JPH02135350A - Photosensitive resin composition - Google Patents
Photosensitive resin compositionInfo
- Publication number
- JPH02135350A JPH02135350A JP28764688A JP28764688A JPH02135350A JP H02135350 A JPH02135350 A JP H02135350A JP 28764688 A JP28764688 A JP 28764688A JP 28764688 A JP28764688 A JP 28764688A JP H02135350 A JPH02135350 A JP H02135350A
- Authority
- JP
- Japan
- Prior art keywords
- prepolymer
- photosensitive resin
- epoxy resin
- resin composition
- initiator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims description 31
- 239000003822 epoxy resin Substances 0.000 claims abstract description 24
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 24
- 239000004641 Diallyl-phthalate Substances 0.000 claims abstract description 15
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000000178 monomer Substances 0.000 claims abstract description 10
- 239000003999 initiator Substances 0.000 claims abstract description 7
- 150000001875 compounds Chemical class 0.000 claims description 24
- 239000003505 polymerization initiator Substances 0.000 claims description 21
- 239000000203 mixture Substances 0.000 claims description 15
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims description 4
- 238000012663 cationic photopolymerization Methods 0.000 claims description 2
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims 2
- 150000002440 hydroxy compounds Chemical class 0.000 claims 1
- 229920002601 oligoester Polymers 0.000 claims 1
- 229920005989 resin Polymers 0.000 abstract description 17
- 239000011347 resin Substances 0.000 abstract description 17
- 239000002904 solvent Substances 0.000 abstract description 6
- 238000009413 insulation Methods 0.000 abstract description 5
- 229920000642 polymer Polymers 0.000 abstract description 4
- 125000002091 cationic group Chemical group 0.000 abstract description 3
- 239000007787 solid Substances 0.000 abstract description 3
- 239000005977 Ethylene Substances 0.000 abstract description 2
- 239000003795 chemical substances by application Substances 0.000 description 11
- 238000001723 curing Methods 0.000 description 10
- 150000001412 amines Chemical class 0.000 description 8
- 230000018109 developmental process Effects 0.000 description 8
- 239000004593 Epoxy Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000007261 regionalization Effects 0.000 description 6
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- -1 aromatic amine compound Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920003986 novolac Polymers 0.000 description 4
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 239000002518 antifoaming agent Substances 0.000 description 3
- 238000010538 cationic polymerization reaction Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- 229930185605 Bisphenol Natural products 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 125000003700 epoxy group Chemical group 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000013008 thixotropic agent Substances 0.000 description 2
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- POYODSZSSBWJPD-UHFFFAOYSA-N 2-methylprop-2-enoyloxy 2-methylprop-2-eneperoxoate Chemical compound CC(=C)C(=O)OOOC(=O)C(C)=C POYODSZSSBWJPD-UHFFFAOYSA-N 0.000 description 1
- BUZICZZQJDLXJN-UHFFFAOYSA-N 3-azaniumyl-4-hydroxybutanoate Chemical compound OCC(N)CC(O)=O BUZICZZQJDLXJN-UHFFFAOYSA-N 0.000 description 1
- CDSULTPOCMWJCM-UHFFFAOYSA-N 4h-chromene-2,3-dione Chemical compound C1=CC=C2OC(=O)C(=O)CC2=C1 CDSULTPOCMWJCM-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- 239000002841 Lewis acid Substances 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 239000013040 bath agent Substances 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- JHLBVQSHFYWSNA-UHFFFAOYSA-N butane 2-methylprop-2-enoic acid Chemical compound CCCC.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O JHLBVQSHFYWSNA-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 239000011353 cycloaliphatic epoxy resin Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000005886 esterification reaction Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012442 inert solvent Substances 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 150000007517 lewis acids Chemical class 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 238000005502 peroxidation Methods 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 229920002587 poly(1,3-butadiene) polymer Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 235000021395 porridge Nutrition 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 239000007870 radical polymerization initiator Substances 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- 235000021122 unsaturated fatty acids Nutrition 0.000 description 1
- 235000015112 vegetable and seed oil Nutrition 0.000 description 1
- 239000008158 vegetable oil Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、感光性樹脂組成物に係り、特に浚れた作業性
と優れた皮膜特性を有するプリント配線板製造用の感光
性樹脂組成物に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a photosensitive resin composition, and particularly to a photosensitive resin composition for manufacturing printed wiring boards that has easy workability and excellent film properties. Regarding.
プリント配線板製造用ソルダレジストなどのレジスト材
料として熱硬化型のエポキシ樹脂系インクが使用できる
ことは、すでによく知られている。It is already well known that thermosetting epoxy resin inks can be used as resist materials such as solder resists for manufacturing printed wiring boards.
一方、レジスト材料としてソルダレジストを考えた場合
、配線の高密度化にともなって回路上に形成するソルダ
レジストのパターン精度の向上が強く要求されている。On the other hand, when considering a solder resist as a resist material, there is a strong demand for improvement in the pattern accuracy of the solder resist formed on a circuit as the density of wiring increases.
