JPH02132933U - - Google Patents
Info
- Publication number
- JPH02132933U JPH02132933U JP4163689U JP4163689U JPH02132933U JP H02132933 U JPH02132933 U JP H02132933U JP 4163689 U JP4163689 U JP 4163689U JP 4163689 U JP4163689 U JP 4163689U JP H02132933 U JPH02132933 U JP H02132933U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- substrate
- spin chuck
- cleaning
- spin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989041636U JPH0713211Y2 (ja) | 1989-04-11 | 1989-04-11 | スピンチャック洗浄機能付きレジスト塗布装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989041636U JPH0713211Y2 (ja) | 1989-04-11 | 1989-04-11 | スピンチャック洗浄機能付きレジスト塗布装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02132933U true JPH02132933U (US07943777-20110517-C00090.png) | 1990-11-05 |
JPH0713211Y2 JPH0713211Y2 (ja) | 1995-03-29 |
Family
ID=31552475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989041636U Expired - Lifetime JPH0713211Y2 (ja) | 1989-04-11 | 1989-04-11 | スピンチャック洗浄機能付きレジスト塗布装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0713211Y2 (US07943777-20110517-C00090.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006066447A (ja) * | 2004-08-24 | 2006-03-09 | Komatsu Electronic Metals Co Ltd | ワークチャックの洗浄装置、ワークチャックの洗浄方法、及びワークチャックの洗浄装置を備えた研磨装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4863709A (US07943777-20110517-C00090.png) * | 1971-11-20 | 1973-09-04 |
-
1989
- 1989-04-11 JP JP1989041636U patent/JPH0713211Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4863709A (US07943777-20110517-C00090.png) * | 1971-11-20 | 1973-09-04 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006066447A (ja) * | 2004-08-24 | 2006-03-09 | Komatsu Electronic Metals Co Ltd | ワークチャックの洗浄装置、ワークチャックの洗浄方法、及びワークチャックの洗浄装置を備えた研磨装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0713211Y2 (ja) | 1995-03-29 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |