JPH02135843U - - Google Patents
Info
- Publication number
- JPH02135843U JPH02135843U JP10062289U JP10062289U JPH02135843U JP H02135843 U JPH02135843 U JP H02135843U JP 10062289 U JP10062289 U JP 10062289U JP 10062289 U JP10062289 U JP 10062289U JP H02135843 U JPH02135843 U JP H02135843U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- capillary
- flow path
- valve provided
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010790 dilution Methods 0.000 claims description 3
- 239000012895 dilution Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Sampling And Sample Adjustment (AREA)
- Flow Control (AREA)
Description
第1図は第1考案のガス流量制御装置を利用し
た試料ガス希釈装置の構成を示すブロツク図、第
2図は第2考案のガス流量制御装置を利用した試
料ガス希釈装置の構成を示すブロツク図、第3図
は従来のガス流量制御装置の一種であるマスフロ
ーコントローラの構成を示すブロツク図である。
2,4,6…オリフイス、18,50…バツフ
アタンク、30,32…キヤピラリ、44,61
…希釈制御装置、46,63,65…インジエク
タ(デユーテイ制御開閉弁)、Pm…混合部位。
FIG. 1 is a block diagram showing the configuration of a sample gas diluter using the gas flow rate control device of the first invention, and FIG. 2 is a block diagram showing the configuration of the sample gas dilution device using the gas flow rate control device of the second invention. 3 are block diagrams showing the configuration of a mass flow controller, which is a type of conventional gas flow rate control device. 2, 4, 6... Orifice, 18, 50... Buffer tank, 30, 32... Capillary, 44, 61
...Dilution control device, 46, 63, 65... Injector (duty control opening/closing valve), Pm... Mixing section.
Claims (1)
の出口に設けられてデユーテイ制御される開閉弁
とを備えることを特徴とする、流量を任意の値に
設定することのできるガス流量制御装置。 2 第1ガスの流路に設けられた第1開閉弁と、 第2ガスの流路に設けられた第2開閉弁と、 上記開閉弁通過後の第1ガス及び第2ガスを合
流させる混合部位と、 上記両流路または混合部位下流の流路に設けら
れたキヤピラリと、 上記第1及び第2開閉弁を任意の希釈率に応じ
たデユーテイで逆モードに交互に開閉させる制御
手段と、 を備えたことを特徴とするガス流量制御装置。[Claims for Utility Model Registration] 1. A gas whose flow rate can be set to an arbitrary value, characterized by comprising a capillary through which gas passes and an on-off valve provided at the outlet of the capillary and subjected to duty control. Flow control device. 2. A first on-off valve provided in the first gas flow path, a second on-off valve provided in the second gas flow path, and mixing in which the first gas and the second gas after passing through the on-off valve are joined together. a capillary provided in both flow paths or a flow path downstream of the mixing portion; and a control means for alternately opening and closing the first and second on-off valves in a reverse mode with a duty corresponding to an arbitrary dilution rate; A gas flow rate control device comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10062289U JPH02135843U (en) | 1988-11-08 | 1989-08-29 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14558588 | 1988-11-08 | ||
JP10062289U JPH02135843U (en) | 1988-11-08 | 1989-08-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02135843U true JPH02135843U (en) | 1990-11-13 |
Family
ID=31718749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10062289U Pending JPH02135843U (en) | 1988-11-08 | 1989-08-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02135843U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000035822A (en) * | 1998-07-17 | 2000-02-02 | Horiba Ltd | Dilution gas flow rate controller |
JP2010518411A (en) * | 2007-02-14 | 2010-05-27 | アリストトル ユニバーシティ テッサロニキ−リサーチ コミッティー | Dilution apparatus and method for sampling exhaust gas |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59211840A (en) * | 1983-05-17 | 1984-11-30 | Tsukasa Sotsuken:Kk | Air fuel ratio measuring apparatus |
JPS60143738A (en) * | 1983-12-29 | 1985-07-30 | Shimadzu Corp | Manufacture of diluted gas |
JPS6210639B2 (en) * | 1977-08-19 | 1987-03-07 | Merck & Co Inc |
-
1989
- 1989-08-29 JP JP10062289U patent/JPH02135843U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6210639B2 (en) * | 1977-08-19 | 1987-03-07 | Merck & Co Inc | |
JPS59211840A (en) * | 1983-05-17 | 1984-11-30 | Tsukasa Sotsuken:Kk | Air fuel ratio measuring apparatus |
JPS60143738A (en) * | 1983-12-29 | 1985-07-30 | Shimadzu Corp | Manufacture of diluted gas |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000035822A (en) * | 1998-07-17 | 2000-02-02 | Horiba Ltd | Dilution gas flow rate controller |
JP2010518411A (en) * | 2007-02-14 | 2010-05-27 | アリストトル ユニバーシティ テッサロニキ−リサーチ コミッティー | Dilution apparatus and method for sampling exhaust gas |
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