この要求に応えるために、熱硬化性レジストに代わり、
感光性のソルダレジストを用いて、露光、現像して、高
精度のレジストパターンを得る試みが提案されており、
この種レジスト材料に関する提案として、例えば、特公
昭51−40451号、特公昭52−30969号など
の記載を挙げることができる。In order to meet this demand, instead of thermosetting resist,
Attempts to obtain a highly accurate resist pattern by exposing and developing a photosensitive solder resist have been proposed.
Proposals regarding this type of resist material include, for example, Japanese Patent Publications No. 40451/1983 and Japanese Patent Publication No. 30969/1989.
上記特公昭51−40451号は、(a)末端エチレン
基を少なくとも2個含有する光重合可能な不飽和化合物
、(b1元重合増感剤、(cl少なくとも2個のエポキ
シ基を含む化合物および(d)ジシアンジアミドよりな
る、またはこれらを主成分とする感光性樹脂組成物を開
示している。また、上記特公昭52−30969号は、
少なくとも1つの光重合可能な多官能ビニル単量体から
なる多官能ビニル単量体系と、露光の際に上記多官能ビ
ニル単量体系の光重合を開始させる光増感剤と、ビスフ
ェノール大型エポキシ樹脂、エポキシ・ノボラック型樹
脂またはそれらの混合物であってB段階のエポキシ樹脂
からなる架橋可能な重合体系と、上記光重合作用に来質
的に不感応である上記重合体系のための無水物硬化剤ま
たはジシアンジアミドと、上記成分を溶解するための不
活性溶剤とよりなる感光性誘′1体組成物を開示してい
る。The above-mentioned Japanese Patent Publication No. 51-40451 discloses (a) a photopolymerizable unsaturated compound containing at least two terminal ethylene groups, (b1-primary polymerization sensitizer, (cl) a compound containing at least two epoxy groups, and ( d) Discloses a photosensitive resin composition consisting of dicyandiamide or containing these as a main component.In addition, the above-mentioned Japanese Patent Publication No. 52-30969 discloses:
A polyfunctional vinyl monomer system comprising at least one photopolymerizable polyfunctional vinyl monomer, a photosensitizer that initiates photopolymerization of the polyfunctional vinyl monomer system upon exposure, and a bisphenol large epoxy resin. , an epoxy novolak type resin or a mixture thereof, a crosslinkable polymer system comprising a B-staged epoxy resin, and an anhydride curing agent for said polymer system that is inherently insensitive to said photopolymerization action. Alternatively, a photosensitive dielectric composition comprising dicyandiamide and an inert solvent for dissolving the above components is disclosed.
しかしながら、上記従来技術は、露光、現像によるレジ
ストパターンの形成が可能であり、かつ皮膜特性も良好
であるものの、プリント配線板製造において重要な要素
となる作業性について十分な考慮がなされていなかった
。However, although the above-mentioned conventional technology enables formation of a resist pattern by exposure and development and has good film properties, sufficient consideration was not given to workability, which is an important factor in printed wiring board manufacturing. .
つまり従来技術の感光性樹脂組成物は、銅箔との密着性
、耐薬品性および耐熱性を向上させるために、エポキシ
樹脂およびその化合物を便用している。それらの樹脂は
、アミン系の硬化剤により熱重合させるため、UV光照
射の他に高温加熱を施さなければならない。また、低温
で反応開始するアミン系の硬化剤を使用した場合は、熱
安定性が悪く、フィルムネガマスクとの密着露光性を向
上させるための予備乾燥において、樹脂が硬化してしま
い、俗剤現像によるパターン形成ができなくなるという
致命的な問題があった。In other words, conventional photosensitive resin compositions use epoxy resins and compounds thereof in order to improve adhesion to copper foil, chemical resistance, and heat resistance. Since these resins are thermally polymerized using an amine curing agent, they must be subjected to high-temperature heating in addition to UV light irradiation. In addition, when using an amine-based curing agent that starts reacting at low temperatures, it has poor thermal stability and the resin hardens during pre-drying to improve the close exposure with the film negative mask. There was a fatal problem in that pattern formation by development became impossible.
本発明の目的は、上記従来技術にみられた種々の問題点
を解決し、良好な皮膜特性を維持し、かつ、作業性に優
れた高解像度の感光性樹脂組成物を提供することにある
。An object of the present invention is to solve the various problems seen in the above-mentioned conventional techniques, and to provide a high-resolution photosensitive resin composition that maintains good film properties and has excellent workability. .
上記目的は、感光性樹脂組成物を、不飽和化合物のプレ
ポリマー 例えばジアリルフタレートのプレポリマーと
、多官能不飽和化合物のモノマーと、光ラジカル重合開
始剤と、エポキシ樹脂と、元カチオン重合開始剤とから
なる、またはこれらを主成分とする樹脂組成物とするこ
とによって達成される。The above purpose is to combine a photosensitive resin composition with a prepolymer of an unsaturated compound, such as a prepolymer of diallyl phthalate, a monomer of a polyfunctional unsaturated compound, a photoradical polymerization initiator, an epoxy resin, and a former cationic polymerization initiator. This can be achieved by making a resin composition consisting of or having these as main components.
