JPH02134372U - - Google Patents
Info
- Publication number
- JPH02134372U JPH02134372U JP4269489U JP4269489U JPH02134372U JP H02134372 U JPH02134372 U JP H02134372U JP 4269489 U JP4269489 U JP 4269489U JP 4269489 U JP4269489 U JP 4269489U JP H02134372 U JPH02134372 U JP H02134372U
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- main
- inlet
- outlet parts
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lift Valve (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4269489U JPH02134372U (h) | 1989-04-11 | 1989-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4269489U JPH02134372U (h) | 1989-04-11 | 1989-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02134372U true JPH02134372U (h) | 1990-11-07 |
Family
ID=31554460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4269489U Pending JPH02134372U (h) | 1989-04-11 | 1989-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02134372U (h) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04104318U (ja) * | 1991-02-19 | 1992-09-08 | トキコ株式会社 | 切換弁 |
| WO2004044969A1 (ja) * | 2001-05-14 | 2004-05-27 | Tokyo Electron Limited | 弁装置および熱処理装置 |
| KR100889665B1 (ko) * | 2003-10-13 | 2009-03-19 | 도쿄엘렉트론가부시키가이샤 | 열처리 장치 |
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1989
- 1989-04-11 JP JP4269489U patent/JPH02134372U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04104318U (ja) * | 1991-02-19 | 1992-09-08 | トキコ株式会社 | 切換弁 |
| WO2004044969A1 (ja) * | 2001-05-14 | 2004-05-27 | Tokyo Electron Limited | 弁装置および熱処理装置 |
| CN100397577C (zh) * | 2001-05-14 | 2008-06-25 | 东京毅力科创株式会社 | 阀装置和热处理装置 |
| KR100889665B1 (ko) * | 2003-10-13 | 2009-03-19 | 도쿄엘렉트론가부시키가이샤 | 열처리 장치 |