active Pending
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