上記組成中のジアリルフタレートのプレポリマーはβ−
ポリマーとも称されるもので、常態で固体である。例え
ば、吉見直喜著[ジアリルフタレート樹脂」日刊工業新
関社刊(昭44)にその詳細な性質および製造方法の記
載があり、また、例えば、大阪曹達味から入手すること
ができる。本発明に用いるジアリルフタレートのプレポ
リマーは、分子[3,000ないし30,000のもの
が現像性良好ということで望ましいが、必ずしもこの範
囲に限定されるものではない。The prepolymer of diallyl phthalate in the above composition is β-
Also called a polymer, it is normally solid. For example, its detailed properties and manufacturing method are described in "Diallyl Phthalate Resin" by Naoki Yoshimi, published by Nikkan Kogyo Shinsekisha (1972), and can be obtained from, for example, Osaka Sodami. The diallyl phthalate prepolymer used in the present invention preferably has a molecular weight of 3,000 to 30,000 because it provides good developability, but is not necessarily limited to this range.
また、上記樹脂組成物中の多官能不飽和化合物は、分子
内に少なくとも2個以上のエチレン結合を有するもので
、このような化合物の一例として、不飽和カルボン酸と
2価以上のポリヒドロキシ化合物とのエステル化反応に
よって得られる化合物を挙げることができる。ここで、
不飽和カルボン酸としては、アクリル酸、メタクリル酸
、イタコン酸、クロトン酸、マレイン酸などを、また、
2価以上のポリヒドロキシ化合物としては、エチレンク
リコール、プロピレングリコール、トリエチレングリコ
ール、ヒドロキシノン、ピロガロールなどを挙けること
ができる。また、エポキシ樹脂とアクリル酸あるいはメ
タクリル酸との反応によって生成されるエポキシアクリ
レートあるいはエポキシメタクリレートを挙げることが
できる。なお、以上の例は、単官能不飽和化合物の添加
を制限するものではなく、また、必要によって、多官能
不飽和化合物の混合物を用いることもできる。In addition, the polyfunctional unsaturated compound in the resin composition has at least two or more ethylene bonds in the molecule, and examples of such compounds include unsaturated carboxylic acids and polyhydroxy compounds with divalent or higher valences. Examples include compounds obtained by an esterification reaction with. here,
Examples of unsaturated carboxylic acids include acrylic acid, methacrylic acid, itaconic acid, crotonic acid, maleic acid, etc.
Examples of polyhydroxy compounds having a valence of two or more include ethylene glycol, propylene glycol, triethylene glycol, hydroxynon, and pyrogallol. Furthermore, epoxy acrylate or epoxy methacrylate produced by a reaction between an epoxy resin and acrylic acid or methacrylic acid can be mentioned. Note that the above examples do not limit the addition of monofunctional unsaturated compounds, and if necessary, a mixture of polyfunctional unsaturated compounds can also be used.
また、上記樹脂組、酸物中の光ラジカル重合開始剤は、
アセトフェノンおよびその誘導体、ペンゾフヱノンおよ
びその誘導体、ベンジルおよびその誘導体、チオキサン
トンおよびその誘導体、ベンゾインおよびその誘導体、
ケトクマリンおよびその誘導体、テトラメチルチウラム
モノサルファイド、1−ヒトOキシシクOへキシルフェ
ニルケトン、2−メチル−1−(4−(メチルチオ)フ
ェニル〕−2−モルフォリノ−プロパン−1IC代表さ
れるα−アミノケトン化合物などである。なお。In addition, the photoradical polymerization initiator in the resin group and acid is
Acetophenone and its derivatives, penzophenone and its derivatives, benzyl and its derivatives, thioxanthone and its derivatives, benzoin and its derivatives,
α-aminoketones represented by ketocoumarin and its derivatives, tetramethylthiuram monosulfide, 1-human O-oxycyc-O-hexylphenyl ketone, 2-methyl-1-(4-(methylthio)phenyl]-2-morpholino-propane-1IC) Compounds, etc.
必要により、上記化合物の混合物も使用でき、また、必
要によって、光ラジカル重合開始剤の作用を向上する目
的で芳香族アミン化合物を添加することもできる。If necessary, a mixture of the above compounds can be used, and if necessary, an aromatic amine compound can also be added for the purpose of improving the action of the photoradical polymerization initiator.
