JPH02137028U - - Google Patents
Info
- Publication number
- JPH02137028U JPH02137028U JP4312489U JP4312489U JPH02137028U JP H02137028 U JPH02137028 U JP H02137028U JP 4312489 U JP4312489 U JP 4312489U JP 4312489 U JP4312489 U JP 4312489U JP H02137028 U JPH02137028 U JP H02137028U
- Authority
- JP
- Japan
- Prior art keywords
- data
- time
- piping
- computer
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 239000003814 drug Substances 0.000 claims description 2
- 229940079593 drug Drugs 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000007613 environmental effect Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989043124U JPH0632675Y2 (ja) | 1989-04-13 | 1989-04-13 | 半導体製造用塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989043124U JPH0632675Y2 (ja) | 1989-04-13 | 1989-04-13 | 半導体製造用塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02137028U true JPH02137028U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-11-15 |
| JPH0632675Y2 JPH0632675Y2 (ja) | 1994-08-24 |
Family
ID=31555274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989043124U Expired - Lifetime JPH0632675Y2 (ja) | 1989-04-13 | 1989-04-13 | 半導体製造用塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632675Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003266006A (ja) * | 2002-03-14 | 2003-09-24 | Fujitsu Ltd | 薬液塗布装置及びその薬液管理方法 |
| US7638001B2 (en) | 2004-05-07 | 2009-12-29 | Kabushiki Kaisha Toshiba | Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6273715A (ja) * | 1985-09-27 | 1987-04-04 | Toshiba Corp | レジスト塗布装置 |
-
1989
- 1989-04-13 JP JP1989043124U patent/JPH0632675Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6273715A (ja) * | 1985-09-27 | 1987-04-04 | Toshiba Corp | レジスト塗布装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003266006A (ja) * | 2002-03-14 | 2003-09-24 | Fujitsu Ltd | 薬液塗布装置及びその薬液管理方法 |
| US7638001B2 (en) | 2004-05-07 | 2009-12-29 | Kabushiki Kaisha Toshiba | Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices |
| US8122848B2 (en) | 2004-05-07 | 2012-02-28 | Kabushiki Kaisha Toshiba | Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632675Y2 (ja) | 1994-08-24 |