JPH02135843U - - Google Patents

Info

Publication number
JPH02135843U
JPH02135843U JP10062289U JP10062289U JPH02135843U JP H02135843 U JPH02135843 U JP H02135843U JP 10062289 U JP10062289 U JP 10062289U JP 10062289 U JP10062289 U JP 10062289U JP H02135843 U JPH02135843 U JP H02135843U
Authority
JP
Japan
Prior art keywords
gas
capillary
flow path
valve provided
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10062289U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10062289U priority Critical patent/JPH02135843U/ja
Publication of JPH02135843U publication Critical patent/JPH02135843U/ja
Pending legal-status Critical Current

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  • Sampling And Sample Adjustment (AREA)
  • Flow Control (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は第1考案のガス流量制御装置を利用し
た試料ガス希釈装置の構成を示すブロツク図、第
2図は第2考案のガス流量制御装置を利用した試
料ガス希釈装置の構成を示すブロツク図、第3図
は従来のガス流量制御装置の一種であるマスフロ
ーコントローラの構成を示すブロツク図である。 2,4,6…オリフイス、18,50…バツフ
アタンク、30,32…キヤピラリ、44,61
…希釈制御装置、46,63,65…インジエク
タ(デユーテイ制御開閉弁)、Pm…混合部位。
FIG. 1 is a block diagram showing the configuration of a sample gas diluter using the gas flow rate control device of the first invention, and FIG. 2 is a block diagram showing the configuration of the sample gas dilution device using the gas flow rate control device of the second invention. 3 are block diagrams showing the configuration of a mass flow controller, which is a type of conventional gas flow rate control device. 2, 4, 6... Orifice, 18, 50... Buffer tank, 30, 32... Capillary, 44, 61
...Dilution control device, 46, 63, 65... Injector (duty control opening/closing valve), Pm... Mixing section.

Claims (1)

【実用新案登録請求の範囲】 1 ガスを通過させるキヤピラリと、キヤピラリ
の出口に設けられてデユーテイ制御される開閉弁
とを備えることを特徴とする、流量を任意の値に
設定することのできるガス流量制御装置。 2 第1ガスの流路に設けられた第1開閉弁と、 第2ガスの流路に設けられた第2開閉弁と、 上記開閉弁通過後の第1ガス及び第2ガスを合
流させる混合部位と、 上記両流路または混合部位下流の流路に設けら
れたキヤピラリと、 上記第1及び第2開閉弁を任意の希釈率に応じ
たデユーテイで逆モードに交互に開閉させる制御
手段と、 を備えたことを特徴とするガス流量制御装置。
[Claims for Utility Model Registration] 1. A gas whose flow rate can be set to an arbitrary value, characterized by comprising a capillary through which gas passes and an on-off valve provided at the outlet of the capillary and subjected to duty control. Flow control device. 2. A first on-off valve provided in the first gas flow path, a second on-off valve provided in the second gas flow path, and mixing in which the first gas and the second gas after passing through the on-off valve are joined together. a capillary provided in both flow paths or a flow path downstream of the mixing portion; and a control means for alternately opening and closing the first and second on-off valves in a reverse mode with a duty corresponding to an arbitrary dilution rate; A gas flow rate control device comprising:
JP10062289U 1988-11-08 1989-08-29 Pending JPH02135843U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10062289U JPH02135843U (en) 1988-11-08 1989-08-29

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14558588 1988-11-08
JP10062289U JPH02135843U (en) 1988-11-08 1989-08-29

Publications (1)

Publication Number Publication Date
JPH02135843U true JPH02135843U (en) 1990-11-13

Family

ID=31718749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10062289U Pending JPH02135843U (en) 1988-11-08 1989-08-29

Country Status (1)

Country Link
JP (1) JPH02135843U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000035822A (en) * 1998-07-17 2000-02-02 Horiba Ltd Dilution gas flow rate controller
JP2010518411A (en) * 2007-02-14 2010-05-27 アリストトル ユニバーシティ テッサロニキ−リサーチ コミッティー Dilution apparatus and method for sampling exhaust gas

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211840A (en) * 1983-05-17 1984-11-30 Tsukasa Sotsuken:Kk Air fuel ratio measuring apparatus
JPS60143738A (en) * 1983-12-29 1985-07-30 Shimadzu Corp Manufacture of diluted gas
JPS6210639B2 (en) * 1977-08-19 1987-03-07 Merck & Co Inc

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6210639B2 (en) * 1977-08-19 1987-03-07 Merck & Co Inc
JPS59211840A (en) * 1983-05-17 1984-11-30 Tsukasa Sotsuken:Kk Air fuel ratio measuring apparatus
JPS60143738A (en) * 1983-12-29 1985-07-30 Shimadzu Corp Manufacture of diluted gas

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000035822A (en) * 1998-07-17 2000-02-02 Horiba Ltd Dilution gas flow rate controller
JP2010518411A (en) * 2007-02-14 2010-05-27 アリストトル ユニバーシティ テッサロニキ−リサーチ コミッティー Dilution apparatus and method for sampling exhaust gas

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