また、上記樹脂組成物中のエポキシ樹脂は、平均して1
分子当り2個以上のエポキシ基を有するもので、例えば
、ビスフェノール人、ハロゲン化ビスフェノール人1カ
テコール、レゾルシノールなどのような多価フェノール
またはグリセリンのような多価アルコールとエピクロー
ルヒドリンとを塩基性触媒の存在下で反応させて得られ
るポリグリシジルエーテルあるいはポリグリシジルエス
テル、ノボラック型フェノール樹脂とエポクロールヒド
リンとを縮合させて得られるエポキシノボラック、過酸
化法でエポキシ化したエポキシ化ポリオレフィン、エポ
キシ化ポリブタジェン、ジシクロペンタジェン化オキサ
イドあるいはエポキシ化植物油などを用いることができ
る。また、不飽和脂肪酸のエステルあるいはブタジェン
・ポリマーまたは共重合物などを過酢酸によりエポキシ
化した、環式脂肪族エポキシ樹脂などを用いることがで
きる。また、必要によって、エポキシ樹脂の特性向上を
図り、混合物を用いることもできる。Further, the epoxy resin in the resin composition has an average content of 1
Those having two or more epoxy groups per molecule, for example, polyhydric phenols such as bisphenols, halogenated bisphenols, catechol, resorcinol, etc., or polyhydric alcohols such as glycerin, and epichlorohydrin are basicized. Polyglycidyl ether or polyglycidyl ester obtained by reacting in the presence of a catalyst, epoxy novolac obtained by condensing a novolac type phenol resin and epochrohydrin, epoxidized polyolefin epoxidized by peroxidation method, epoxidized Polybutadiene, dicyclopentagenated oxide, epoxidized vegetable oil, etc. can be used. Further, a cycloaliphatic epoxy resin obtained by epoxidizing an unsaturated fatty acid ester or a butadiene polymer or copolymer with peracetic acid can also be used. Furthermore, if necessary, it is also possible to improve the properties of the epoxy resin and use a mixture.
また、上記樹脂組成物中の元カチオン重合開始剤は、U
V″/l、を照射することでブoトン敗、ルイス酸およ
びラジカルを生成しエポキシ樹脂を光で硬化させるもの
で、芳香族ジアゾニウム塩、芳香族ハロニウム塩、芳香
族スルホニウム塩、芳香族ヨードニウム塩を用いること
ができる。また、増感剤を混合して用いることもできる
。特に、芳香族スルホニウム塩は、反応が速く、熱安定
性が良いことで望ましい。芳香族スルホニウム塩の一般
式は下記の通りである。Further, the original cationic polymerization initiator in the resin composition is U
By irradiating the epoxy resin with V″/l, it generates bouton destruction, Lewis acid, and radicals, and cures the epoxy resin with light. A salt can be used.Also, a sensitizer can be used in combination.Aromatic sulfonium salts are particularly desirable because they react quickly and have good thermal stability.The general formula of aromatic sulfonium salts is It is as follows.
(M−m PF、 s Br3 、8bF、 )さら
に、本発明の樹脂組成物には、必要であれば、希釈剤と
しての有機溶剤および着色剤、消泡剤、充てん剤、揺変
剤を含むことができる。ただし、これらを含むことは本
発明を%徴づける要素ではない。(M-m PF, s Br3, 8bF, ) Furthermore, the resin composition of the present invention contains an organic solvent as a diluent, a coloring agent, an antifoaming agent, a filler, and a thixotropic agent, if necessary. be able to. However, the inclusion of these is not an element that characterizes the present invention.
この中、有ms剤の適切な例としては、セロソルブ、セ
ロソルブアセテート、メチルセロソルブ、ブチルセロソ
ルブ、カルピトール、メチルカルピトール、ブチルカル
ピトール、テルピネオールなどの高佛点溶剤を、好まし
いものとして挙げることができる。ただし、アセトン、
メチルエチルケトン、エタノールなども使用し得ないわ
けではない。Among these, suitable examples of MS agents include high temperature point solvents such as cellosolve, cellosolve acetate, methyl cellosolve, butyl cellosolve, carpitol, methyl carpitol, butyl carpitol, and terpineol. However, acetone,
Methyl ethyl ketone, ethanol, etc. can also be used.
また、着色剤は、フタロシアニングリーン、フタロシア
ニンブルーなどの着色材料を適宜用いればよい。Further, as the colorant, a coloring material such as phthalocyanine green or phthalocyanine blue may be used as appropriate.
消泡剤は、シリコーンオイルに代表される、シロキサン
結合を言む有機けい素化合物を用いる。As the antifoaming agent, an organosilicon compound with siloxane bonds, typified by silicone oil, is used.
充填剤は、無機フィラーとして樹脂組成物に添加するも
ので、シリカ、アルミナ、タルク等の微粉末を使用する
。The filler is added to the resin composition as an inorganic filler, and a fine powder of silica, alumina, talc, etc. is used.
また、揺X剤は、樹脂組成物の粘度、特にチキソトロピ
ー性の改善のために使用するもので、超微粉末シリカを
用いることが望ましい。The thixotropic agent is used to improve the viscosity, particularly the thixotropy, of the resin composition, and it is desirable to use ultrafine powdered silica.
以上、本発明の感光性樹脂組成物の成分内容について説
明したが、その好ましい組成比は、ジアリルフタレート
プレポリマー100:iat部に対して、多官能不飽和
化合物のモノマーL〜50 、i!!< f部、光ラジ
カル重合開始剤0.5〜20 IJK−ffi部、エポ
キシ樹脂5〜303m M都、エポキシ樹脂100重量
部に対して、光力チオン重合開始剤1〜lO重重部であ
る。The content of the components of the photosensitive resin composition of the present invention has been explained above, and the preferred composition ratio is 100:iat parts of the diallylphthalate prepolymer to L~50 parts of the polyfunctional unsaturated compound monomer, i! ! < Part f, photoradical polymerization initiator 0.5-20 parts IJK-ffi, epoxy resin 5-303 m M, 1-10 parts of photoradical thionic polymerization initiator per 100 parts by weight of epoxy resin.
