JPH01164512U - - Google Patents
Info
- Publication number
- JPH01164512U JPH01164512U JP5988488U JP5988488U JPH01164512U JP H01164512 U JPH01164512 U JP H01164512U JP 5988488 U JP5988488 U JP 5988488U JP 5988488 U JP5988488 U JP 5988488U JP H01164512 U JPH01164512 U JP H01164512U
- Authority
- JP
- Japan
- Prior art keywords
- stay
- valve
- flow rate
- flow channel
- main flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Flow Control (AREA)
Description
第１図は本考案の実施例１を示す構成図、第２
図ａ，ｂは第１図における第１及び第２の弁の開
度を示す説明図、第３図は本考案の実施例２を示
す構成図、第４図は従来のガス流量制御装置を示
す構成図である。
１，３１…管路、２，３２…流量センサ、３，
３３…主流路、４，３４…第１の弁、５，３５…
第１のステー、６，３６…副流路、７，３７…第
２の弁、８，３８…第２のステー、９，１０，３
９，４０…ヒーター、１１，４１…ガス入口、１
２，４２…ガス出口、１３，４３…可変弁ユニツ
ト、１４，４４…ブリツジ回路、１５，４５…増
幅器、１６，４６…比較器、１７，４７…分割・
制御回路、１８，４８…流量信号、１９，４９…
設定流量信号、２０，２１，５０，５１…ヒータ
ー駆動信号、Ａ，Ｂ，Ｃ，Ｄ…ガスの流れ方向、
Ｋ…副流路の最大流量。
Fig. 1 is a configuration diagram showing the first embodiment of the present invention;
Figures a and b are explanatory diagrams showing the opening degrees of the first and second valves in Figure 1, Figure 3 is a configuration diagram showing Embodiment 2 of the present invention, and Figure 4 is a diagram showing a conventional gas flow rate control device. FIG. 1, 31... Pipe line, 2, 32... Flow rate sensor, 3,
33... Main flow path, 4, 34... First valve, 5, 35...
First stay, 6, 36... Sub-flow path, 7, 37... Second valve, 8, 38... Second stay, 9, 10, 3
9,40...Heater, 11,41...Gas inlet, 1
2, 42... Gas outlet, 13, 43... Variable valve unit, 14, 44... Bridge circuit, 15, 45... Amplifier, 16, 46... Comparator, 17, 47... Division/
Control circuit, 18, 48...Flow rate signal, 19, 49...
Set flow rate signal, 20, 21, 50, 51...Heater drive signal, A, B, C, D...Gas flow direction,
K...Maximum flow rate of the sub-channel.
Claims (1)
、該流量センサより下流側の前記管路上に設けた
テーパ状の主流路と、該主流路の開口面積を制御
する第１の弁と、該第１の弁を支持・駆動し、中
空でかつ前記管路に連通する第１のステーと、前
記第１の弁の中央に設けられ、前記第１のステー
内と前記主流路とを連通するテーパ状の副流路と
、該副流路の開口面積を制御する第２の弁と、前
記第１のステーの中空部に設けられ、該第２の弁
を支持・駆動する第２のステーとを含むことを特
徴とするガス流量制御装置。 a flow rate sensor provided in a part of a pipe through which gas flows, a tapered main flow channel provided on the pipe downstream of the flow sensor, and a first valve that controls an opening area of the main flow channel; a first stay that supports and drives the first valve and is hollow and communicates with the pipeline; and a first stay that is provided at the center of the first valve and communicates between the inside of the first stay and the main flow channel. a second valve that controls the opening area of the second stay, and a second valve that is provided in the hollow part of the first stay and supports and drives the second valve. A gas flow rate control device comprising a stay.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5988488U JPH01164512U (en) | 1988-05-06 | 1988-05-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5988488U JPH01164512U (en) | 1988-05-06 | 1988-05-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01164512U true JPH01164512U (en) | 1989-11-16 |
Family
ID=31285620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5988488U Pending JPH01164512U (en) | 1988-05-06 | 1988-05-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01164512U (en) |
-
1988
- 1988-05-06 JP JP5988488U patent/JPH01164512U/ja active Pending
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