JPH02132658U - - Google Patents
Info
- Publication number
- JPH02132658U JPH02132658U JP4132589U JP4132589U JPH02132658U JP H02132658 U JPH02132658 U JP H02132658U JP 4132589 U JP4132589 U JP 4132589U JP 4132589 U JP4132589 U JP 4132589U JP H02132658 U JPH02132658 U JP H02132658U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- gas treatment
- flow path
- exhaust
- processing tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims 2
- 230000006837 decompression Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4132589U JP2518283Y2 (ja) | 1989-04-08 | 1989-04-08 | 排気ガス処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4132589U JP2518283Y2 (ja) | 1989-04-08 | 1989-04-08 | 排気ガス処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02132658U true JPH02132658U (fr) | 1990-11-05 |
| JP2518283Y2 JP2518283Y2 (ja) | 1996-11-27 |
Family
ID=31551894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4132589U Expired - Lifetime JP2518283Y2 (ja) | 1989-04-08 | 1989-04-08 | 排気ガス処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2518283Y2 (fr) |
-
1989
- 1989-04-08 JP JP4132589U patent/JP2518283Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2518283Y2 (ja) | 1996-11-27 |
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