なお、上記組成の下限および上限は、それぞれ樹脂組成
物特性の感光感度が不足しないこと、および密層露光が
可能なこと、および耐熱性、耐′鑞気特性(特に絶縁抵
抗)が確保できることを条件として求め得た値である。Note that the lower and upper limits of the above composition are determined to ensure that the photosensitivity of the resin composition characteristics is not insufficient, that dense layer exposure is possible, and that heat resistance and brazing resistance (especially insulation resistance) are ensured. This is the value that can be obtained as a condition.
本発明による感光性樹脂組成物は、常態で固体であるジ
アリルフタレートプレポリマーを多量に含んでなるもの
であるため、溶剤添加によりて組成物に流動性を付与す
ることができ、また、スクリーン印刷法による基板上へ
の塗布も容易に行うことができる。また、塗布後、露光
前の予備乾燥によって容易に固化するため、レジスト表
面にネガマスクを密着して露光することが可能である。Since the photosensitive resin composition according to the present invention contains a large amount of diallyl phthalate prepolymer which is solid in normal state, fluidity can be imparted to the composition by adding a solvent, and it can also be used for screen printing. It can also be easily applied onto a substrate by a method. Further, since the resist is easily solidified by pre-drying after coating and before exposure, it is possible to expose the resist surface with a negative mask in close contact with the resist surface.
また、本発明樹脂組成物中の多官能不飽和化合物および
光ラジカル1合開始剤は、ジアリルフタレートプレポリ
マーと光ぽ化反応が実用的な時間内に終了するように添
加するもので、露光後の現像工程で光硬化部が現像液に
溶解したり、膨潤したりすることを防ぐ作用をする。ま
た、エポキシ樹脂および光カチオン重合開始剤も、UV
光により1001 m合するものの、現在、開発されて
いる光カチオン重合開始剤は、反応するUV光の波長が
、@波長であるため、ネガマスクを通ったJV光では、
反応せず、パターン形成には至らない。In addition, the polyfunctional unsaturated compound and the photoradical 1 initiator in the resin composition of the present invention are added so that the photopolymerization reaction with the diallylphthalate prepolymer is completed within a practical time. It acts to prevent the photocured part from dissolving or swelling in the developer during the development process. In addition, epoxy resins and photocationic polymerization initiators can also be
Although the photocationic polymerization initiators currently being developed undergo 1001 m polymerization when exposed to light, the wavelength of the UV light they react with is @wavelength, so JV light passing through a negative mask
It does not react and does not lead to pattern formation.
従って、樹脂組成物中の多官能不飽和化合物および、光
ラジカル重合開始剤を用いることにより、UV光で短時
間に微細なパターン形成が可能となる。Therefore, by using the polyfunctional unsaturated compound and the photoradical polymerization initiator in the resin composition, it becomes possible to form a fine pattern in a short time using UV light.
また1本発明樹脂組成物中のエポキシ樹脂および光カチ
オン重合開始剤は、プリント基板上の銅箔との密層性を
向上させることができる。しかも、エポキシ樹脂をパタ
ーン形成後にUV光で容易に重合させることができるた
め、作業性にすぐれている。Moreover, the epoxy resin and the photocationic polymerization initiator in the resin composition of the present invention can improve the close layering property with the copper foil on the printed circuit board. Moreover, since the epoxy resin can be easily polymerized with UV light after pattern formation, workability is excellent.
さらに、アミン系の硬化剤に比べて、光カチオン重合開
始剤は、熱安定性がよい。レジストの硬化物についても
、耐熱性、電気特性が光カチオン重合開始剤により硬化
したものと同等以上に維持されることがわかった。Furthermore, compared to amine-based curing agents, photocationic polymerization initiators have better thermal stability. It was also found that the heat resistance and electrical properties of the cured resist were maintained at the same level or better than those cured with a photocationic polymerization initiator.
また、現像に関しては、ジアリルフタレートプレポリマ
ー 多官能不飽和化合物およびエポキシ樹脂の組合せの
組成においてのみ、1.1.1−トリクロルエタンのよ
うな塩素系溶剤に溶解可能となることを見出し、かつ、
光・カチオン重合開始剤の添加によりパターン形成時の
露光硬化物表面が溶解しないことも併せて見出した。こ
のことによって、塩素系溶剤による現像が可能となった
。In addition, regarding development, it was discovered that only a combination of a diallylphthalate prepolymer, a polyfunctional unsaturated compound, and an epoxy resin can be dissolved in a chlorinated solvent such as 1.1.1-trichloroethane, and
We have also found that the surface of the exposed cured product does not dissolve during pattern formation due to the addition of a photo-cationic polymerization initiator. This made it possible to develop with a chlorinated solvent.
