JPH02132936U - - Google Patents

Info

Publication number
JPH02132936U
JPH02132936U JP4168989U JP4168989U JPH02132936U JP H02132936 U JPH02132936 U JP H02132936U JP 4168989 U JP4168989 U JP 4168989U JP 4168989 U JP4168989 U JP 4168989U JP H02132936 U JPH02132936 U JP H02132936U
Authority
JP
Japan
Prior art keywords
wafer
cylindrical body
heat treatment
treatment apparatus
wafer heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4168989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4168989U priority Critical patent/JPH02132936U/ja
Publication of JPH02132936U publication Critical patent/JPH02132936U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP4168989U 1989-04-11 1989-04-11 Pending JPH02132936U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4168989U JPH02132936U (enrdf_load_stackoverflow) 1989-04-11 1989-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4168989U JPH02132936U (enrdf_load_stackoverflow) 1989-04-11 1989-04-11

Publications (1)

Publication Number Publication Date
JPH02132936U true JPH02132936U (enrdf_load_stackoverflow) 1990-11-05

Family

ID=31552574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4168989U Pending JPH02132936U (enrdf_load_stackoverflow) 1989-04-11 1989-04-11

Country Status (1)

Country Link
JP (1) JPH02132936U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5143673A (en) * 1974-10-11 1976-04-14 Sharp Kk Handotaiuehano fujunbutsukakusansochi
JPS6343315A (ja) * 1986-08-11 1988-02-24 Kokusai Electric Co Ltd 減圧ｃｖｄ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5143673A (en) * 1974-10-11 1976-04-14 Sharp Kk Handotaiuehano fujunbutsukakusansochi
JPS6343315A (ja) * 1986-08-11 1988-02-24 Kokusai Electric Co Ltd 減圧ｃｖｄ装置

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