本発明の感光性樹脂組成物は、上記したような作用、特
性を有するため、高密度、低価格の印刷配線叛製造に特
に好適なものであるが、他の用途に対してもその有効性
を失うものではない。Since the photosensitive resin composition of the present invention has the above-mentioned actions and characteristics, it is particularly suitable for manufacturing high-density, low-cost printed wiring, but its effectiveness also applies to other uses. It's not something you lose.
以下、本発明の感光性樹脂組成物の実施例について比較
例とともに説明する。Examples of the photosensitive resin composition of the present invention will be described below along with comparative examples.
実施例1
まず、下記ビ)〜(ホ)を主成分とする樹脂組成物を調
製した。各成分の配合比は第1表に示す通りである。Example 1 First, a resin composition containing the following B) to (E) as main components was prepared. The blending ratio of each component is as shown in Table 1.
(イ)ジアリルフタレートプレポリマー(01トIJメ
チO−ルプロパントリメタクリレート(3官能メタクリ
レート)
(ハ) 2−メチル−1−(4−(メチルチオ)フェニ
ルクー2−モルフォリノ−プロパン−1(光ラジカル重
合開始剤)
に)エポキシ樹脂
(ホ) ビス−(4−(ジフェニルスルフオニオ)フェ
ニル〕スルフィド−ビス−へキサフルオロフォスフェー
ト(光カチオン重合開始剤)ここで、ジアリルフタレー
トプレポリマーとしては、平均分子量的7,000の該
プレポリマー(大阪曹達@製、商品名イソダツプ)を、
エポキシ樹)1旨としてはフェノールノボラック型エポ
キシ(油化シェルエポキシ■製、商品名エピコート15
2 )を用いた。(a) Diallyl phthalate prepolymer (01 to IJ methylpropane trimethacrylate (trifunctional methacrylate) (c) 2-methyl-1-(4-(methylthio)phenyl-2-morpholino-propane-1 Polymerization initiator) Epoxy resin (e) Bis-(4-(diphenylsulfonio)phenyl)sulfide-bis-hexafluorophosphate (photocationic polymerization initiator) Here, as the diallylphthalate prepolymer, The prepolymer (manufactured by Osaka Soda@, trade name Isodap) with an average molecular weight of 7,000,
epoxy tree) 1 effect is phenol novolac type epoxy (manufactured by Yuka Shell Epoxy ■, product name Epicote 15)
2) was used.
樹脂組成物の調製は本発明の範囲内の配合比で下記手順
により行った。すなわち、まず、げ)〜(ホ)を混合し
、約80℃で30分間加熱攪拌した。このとき、組成物
の塗布特性を一層良好なものとするため、溶剤(ブチル
セロソルブアセテート)、看色剤(フタロシアニングリ
ーン)、消泡剤(シリコーンオイル)をi!1m添加し
て上記主成分に分散、溶解し本発明の感光性樹脂組成物
を得た。The resin composition was prepared according to the following procedure at a blending ratio within the range of the present invention. That is, first, (e) to (e) were mixed and heated and stirred at about 80° C. for 30 minutes. At this time, in order to improve the coating properties of the composition, a solvent (butyl cellosolve acetate), a coloring agent (phthalocyanine green), and an antifoaming agent (silicone oil) were added to i! The photosensitive resin composition of the present invention was obtained by adding 1 m of the resin and dispersing and dissolving it in the above main component.
上記a4脂組成物を、180メツシユ・ステンレススク
リーン版使用のスクリーン印刷機で、印刷配縁板上に全
面にわたり印刷した後、約80℃で30分間の予備乾燥
を施した。この状態において、樹脂表面が固化し、ネガ
マスクを密着して露光できる場合をもりて、密着露光住
良と判定することにした。The above A4 fat composition was printed over the entire surface of the printing board using a screen printing machine using a 180 mesh stainless steel screen plate, and then pre-dried at about 80° C. for 30 minutes. In this state, when the resin surface is solidified and a negative mask can be exposed in close contact with the resin surface, it is determined that the contact exposure is possible.
次いで、ネガマスクを通し、400W高圧水銀ランプを
用いて05〜2分の範囲で、紫外線露光を行っf、−後
、1 、1 、1−1リクロルエタンでスプレー現像を
行った。現像による樹脂パターンの形成後、樹脂層底面
の顕微鏡観察を行い、この状態で、レジストが膨潤して
いない場合をもって、パターン形成良と判定することと
した。Next, the film was exposed to ultraviolet light through a negative mask using a 400W high-pressure mercury lamp for a period of 0.5 to 2 minutes, followed by spray development with 1,1,1-1 dichlorethane. After the resin pattern was formed by development, the bottom surface of the resin layer was observed under a microscope, and if the resist did not swell in this state, it was determined that the pattern formation was good.
上記現像後の試料について、さらに、400 W高圧水
銀ランプで2〜4分の範囲で、直接レジストに紫外線露
光を行った。Regarding the sample after the development, the resist was further directly exposed to ultraviolet light for 2 to 4 minutes using a 400 W high-pressure mercury lamp.
さらに、上記印刷配組板を260℃のはんだ僧に10秒
間&ffし、空気中で常温まで下げる。このはんだ浸漬
を5回くり返し、レジスト層の剥離の有無によって耐熱
性の判定を行った。Further, the printed layout board was subjected to soldering at 260° C. for 10 seconds and cooled to room temperature in air. This solder immersion was repeated five times, and the heat resistance was evaluated based on whether or not the resist layer peeled off.
さらに%JISにもとづき体積絶縁抵抗測定を行った。Furthermore, volume insulation resistance was measured based on %JIS.
以上の判定方法によって得られた樹脂層の特性を第1表
に示した。Table 1 shows the characteristics of the resin layer obtained by the above evaluation method.
比較例1
実施例1の組成中、光カチオン重合開始剤に代わり、ア
ミン系硬化剤であるトリエチレンテトラミンとジシアン
ジアミドとの2植を含む樹脂組成物を用い、実施例1と
同様にして印刷配紛板を製造した。ただし、現像後の紫
外線露光の代わりに160℃で1時間の加熱硬化を行っ
た。次に、得られた樹脂層について、実施例1の場合と
同一条件により、評価を行った。結果は第1表に示す通
りである。Comparative Example 1 Printing was carried out in the same manner as in Example 1, using a resin composition containing two amine curing agents, triethylenetetramine and dicyandiamide, instead of the photocationic polymerization initiator in the composition of Example 1. Manufactured powder board. However, instead of exposure to ultraviolet light after development, heat curing was performed at 160° C. for 1 hour. Next, the obtained resin layer was evaluated under the same conditions as in Example 1. The results are shown in Table 1.
第1表の結果から、実施例1の場合には、いずれも、凌
れた特性を示すのに対して、比較例1においては、低温
で反応するアミン系硬化剤(トリエチレンテトラミン)
を用いた場合には、予備乾燥時にエポキシの反応が開始
してしまい、パターン形成が不可能であること、高温で
反応するアミン系硬化剤(ジシアンジアミド)を用いた
場合には、パターン形成は可能であるものの、耐熱性が
惑いこと、また、カチオン系硬化剤に比べ、アミン系硬
化剤の方が体積絶縁抵抗が劣ることなどが知られる。From the results in Table 1, in the case of Example 1, all showed superior properties, whereas in Comparative Example 1, an amine-based curing agent (triethylenetetramine) that reacts at low temperatures was used.
When using epoxy, the reaction of the epoxy starts during pre-drying, making it impossible to form a pattern; however, when using an amine-based curing agent (dicyandiamide) that reacts at high temperatures, pattern formation is possible. However, it is known that heat resistance is questionable and that amine curing agents have inferior volume insulation resistance compared to cationic curing agents.
実施例2
下記げ)〜(ホ)を主成分とする樹脂組成物を実施例1
の場合と同様にして調製した。各成分の配合比は第2表
に示す通りである。Example 2 A resin composition containing the following (G) to (E) as main components was prepared in Example 1.
It was prepared in the same manner as in the case of . The blending ratio of each component is as shown in Table 2.
げ) ジアリルフタレートプレポリマー(平均分子ii
3,500 、大阪暫遅@製、商品名ダイソーダツブ
L)
(ロ)多官能不飽和化合@(第2弐に示したアクリレー
トおよびメタクリレート計5池)
(ハ)ベンゾインイソプロピルエーテル(元ラジカル重
合開始剤)
に) エポキシ樹脂
(ホ) ビス−[:4−(ジフェニルスルフォニオ)フ
ェニル〕スルフィドービスーヘキサフルオOアンチモネ
ート(光カチオン重合開始剤)得られた樹脂層の特性を
第2表に示す。種々の多官能不飽和化合物使用の場合に
ついても、夾施例1と同様潰れた特性を有することが知
られる。) diallyl phthalate prepolymer (average molecular ii
3,500, manufactured by Osaka Shikushoku@, trade name: Daisodatsubu L) (b) Polyfunctional unsaturated compound @ (total of 5 acrylates and methacrylates shown in Part 2-2) (c) Benzoin isopropyl ether (former radical polymerization initiator) ) Epoxy resin (e) Bis-[:4-(diphenylsulfonio)phenyl]sulfide bis-hexafluoro antimonate (photocationic polymerization initiator) The properties of the resulting resin layer are shown in Table 2. show. It is known that the same characteristics as in Example 1 are obtained when various polyfunctional unsaturated compounds are used.
比較例2
夾施例2の組成中、光カチオン重合開始剤に代わり、ア
ミン系硬化剤であるトリエチレンテトラミンとジシアン
ジアミドの2捕を苫む粥腹組成物を用い、比較例1と同
様にして印刷配線板を製造した。Comparative Example 2 In the composition of Comparative Example 2, instead of the cationic photopolymerization initiator, a porridge composition containing two amine-based curing agents, triethylenetetramine and dicyandiamide, was used, and the same procedure as in Comparative Example 1 was carried out. A printed wiring board was manufactured.
得られた圀脂層の時性Jf価結果は第2表に示した通り
で、比較例1の場合と同じく、満足な#f性を確抹する
ことができなかりた。The results of the temporal Jf value of the resulting resin layer are shown in Table 2, and as in the case of Comparative Example 1, satisfactory #f properties could not be confirmed.
以上述べてきたように、感光性樹脂組成物を本発明の組
成とすることによって、スクリーン印刷が可能で、露光
時に十分な固化を示し、かつ、塩素系浴剤で現像するこ
とが可1目であり、さらに、蕗元硬化物の耐熱性、絶縁
抵抗皿の向上に効果がある感光性樹脂組成物を得ること
ができた。また、紫外線露光たけで曖れたレジストパタ
ーンを得ることができるため、作業時間のW 4mがで
きる。As described above, by making the photosensitive resin composition of the present invention, screen printing is possible, it shows sufficient solidification upon exposure, and it can be developed with a chlorine bath agent. Furthermore, it was possible to obtain a photosensitive resin composition that is effective in improving the heat resistance and insulation resistance of the cured product. In addition, since a vague resist pattern can be obtained with a deep UV exposure, the working time can be reduced to W4m.
第2表
これらの特性を有することは、従来技術にみれた問題点
を解決して高密度のレジストパターを形成し得ること、
印刷配線板製造において作性を者しく同上し、低コスト
化し得ることを示ものである。Table 2 Having these characteristics means that it is possible to solve the problems seen in the prior art and form a high-density resist pattern;
This shows that productivity can be clearly improved and costs can be reduced in the production of printed wiring boards.
Claims (1)
物のモノマーと、光ラジカル重合開始剤と、エポキシ樹
脂と、光カチオン重合開始剤とからなる、またはこれら
を主成分とする感光性樹脂組成物。 2、上記不飽和化合物のプレポリマーは、ジアリルフタ
レートのプレポリマーで分子量3,000ないし30,
000であり、また、上記多官能不飽和化合物のモノマ
ーは、ヒドロキシ化合物のアクリレートあるいはメタク
リレート、オリゴエステルアクリレートあるいはメタク
リレート、エポキシアクリレートあるいはメタクリレー
トの中から選ばれる少なくとも1種類の多官能不飽和化
合物であり、組成比は、ジアリルフタレートプレポリマ
ー100重量部に対し、多官能不飽和化合物のモノマー
1〜50重量部、光ラジカル重合開始剤0.5〜20重
量部、エポキシ樹脂5〜30重量部であり、また、エポ
キシ樹脂100重量部に対し、光カチオン重合開始剤1
〜10重量部であることを特徴とする請求項1記載の感
光性樹脂組成物。[Claims] 1. Consisting of a prepolymer of an unsaturated compound, a monomer of a polyfunctional unsaturated compound, a photoradical polymerization initiator, an epoxy resin, and a cationic photopolymerization initiator, or consisting of these as the main component A photosensitive resin composition. 2. The unsaturated compound prepolymer is a diallyl phthalate prepolymer with a molecular weight of 3,000 to 30,
000, and the monomer of the polyfunctional unsaturated compound is at least one polyfunctional unsaturated compound selected from acrylate or methacrylate of a hydroxy compound, oligoester acrylate or methacrylate, epoxy acrylate or methacrylate, The composition ratio is 1 to 50 parts by weight of a polyfunctional unsaturated compound monomer, 0.5 to 20 parts by weight of a photoradical polymerization initiator, and 5 to 30 parts by weight of an epoxy resin to 100 parts by weight of diallylphthalate prepolymer. In addition, 1 part by weight of photocationic polymerization initiator per 100 parts by weight of epoxy resin.
2. The photosensitive resin composition according to claim 1, wherein the amount is 10 parts by weight.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28764688A JPH02135350A (en) | 1988-11-16 | 1988-11-16 | Photosensitive resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28764688A JPH02135350A (en) | 1988-11-16 | 1988-11-16 | Photosensitive resin composition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02135350A true JPH02135350A (en) | 1990-05-24 |
Family
ID=17719910
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28764688A Pending JPH02135350A (en) | 1988-11-16 | 1988-11-16 | Photosensitive resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02135350A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108026194A (en) * | 2015-08-26 | 2018-05-11 | 长濑化成株式会社 | Pattern forming material, pattern formation method and patterning device |
WO2018225748A1 (en) * | 2017-06-08 | 2018-12-13 | Jsr株式会社 | Composition, method for producing cured film, and electronic component |
-
1988
- 1988-11-16 JP JP28764688A patent/JPH02135350A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108026194A (en) * | 2015-08-26 | 2018-05-11 | 长濑化成株式会社 | Pattern forming material, pattern formation method and patterning device |
US20190009457A1 (en) * | 2015-08-26 | 2019-01-10 | Nagase Chemtex Corporation | Patterning material, patterning method, and patterning apparatus |
CN108026194B (en) * | 2015-08-26 | 2020-10-02 | 长濑化成株式会社 | Pattern forming material, pattern forming method, and pattern forming apparatus |
TWI717379B (en) * | 2015-08-26 | 2021-02-01 | 日商長瀨化成股份有限公司 | Patterning material, patterning method, and patterning apparatus |
WO2018225748A1 (en) * | 2017-06-08 | 2018-12-13 | Jsr株式会社 | Composition, method for producing cured film, and electronic component |
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